METHOD FOR IMPROVING SURFACE PLASMON RESONANCE BY USING CONDUCTING METAL OXIDE AS ADHESIVE LAYER
    8.
    发明申请
    METHOD FOR IMPROVING SURFACE PLASMON RESONANCE BY USING CONDUCTING METAL OXIDE AS ADHESIVE LAYER 有权
    通过使用导电金属氧化物作为粘合层改善表面等离子体共振的方法

    公开(公告)号:US20090161110A1

    公开(公告)日:2009-06-25

    申请号:US12048238

    申请日:2008-03-14

    IPC分类号: G01N21/55

    CPC分类号: G01N21/553

    摘要: Surface plasmon resonance (SPR) sensing technique which provides high specificity and accuracy has been an important method for molecular sensing technology. In the past, in order to affix 45 nm gold film onto glass or silicon substrate, several nanometers of chromium (Cr) or titanium (Ti) has been used as adhesive layer for the attachment of Au film. However, the existence of Cr or Ti thin film deteriorates the performance of SPR sensor due to their characteristic optical absorption. Our experimental results have confirmed the uses of conducting metal oxide, specifically, ITO and Zinc Oxide (ZnO) can be used to replace Cr or Ti for better performance in terms of SPR resonant properties (resonant angle and HMBW) and sensitivity enhancement for 3 to 15 times than traditional ones. It would contribute significantly to the SPR applications in both biosensors and gas sensors.

    摘要翻译: 提供高特异性和准确度的表面等离子体共振(SPR)感测技术已成为分子感测技术的重要方法。 在过去,为了将45nm金膜贴在玻璃或硅衬底上,已经使用几纳米的铬(Cr)或钛(Ti)作为用于附着Au膜的粘合剂层。 然而,Cr或Ti薄膜的存在由于其特征性光吸收而使SPR传感器的性能劣化。 我们的实验结果证实了导电金属氧化物的用途,特别是ITO和氧化锌(ZnO)可以用于替代Cr或Ti,以获得更好的SPR谐振特性(谐振角和HMBW)性能,灵敏度提高为3〜 比传统的15倍。 这将有助于生物传感器和气体传感器中的SPR应用。