公开(公告)号：US5856242A

公开(公告)日：1999-01-05

申请号：US672233

申请日：1996-06-27

申请人： Hisako Arai ,  Ryusuke Kita ,  Yoshiyuki Masuda ,  Noboru Ohtani ,  Yoshiyuki Matsu ,  Masayoshi Koba

发明人： Hisako Arai ,  Ryusuke Kita ,  Yoshiyuki Masuda ,  Noboru Ohtani ,  Yoshiyuki Matsu ,  Masayoshi Koba

IPC分类号： C04B35/46 ,  C01B13/14 ,  C23C14/08 ,  C23C14/34 ,  C23C14/35 ,  C23C14/54 ,  C23C14/58 ,  H01L21/283 ,  H01L21/31

CPC分类号： C23C14/5806 ,  C23C14/088 ,  C23C14/5853

摘要： A method for preparing an oxide dielectric thin film, for use in a dielectric thin film device, is described. Briefly, a film forming chamber is heated, and a thin film of dielectric, about 200 nm thick, is formed by sputtering or another deposition method. After the film is formed, evacuation of the film forming chamber is suspended, and oxygen gas is introduced into the chamber. The film is oxidized after its formation by maintaining the film in the oxygen atmosphere for a period of time, which can include cooling steps. The resulting dielectric thin film has excellent dielectric properties, such as a high dielectric constant and great dielectric strength.

摘要翻译： 描述了用于制造用于电介质薄膜器件的氧化物电介质薄膜的方法。 简而言之，加热成膜室，通过溅射或其它沉积方法形成约200nm厚的电介质薄膜。 在形成膜之后，将成膜室抽真空，并将氧气引入室中。 通过将膜在氧气氛中保持一段时间，其形成后膜被氧化，这可以包括冷却步骤。 所得的电介质薄膜具有优良的介电特性，例如介电常数高，介电强度大。

公开(公告)号：US5905836A

公开(公告)日：1999-05-18

申请号：US24344

申请日：1998-02-17

申请人： Hisako Arai ,  Akio Miyata ,  Yutaka Unuma

发明人： Hisako Arai ,  Akio Miyata ,  Yutaka Unuma

IPC分类号： G02B6/04 ,  G02B6/06 ,  G02B6/42

CPC分类号： G02B6/4249 ,  G02B6/06 ,  G02B6/04

摘要： In an optical waveguide reduction optical image sensor constituted by a polymeric optical waveguide array having a plurality of cores arranged into a one-dimensional array in a cladding substrate, and a photoelectric conversion element array for detecting light propagating through the polymeric optical waveguide array and converting the detected light into an electrical signal, a hollow thermal expansion suppressing member (jig) is mounted on the joint portion between the polymeric optical waveguide array and the photoelectric conversion element array, and the coefficient of linear thermal expansion of the thermal expansion suppressing member in the core array direction of the polymeric optical waveguide array is smaller than that of the polymeric optical waveguide array in the same direction.

摘要翻译： 在由具有在包层基板中排列成一维阵列的多个芯的聚合物光波导阵列构成的光波导路径还原光学图像传感器中，以及用于检测通过聚合物光波导阵列传播的光的光电转换元件阵列， 将检测到的光转换成电信号，将中空热膨胀抑制部件（夹具）安装在聚合光波导阵列和光电转换元件阵列之间的接合部分上，并且将热膨胀抑制部件的线性热膨胀系数 聚合物光波导阵列的核心阵列方向小于聚合物光波导阵列沿相同方向的方向。

公开(公告)号：US5593495A

公开(公告)日：1997-01-14

申请号：US435135

申请日：1995-05-05

申请人： Yoshiyuki Masuda ,  Ryusuke Kita ,  Hisako Arai ,  Noboru Ohtani ,  Masayoshi Koba

发明人： Yoshiyuki Masuda ,  Ryusuke Kita ,  Hisako Arai ,  Noboru Ohtani ,  Masayoshi Koba

IPC分类号： C01B13/14 ,  C01G21/00 ,  C01G23/00 ,  C23C18/12 ,  C30B5/00 ,  H01B3/00 ,  H01L37/02 ,  H01L41/39 ,  C30B1/10

CPC分类号： C23C18/1225 ,  C23C18/1216 ,  C23C18/1254 ,  C30B29/32 ,  C30B5/00

摘要： In a method for manufacturing a thin film of metal-oxide dielectric, a precursor solution in a sol state is synthesized in a first step. This precursor solution is composed of component elements of materials of the composite metal-oxide dielectric to be manufactured. In a second step, this precursor solution is made a thin film by spin coating. In a third step, this thin film in the sol state is dried to convert it into a thin film of dry gel. Thereafter, in a fourth step, the thin film of dry gel is subjected to a heat treatment for thermally decomposing and removing organic substances in the dry gel thin film and simultaneously crystallizing this gel state thin film.

摘要翻译： 在金属氧化物电介质薄膜的制造方法中，在第一工序中合成溶胶状态的前体溶液。 该前体溶液由待制造的复合金属 - 氧化物电介质的材料的组成元素组成。 在第二步中，通过旋涂将该前体溶液制成薄膜。 在第三步骤中，将该溶胶状的薄膜干燥，将其转变为干燥凝胶的薄膜。 此后，在第四步骤中，对干燥凝胶薄膜进行热分解，除去干凝胶薄膜中的有机物质，同时使该凝胶态薄膜结晶。

公开(公告)号：US5943463A

公开(公告)日：1999-08-24

申请号：US877568

申请日：1997-06-17

申请人： Yutaka Unuma ,  David Heard ,  Akio Miyata ,  Manabu Fujimoto ,  Hisako Arai ,  Teruyuki Kataoka

发明人： Yutaka Unuma ,  David Heard ,  Akio Miyata ,  Manabu Fujimoto ,  Hisako Arai ,  Teruyuki Kataoka

IPC分类号： G02B6/12 ,  G02B6/122 ,  H04N1/031 ,  H04N1/48 ,  G02B6/04

CPC分类号： G02B6/1221 ,  H04N1/031 ,  H04N1/486 ,  G02B2006/12102 ,  G02B2006/1219

摘要： A color image sensor has a white fluorescent tube as a light source, a microlens array with three rows of microlenses arranged vertically, a three-layer optical waveguide array and a three-line color CCD with color filters. The waveguides in each waveguide array layer are bent so that the interval between successive waveguides becomes narrower from the input end toward the output end. The three-line color CCD has three lines of light-receiving elements (photodiodes) as the light sensing portion. These lines in the light-receiving element array are arranged vertically at the same intervals as the waveguide layers are arranged. Further, a cylindrical lens is attached to cover the microlens array. Because of the presence of this cylindrical lens, the images of light beams incident on different microlenses of the microlens array corresponding to different waveguide layers are the same image from an identical area on the original.

摘要翻译： 彩色图像传感器具有作为光源的白色荧光管，具有垂直布置的三行微透镜的微透镜阵列，三层光波导阵列和具有滤色器的三线彩色CCD。 每个波导阵列层中的波导被弯曲，使得连续波导之间的间隔从输入端朝向输出端变窄。 三线彩色CCD具有作为光感测部分的三条光接收元件（光电二极管）。 光接收元件阵列中的这些线以与布置波导层相同的间隔布置。 此外，安装柱面透镜以覆盖微透镜阵列。 由于这种柱面透镜的存在，入射到对应于不同波导层的微透镜阵列的不同微透镜上的光束的图像是与原始相同区域相同的图像。