公开(公告)号：US5336903A

公开(公告)日：1994-08-09

申请号：US69030

申请日：1993-05-28

申请人： Mehmet C. Ozturk ,  Douglas T. Grider ,  Mahesh K. Sanganeria ,  Stanton P. Ashburn ,  Jimmie J. Wortman

发明人： Mehmet C. Ozturk ,  Douglas T. Grider ,  Mahesh K. Sanganeria ,  Stanton P. Ashburn ,  Jimmie J. Wortman

IPC分类号： H01L21/225 ,  H01L21/285 ,  H01L21/336 ,  H01L21/60 ,  H01L23/48

CPC分类号： H01L21/76897 ,  H01L21/2254 ,  H01L21/28518 ,  H01L29/41783 ,  H01L29/66545 ,  H01L29/66575 ,  H01L2924/0002 ,  Y10S148/058 ,  Y10S148/059

摘要： Doped silicon-germanium alloy is selectively deposited on a semiconductor substrate, and the semiconductor substrate is then heated to diffuse at least some of the dopant from the silicon-germanium alloy into the semiconductor substrate to form a doped region at the face of the semiconductor substrate. The doped silicon-germanium alloy acts as a diffusion source for the dopant, so that shallow doped, regions may be formed at the face of the semiconductor substrate without ion implantation. A high performance contact to the doped region is also provided by forming a metal layer on the doped silicon-germanium alloy layer and heating to react at least part of the silicon-germanium alloy layer with at least part of the metal layer to form a layer of germanosilicide alloy over the doped regions. The method of the present invention is particularly suitable for forming shallow source and drain regions for a field effect transistor, and self-aligned source and drain contacts therefor.

摘要翻译： 掺杂的硅 - 锗合金被选择性地沉积在半导体衬底上，然后加热半导体衬底以将至少一些掺杂剂从硅 - 锗合金扩散到半导体衬底中，以在半导体衬底的表面形成掺杂区域 。 掺杂的硅 - 锗合金充当掺杂剂的扩散源，使得可以在半导体衬底的表面处形成浅掺杂的区域而不进行离子注入。 还通过在掺杂的硅 - 锗合金层上形成金属层并加热以使至少部分硅 - 锗合金层与至少一部分金属层反应形成层，从而提供与掺杂区的高性能接触 的锗硅酸盐合金。 本发明的方法特别适用于形成用于场效应晶体管的浅源极和漏极区域，以及用于其的自对准源极和漏极接触。

公开(公告)号：US3953792A

公开(公告)日：1976-04-27

申请号：US464722

申请日：1974-04-26

申请人： James C. Administrator of the National Aeronautics and Space Administration, with respect to an invention of Fletcher ,  Jimmie J. Wortman ,  Robert P. Donovan ,  Arthur D. Brooks ,  Larry K. Monteith ,  William H. Kinard ,  Robert L. O'Neil

发明人： James C. Administrator of the National Aeronautics and Space Administration, with respect to an invention of Fletcher ,  Jimmie J. Wortman ,  Robert P. Donovan ,  Arthur D. Brooks ,  Larry K. Monteith ,  William H. Kinard ,  Robert L. O'Neil

IPC分类号： G01N15/10 ,  G01R27/26

CPC分类号： G01N15/1031 ,  G01N2015/1062

摘要： The invention is a device for counting aerosols and sorting them according to either size, mass or energy. The component parts of the invention are an accelerator, a capacitor sensor and a readout. The accelerator is a means for accelerating the aerosols toward the face of the capacitor sensor with such force that they partially penetrate the capacitor sensor, momentarily discharging it. The readout device is a means for counting the number of discharges of the capacitor sensor and measuring the amplitudes of these different discharges. The capacitor employed is a metal-oxide-silicon capacitor in which the metal and oxide layers are very thin. The aerosols are accelerated by the accelerator in the direction of the metal layer with such force that they penetrate the metal and damage the oxide layers, thereby allowing the electrical charge on the capacitor to discharge through the damaged region. The impacting aerosols create a discharge path which is self-healing; that is, each incident aerosol initiates a discharge path through the capacitor in such a fashion as to vaporize or blow out the conducting path in the process. Once the discharge action is complete, the low resistance path no longer exists between the two capacitor plates and the capacitor is again able to accept a charge. The active area of the capacitor is reduced in size by the damaged area each time a discharge occurs.

摘要翻译： 本发明是一种用于计数气溶胶并根据尺寸，质量或能量进行分选的装置。 本发明的组成部分是加速器，电容传感器和读出器。 加速器是用这种力使气溶胶朝向电容器传感器的表面加速的手段，使得它们部分地穿透电容器传感器，瞬间将其放电。 读出装置是用于对电容器传感器的放电次数进行计数并测量这些不同放电的振幅的装置。 所使用的电容器是金属氧化物 - 硅电容器，其中金属和氧化物层非常薄。 气溶胶通过加速器在金属层的方向上以这样的力加速，使得它们穿透金属并损坏氧化物层，从而允许电容器上的电荷通过损坏区域排出。 影响气溶胶产生自愈的排放路径; 也就是说，每个入射气溶胶以这样的方式引发通过电容器的放电路径，以便在该过程中蒸发或吹出导电路径。 一旦放电动作完成，两个电容器板之间的电阻路径就不再存在，电容器再次可以接受充电。 每次发生放电时，电容器的有效面积都由损坏区域减小。

