SHOWERHEAD OF A MOCVD REACTOR WITH LARGE DIAMETER
    5.
    发明申请
    SHOWERHEAD OF A MOCVD REACTOR WITH LARGE DIAMETER 审中-公开
    具有大直径的MOCVD反应器的淋浴

    公开(公告)号:US20140306027A1

    公开(公告)日:2014-10-16

    申请号:US14240927

    申请日:2012-08-24

    IPC分类号: C23C16/455

    CPC分类号: C23C16/45572 C23C16/45565

    摘要: The present invention intends to provide a shower of a large diameter MOCVD reactor, and the difficulty for manufacturing the shower does not obviously increase when its size increases. The shower of a large diameter MOCVD reactor of the present invention comprises III group chamber, V group chamber and a cooling water chamber, and it is characterized in that, III group chamber, V group chamber and cooling water chamber are all separated as N chambers, wherein N is a natural number greater than or equal to 2 and each chamber is an individual unity.

    摘要翻译: 本发明旨在提供大直径MOCVD反应器的淋浴,并且当其尺寸增加时,用于制造淋浴器的难度不会明显增加。 本发明的大直径MOCVD反应器的淋浴器包括III组室,V组室和冷却水室,其特征在于,III组室,V组室和冷却水室均分离为N室 其中N是大于或等于2的自然数,并且每个室是个体单位。