公开(公告)号：US20200373384A1

公开(公告)日：2020-11-26

申请号：US16992244

申请日：2020-08-13

申请人： JOSEPHINE BEA CHANG ,  ERIC J. STEWART ,  KEN ALFRED NAGAMATSU ,  ROBERT S. HOWELL ,  SHALINI GUPTA

发明人： JOSEPHINE BEA CHANG ,  ERIC J. STEWART ,  KEN ALFRED NAGAMATSU ,  ROBERT S. HOWELL ,  SHALINI GUPTA

IPC分类号： H01L29/06 ,  H01L29/08 ,  H01L23/29 ,  H01L23/31 ,  H01L29/15 ,  H01L29/423 ,  H01L21/02 ,  H01L21/306 ,  H01L29/778 ,  H01L29/66

摘要： A transistor is provided that comprises a source region overlying a base structure, a drain region overlying the base structure, and a block of semiconducting material overlying the base structure and being disposed between the source region and the drain region. The block of semiconducting material comprises a gate controlled region adjacent the source region, and a drain access region disposed between the gate controlled region and the drain region. The drain access region is formed of a plurality of semiconducting material ridges spaced apart from one another by non-channel trench openings, wherein at least a portion of the non-channel trench openings being filled with a doped material to provide a depletion region to improve breakdown voltage of the transistor.

公开(公告)号：US10804387B1

公开(公告)日：2020-10-13

申请号：US16360828

申请日：2019-03-21

申请人： Josephine Bea Chang ,  Robert S. Howell ,  Matthew R. King

发明人： Josephine Bea Chang ,  Robert S. Howell ,  Matthew R. King

IPC分类号： H01L29/778 ,  H01L29/15 ,  H01L29/08 ,  H01L29/66 ,  H01L21/02

摘要： A vertical transistor is provided that includes a base structure and a superlattice structure overlying the base structure. The superlattice structure comprises a multichannel ridge having sidewalls. The multichannel ridge comprises a plurality of heterostructures that each form a channel of the multichannel ridge. The vertical transistor also includes a source region that overlies the base structure and is in contact with a first end of the superlattice structure, a floating drain that overlies the base structure and is in contact with a second end of the superlattice structure, and a drain. When the vertical transistor is in an ‘ON’ state, current flows from the source region through the channels of the multichannel ridge to the floating drain, which funnels the current to the drain through at least a portion of the base structure.

公开(公告)号：US20200303536A1

公开(公告)日：2020-09-24

申请号：US16360828

申请日：2019-03-21

申请人： JOSEPHINE BEA CHANG ,  ROBERT S. HOWELL ,  MATTHEW R. KING

发明人： JOSEPHINE BEA CHANG ,  ROBERT S. HOWELL ,  MATTHEW R. KING

IPC分类号： H01L29/778 ,  H01L29/15 ,  H01L29/08 ,  H01L29/66 ,  H01L21/02

摘要： A vertical transistor is provided that includes a base structure and a superlattice structure overlying the base structure. The superlattice structure comprises a multichannel ridge having sidewalls. The multichannel ridge comprises a plurality of heterostructures that each form a channel of the multichannel ridge. The vertical transistor also includes a source region that overlies the base structure and is in contact with a first end of the superlattice structure, a floating drain that overlies the base structure and is in contact with a second end of the superlattice structure, and a drain. When the vertical transistor is in an ‘ON’ state, current flows from the source region through the channels of the multichannel ridge to the floating drain, which funnels the current to the drain through at least a portion of the base structure.

公开(公告)号：US20200235202A1

公开(公告)日：2020-07-23

申请号：US16252952

申请日：2019-01-21

申请人： JOSEPHINE BEA CHANG ,  ERIC J. STEWART ,  KEN ALFRED NAGAMATSU ,  ROBERT S. HOWELL ,  SHALINI GUPTA

发明人： JOSEPHINE BEA CHANG ,  ERIC J. STEWART ,  KEN ALFRED NAGAMATSU ,  ROBERT S. HOWELL ,  SHALINI GUPTA

IPC分类号： H01L29/06 ,  H01L29/08 ,  H01L23/29 ,  H01L23/31 ,  H01L29/15 ,  H01L29/423 ,  H01L21/02 ,  H01L21/306 ,  H01L29/778 ,  H01L29/66

摘要： A transistor is provided that comprises a source region overlying a base structure, a drain region overlying the base structure, and a block of semiconducting material overlying the base structure and being disposed between the source region and the drain region. The block of semiconducting material comprises a gate controlled region adjacent the source region, and a drain access region disposed between the gate controlled region and the drain region. The drain access region is formed of a plurality of semiconducting material ridges spaced apart from one another by non-channel trench openings, wherein at least a portion of the non-channel trench openings being filled with a doped material to provide a depletion region to improve breakdown voltage of the transistor.

公开(公告)号：US10985243B2

公开(公告)日：2021-04-20

申请号：US16992244

申请日：2020-08-13

申请人： Josephine Bea Chang ,  Eric J. Stewart ,  Ken Alfred Nagamatsu ,  Robert S. Howell ,  Shalini Gupta

发明人： Josephine Bea Chang ,  Eric J. Stewart ,  Ken Alfred Nagamatsu ,  Robert S. Howell ,  Shalini Gupta

IPC分类号： H01L29/06 ,  H01L29/08 ,  H01L23/29 ,  H01L23/31 ,  H01L29/15 ,  H01L29/423 ,  H01L21/02 ,  H01L21/306 ,  H01L29/778 ,  H01L29/66

摘要： A transistor is provided that comprises a source region overlying a base structure, a drain region overlying the base structure, and a block of semiconducting material overlying the base structure and being disposed between the source region and the drain region. The block of semiconducting material comprises a gate controlled region adjacent the source region, and a drain access region disposed between the gate controlled region and the drain region. The drain access region is formed of a plurality of semiconducting material ridges spaced apart from one another by non-channel trench openings, wherein at least a portion of the non-channel trench openings being filled with a doped material to provide a depletion region to improve breakdown voltage of the transistor.

公开(公告)号：US10784341B2

公开(公告)日：2020-09-22

申请号：US16252952

申请日：2019-01-21

申请人： Josephine Bea Chang ,  Eric J. Stewart ,  Ken Alfred Nagamatsu ,  Robert S. Howell ,  Shalini Gupta

发明人： Josephine Bea Chang ,  Eric J. Stewart ,  Ken Alfred Nagamatsu ,  Robert S. Howell ,  Shalini Gupta

IPC分类号： H01L29/06 ,  H01L29/08 ,  H01L23/29 ,  H01L23/31 ,  H01L29/15 ,  H01L29/423 ,  H01L21/02 ,  H01L21/306 ,  H01L29/778 ,  H01L29/66

摘要： A transistor is provided that comprises a source region overlying a base structure, a drain region overlying the base structure, and a block of semiconducting material overlying the base structure and being disposed between the source region and the drain region. The block of semiconducting material comprises a gate controlled region adjacent the source region, and a drain access region disposed between the gate controlled region and the drain region. The drain access region is formed of a plurality of semiconducting material ridges spaced apart from one another by non-channel trench openings, wherein at least a portion of the non-channel trench openings being filled with a doped material to provide a depletion region to improve breakdown voltage of the transistor.