公开(公告)号：US20120205296A1

公开(公告)日：2012-08-16

申请号：US13297227

申请日：2011-11-15

Applicant: Arye Malek ,  Joshua J. Hackney ,  Franz W. Ulrich

Inventor： Arye Malek ,  Joshua J. Hackney ,  Franz W. Ulrich

IPC: B07C5/00 ,  H04N7/18

CPC classification number: B07C5/3422 ,  B07C5/3404 ,  G01N21/8901 ,  G01N21/9501 ,  G01N21/95684 ,  G01N2021/845 ,  G01N2201/0635 ,  G02B13/22 ,  Y10S209/922

Abstract: Manufacturing lines include inspection systems for monitoring the quality of parts produced. Manufacturing lines for making semiconductor devices generally inspect each fabricated part. The information obtained is used to fix manufacturing problems in the semiconductor fab plant. A machine-vision system for inspecting devices includes a flipper mechanism. After being inspected at a first station, a tray-transfer device moves the tray from the first inspection station to a flipper mechanism. The flipper mechanism includes two jaws, a mover, and a rotator. The flipper mechanism turns the devices over and places the devices in a second tray so that another surface of the device can be inspected. A second tray-transfer device moves the second tray from the flipper to a second inspection station. The mover of the flipper mechanism removes the tray from the first inspection surface and places a tray at the second inspection surface.

Abstract translation: 生产线包括用于监测生产零件质量的检测系统。 用于制造半导体器件的制造线通常检查每个制造的部件。 获得的信息用于解决半导体晶圆厂的制造问题。 用于检查装置的机器视觉系统包括翻转机构。 在第一站检查后，托盘传送装置将托盘从第一检查站移动到翻动机构。 导板机构包括两个钳口，一个动子和一个旋转器。 导板机构将装置转过来并将装置放置在第二托盘中，使得可以检查装置的另一个表面。 第二托盘传送装置将第二托盘从托板移动到第二检查台。 导板机构的移动器从第一检查表面移除托盘，并将托盘放置在第二检查表面。

公开(公告)号：US07773209B2

公开(公告)日：2010-08-10

申请号：US12397342

申请日：2009-03-03

Applicant: Joshua J. Hackney ,  Arye Malek ,  Franz W. Ulrich ,  John B. Estridge

Inventor： Joshua J. Hackney ,  Arye Malek ,  Franz W. Ulrich ,  John B. Estridge

IPC: G01N21/00

CPC classification number: H01L21/00 ,  G01B11/2513 ,  G01B11/2518 ,  G01N21/95607 ,  G03F7/70483 ,  G06T7/521

Abstract: Improved method and apparatus for machine vision. One embodiment provides automated imaging and analysis, optionally including Scheimpflug's condition on the pattern projector, telecentric imaging and projecting, an IR filter, a mask to constrain observed illumination, and/or a sine-wave projection pattern for more accurate results. Another embodiment provides circuitry for a machine-vision system. Another embodiment provides a machine-vision system, optionally including accommodation of random orientation of parts in trays, irregular location of features being inspected, crossed pattern projectors and detectors for shadow reduction, detection of substrate warpage as well as ball-top coplanarity, two discrete shutters (or flash brightnesses) interleaved (long shutter for dark features, short shutter for bright features). Another embodiment provides parts inspection, optionally including a tray elevator that lifts trays to an inspection surface, moves trays in short tray dimension, provides first tray inspection at a major surface of the elevator, and/or provides a tray flipper.

Abstract translation: 改进机器视觉的方法和装置。 一个实施例提供自动成像和分析，可选地包括在图案投影仪上的Scheimpflug的条件，远心成像和投影，IR滤光器，用于约束观察到的照明的掩模和/或正弦波投影图案以获得更准确的结果。 另一个实施例提供了用于机器视觉系统的电路。 另一个实施例提供了一种机器视觉系统，可选地包括托盘中零件的随机取向的容纳，被检查的特征的不规则位置，用于阴影减少的交叉图案投影仪和检测器，基板翘曲的检测以及球顶共面性，两个离散的 快门（或闪光亮度）交错（长遮光功能的快门，亮度快的快门）。 另一个实施例提供部件检查，可选地包括将托盘提升到检查表面的托盘升降机，以短托盘尺寸移动托盘，在电梯的主表面处提供第一托盘检查和/或提供托盘托板。

公开(公告)号：US07719670B2

公开(公告)日：2010-05-18

申请号：US12169610

申请日：2008-07-08

Applicant: Joshua J. Hackney ,  Arye Malek ,  Franz W. Ulrich ,  John B. Estridge

