公开(公告)号：US6008914A

公开(公告)日：1999-12-28

申请号：US935161

申请日：1997-09-22

申请人： Tomohiro Sasagawa ,  Kenyu Haruta ,  Yukio Sato ,  Hitoshi Wakata, deceased ,  Mitsuo Inoue ,  Akihiro Suzuki ,  Shuichi Fujikawa ,  Yoshio Saito

发明人： Tomohiro Sasagawa ,  Kenyu Haruta ,  Yukio Sato ,  Hitoshi Wakata, deceased ,  Mitsuo Inoue ,  Akihiro Suzuki ,  Shuichi Fujikawa ,  Yoshio Saito

IPC分类号： B23K26/06 ,  B23K26/067 ,  B23K26/38 ,  G03H1/08 ,  G03H1/16 ,  G02B5/32 ,  G02B27/44 ,  G02B27/46

CPC分类号： G03H1/0005 ,  B23K26/0604 ,  B23K26/066 ,  B23K26/067 ,  B23K26/386 ,  G03H1/08 ,  G03H1/16 ,  G03H2001/0094

摘要： The laser transfer machining apparatus comprises a shaping unit for shaping the laser beam so that the laser beam has a beam pattern which corresponds to a desired pattern to be machined in the object to be machined and a generating unit disposed separately from the shaping unit for simultaneously generating a plurality of laser beams each having the beam pattern from the laser beam shaped by the shaping unit. The generating unit is adapted to emit the plural laser beams while simultaneously defining a plurality of radiation directions of the generated plural laser beams to the object to be machined. The laser transfer machining apparatus can provide a high efficiency of utilization of light and reduce the time required for machining. Furthermore, the laser transfer machining apparatus can utilize a laser with a relatively low spatially coherence such as an eximer laser.

摘要翻译： 激光传递加工装置包括：成形单元，用于使激光束成形，使得激光束具有对应于待加工物体中要加工的期望图案的光束图案;以及与成形单元分开设置的发生单元，用于同时 产生多个激光束，每个激光束具有来自由成形单元成形的激光束的光束图案。 发生单元适于发射多个激光束，同时将所生成的多个激光束的多个辐射方向限定到待加工物体。 激光转印加工装置可以提供高效率的光利用并减少加工所需的时间。 此外，激光转印加工装置可以利用具有较低空间相干性的激光器，例如准分子激光器。