摘要:
A multi-layer structure and a method for manufacturing the multi-layer structure are provided. The multi-layer structure includes: a waveguide including one or more light coupling regions having a refractive index gradient; at least one organic material based active optical element disposed above the waveguide; wherein the one or more light coupling regions is configured to change characteristics of light propagating in the waveguide; wherein at least one of the one or more light coupling regions is configured to enhance light coupling between the waveguide and the active optical element.
摘要:
A method of manufacturing a multi-layer structure is provided. The method may include forming a waveguide on a substrate; forming a light coupling arrangement in the waveguide, wherein the light coupling arrangement is substantially non-wavelength selective; forming at least one light source above the waveguide; and forming at least one photo detector above the waveguide. The at least one light source, the at least one photo detector and the waveguide comprise organic material. The waveguide, the light coupling arrangement, the at least one light source and the at least one photo detector are monolithically integrated.
摘要:
A method of fabricating a sensor comprising a nanowire on a support substrate with a first semiconductor layer arranged on the support substrate is disclosed. The method comprises forming a fin structure from the first semiconductor layer, the fin structure comprising at least two supporting portions and a fin portion arranged there between; oxidizing at least the fin portion of the fin structure thereby forming the nanowire being surrounded by a first layer of oxide; and forming an insulating layer above the supporting portions; wherein the supporting portions and the first insulating layer form a microfluidic channel. A nanowire sensor is also disclosed. The nanowire sensor comprises a support substrate, a semiconducting fin structure arranged on the support substrate, the fin structure comprising at least two semiconducting supporting portions and a nanowire arranged there between; and a first insulating layer on a contact surface of the supporting portions; wherein the supporting portions and the first insulating layer form a microfluidic channel.
摘要:
A multi-layer structure and a method for manufacturing the multi-layer structure are provided. The multi-layer structure includes: a waveguide including one or more light coupling regions having a refractive index gradient; at least one organic material based active optical element disposed above the waveguide; wherein the one or more light coupling regions is configured to change characteristics of light propagating in the waveguide; wherein at least one of the one or more light coupling regions is configured to enhance light coupling between the waveguide and the active optical element.
摘要:
In an embodiment, a sensor element is provided. The sensor element may include a light input configured to receive input light, a sample chamber configured to accommodate a sample, and at least one polymer waveguide optically coupling the light input with the sample chamber, the at least one polymer waveguide including a first contact portion and a second contact portion, wherein at least a portion of the second contact portion may be arranged in the sample chamber. The second contact portion may include a different structure than the first contact portion so that a change of the light intensity of the input light passing through the second contact portion may be caused due to an interaction between the input light passing through the second contact portion and the sample, wherein the change of the light intensity of the input light passing through the second contact portion may be different from the change of the light intensity of the input light passing through the first contact portion.
摘要:
A multi-layer structure is provided. The multi-layer structure includes: a waveguide including a light coupling arrangement, wherein the light coupling arrangement is substantially non-wavelength selective; at least one light source disposed above the waveguide; and at least one photo detector disposed above the waveguide; wherein the at least one light source, the at least one photo detector and the waveguide include organic material, and wherein the waveguide, the light coupling arrangement, the at least one light source and the at least one photo detector are monolithically integrated.
摘要:
A method of fabricating a sensor comprising a nanowire on a support substrate with a first semiconductor layer arranged on the support substrate is disclosed. The method comprises forming a fin structure from the first semiconductor layer, the fin structure comprising at least two supporting portions and a fin portion arranged there between; oxidizing at least the fin portion of the fin structure thereby forming the nanowire being surrounded by a first layer of oxide; and forming an insulating layer above the supporting portions; wherein the supporting portions and the first insulating layer form a microfluidic channel. A nanowire sensor is also disclosed. The nanowire sensor comprises a support substrate, a semiconducting fin structure arranged on the support substrate, the fin structure comprising at least two semiconducting supporting portions and a nanowire arranged there between; and a first insulating layer on a contact surface of the supporting portions; wherein the supporting portions and the first insulating layer form a microfluidic channel.
摘要:
In an embodiment, a sensor element is provided. The sensor element may include a light input configured to receive input light, a sample chamber configured to accommodate a sample, and at least one polymer waveguide optically coupling the light input with the sample chamber, the at least one polymer waveguide including a first contact portion and a second contact portion, wherein at least a portion of the second contact portion may be arranged in the sample chamber. The second contact portion may include a different structure than the first contact portion so that a change of the light intensity of the input light passing through the second contact portion may be caused due to an interaction between the input light passing through the second contact portion and the sample, wherein the change of the light intensity of the input light passing through the second contact portion may be different from the change of the light intensity of the input light passing through the first contact portion.