Inventor： Joshua J. Hackney ,  Arye Malek ,  Franz W. Ulrich ,  John B. Estridge

IPC: G01N21/00

CPC classification number: H01L21/00 ,  G01B11/2513 ,  G01B11/2518 ,  G01N21/95607 ,  G03F7/70483 ,  G06T7/521

Abstract: Improved method and apparatus for machine vision. One embodiment provides automated imaging and analysis, optionally including Scheimpflug's condition on the pattern projector, telecentric imaging and projecting, an IR filter, a mask to constrain observed illumination, and/or a sine-wave projection pattern for more accurate results. Another embodiment provides circuitry for a machine-vision system. Another embodiment provides a machine-vision system, optionally including accommodation of random orientation of parts in trays, irregular location of features being inspected, crossed pattern projectors and detectors for shadow reduction, detection of substrate warpage as well as ball-top coplanarity, two discrete shutters (or flash brightnesses) interleaved (long shutter for dark features, short shutter for bright features). Another embodiment provides parts inspection, optionally including a tray elevator that lifts trays to an inspection surface, moves trays in short tray dimension, provides first tray inspection at a major surface of the elevator, and/or provides a tray flipper.

Abstract translation: 改进机器视觉的方法和装置。 一个实施例提供自动成像和分析，可选地包括在图案投影仪上的Scheimpflug的条件，远心成像和投影，IR滤光器，用于约束观察到的照明的掩模和/或正弦波投影图案以获得更准确的结果。 另一个实施例提供了用于机器视觉系统的电路。 另一个实施例提供了一种机器视觉系统，可选地包括托盘中零件的随机取向的容纳，被检查的特征的不规则位置，用于阴影减少的交叉图案投影仪和检测器，基底翘曲的检测以及球顶共面性，两个离散的 快门（或闪光亮度）交错（长遮光功能的快门，亮度快的快门）。 另一个实施例提供部件检查，可选地包括将托盘提升到检查表面的托盘升降机，以短托盘尺寸移动托盘，在电梯的主表面处提供第一托盘检查和/或提供托盘托板。

公开(公告)号：US20090180679A1

公开(公告)日：2009-07-16

申请号：US12397342

申请日：2009-03-03

Applicant: Joshua J. Hackney ,  Arye Malek ,  Franz W. Ulrich ,  John B. Estridge

Inventor： Joshua J. Hackney ,  Arye Malek ,  Franz W. Ulrich ,  John B. Estridge

IPC: G06K9/00 ,  G01N21/00

CPC classification number: H01L21/00 ,  G01B11/2513 ,  G01B11/2518 ,  G01N21/95607 ,  G03F7/70483 ,  G06T7/521

Abstract: Improved method and apparatus for machine vision. One embodiment provides automated imaging and analysis, optionally including Scheimpflug's condition on the pattern projector, telecentric imaging and projecting, an IR filter, a mask to constrain observed illumination, and/or a sine-wave projection pattern for more accurate results. Another embodiment provides circuitry for a machine-vision system. Another embodiment provides a machine-vision system, optionally including accommodation of random orientation of parts in trays, irregular location of features being inspected, crossed pattern projectors and detectors for shadow reduction, detection of substrate warpage as well as ball-top coplanarity, two discrete shutters (or flash brightnesses) interleaved (long shutter for dark features, short shutter for bright features). Another embodiment provides parts inspection, optionally including a tray elevator that lifts trays to an inspection surface, moves trays in short tray dimension, provides first tray inspection at a major surface of the elevator, and/or provides a tray flipper.

Abstract translation: 改进机器视觉的方法和装置。 一个实施例提供自动成像和分析，可选地包括在图案投影仪上的Scheimpflug的条件，远心成像和投影，IR滤光器，用于约束观察到的照明的掩模和/或正弦波投影图案以获得更准确的结果。 另一个实施例提供了用于机器视觉系统的电路。 另一个实施例提供了一种机器视觉系统，可选地包括托盘中零件的随机取向的容纳，被检查的特征的不规则位置，用于阴影减少的交叉图案投影仪和检测器，基板翘曲的检测以及球顶共面性，两个离散的 快门（或闪光亮度）交错（长遮光功能的快门，亮度快的快门）。 另一个实施例提供部件检查，可选地包括将托盘提升到检查表面的托盘升降机，以短托盘尺寸移动托盘，在电梯的主表面处提供第一托盘检查和/或提供托盘托板。

