Optical scanning configurations, systems, and methods involving at least one actuator for scanning a scan head
    1.
    发明授权
    Optical scanning configurations, systems, and methods involving at least one actuator for scanning a scan head 有权
    涉及用于扫描扫描头的至少一个致动器的光学扫描配置,系统和方法

    公开(公告)号:US07599060B2

    公开(公告)日:2009-10-06

    申请号:US12222820

    申请日:2008-08-18

    IPC分类号: G01N21/64

    摘要: An optical system includes a sample substrate having a surface, the surface defining a 2-dimensional sample plane. The system includes an excitation source configured to provide excitation light to the sample substrate. The system further includes an optical detector configured to receive emission light from the sample substrate and generate detection data. The system also includes a scan head configured at least (i) to direct the excitation light towards the sample substrate, (ii) to receive emission light from the sample substrate and direct the emission light towards the optical detector, and (iii) for scanning relative to the sample substrate. The system includes at least one actuator configured to scan the scan head relative to the sample substrate, the at least one actuator being configured to provide at least one of (1) a relative linear motion and a relative angular motion about a rotational axis generally perpendicular to the sample plane and (2) two relative angular motions about two respectively different rotational axes generally perpendicular to the sample plane.

    摘要翻译: 光学系统包括具有表面的样品基底,该表面限定了二维样品平面。 该系统包括被配置为向样品基底提供激发光的激发源。 该系统还包括光学检测器,其被配置为接收来自样品基板的发射光并产生检测数据。 该系统还包括扫描头,该扫描头至少配置成(i)将激发光引向样品衬底,(ii)接收来自样品衬底的发射光并将发射光引向光学检测器,以及(iii)用于扫描 相对于样品基底。 所述系统包括至少一个致动器,其构造成相对于样品基板扫描扫描头,所述至少一个致动器被配置为提供以下中的至少一个:(1)相对线性运动和围绕大体垂直的旋转轴线的相对角运动 (2)大致垂直于样品平面的两个不同旋转轴的两个相对角运动。