公开(公告)号：US07026607B2

公开(公告)日：2006-04-11

申请号：US10828002

申请日：2004-04-20

Applicant: Itaru Kitajima ,  Masatsugu Shigeno

Inventor： Itaru Kitajima ,  Masatsugu Shigeno

IPC: G01N23/00 ,  G21K7/00 ,  H01J3/14 ,  H01J40/14 ,  H01J5/16

CPC classification number: G01Q10/06 ,  G01Q40/00

Abstract: A scanning probe microscope has a scanner and a mounting unit for supporting the scanner. An identifying mark is disposed on a part of the scanner for representing preselected information corresponding to the scanner. The mounting unit has an interpreting device for interpreting the preselected information represented by the identifying mark. A setting device sets in a controller, for controlling the scanning probe microscope, parameter information corresponding to the scanner probe microscope, parameter information corresponding interpreted by the interpreting device.

Abstract translation: 扫描探针显微镜具有扫描器和用于支撑扫描器的安装单元。 识别标记设置在扫描器的一部分上，用于表示对应于扫描仪的预选信息。 安装单元具有用于解释由识别标记表示的预选信息的解释装置。 设置在控制器中的控制器，用于控制扫描探针显微镜，对应于扫描仪探针显微镜的参数信息，由解释装置解释的参数信息。

公开(公告)号：US20100031402A1

公开(公告)日：2010-02-04

申请号：US12510794

申请日：2009-07-28

Applicant: Shigeru Wakiyama ,  Hiroyoshi Yamamoto ,  Yoshiteru Shikakura ,  Itaru Kitajima

Inventor： Shigeru Wakiyama ,  Hiroyoshi Yamamoto ,  Yoshiteru Shikakura ,  Itaru Kitajima

IPC: G01N13/10

CPC classification number: G01Q40/00 ,  G01Q30/06

Abstract: Provided is an aligning method capable of setting a sample observation unit such as an optical microscope to a probe microscope observation position at high precision. A sample having a known structure is used in advance. A surface of the sample and a shape of a cantilever provided with a probe are observed using the sample observation unit such as the optical microscope. A sample observation position and a probe position which are obtained using the sample observation unit are verified, and a relative positional relationship therebetween is recorded. Then, a first mark indicating a position of the cantilever and a second mark which is displayed in conjunction with the first mark and has the relative positional relationship with the first mark are produced to align the sample relative to the second mark.

Abstract translation: 提供了一种能够将诸如光学显微镜的样本观察单元以高精度设置在探针显微镜观察位置的对准方法。 预先使用具有已知结构的样品。 使用诸如光学显微镜的样品观察单元观察样品的表面和设置有探针的悬臂的形状。 验证使用样本观察单元获得的样本观察位置和探针位置，并记录它们之间的相对位置关系。 然后，产生指示悬臂的位置的第一标记和与第一标记一起显示并与第一标记具有相对位置关系的第二标记，以使样本相对于第二标记进行对准。

公开(公告)号：US20050089463A1

公开(公告)日：2005-04-28

申请号：US10951000

申请日：2004-09-27

Applicant: Masatoshi Yasutake ,  Takashi Kaito ,  Yoshiharu Shirakawabe ,  Itaru Kitajima

Inventor： Masatoshi Yasutake ,  Takashi Kaito ,  Yoshiharu Shirakawabe ,  Itaru Kitajima

IPC: B82B3/00 ,  B82B1/00 ,  C01B31/00 ,  C01B31/02 ,  C23C16/48 ,  D01C5/00 ,  D01F9/12 ,  D01F9/127 ,  G01Q60/00 ,  G01Q70/12

CPC classification number: G01Q70/12 ,  C01B32/162 ,  D01F9/12 ,  D01F9/1276

Abstract: In a method for fabricating a nanometer-scale structure by arranging nanotubes in a predetermined direction at a predetermined position, the method for fabricating a nanometer-scale structure comprises a first step of planarizing a substrate by etching a predetermined part by irradiating a focused energy beam to the sample, a second step of decomposing and depositing an organic gas into a columnar structure with an objective of determining the position and direction, and a third step of attaching and fixing the nanotube by using the thus deposited columnar structure as a standard of position and direction.

