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公开(公告)号：US6008914A
公开(公告)日：1999-12-28
申请号：US935161
申请日：1997-09-22
申请人： Tomohiro Sasagawa , Kenyu Haruta , Yukio Sato , Hitoshi Wakata, deceased , Mitsuo Inoue , Akihiro Suzuki , Shuichi Fujikawa , Yoshio Saito
发明人： Tomohiro Sasagawa , Kenyu Haruta , Yukio Sato , Hitoshi Wakata, deceased , Mitsuo Inoue , Akihiro Suzuki , Shuichi Fujikawa , Yoshio Saito
CPC分类号： G03H1/0005 , B23K26/0604 , B23K26/066 , B23K26/067 , B23K26/386 , G03H1/08 , G03H1/16 , G03H2001/0094
摘要： The laser transfer machining apparatus comprises a shaping unit for shaping the laser beam so that the laser beam has a beam pattern which corresponds to a desired pattern to be machined in the object to be machined and a generating unit disposed separately from the shaping unit for simultaneously generating a plurality of laser beams each having the beam pattern from the laser beam shaped by the shaping unit. The generating unit is adapted to emit the plural laser beams while simultaneously defining a plurality of radiation directions of the generated plural laser beams to the object to be machined. The laser transfer machining apparatus can provide a high efficiency of utilization of light and reduce the time required for machining. Furthermore, the laser transfer machining apparatus can utilize a laser with a relatively low spatially coherence such as an eximer laser.
摘要翻译： 激光传递加工装置包括：成形单元，用于使激光束成形，使得激光束具有对应于待加工物体中要加工的期望图案的光束图案;以及与成形单元分开设置的发生单元，用于同时 产生多个激光束，每个激光束具有来自由成形单元成形的激光束的光束图案。 发生单元适于发射多个激光束，同时将所生成的多个激光束的多个辐射方向限定到待加工物体。 激光转印加工装置可以提供高效率的光利用并减少加工所需的时间。 此外，激光转印加工装置可以利用具有较低空间相干性的激光器，例如准分子激光器。
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公开(公告)号：US5313487A
公开(公告)日：1994-05-17
申请号：US887770
申请日：1992-05-22
申请人： Shuichi Fujikawa , Mitsuo Inoue , Yukio Sato , Haruhiko Nagai
发明人： Shuichi Fujikawa , Mitsuo Inoue , Yukio Sato , Haruhiko Nagai
IPC分类号： H01S3/0977 , H01S3/097
CPC分类号： H01S3/0977 , H01S3/09775
摘要： At least two types of preionization systems are provided at a backside of one of a pair of primary electrodes which are disposed in a spaced opposed relation with respect to each other for causing a large area, spatially uniform main discharge in a laser gas therebetween. This improves efficiency and stability in laser oscillations under repeated operations at a high rate of tens to hundreds of shots per second. In addition, without using the laser output power, the preionization timing is controlled such that an optimal preionization timing is realized. The optimal preionization timing is determined on the basis of a minimum discharge starting voltage between the primary electrodes or a minimum required time from the time of applying a high voltage between said first and second primary electrodes until the time the main discharge commences.
摘要翻译： 在一对主电极之一的背面设置至少两种类型的预电离系统，这些主电极相对于彼此以间隔开的相对关系设置，以在它们之间的激光气体中引起大面积的空间均匀的主放电。 这样可以在每秒数十到数百次的高速率重复操作下提高激光振荡的效率和稳定性。 此外，在不使用激光输出功率的情况下，控制预定时定时，从而实现最佳的初步化定时。 基于初级电极之间的最小放电起始电压或从在所述第一和第二主电极之间施加高电压直到主放电开始时的最小所需时间来确定最佳预电离定时。
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3.发明授权Diode laser pumped solid state laser amplifier and diode laser pumped solid state laser 失效二极管激光泵浦固态激光放大器和二极管激光泵浦固态激光器公开(公告)号：US07796670B1
公开(公告)日：2010-09-14
申请号：US08938700
申请日：1997-09-26
申请人： Shuichi Fujikawa , Tetsuo Kojima
发明人： Shuichi Fujikawa , Tetsuo Kojima
CPC分类号： H01S3/0941 , H01S3/025 , H01S3/0407 , H01S3/042 , H01S3/0602 , H01S3/061 , H01S3/08072 , H01S3/094057 , H01S3/094084 , H01S3/2308
摘要： A diode laser pumped solid-state laser amplifier capable of homogenizing the distribution of heat dissipation levels on a section of a solid-state laser rod and not causing a bifocal phenomenon, and a diode laser pumped solid-state laser using the diode laser pumped solid-state laser amplifier. A diode laser pumped solid-state laser amplifier includes a solid-state laser rod having an optical axis along which a laser beam propagates and includes an active medium therein and a plurality of pumping sources having optical axes that run on a plane orthogonal to the axial core of the solid-state laser rod and are separated by a given distance from the axial core of the solid-state laser rod. When pumping light rays are projected on a plane orthogonal to the axial core of the solid-state laser rod, the plurality of pumping sources are located at equiangular intervals with respect to the axial core of the solid-state laser rod.
