公开(公告)号：US20100245812A1

公开(公告)日：2010-09-30

申请号：US12376407

申请日：2007-08-07

申请人： Misako Saito ,  Teruyuki Hayashi ,  Kaoru Fujiwara

发明人： Misako Saito ,  Teruyuki Hayashi ,  Kaoru Fujiwara

IPC分类号： G01N21/01

CPC分类号： G01N23/2251 ,  G01N21/956 ,  G01N2223/646 ,  G01R31/2831 ,  G01R31/305 ,  G01R31/307 ,  G01R31/308 ,  G01R31/311 ,  H01L22/12 ,  H01L22/20 ,  H01L2924/0002 ,  H01L2924/00

摘要： Provided is a method and apparatus for inspecting a defect of a shape formed on a substrate. Primary inspection is sequentially performed on specific patterns in a plurality of divided regions of the substrate by using an optical method, and one or more regions on which secondary inspection is to be performed are selected from the regions. One or more defects are detected by performing the secondary inspection using an electron beam on the selected regions.

摘要翻译： 提供了一种用于检查形成在基板上的形状的缺陷的方法和装置。 通过使用光学方法在基板的多个分割区域中的特定图案上依次执行初次检查，并且从该区域中选择要进行二次检查的一个或多个区域。 通过使用所选择的区域上的电子束执行二次检查来检测一个或多个缺陷。

公开(公告)号：US06432374B1

公开(公告)日：2002-08-13

申请号：US09994684

申请日：2001-11-28

申请人： Tsuneyoshi Takase ,  Nobuyashi Hayashi ,  Yasushi Shioya ,  Kaoru Fujiwara ,  Mitsuhiro Ohashi

发明人： Tsuneyoshi Takase ,  Nobuyashi Hayashi ,  Yasushi Shioya ,  Kaoru Fujiwara ,  Mitsuhiro Ohashi

IPC分类号： C01B707

CPC分类号： C10G25/003 ,  B01J20/06

摘要： The invention has an object to provide a solid chloride absorbent which can efficiently absorb inorganic chlorides such as hydrogen chloride flowing out from a process in which a heavy naphtha and the like are treated and inorganic chloride derived from crude oil, and which is difficult to powder and soften after absorbing the chlorides. The solid chloride absorbent according to the invention comprises zinc oxide, a porous refractory inorganic matter and an inert binder, has a long life, and hardly releases the absorbed chlorides.

摘要翻译： 本发明的目的是提供一种固体氯化物吸收剂，其能够有效地吸收从重质石脑油等处理的过程中流出的无机氯化物，以及来自原油的无机氯化物，难以粉化 并在吸收氯化物后软化。 根据本发明的固体氯化物吸收剂包含氧化锌，多孔耐火无机物和惰性粘合剂，使用寿命长，几乎不释放吸收的氯化物。

公开(公告)号：US08040504B2

公开(公告)日：2011-10-18

申请号：US12376407

申请日：2007-08-07

申请人： Misako Saito ,  Teruyuki Hayashi ,  Kaoru Fujiwara

发明人： Misako Saito ,  Teruyuki Hayashi ,  Kaoru Fujiwara

IPC分类号： G01N21/00

CPC分类号： G01N23/2251 ,  G01N21/956 ,  G01N2223/646 ,  G01R31/2831 ,  G01R31/305 ,  G01R31/307 ,  G01R31/308 ,  G01R31/311 ,  H01L22/12 ,  H01L22/20 ,  H01L2924/0002 ,  H01L2924/00

摘要： Provided is a method and apparatus for inspecting a defect of a shape formed on a substrate. Primary inspection is sequentially performed on specific patterns in a plurality of divided regions of the substrate by using an optical method, and one or more regions on which secondary inspection is to be performed are selected from the regions. One or more defects are detected by performing the secondary inspection using an electron beam on the selected regions.

摘要翻译： 提供了一种用于检查形成在基板上的形状的缺陷的方法和装置。 通过使用光学方法在基板的多个分割区域中的特定图案上依次执行初次检查，并且从该区域中选择要进行二次检查的一个或多个区域。 通过使用所选择的区域上的电子束执行二次检查来检测一个或多个缺陷。