公开(公告)号：US20090078620A1

公开(公告)日：2009-03-26

申请号：US12099774

申请日：2008-04-08

Applicant: Arye Malek ,  Joshua J. Hackney ,  Franz W. Ulrich

Inventor： Arye Malek ,  Joshua J. Hackney ,  Franz W. Ulrich

IPC: B07C5/02

CPC classification number: B07C5/3422 ,  B07C5/3404 ,  G01N21/8901 ,  G01N21/9501 ,  G01N21/95684 ,  G01N2021/845 ,  G01N2201/0635 ,  G02B13/22 ,  Y10S209/922

Abstract: Manufacturing lines include inspection systems for monitoring the quality of parts produced. Manufacturing lines for making semiconductor devices generally inspect each fabricated part. The information obtained is used to fix manufacturing problems in the semiconductor fab plant. A machine-vision system for inspecting devices includes a flipper mechanism. After being inspected at a first station, a tray-transfer device moves the tray from the first inspection station to a flipper mechanism. The flipper mechanism includes two jaws, a mover, and a rotator. The flipper mechanism turns the devices over and places the devices in a second tray so that another surface of the device can be inspected. A second tray-transfer device moves the second tray from the flipper to a second inspection station. The mover of the flipper mechanism removes the tray from the first inspection surface and places a tray at the second inspection surface.

Abstract translation: 生产线包括用于监测生产零件质量的检测系统。 用于制造半导体器件的制造线通常检查每个制造的部件。 获得的信息用于解决半导体晶圆厂的制造问题。 用于检查装置的机器视觉系统包括翻转机构。 在第一站检查后，托盘传送装置将托盘从第一检查站移动到翻动机构。 导板机构包括两个钳口，一个动子和一个旋转器。 导板机构将装置转过来并将装置放置在第二托盘中，使得可以检查装置的另一个表面。 第二托盘传送装置将第二托盘从托板移动到第二检查台。 导板机构的移动器从第一检查表面移除托盘，并将托盘放置在第二检查表面。

公开(公告)号：US07397550B2

公开(公告)日：2008-07-08

申请号：US10881518

申请日：2004-06-29

Applicant: Joshua J. Hackney ,  Arye Malek ,  Franz W. Ulrich ,  John Estridge

Inventor： Joshua J. Hackney ,  Arye Malek ,  Franz W. Ulrich ,  John Estridge

IPC: G01N21/00

CPC classification number: H01L21/00 ,  G01B11/2513 ,  G01B11/2518 ,  G01N21/95607 ,  G03F7/70483 ,  G06T7/521

Abstract: Manufacturing lines include inspection systems for monitoring the quality of parts produced. Manufacturing lines for making semiconductor devices generally inspect each fabricated part. The information obtained is used to fix manufacturing problems in the semiconductor fab plant. A machine-vision system for inspecting devices includes a light source for propagating light to the device and an image detector that receives light from the device. Also included is a light sensor assembly for receiving a portion of the light from the light source. The light sensor assembly produces an output signal responsive to the intensity of the light received at the light sensor assembly. A controller controls the amount of light received by the image detector to a desired intensity range in response to the output from the light sensor. The image detector may include an array of imaging pixels. The imaging system may also include a memory device which stores correction values for at least one of the pixels in the array of imaging pixels. To minimize or control thermal drift of signals output from an array of imaging pixels, the machine-vision system may also include a cooling element attached to the imaging device. The light source for propagating light to the device may be strobed. The image detector that receives light from the device remains in a fixed position with respect to the strobed light source. A translation element moves the strobed light source and image detector with respect to the device. The strobed light may be alternated between a first and second level.

Abstract translation: 生产线包括用于监测生产零件质量的检测系统。 用于制造半导体器件的制造线通常检查每个制造的部件。 获得的信息用于解决半导体晶圆厂的制造问题。 用于检查装置的机器视觉系统包括用于将光传播到装置的光源和从装置接收光的图像检测器。 还包括用于接收来自光源的一部分光的光传感器组件。 光传感器组件响应于在光传感器组件处接收的光的强度而产生输出信号。 响应于来自光传感器的输出，控制器将图像检测器接收的光量控制在期望的强度范围。 图像检测器可以包括成像像素的阵列。 成像系统还可以包括存储器件，其存储成像像素阵列中的至少一个像素的校正值。 为了最小化或控制从成像像素阵列输出的信号的热漂移，机器视觉系统还可以包括附接到成像装置的冷却元件。 可以选通用于将光传播到设备的光源。 从设备接收光的图像检测器相对于选通的光源保持在固定位置。 平移元件相对于设备移动选通的光源和图像检测器。 频闪灯可以在第一和第二电平之间交替。

