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公开(公告)号：US09640396B2
公开(公告)日：2017-05-02
申请号：US12652464
申请日：2010-01-05
Applicant: Qin Lin , Rama Puligadda , James Claypool , Douglas J. Guerrero , Brian Smith
Inventor： Qin Lin , Rama Puligadda , James Claypool , Douglas J. Guerrero , Brian Smith
IPC: H01L21/308 , B31D3/00 , H01L21/311 , H01L21/033 , C08G77/20 , G03F7/40 , H01L21/312
CPC classification number: H01L21/0337 , C08G77/20 , G03F7/40 , H01L21/0338 , H01L21/3121
Abstract: Novel double- and triple-patterning methods are provided. The methods involve applying a shrinkable composition to a patterned template structure (e.g., a structure having lines) and heating the composition. The shrinkable composition is selected to possess properties that will cause it to shrink during heating, thus forming a conformal layer over the patterned template structure. The layer is then etched to leave behind pre-spacer structures, which comprise the features from the pattern with remnants of the shrinkable composition adjacent the feature sidewalls. The features are removed, leaving behind a doubled pattern. In an alternative embodiment, an extra etch step can be carried out prior to formation of the features on the template structure, thus allowing the pattern to be tripled rather than doubled.
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公开(公告)号：US20100170868A1
公开(公告)日：2010-07-08
申请号：US12652464
申请日：2010-01-05
Applicant: Qin Lin , Rama Puligadda , James Claypool , Douglas J. Guerrero , Brian Smith
Inventor： Qin Lin , Rama Puligadda , James Claypool , Douglas J. Guerrero , Brian Smith
IPC: H05K3/00
CPC classification number: H01L21/0337 , C08G77/20 , G03F7/40 , H01L21/0338 , H01L21/3121
Abstract: Novel double- and triple-patterning methods are provided. The methods involve applying a shrinkable composition to a patterned template structure (e.g., a structure having lines) and heating the composition. The shrinkable composition is selected to possess properties that will cause it to shrink during heating, thus forming a conformal layer over the patterned template structure. The layer is then etched to leave behind pre-spacer structures, which comprise the features from the pattern with remnants of the shrinkable composition adjacent the feature sidewalls. The features are removed, leaving behind a doubled pattern. In an alternative embodiment, an extra etch step can be carried out prior to formation of the features on the template structure, thus allowing the pattern to be tripled rather than doubled.
Abstract translation: 提供了新的双重和三重图案化方法。 所述方法包括将可收缩的组合物应用于图案化的模板结构（例如，具有线的结构）并加热组合物。 可收缩组合物被选择为具有使其在加热期间收缩的性质，从而在图案化模板结构上形成共形层。 然后蚀刻该层以留下预间隔结构，其包含来自图案的特征，其中可收缩组合物的残余物邻近特征侧壁。 功能被删除，留下了一倍的模式。 在替代实施例中，可以在模板结构上形成特征之前执行额外蚀刻步骤，从而允许图案增加三倍而不是加倍。
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公开(公告)号：US20050270673A1
公开(公告)日：2005-12-08
申请号：US10860895
申请日：2004-06-04
Applicant: James Claypool
Inventor： James Claypool
Abstract: For camping trips and other activities it is useful to have a solar reflector for cooking or electricity generation. It can be made form a flat piece of material and folded into a three dimensional parabolic dish for concentrating solar radiation. The flat disk has a plurality of spirally cut segments, which can overlap when the segments are made to stand extending in a parabolic shape from their central circular base. The segments will overlap on their edges and can be fastened together near the circumference to form a parabolic dish for reflecting solar rays toward a central area used for cooking. The parabolic reflective dish can be disassembled and stored flat by removing the fasteners and urging the spiral side segments to lie flat. The number of spiral side segments and their size may vary. The parabolic reflector is easy to assemble and disassemble and easy to carry.
Abstract translation: 对于野营旅行和其他活动，有一个用于烹饪或发电的太阳能反射器是有用的。 它可以由平坦的材料制成，并折叠成三维抛物面皿，用于集中太阳辐射。 扁平盘具有多个螺旋切割的段，当段被制成从其中心圆形基底以抛物线形状延伸时可重叠。 这些片段在它们的边缘上将重叠，并且可以在圆周附近紧固在一起，以形成用于将太阳光线朝向用于烹调的中心区域反射的抛物线盘。 抛物面反光盘可以通过移除紧固件并使螺旋侧段平坦地平坦地拆卸和平放。 螺旋侧段的数量及其尺寸可能不同。 抛物面反射器易于组装和拆卸，便于携带。
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