Abstract translation: 在通过在预定位置处以预定方向布置纳米管制造纳米级结构的方法中，纳米级结构的制造方法包括：通过照射聚焦能量束来蚀刻预定部分来平坦化基板的第一步骤 以样品的方式分解和沉积有机气体到目标为确定位置和方向的柱状结构中的第二步骤，以及通过使用这样沉积的柱状结构作为位置标准来附着和固定纳米管的第三步骤 和方向。

公开(公告)号：US07373806B2

公开(公告)日：2008-05-20

申请号：US10925049

申请日：2004-08-24

Applicant: Itaru Kitajima ,  Kazutoshi Watanabe ,  Shigeru Wakiyama ,  Masatoshi Yasutake ,  Akira Inoue

Inventor： Itaru Kitajima ,  Kazutoshi Watanabe ,  Shigeru Wakiyama ,  Masatoshi Yasutake ,  Akira Inoue

IPC: G01B5/28

CPC classification number: G01Q10/065 ,  G01Q60/32

Abstract: A scanning probe microscope has a probe tip for undergoing a scanning operation to scan a sample surface in X- and Y-directions parallel to the sample surface and for undergoing movement in a Z-direction vertical to the sample surface. A vibration unit vibrates the probe tip at a vibration frequency that resonates with of forcedly vibrates the probe tip. An observation unit collects observational data from the sample surface when the probe tip is in proximity or contact with the sample surface. A detection unit detects a variation in the state of vibration of the probe tip when the probe tip is in proximity or contact with the sample surface during a scanning operation. A control controls scanning of the probe tip in the X- and Y-directions and movement of the probe tip in the Z-direction, and controls scanning of the probe tip in a direction parallel to the sample surface after the observational data is collected from the sample surface and until the probe tip reached a next observation position in the X- and Y-direction. During a scanning operation, the control unit controls the probe tip to move in the Z-direction away from the sample surface only when the detection unit detects a variation in the state of vibration of the probe tip.

Abstract translation: 扫描探针显微镜具有用于进行扫描操作的探针尖端，以在与样品表面平行的X和Y方向上扫描样品表面，并且在垂直于样品表面的Z方向上进行移动。 振动单元以与谐振的振动频率振动探针尖端，强制地振动探针尖端。 当探头尖端接近或与样品表面接触时，观察单元从样品表面收集观察数据。 检测单元在扫描操作期间当探针尖端接近或接触样品表面时检测探针尖端的振动状态的变化。 控制器控制探针尖端沿X方向和Y方向的扫描以及探针尖端沿Z方向的移动，并且在从观察数据收集之后控制探针尖端在与样品表面平行的方向上的扫描 样品表面，直到探针尖端到达X和Y方向的下一个观察位置。 在扫描操作期间，只有当检测单元检测到探针尖端的振动状态的变化时，控制单元才控制探针尖端沿Z方向移动离开样品表面。

公开(公告)号：US20050050947A1

公开(公告)日：2005-03-10

申请号：US10925049

申请日：2004-08-24

Applicant: Itaru Kitajima ,  Kazutoshi Watanabe ,  Shigeru Wakiyama ,  Masatoshi Yasutake ,  Akira Inoue

Inventor： Itaru Kitajima ,  Kazutoshi Watanabe ,  Shigeru Wakiyama ,  Masatoshi Yasutake ,  Akira Inoue

IPC: G01Q10/00 ,  G01Q10/02 ,  G01Q10/04 ,  G01Q10/06 ,  G01Q60/24 ,  G01Q60/32 ,  G01B5/28 ,  H01J3/14

CPC classification number: G01Q10/065 ,  G01Q60/32

Abstract: There are disclosed a scanning probe microscope and scanning method capable of reducing or avoiding damage due to collision between a probe tip and a sample, shortening the measuring time, improving the throughput and measuring accuracy, and collecting observational data such as topographic data about the sample surface without being affected by an adhesive water layer. The microscope has a vibration unit for vibrating the probe tip, an observation unit for collecting observational data when the tip is in proximity or contact with the sample surface, a detector for detecting a variation in the state of vibration of the tip when it is in proximity or contact with the sample surface, and a control unit for controlling movement of the tip in X- and Y-directions parallel to the sample surface and in a Z-direction vertical to the sample surface. After collecting the observational data, the control unit scans the tip in a direction parallel to the sample surface until a next observation position in the X- or Y-direction is reached. During the scanning, if a variation in the state of vibration of the tip is detected, the control unit moves the tip in the Z-direction away from the sample surface.