公开(公告)号：US08056700B2

公开(公告)日：2011-11-15

申请号：US12099774

申请日：2008-04-08

Applicant: Arye Malek ,  Joshua J. Hackney ,  Franz W. Ulrich

Inventor： Arye Malek ,  Joshua J. Hackney ,  Franz W. Ulrich

IPC: B07C5/02

CPC classification number: B07C5/3422 ,  B07C5/3404 ,  G01N21/8901 ,  G01N21/9501 ,  G01N21/95684 ,  G01N2021/845 ,  G01N2201/0635 ,  G02B13/22 ,  Y10S209/922

Abstract: Manufacturing lines include inspection systems for monitoring the quality of parts produced. Manufacturing lines for making semiconductor devices generally inspect each fabricated part. The information obtained is used to fix manufacturing problems in the semiconductor fab plant. A machine-vision system for inspecting devices includes a flipper mechanism. After being inspected at a first station, a tray-transfer device moves the tray from the first inspection station to a flipper mechanism. The flipper mechanism includes two jaws, a mover, and a rotator. The flipper mechanism turns the devices over and places the devices in a second tray so that another surface of the device can be inspected. A second tray-transfer device moves the second tray from the flipper to a second inspection station. The mover of the flipper mechanism removes the tray from the first inspection surface and places a tray at the second inspection surface.

Abstract translation: 生产线包括用于监测生产零件质量的检测系统。 用于制造半导体器件的制造线通常检查每个制造的部件。 获得的信息用于解决半导体晶圆厂的制造问题。 用于检查装置的机器视觉系统包括翻转机构。 在第一站检查后，托盘传送装置将托盘从第一检查站移动到翻动机构。 导板机构包括两个钳口，一个动子和一个旋转器。 导板机构将装置转过来并将装置放置在第二托盘中，使得可以检查装置的另一个表面。 第二托盘传送装置将第二托盘从托板移动到第二检查台。 导板机构的移动器从第一检查表面移除托盘，并将托盘放置在第二检查表面。

公开(公告)号：US20090073427A1

公开(公告)日：2009-03-19

申请号：US12169610

申请日：2008-07-08

Applicant: Joshua J. Hackney ,  Arye Malek ,  Franz W. Ulrich ,  John B. Estridge

Inventor： Joshua J. Hackney ,  Arye Malek ,  Franz W. Ulrich ,  John B. Estridge

IPC: G01N21/88

CPC classification number: H01L21/00 ,  G01B11/2513 ,  G01B11/2518 ,  G01N21/95607 ,  G03F7/70483 ,  G06T7/521

Abstract: Improved method and apparatus for machine vision. One embodiment provides automated imaging and analysis, optionally including Scheimpflug's condition on the pattern projector, telecentric imaging and projecting, an IR filter, a mask to constrain observed illumination, and/or a sine-wave projection pattern for more accurate results. Another embodiment provides circuitry for a machine-vision system. Another embodiment provides a machine-vision system, optionally including accommodation of random orientation of parts in trays, irregular location of features being inspected, crossed pattern projectors and detectors for shadow reduction, detection of substrate warpage as well as ball-top coplanarity, two discrete shutters (or flash brightnesses) interleaved (long shutter for dark features, short shutter for bright features). Another embodiment provides parts inspection, optionally including a tray elevator that lifts trays to an inspection surface, moves trays in short tray dimension, provides first tray inspection at a major surface of the elevator, and/or provides a tray flipper.

Abstract translation: 改进机器视觉的方法和装置。 一个实施例提供自动成像和分析，可选地包括在图案投影仪上的Scheimpflug的条件，远心成像和投影，IR滤光器，用于约束观察到的照明的掩模和/或正弦波投影图案以获得更准确的结果。 另一个实施例提供了用于机器视觉系统的电路。 另一个实施例提供了一种机器视觉系统，可选地包括托盘中零件的随机取向的容纳，被检查的特征的不规则位置，用于阴影减少的交叉图案投影仪和检测器，基底翘曲的检测以及球顶共面性，两个离散的 快门（或闪光亮度）交错（长遮光功能的快门，亮度快的快门）。 另一个实施例提供部件检查，可选地包括将托盘提升到检查表面的托盘升降机，以短托盘尺寸移动托盘，在电梯的主表面处提供第一托盘检查和/或提供托盘托板。

公开(公告)号：US06501554B1

公开(公告)日：2002-12-31

申请号：US09597865

申请日：2000-06-20

Applicant: Joshua J. Hackney ,  John Ma ,  Arye Malek ,  Matthew M. McPherson ,  Xin Shi

