公开(公告)号：US20100001202A1

公开(公告)日：2010-01-07

申请号：US12374892

申请日：2007-07-26

Applicant: Hiroyuki Matsuda ,  Horoshi Daimon

Inventor： Hiroyuki Matsuda ,  Horoshi Daimon

IPC: H01J3/18 ,  G01N23/00

CPC classification number: H01J37/12 ,  H01J37/252 ,  H01J2237/05 ,  H01J2237/153 ,  H01J2237/1532 ,  H01J2237/244 ,  H01J2237/2511 ,  H01J2237/2538

Abstract: A spherical aberration correction decelerating lens corrects a spherical aberration occurring in an electron beam or an ion beam (hereinafter, referred to as “beam”) emitted from a predetermined object plane position with a certain divergence angle, and said spherical aberration correction decelerating lens comprises at least two electrodes, each of which is constituted of a surface of a solid of revolution whose central axis coincides with an optical axis and each of which receives an intentionally set voltage applied by an external power supply, wherein at least one of the electrodes includes one or more meshes (M) which has a concaved shape opposite to an object plane (P0) and which is constituted of a surface of a solid of revolution so that a central axis of the concaved shape coincides with the optical axis, and a voltage applied to each of the electrodes causes the beam to be decelerated and causes formation of a decelerating convergence field for correcting the spherical aberration occurring in the beam. This makes it possible to provide a spherical aberration correction decelerating lens which converges a beam, emitted from the sample and having high energy and a large divergence angle, onto an image plane.

Abstract translation: 球面像差校正减速透镜校正从具有一定发散角的预定物平面位置发射的电子束或离子束（以下称为“光束”）中发生的球面像差，并且所述球面像差校正减速透镜包括 至少两个电极，每个电极由其中心轴与光轴重合的旋转实体表面构成，每个电极接收由外部电源施加的有意设定的电压，其中至少一个电极包括 一个或多个网格（M），其具有与物平面（P0）相反的凹形，并且由旋转实体的表面构成，使得凹形的中心轴与光轴重合，并且电压 施加到每个电极使得光束减速，并且形成用于校正球面像差的减速会聚场 在梁中发生。 这使得可以提供一种球面像差校正减速透镜，其将从样品发射并具有高能量和大发散角的光束会聚到图像平面上。