Electroplating Transitional Metal Oxides
    3.
    发明申请

    公开(公告)号:US20190100850A1

    公开(公告)日:2019-04-04

    申请号:US16143453

    申请日:2018-09-27

    Abstract: The present disclosure generally relates to a method for electroplating (or electrodeposition) a transition metal oxide composition that may be used in gas sensors, biological cell sensors, supercapacitors, catalysts for fuel cells and metal air batteries, nano and optoelectronic devices, filtration devices, structural components, and energy storage devices. The method includes electrodepositing the electrochemically active transition metal oxide composition onto a working electrode in an electrodeposition bath containing a molten salt electrolyte and a transition metal ion source. The electrode structure can be used for various applications such as electrochemical energy storage devices including high power and high-energy primary or secondary batteries.

    Process control for pulsed laser deposition using raman spectroscopy
    4.
    发明授权
    Process control for pulsed laser deposition using raman spectroscopy 失效
    使用拉曼光谱法进行脉冲激光沉积的过程控制

    公开(公告)号:US6038525A

    公开(公告)日:2000-03-14

    申请号:US846437

    申请日:1997-04-30

    CPC classification number: H01L21/67253 C23C14/28 C23C14/547 C23C14/548

    Abstract: A method of controlling a pulsed laser deposition process. A spectroscope is used to acquire Raman response data from a substrate as it is being coated with a film. A processor compares the response data to reference data, which may represent an uncoated substrate or an ideal film. In the former case, the attenuation of the response signal is used to indicate film thickness. In the former case, the peak characteristics of the film can be used to indicate its chemical properties. The processor may be further programmed to compare deposition rates, reaction rates, and transport rates to model data. The processor makes decisions regarding equipment control based on these comparisons. It may access heuristic rules to aid in decision making where several factors are involved.

    Abstract translation: 一种控制脉冲激光沉积工艺的方法。 使用分光镜从底物获取拉曼响应数据,因为它被涂覆。 处理器将响应数据与参考数据进行比较,参考数据可以表示未涂覆的基底或理想的膜。 在前一种情况下,响应信号的衰减用于指示膜厚度。 在前一种情况下,膜的峰值特性可用于表示其化学性质。 处理器可以被进一步编程以将沉积速率,反应速率和传输速率与模型数据进行比较。 基于这些比较,处理器做出关于设备控制的决策。 它可以访问启发式规则来帮助决策,其中涉及到几个因素。

    Surface flaw detection using spatial raman-based imaging
    6.
    发明授权
    Surface flaw detection using spatial raman-based imaging 有权
    使用空间拉曼成像的表面探伤

    公开(公告)号:US06453264B1

    公开(公告)日:2002-09-17

    申请号:US09350329

    申请日:1999-07-09

    Abstract: A Raman-based spatial analysis method of detecting surface flaws. Special filters and optics are used to acquire filtered Raman response data from a portion of the surface. The filtered Raman response data represents the Raman response of the surface at a selected frequency. A camera records the response, thereby providing a two dimensional image of the portion of the surface. The image may be analyzed to determine whether that portion has desired thickness and chemical characteristics.

    Abstract translation: 一种用于检测表面缺陷的基于拉曼的空间分析方法。 特殊滤光片和光学元件用于从表面的一部分获取滤波的拉曼响应数据。 滤波的拉曼响应数据表示所选频率处的表面的拉曼响应。 相机记录响应,从而提供表面部分的二维图像。 可以分析图像以确定该部分是否具有期望的厚度和化学特性。

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