Inventor： Joshua J. Hackney ,  John Ma ,  Arye Malek ,  Matthew M. McPherson ,  Xin Shi

IPC: G01B1124

CPC classification number: G01B11/00

Abstract: In the context of a machine-vision system for inspecting a part, a method and apparatus to provide high-speed 3D (three-dimensional) inspection of manufactured parts. Parts are inspected to obtain dimensional and geometric information regarding such characteristics as sag or bow of subportions of the item, the angle of pitch, yaw, and or roll of one portion relative to another, heights of various formations on the part. In some embodiments, an array of height pixels is calculated, and regions of interest (ROIs) are located within the array, and the ROIs are used to determine characteristic geometries of the parts being measured. One measurement system includes a light source, an imager, and a computer. Light source provides projected patterned light on the object useful to obtain 3D geometric information about the object. The imager has a reception optical axis that intersects the object when the machine-vision system is in operation. In some embodiments, imager includes at least three rows of imaging pixels positioned to receive light shone onto the object by the light source. The computer system calculates three-dimensional object-geometry data of the object using signals from the imager, and computes at least a first characteristic plane and a second characteristic plane of the object from the calculated object-geometry data. The method provides a process for obtaining and manipulating image data (e.g., make calculations on ROI data within one or more arrays of height pixels) to determine characteristics of the parts.

Abstract translation: 在用于检查零件的机器视觉系统的上下文中，提供对制造零件的高速3D（三维）检查的方法和装置。 检查部件以获得关于物品的下垂或弓部分，俯仰角，偏转角和/或相对于另一部分的滚动的特征的尺寸和几何信息，部件上各种形式的高度。 在一些实施例中，计算高度像素的阵列，并且感兴趣区域（ROI）位于阵列内，并且使用ROI来确定被测量的部件的特征几何形状。 一个测量系统包括光源，成像器和计算机。 光源在物体上提供投影图案光，有助于获得关于物体的3D几何信息。 当机器视觉系统运行时，成像器具有与物体相交的接收光轴。 在一些实施例中，成像器包括至少三行成像像素，其被定位成通过光源将光照射到物体上。 计算机系统使用来自成像器的信号来计算物体的三维物体几何数据，并根据计算出的物体几何数据计算物体的至少第一特征平面和第二特征平面。 该方法提供用于获得和操纵图像数据的过程（例如，对一个或多个高度像素阵列内的ROI数据进行计算）以确定部件的特性。

公开(公告)号：US08408379B2

公开(公告)日：2013-04-02

申请号：US13645500

申请日：2012-10-04

Applicant: Arye Malek ,  Joshua J. Hackney ,  Franz W. Ulrich

Inventor： Arye Malek ,  Joshua J. Hackney ,  Franz W. Ulrich

IPC: B07C5/02

CPC classification number: B07C5/3422 ,  B07C5/3404 ,  G01N21/8901 ,  G01N21/9501 ,  G01N21/95684 ,  G01N2021/845 ,  G01N2201/0635 ,  G02B13/22 ,  Y10S209/922

Abstract: Manufacturing lines include inspection systems for monitoring the quality of parts produced. Manufacturing lines for making semiconductor devices generally inspect each fabricated part. The information obtained is used to fix manufacturing problems in the semiconductor fab plant. A machine-vision system for inspecting devices includes a flipper mechanism. After being inspected at a first station, a tray-transfer device moves the tray from the first inspection station to a flipper mechanism. The flipper mechanism includes two jaws, a mover, and a rotator. The flipper mechanism turns the devices over and places the devices in a second tray so that another surface of the device can be inspected. A second tray-transfer device moves the second tray from the flipper to a second inspection station. The mover of the flipper mechanism removes the tray from the first inspection surface and places a tray at the second inspection surface.

Abstract translation: 生产线包括用于监测生产零件质量的检测系统。 用于制造半导体器件的制造线通常检查每个制造的部件。 获得的信息用于解决半导体晶圆厂的制造问题。 用于检查装置的机器视觉系统包括翻转机构。 在第一站检查后，托盘传送装置将托盘从第一检查站移动到翻动机构。 导板机构包括两个钳口，一个动子和一个旋转器。 导板机构将装置转过来并将装置放置在第二托盘中，使得可以检查装置的另一个表面。 第二托盘传送装置将第二托盘从托板移动到第二检查台。 导板机构的移动器从第一检查表面移除托盘，并将托盘放置在第二检查表面。