Abstract translation: 公开了一种扫描探针显微镜和扫描方法，其能够减少或避免由于探针尖端和样品之间的碰撞而引起的损伤，缩短测量时间，提高吞吐量和测量精度，并且收集观测数据，例如样品的地形数据 表面不受粘合剂水层的影响。 显微镜具有用于使探针尖端振动的振动单元，用于当尖端接近样品表面时收集观察数据的观察单元，用于检测尖端在其中处于振动状态时的变化的检测器 与样品表面接近或接触;以及控制单元，用于控制尖端在平行于样品表面的X和Y方向以及垂直于样品表面的Z方向上的移动。 在收集观察数据之后，控制单元沿与样品表面平行的方向扫描尖端，直到到达X或Y方向的下一个观察位置。 在扫描期间，如果检测到尖端的振动状态的变化，则控制单元将尖端沿Z方向移动离开样品表面。

公开(公告)号：US08495759B2

公开(公告)日：2013-07-23

申请号：US12510794

申请日：2009-07-28

Applicant: Shigeru Wakiyama ,  Hiroyoshi Yamamoto ,  Yoshiteru Shikakura ,  Itaru Kitajima

Inventor： Shigeru Wakiyama ,  Hiroyoshi Yamamoto ,  Yoshiteru Shikakura ,  Itaru Kitajima

IPC: G01Q10/00

CPC classification number: G01Q40/00 ,  G01Q30/06

Abstract: Provided is an aligning method capable of setting a sample observation unit such as an optical microscope to a probe microscope observation position at high precision. A sample having a known structure is used in advance. A surface of the sample and a shape of a cantilever provided with a probe are observed using the sample observation unit such as the optical microscope. A sample observation position and a probe position which are obtained using the sample observation unit are verified, and a relative positional relationship therebetween is recorded. Then, a first mark indicating a position of the cantilever and a second mark which is displayed in conjunction with the first mark and has the relative positional relationship with the first mark are produced to align the sample relative to the second mark.

Abstract translation: 提供了一种能够将诸如光学显微镜的样本观察单元以高精度设置在探针显微镜观察位置的对准方法。 预先使用具有已知结构的样品。 使用诸如光学显微镜的样品观察单元观察样品的表面和设置有探针的悬臂的形状。 验证使用样本观察单元获得的样本观察位置和探针位置，并记录它们之间的相对位置关系。 然后，产生指示悬臂的位置的第一标记和与第一标记一起显示并与第一标记具有相对位置关系的第二标记，以使样本相对于第二标记进行对准。

公开(公告)号：US07476418B2

公开(公告)日：2009-01-13

申请号：US10951000

申请日：2004-09-27

Applicant: Masatoshi Yasutake ,  Takashi Kaito ,  Yoshiharu Shirakawabe ,  Itaru Kitajima

Inventor： Masatoshi Yasutake ,  Takashi Kaito ,  Yoshiharu Shirakawabe ,  Itaru Kitajima

IPC: C23C16/00 ,  B05D3/06 ,  C23C18/00 ,  C23C18/14 ,  C23C20/00 ,  C23C8/00 ,  C23C14/30 ,  H05B7/00

CPC classification number: G01Q70/12 ,  C01B32/162 ,  D01F9/12 ,  D01F9/1276

Abstract: In a method for fabricating a nanometer-scale structure by arranging nanotubes in a predetermined direction at a predetermined position, the method for fabricating a nanometer-scale structure comprises a first step of planarizing a substrate by etching a predetermined part by irradiating a focused energy beam to the sample, a second step of decomposing and depositing an organic gas into a columnar structure with an objective of determining the position and direction, and a third step of attaching and fixing the nanotube by using the thus deposited columnar structure as a standard of position and direction.