公开(公告)号：US5418885A

公开(公告)日：1995-05-23

申请号：US998149

申请日：1992-12-29

申请人： John R. Hauser ,  Furman Y. Sorrell ,  Jimmie J. Wortman

发明人： John R. Hauser ,  Furman Y. Sorrell ,  Jimmie J. Wortman

IPC分类号： C23C8/10 ,  C23C16/48 ,  C30B31/12 ,  H05B3/00 ,  F26B19/00 ,  A21B2/00 ,  H01L21/00

CPC分类号： C30B31/12 ,  C23C16/481 ,  C23C8/10 ,  H05B3/0047

摘要： A three zone rapid thermal processing system includes three arrays of radiant heating lamps for heating a semiconductor wafer. The arrays are positioned along the axis of the wafer such that one array is adjacent one face of the wafer, the second array is adjacent the second face of the wafer and the third array is adjacent the edge of the wafer. A wafer holder holds the wafer face transverse to the common axis of the radiant heating lamps. Reflectors at each array reflect radiant heat onto the wafer. The arrays are independently connected to power sources and a controller to provide efficient coupling of the heat sources and a uniform temperature distribution across a wafer.

摘要翻译： 三区快速热处理系统包括用于加热半导体晶片的三个辐射加热灯阵列。 阵列沿着晶片的轴线定位，使得一个阵列邻近晶片的一个面，第二阵列邻近晶片的第二面，并且第三阵列邻近晶片的边缘。 晶片保持器将晶片表面横向于辐射加热灯的公共轴线保持。 每个阵列上的反射器将辐射热量反射到晶片上。 阵列独立地连接到电源和控制器以提供热源的有效耦合和跨晶片的均匀温度分布。

公开(公告)号：US5253324A

公开(公告)日：1993-10-12

申请号：US953568

申请日：1992-09-29

申请人： Jimmie J. Wortman ,  Furman Y. Sorrell ,  John R. Hauser ,  Mark J. Fordham

发明人： Jimmie J. Wortman ,  Furman Y. Sorrell ,  John R. Hauser ,  Mark J. Fordham

IPC分类号： C30B31/12 ,  F26B3/28 ,  H01L21/00 ,  A21B2/00 ,  F26B3/30 ,  F27B9/04 ,  F27B9/06

CPC分类号： H01L21/67115 ,  C30B31/12 ,  F26B3/28

摘要： A conical rapid thermal processing system includes a conical thermal radiation reflector and a plurality of elongated radiant heating sources within the conical thermal radiation reflector. The elongated radiant heating sources pass through an imaginary conical surface within the conical thermal radiation reflector. A wafer holder within the imaginary conical surface holds the wafer face transverse to the common axis of the conical reflector and the conically arranged radiant heating lamps. The conical thermal radiation reflector and conically arranged lamps provide uniform radiant heating across the face of a wafer without significantly degrading coupling efficiency.

摘要翻译： 锥形快速热处理系统包括锥形热辐射反射器和圆锥形热辐射反射器内的多个细长辐射加热源。 细长的辐射加热源通过锥形热辐射反射器内的假想圆锥形表面。 在假想圆锥形表面内的晶片保持器将晶片表面保持横向于锥形反射器和锥形布置的辐射加热灯的公共轴线。 圆锥形热辐射反射器和圆锥形布置的灯提供横跨晶片表面的均匀的辐射加热，而不会显着降低耦合效率。

公开(公告)号：US4136778A

公开(公告)日：1979-01-30

申请号：US842158

申请日：1977-10-14

申请人： Jimmie J. Wortman ,  Richard A. Whisnant ,  Larry K. Monteith

发明人： Jimmie J. Wortman ,  Richard A. Whisnant ,  Larry K. Monteith

IPC分类号： B07C5/34 ,  D06F93/00 ,  G06K1/12 ,  G06K7/12 ,  B07C5/346

CPC分类号： D06F93/00 ,  B07C5/3412 ,  G06K1/12 ,  G06K7/12 ,  Y10S209/937

摘要： A method, system, and attachment for sorting articles, such as laundry or the like whereby each article includes as a part thereof a quantity of each of a number of different materials of the type which each produce secondary radiation at a characteristic energy level when x-ray, gamma or other radiation impinges thereon, the combination of materials forming a code uniquely identifing the article. Each article is passed through a pneumatic tube or on a conveyor line substantially one at a time past a source of radiation and a multi-channel energy level detector which produces an electrical output signal indicating the article, and also indicating when two or more combination codes are being simultaneously passed. The articles are then diverted in accordance with the electrical signal.

摘要翻译： 一种用于分类物品（例如衣物等）的方法，系统和附件，其中每个物品作为其一部分包括多个不同材料中的每一种的数量，每种材料在特征能量级别产生二次辐射时，当x 射线，伽马或其他辐射照射在其上，材料的组合形成唯一地识别物品的代码。 每个物品通过气动管或输送线，基本上一次通过辐射源，多通道能级检测器产生指示物品的电输出信号，并且还指示两个或多个组合代码 正在同时通过。 然后根据电信号转移物品。