公开(公告)号：US20130093431A1

公开(公告)日：2013-04-18

申请号：US13442975

申请日：2012-04-10

Applicant: Johan RAMAN ,  Pieter ROMBOUTS

Inventor： Johan RAMAN ,  Pieter ROMBOUTS

IPC: G01R31/00

CPC classification number: G01R31/003 ,  G01L1/144 ,  G01L1/2262 ,  G01L9/02 ,  G01L9/04 ,  G01L9/06 ,  G01L9/12 ,  G01R31/2829

Abstract: A difference measurement circuit including a first port and a second port for connection to a first set of nodes and a second set of nodes of a sensor unit. The circuit further includes switching units for switching excitation signals emanating from excitation nodes from being applied to the first set of nodes via the first port to being applied to the second set of nodes via the second port and for switching differential measurement signals measured at sensing nodes from being obtained from the second set of nodes via the second port to being obtained from the first set of nodes via the first port. A corresponding method is described. The circuit further includes redundancy testing circuitry for evaluating the similarity or deviation between measurement signals obtained in different states of the switching units.

Abstract translation: 差分测量电路，包括用于连接到第一组节点的第一端口和第二端口以及传感器单元的第二组节点。 该电路还包括用于切换从激励节点发出的激励信号经由第一端口被施加到第一组节点以经由第二端口被施加到第二组节点并且用于切换在感测节点处测量的差分测量信号的开关单元 从第二组节点经由第二端口获得经由第一端口从第一组节点获得。 描述相应的方法。 电路还包括用于评估在开关单元的不同状态下获得的测量信号之间的相似性或偏差的冗余测试电路。

公开(公告)号：US20100307241A1

公开(公告)日：2010-12-09

申请号：US12738504

申请日：2008-10-20

Applicant: Johan Raman ,  Pieter Rombouts

Inventor： Johan Raman ,  Pieter Rombouts

IPC: G01C19/56

CPC classification number: G01C19/56 ,  G01C19/5755 ,  G01P15/125 ,  G01P15/14 ,  G01P15/18

Abstract: A MEMS structure for a combined gyroscope and accelerometer unit (100) based on in-plane vibratory movements comprises a proof mass (101) and comb-drives (102) operable to cause the proof mass (101) to resonate in the x-direction, commonly referred to as the primary mode. Under the influence of a rotation Ωz around the z-axis, a Coriolis force acting in the y-direction results. This excites the secondary (or sense) mode. A set of parallel-plate capacitors 103 are provided to enable position readout along the secondary axis. In addition to the above, the comb-drive capacitors (102) of the primary mode can also be used for readout of position along the primary axis, and the parallel-plate capacitors (103) for actuation along the secondary axis. This can be achieved either by time-multiplexing these capacitors (102, 103) or by providing separate sets of capacitors (102, 103) for sensing and actuation along each axis. The unit can operate in separate ΣΔ force-feedback loops with respect to both axes. This force-feedback approach is already known for readout of the secondary mode of MEMS gyroscopes. It has not previously been applied to the primary mode of a gyroscope for the measurement of a component of acceleration.

Abstract translation: 用于基于平面内振动运动的组合陀螺仪和加速度计单元（100）的MEMS结构包括可操作以使检测质量块（101）在x方向上共振的检验质量块（101）和梳状驱动器（102） ，通常被称为主要模式。 在围绕z轴的旋转和OHgr z的影响下，沿y方向作用的科里奥利力结果。 这激发了次要（或感觉）模式。 提供一组平行板电容器103以使得能够沿着次轴读出位置。 除了上述之外，主模式的梳状驱动电容器（102）还可以用于沿主轴的位置的读出，以及用于沿着副轴致动的平行板电容器（103）。 这可以通过对这些电容器（102,103）进行时间复用或通过提供用于沿每个轴的感测和致动的单独的电容器组（102,103）来实现。 该单元可以在单独的＆Sgr＆amp; Dgr 相对于两个轴的力 - 反馈回路。 已知这种力反馈方法用于读出MEMS陀螺仪的二次模式。 以前没有将其应用于用于测量加速度分量的陀螺仪的主要模式。