摘要翻译： 一种二极管激光泵浦固态激光放大器，其能够使固态激光棒的一部分上的散热水平分布均匀化并且不引起双焦现象，并且使用二极管激光泵浦固体的二极管激光泵浦固态激光器 状态激光放大器。 二极管激光泵浦固体激光放大器包括固态激光棒，其具有光轴，激光束沿着该光轴传播并且包括其中的有源介质，以及多个泵浦源，其具有在与轴向正交的平面上延伸的光轴 并且与固态激光棒的轴芯分开给定的距离。 当泵浦光线投射在与固态激光棒的轴向芯正交的平面上时，多个泵浦源相对于固态激光棒的轴向芯等角间隔设置。
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公开(公告)号：US20090141746A1
公开(公告)日：2009-06-04
申请号：US11916114
申请日：2006-05-19
申请人： Shuichi Fujikawa , Junji Kano , Kazuki Kuba
发明人： Shuichi Fujikawa , Junji Kano , Kazuki Kuba
CPC分类号： H01S3/025 , H01S3/005 , H01S3/0092 , H01S3/027 , H01S3/07 , H01S3/0941 , H01S3/117
摘要： In a solid-state laser device, a single outer casing (1) having an approximately sealed structure is included; a single or a plurality of inner casings (2) are provided inside the outer casing (1); in some or all of the inner casings (2), an air cleaning unit (4) is included in which the air within the outer casing (1) is made clean and supplied into the inner casings (2); inside the outer casing (1), there disposed are a laser light-source (5, 6, 7) having a solid-state laser medium (501) and a light resonator, and an optical system (10, 11, 901) that transmits or interrupts a laser beam (8) emitted from the laser light-source; in addition, the laser light-source (5, 6, 7) and the optical system (10, 11, 901) or part of them are contained inside the inner casings (2); thus, in a simple, compact and inexpensive configuration, it is possible to prevent degradation of optical components and dew condensation thereon, and to stably supply a laser beam.
摘要翻译： 在固体激光装置中，包括具有近似密封结构的单个外壳（1） 在外壳（1）的内部设有单个或多个内壳（2）。 在一些或全部内壳体（2）中，包括空气净化单元（4），其中外壳（1）内的空气被清洁并供应到内壳体（2）中; 在外壳（1）的内部，设置有具有固态激光介质（501）和光谐振器的激光光源（5,6,7）和光学系统（10,11,101），其中 传输或中断从激光光源发射的激光束（8）; 另外，激光光源（5,6,7）和光学系统（10,11，901）或其一部分被包含在内壳体（2）内; 因此，在简单，紧凑且廉价的结构中，可以防止光学部件的劣化和结露，并稳定地供给激光束。
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公开(公告)号：US20080225922A1
公开(公告)日：2008-09-18
申请号：US10590191
申请日：2005-09-14
申请人： Shuichi Fujikawa , Takafumi Kawai , Junji Kano
发明人： Shuichi Fujikawa , Takafumi Kawai , Junji Kano
IPC分类号： H01S3/06
CPC分类号： H01S3/08 , G02B6/4206 , H01S3/005 , H01S3/061 , H01S3/07 , H01S3/0805 , H01S3/08072 , H01S3/2316
摘要： In a symmetrically stable optical resonator, a first reference plane is set at an arbitrary position between the end face (102), opposing a partial reflector (2), and the neutral point (101) of a rod type solid state laser medium (1), and an aperture (5) having a diameter substantially equal to that of the rod type solid state laser medium (1) is arranged at a position optically symmetric to the reference plane with the partial reflector (2) as a neutral point using a relay lens (6) and a coupling lens (7) arranged between the aperture (5) and an optical fiber (8), the first reference plane is transfer-relayed onto the incident end face of the optical fiber (8), and the aperture (5) is transferred onto the coupling lens (7) through the relay lens (6). Even when the focal length of thermal lens of the rod type solid state laser medium (1) or pointing of laser light is varied, beam transmission is performed by an optical fiber excellent in stability and reliability and condensation of laser light exiting the optical fiber is sustained constantly.
