Method of processing a defect source at a wafer edge region in a semiconductor manufacturing
    4.
    发明授权
    Method of processing a defect source at a wafer edge region in a semiconductor manufacturing 失效
    在半导体制造中在晶片边缘区域处理缺陷源的方法

    公开(公告)号:US06607983B1

    公开(公告)日:2003-08-19

    申请号:US09707353

    申请日:2000-11-06

    IPC分类号: H01L21461

    摘要: The present invention provides a method of eliminating or covering a defect source in a wafer edge region for semiconductor fabrication. During the etching process of a sacrificial oxide layer for storage node openings, the sacrificial oxide layer has a rumple topology in the wafer edge region due to etching non-uniformity of a photoresist layer formed on the sacrificial oxide layer. Subsequent deposition of a conductive layer and planarization etching, the conductive layer undesirably remains at the wafer edge region as a defect source. Such conductive contaminant particles dislodge, causing many problems in the wafer main region. The present invention removes such a defect source via two methods. One is to directly remove the defect source using a photoresist pattern exposing thereof. The other is to fix the defect source in place in the wafer edge region by protecting thereof by a photoresist pattern during subsequent cleaning processes.

    摘要翻译: 本发明提供一种消除或覆盖用于半导体制造的晶片边缘区域中的缺陷源的方法。 在用于存储节点开口的牺牲氧化物层的蚀刻工艺期间,由于蚀刻在牺牲氧化物层上形成的光致抗蚀剂层的不均匀性,牺牲氧化物层在晶片边缘区域中具有隆起的拓扑结构。 随后沉积导电层和平坦化蚀刻,导电层不期望地保留在晶片边缘区域作为缺陷源。 这种导电性污染物颗粒移动,在晶片主区域引起许多问题。 本发明通过两种方法去除这种缺陷源。 一个是使用其曝光的光致抗蚀剂图案直接去除缺陷源。 另一种是通过在随后的清洁过程中通过光致抗蚀剂图案的保护来将缺陷源固定在晶片边缘区域中。