公开(公告)号：US08464585B2

公开(公告)日：2013-06-18

申请号：US12738504

申请日：2008-10-20

Applicant: Johan Raman ,  Pieter Rombouts

Inventor： Johan Raman ,  Pieter Rombouts

IPC: G01C19/56

CPC classification number: G01C19/56 ,  G01C19/5755 ,  G01P15/125 ,  G01P15/14 ,  G01P15/18

Abstract: A MEMS structure for a combined gyroscope and accelerometer unit (100) based on in-plane vibratory movements comprises a proof mass (101) and comb-drives (102) operable to cause the proof mass (101) to resonate in the x-direction, commonly referred to as the primary mode. Under the influence of a rotation Ωz around the z-axis, a Coriolis force acting in the y-direction results. This excites the secondary (or sense) mode. A set of parallel-plate capacitors 103 are provided to enable position readout along the secondary axis. In addition to the above, the comb-drive capacitors (102) of the primary mode can also be used for readout of position along the primary axis, and the parallel-plate capacitors (103) for actuation along the secondary axis. This can be achieved either by time-multiplexing these capacitors (102, 103) or by providing separate sets of capacitors (102, 103) for sensing and actuation along each axis. The unit can operate in separate ΣΔ force-feedback loops with respect to both axes. This force-feedback approach is already known for readout of the secondary mode of MEMS gyroscopes. It has not previously been applied to the primary mode of a gyroscope for the measurement of a component of acceleration.

Abstract translation: 用于基于平面内振动运动的组合陀螺仪和加速度计单元（100）的MEMS结构包括可操作以使检测质量块（101）在x方向上共振的检验质量块（101）和梳状驱动器（102） ，通常被称为主要模式。 在围绕z轴的旋转Omegaz的影响下，在y方向上作用的科里奥利力结果。 这激发了次要（或感觉）模式。 提供一组平行板电容器103以使得能够沿着次轴读出位置。 除了上述之外，主模式的梳状驱动电容器（102）还可以用于沿主轴的位置的读出，以及用于沿着副轴致动的平行板电容器（103）。 这可以通过对这些电容器（102,103）进行时间复用或通过提供用于沿每个轴的感测和致动的单独的电容器组（102,103）来实现。 该单元可以相对于两个轴在单独的SigmaDelta力 - 反馈回路中操作。 已知这种力反馈方法用于读出MEMS陀螺仪的二次模式。 以前没有将其应用于用于测量加速度分量的陀螺仪的主要模式。

公开(公告)号：US09535103B2

公开(公告)日：2017-01-03

申请号：US13442975

申请日：2012-04-10

Applicant: Johan Raman ,  Pieter Rombouts

Inventor： Johan Raman ,  Pieter Rombouts

IPC: G01R27/02 ,  G01R31/00 ,  G01L1/14 ,  G01L1/22 ,  G01L9/02 ,  G01L9/04 ,  G01L9/06 ,  G01L9/12 ,  G01R31/28

CPC classification number: G01R31/003 ,  G01L1/144 ,  G01L1/2262 ,  G01L9/02 ,  G01L9/04 ,  G01L9/06 ,  G01L9/12 ,  G01R31/2829

Abstract: A difference measurement circuit including a first port and a second port for connection to a first set of nodes and a second set of nodes of a sensor unit. The circuit further includes switching units for switching excitation signals emanating from excitation nodes from being applied to the first set of nodes via the first port to being applied to the second set of nodes via the second port and for switching differential measurement signals measured at sensing nodes from being obtained from the second set of nodes via the second port to being obtained from the first set of nodes via the first port. A corresponding method is described. The circuit further includes redundancy testing circuitry for evaluating the similarity or deviation between measurement signals obtained in different states of the switching units.

Abstract translation: 差分测量电路，包括用于连接到第一组节点的第一端口和第二端口以及传感器单元的第二组节点。 该电路还包括用于切换从激励节点发出的激励信号经由第一端口被施加到第一组节点以经由第二端口被施加到第二组节点并且用于切换在感测节点处测量的差分测量信号的切换单元 从第二组节点经由第二端口获得经由第一端口从第一组节点获得。 描述相应的方法。 电路还包括用于评估在开关单元的不同状态下获得的测量信号之间的相似性或偏差的冗余测试电路。