摘要翻译： 在对称稳定的光学谐振器中，将第一参考平面设置在与部分反射镜（2）相对的端面（102）与棒状固态激光介质（1）的中性点（101）之间的任意位置 ），并且具有与棒状固体激光介质（1）的直径基本相等的直径的孔（5）被布置在与参考平面光学对称的位置处，部分反射器（2）为中性点，使用 中继透镜（6）和布置在孔（5）和光纤（8）之间的耦合透镜（7），第一参考平面被传送到光纤（8）的入射端面上，并且 孔（5）通过中继透镜（6）被转印到耦合透镜（7）上。 即使棒状固体激光介质（1）的热透镜的焦距或者激光的指示变化，也可以通过光稳定性和可靠性优异的光纤进行光束透射，而离开光纤的激光的冷凝是 持续不断。
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公开(公告)号：US08885684B2
公开(公告)日：2014-11-11
申请号：US14123903
申请日：2011-06-20
CPC分类号： H01S3/041 , H01S3/03 , H01S3/036 , H01S3/076 , H01S3/081 , H01S3/0816 , H01S3/0971 , H01S3/2232
摘要： A CO2 gas laser device according to the present invention amplifies CO2 laser light that oscillates repeatedly in short pulses having a pulse width of 100 ns or less, and cools a CO2 laser gas which is excited by continuous discharge by circulating the CO2 laser gas by means of forced convection. Therein, an angle θ defined by the optical axis of the amplified CO2 laser beam and the flow direction of the CO2 laser gas caused by the forced convection is determined by both a discharge cross sectional area and a discharge length of a volume in which the CO2 laser gas is excited by discharge, whereby increasing the gain of pulsed laser to achieve pulsed laser light having an extremely high average output power.
摘要翻译： 根据本发明的二氧化碳气体激光装置放大以脉冲宽度为100ns以下的短脉冲重复振荡的CO 2激光，并通过循环CO 2激光气体的方式冷却通过连续放电而激发的CO 2激光气体 的强制对流。 其中，角度和角度; 由放大的CO 2激光束的光轴限定，并且由强制对流引起的CO 2激光气体的流动方向由放电截面积和其中激发CO 2激光气体的体积的放电长度 从而增加脉冲激光器的增益以实现具有极高平均输出功率的脉冲激光。
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公开(公告)号：US08873599B2
公开(公告)日：2014-10-28
申请号：US13824432
申请日：2011-08-26
CPC分类号： H01S3/038 , H01S3/036 , H01S3/2232 , H01S2301/203
摘要： A tri-axially orthogonal gas laser device in which an optical axis of an optical resonator, a direction in which a laser gas is supplied into the optical resonator, and a direction of discharge for exciting the laser gas are mutually orthogonal to one another, the device including: an exciting unit including a blower supplying the laser gas in −X direction to the optical axis of the optical resonator, and a discharge electrode pair which is shifted on a gas upstream side with respect to the optical axis; and an exciting unit including a blower for supplying the laser gas in +X direction to the optical axis of the optical resonator, and a discharge electrode pair which is shifted on a gas upstream side with respect to the optical axis
摘要翻译： 将光谐振器的光轴，向光谐振器供给激光气体的方向以及使激光气体激发的方向相互正交的三轴正交气体激光装置相互正交， 该装置包括：激励单元，其包括向所述光学谐振器的光轴向-X方向供给激光气体的鼓风机;以及在相对于所述光轴的气体上游侧移动的放电电极对; 以及激励单元，其包括用于将激光气体沿+ X方向供给到光谐振器的光轴的鼓风机，以及在相对于光轴的气体上游侧移动的放电电极对
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公开(公告)号：US20130341309A1
公开(公告)日：2013-12-26
申请号：US14003678
申请日：2012-03-13
IPC分类号： B23K26/00
CPC分类号： B23K26/00 , B23K26/046 , B23K26/0643 , B23K26/0665 , B23K26/707
摘要： A laser machining apparatus, including: a laser light source; a transparent member that is set on an optical path of a laser beam and transmits the laser beam; a contact type temperature difference sensor, set on a surface of the transparent member outside an irradiation range of the laser beam, for detecting a temperature difference between a surface of the transparent member, which is spaced apart from a center of the transparent member by a first distance, and another surface of the transparent member, which is spaced apart from the center of the transparent member by a second distance larger than the first distance; and a controller correcting a focal position based on the temperature difference detected by the contact type temperature difference sensor to stabilize a beam diameter of the laser beam condensed onto a machining object.