Abstract translation: 在通过在预定位置处以预定方向布置纳米管制造纳米级结构的方法中，纳米级结构的制造方法包括：通过照射聚焦能量束来蚀刻预定部分来平坦化基板的第一步骤 以样品的方式分解和沉积有机气体到目标为确定位置和方向的柱状结构中的第二步骤，以及通过使用这样沉积的柱状结构作为位置标准来附着和固定纳米管的第三步骤 和方向。

公开(公告)号：US07375322B2

公开(公告)日：2008-05-20

申请号：US11374841

申请日：2006-03-14

Applicant: Itaru Kitajima ,  Masatsugu Shigeno

Inventor： Itaru Kitajima ,  Masatsugu Shigeno

IPC: G01N13/16 ,  G01B5/28

CPC classification number: G01Q70/02

Abstract: To prevent an influence from effecting on an oscillating state of a cantilever by firmly fixing a main body portion, there is provided a cantilever holder for attachably and detachably fixing a cantilever which is provided with a stylus at a front end thereof and a base end side of which is supported by a main body portion in a single-supported state, the cantilever holder including a base member having a mounting portion for mounting the main body portion in a state of being positioned at a predetermined position, a holding member made to be able to be brought into contact with at least a surface of the main body portion in a state of mounting the main body portion on the mounting portion and extended in a direction substantially orthogonal to a longitudinal direction (axis line A direction) of the cantilever, and pressing means for pressing both ends of the holding member to the base member by a predetermined pressure, fixing the main body portion to the mounting portion by way of the holding member and capable of separating the holding member from the surface of the main body portion by releasing depression, in which the holding member is formed by a resin species material.

Abstract translation: 为了通过牢固地固定主体部分来防止对悬臂的振荡状态的影响，提供了一种用于可拆卸地固定悬臂的悬臂支架，该悬臂在其前端设置有触针和基端侧 其中，所述悬臂支架包括：基座构件，具有用于将所述主体部安装在预定位置的状态的安装部;保持构件， 能够在将主体部安装在安装部上并沿与悬臂的纵向（轴线A方向）大致正交的方向延伸的状态下与主体部的至少一个表面接触， 以及按压装置，用于将保持构件的两端按压预定的压力按压到基座构件上，并将主体部分固定在安装部分上 e保持构件，并且能够通过释放凹部来分离保持构件与主体部的表面，其中保持构件由树脂种材料形成。

公开(公告)号：US20060219916A1

公开(公告)日：2006-10-05

申请号：US11374841

申请日：2006-03-14

Applicant: Itaru Kitajima ,  Masatsugu Shigeno

Inventor： Itaru Kitajima ,  Masatsugu Shigeno

IPC: G21K7/00

CPC classification number: G01Q70/02

Abstract: To prevent an influence from effecting on an oscillating state of a cantilever by firmly fixing a main body portion, there is provided a cantilever holder for attachably and detachably fixing a cantilever which is provided with a stylus at a front end thereof and a base end side of which is supported by a main body portion in a single-supported state, the cantilever holder including a base member having a mounting portion for mounting the main body portion in a state of being positioned at a predetermined position, a holding member made to be able to be brought into contact with at least a surface of the main body portion in a state of mounting the main body portion on the mounting portion and extended in a direction substantially orthogonal to a longitudinal direction (axis line A direction) of the cantilever, and pressing means for pressing both ends of the holding member to the base member by a predetermined pressure, fixing the main body portion to the mounting portion by way of the holding member and capable of separating the holding member from the surface of the main body portion by releasing depression, in which the holding member is formed by a resin species material.

Abstract translation: 为了通过牢固地固定主体部分来防止对悬臂的振荡状态的影响，提供了一种用于可拆卸地固定悬臂的悬臂支架，该悬臂在其前端设置有触针和基端侧 其中，所述悬臂支架包括：基座构件，具有用于将所述主体部安装在预定位置的状态的安装部;保持构件， 能够在将主体部安装在安装部上并沿与悬臂的纵向（轴线A方向）大致正交的方向延伸的状态下与主体部的至少一个表面接触， 以及按压装置，用于将保持构件的两端按压预定的压力按压到基座构件上，并将主体部分固定在安装部分上 e保持构件，并且能够通过释放凹部来分离保持构件与主体部的表面，其中保持构件由树脂种材料形成。