Method of making thick film pressure and temperature sensors on a stainless steel diaphragm
    1.
    发明授权
    Method of making thick film pressure and temperature sensors on a stainless steel diaphragm 有权
    在不锈钢隔膜上制作厚膜压力和温度传感器的方法

    公开(公告)号:US06725514B2

    公开(公告)日:2004-04-27

    申请号:US10159821

    申请日:2002-05-31

    IPC分类号: H04R1700

    摘要: A method of making a low-cost metal diaphragm sensor that integrates both pressure and temperature sensing in a single sensor assembly utilizes thick-film processing to form a circuit including stress and temperature sensitive elements on the outboard or exposed surface of a thin metal diaphragm separating the circuit from a pressurized fluid. Only a thin layer of dielectric separates the stress and temperature sensitive elements from the diaphragm surface. The stress sensitive elements respond to mechanical stressing of the diaphragm due to the presence of the pressurized fluid, while the temperature sensitive element responds to the temperature of the pressurized fluid. The thermal capacity of the fluid greatly exceeds that of the diaphragm, so that the temperature responsive characteristic of the temperature sensitive element accurately reflects the temperature of the pressurized fluid.

    摘要翻译: 制造在单个传感器组件中将压力和温度感测集成在一起的低成本金属膜片传感器的方法利用厚膜处理来形成包括应力和温度敏感元件的电路,该元件在薄金属隔膜分隔件的外侧或暴露表面上 来自加压流体的电路。 只有薄层的介质将应力和温度敏感元件与隔膜表面分开。 应力敏感元件由于加压流体的存在而响应于隔膜的机械应力,而温度敏感元件响应加压流体的温度。 流体的热容量大大超过隔膜的热容量,使得温度敏感元件的温度响应特性能够精确地反映加压流体的温度。