摘要翻译： 一种激光加工装置，包括：激光光源; 透明构件，其被设置在激光束的光路上并透射激光束; 接触式温度差传感器，设置在所述透明构件的表面上，位于所述激光束的照射范围之外，用于检测所述透明构件的与所述透明构件的中心间隔开的表面之间的温度差 第一距离和透明构件的另一个表面，其与透明构件的中心距离大于第一距离的第二距离; 以及控制器，基于由接触型温度差传感器检测的温度差校正焦点位置，以稳定在加工对象物上聚光的激光束的光束直径。
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公开(公告)号：US07608799B2
公开(公告)日：2009-10-27
申请号：US11001052
申请日：2004-12-02
申请人： Hironari Mikata , Kazuhisa Mikame , Akio Sato , Kazuki Kuba , Shuichi Fujikawa , Toshiaki Watanabe
发明人： Hironari Mikata , Kazuhisa Mikame , Akio Sato , Kazuki Kuba , Shuichi Fujikawa , Toshiaki Watanabe
IPC分类号： B23K26/00
CPC分类号： B23K26/073 , B23K26/244 , B23K26/38 , G02B6/4296
摘要： A solid-state laser processing apparatus includes a solid-state laser oscillator, a laser beam diameter controller, an optical fiber, and a processing head. The solid-state laser oscillator oscillates a laser beam. The laser beam diameter controller controls a beam diameter of the laser beam, and includes an aperture. The aperture controls a beam quality of the laser beam defined by M2 so as to fall in a range of 85≦M2≦105. The optical fiber guides the controlled laser beam therein. The processing head includes a transfer optical system, and irradiates the guided laser beam to a surface of a workpiece to be processed by way of the transfer optical system.
摘要翻译： 固体激光加工装置包括固体激光振荡器，激光束直径控制器，光纤和处理头。 固态激光振荡器振荡激光束。 激光束直径控制器控制激光束的光束直径，并且包括光圈。 孔径控制由M2限定的激光束的光束质量，以便落在85 <= M2 <= 105的范围内。 光纤将受控激光束引导到其中。 处理头包括转印光学系统，并且通过转印光学系统将被激光束照射到待处理的工件的表面。
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公开(公告)号：US20050121427A1
公开(公告)日：2005-06-09
申请号：US11001052
申请日：2004-12-02
申请人： Hironari Mikata , Kazuhisa Mikame , Akio Sato , Kazuki Kuba , Shuichi Fujikawa , Toshiaki Watanabe
发明人： Hironari Mikata , Kazuhisa Mikame , Akio Sato , Kazuki Kuba , Shuichi Fujikawa , Toshiaki Watanabe
CPC分类号： B23K26/073 , B23K26/244 , B23K26/38 , G02B6/4296
摘要： A solid-state laser processing apparatus includes a solid-state laser oscillator, a laser beam diameter controller, an optical fiber, and a processing head. The solid-state laser oscillator oscillates a laser beam. The laser beam diameter controller controls a beam diameter of the laser beam, and includes an aperture. The aperture controls a beam quality of the laser beam defined by M2 so as to fall in a range of 85≦M2≦105. The optical fiber guides the controlled laser beam therein. The processing head includes a transfer optical system, and irradiates the guided laser beam to a surface of a workpiece to be processed by way of the transfer optical system.
摘要翻译： 固体激光加工装置包括固体激光振荡器，激光束直径控制器，光纤和处理头。 固态激光振荡器振荡激光束。 激光束直径控制器控制激光束的光束直径，并且包括光圈。 孔径控制由M 2限定的激光束的光束质量，以便落在85≤M≤2.0的范围内。 光纤将受控激光束引导到其中。 处理头包括转印光学系统，并且通过转印光学系统将被激光束照射到待处理的工件的表面。
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