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1.发明授权公开(公告)号：US07449157B2
公开(公告)日：2008-11-11
申请号：US11270550
申请日：2005-11-10
申请人： Shuichi Kanno , Shin Tamata , Kazuyoshi Irie , Kenji Yamamoto , Masayuki Taniguchi , Osamu Ito , Hironobu Kobayashi
发明人： Shuichi Kanno , Shin Tamata , Kazuyoshi Irie , Kenji Yamamoto , Masayuki Taniguchi , Osamu Ito , Hironobu Kobayashi
IPC分类号： F01N3/08
CPC分类号： B01D53/885 , Y02C20/30
摘要： A catalytic exhaust gas decomposition spirals an exhaust gas containing therein a substance to be decomposed and a reactant gas, rectifies the spiral flow, and lets the substance to be decomposed react with the reactant gas after the spiral flow has been rectified. For rectifying the spiral flow of the exhaust gas and the reactant gas, a plate-like baffle wall has therein a through hole at a portion near its center. The spiral flow is allowed to pass through the through hole so as to be centralized temporarily. The spiral flow then passes through an enlarged section of a flow path downstream of the through hole before being introduced into the catalyst bed. The method helps minimize variations in gas velocity of the exhaust gas flowing into the catalyst bed, thereby allowing a desired decomposition rate to be obtained substantially consistently.
摘要翻译： 催化废气分解使含有分解物质的废气和反应气体螺旋化，使螺旋流整流，使物质在分解后与反应气体反应，螺旋流已经整流。 为了整流废气和反应物气体的螺旋流，板状挡板在靠近其中心的部分处具有通孔。 允许螺旋流通过通孔，以便暂时集中。 然后，在引入催化剂床之前，螺旋流通过通孔下游的流路的扩大部分。 该方法有助于使流入催化剂床的废气的气体速度的变化最小化，从而基本上一致地获得所需的分解速率。
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公开(公告)号：US07261868B2
公开(公告)日：2007-08-28
申请号：US10987156
申请日：2004-11-15
申请人： Shuichi Kanno , Akio Honji , Hisao Yamashita , Shigeru Azuhata , Shin Tamata , Kazuyoshi Irie
发明人： Shuichi Kanno , Akio Honji , Hisao Yamashita , Shigeru Azuhata , Shin Tamata , Kazuyoshi Irie
IPC分类号： B01D53/48
摘要： Fluorine compounds such as C2F6, CF4, CHF3, SF6 and NF3, are made to contact with a fluorine compound decomposition catalyst and a catalyst for the decomposition of at least one of CO, SO2F2 and N2O in the presence of water or in the presence of water and oxygen. The catalyst for the decomposition of at least one of CO, SO2F2 and N2O preferably contains at least one selected from Pd, Pt, Cu, Mn, Fe, Co, Rh, Ir and Au in the form of a metal or an oxide. According to the invention, the fluorine compound can be converted to HF, which can be absorbed by water or an alkaline aqueous solution. Furthermore, a substance such as CO, SO2F2 and N2O which is formed by decomposition of the fluorine compound can also be decomposed.
摘要翻译： 氟化合物如C 2 F 6，CF 4，CH 3，SF 6， SUB＆gt;和NF 3 3与氟化合物分解催化剂和用于分解CO，SO 2 F 2的至少一种的催化剂接触 和/或N 2 O在水的存在下或在水和氧的存在下进行。 用于分解CO，SO 2 H 2 N 2和N 2 O 2中的至少一种的催化剂优选含有选自Pd， Pt，Cu，Mn，Fe，Co，Rh，Ir和Au。 根据本发明，可以将氟化合物转化为HF，其可被水或碱性水溶液吸收。 此外，通过氟化合物的分解形成的物质如CO，SO 2 F 2 N和N 2 O O也可以被分解 。
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公开(公告)号：US20060239869A1
公开(公告)日：2006-10-26
申请号：US11473072
申请日：2006-06-23
申请人： Kazuyoshi Irie , Toshihiro Mori , Hisao Yokoyama , Takayuki Tomiyama , Toshihide Takano , Shin Tamata , Shuichi Kanno
发明人： Kazuyoshi Irie , Toshihiro Mori , Hisao Yokoyama , Takayuki Tomiyama , Toshihide Takano , Shin Tamata , Shuichi Kanno
CPC分类号： B01J4/002 , B01D53/8659 , B01D53/8662 , B01J8/0221 , B01J8/025 , B01J8/0278 , B01J8/0285 , B01J19/26 , B01J2208/00061 , B01J2208/00203 , B01J2208/00362 , B01J2208/00407 , B01J2208/00415 , B01J2208/00495 , B01J2208/0053 , B01J2208/00814 , B01J2208/0084 , B01J2208/00884 , B01J2219/00006 , Y02C20/30
摘要： An exhaust gas containing a perfluoride component (PFC) and SiIF4 is conducted into a silicon remover and brought into contact with water. A reaction water supplied from a water supplying piping and air supplied from an air supplying piping are mixed with the exhaust gas exhausted from the silicon remover. The exhaust gas containing water, air, and CF4 is heated at 700° C. by a heater. The exhaust gas containing PFC is conducted to a catalyst layer filled with an alumina group catalyst. The PFC is decomposed to HF and CO2 at a high temperature exhausted from the catalyst layer is cooled in a cooling apparatus. Subsequently, the exhaust gas is conducted to an acidic gas removing apparatus to remove HF. In this way, the silicon component is removed from the exhaust gas before introducing the exhaust gas into the catalyst layer. Therefore, the surface of the catalyst can be utilized effectively, and the decomposition reaction of the perfluoride compound can be improved.
摘要翻译： 将含有全氟化物成分（PFC）和SiIF 4 N的废气导入硅去除剂中并与水接触。 从供水管道供应的反应水和从供气管道供应的空气与从硅去除器排出的废气混合。 含有水，空气和CF 4 N的废气通过加热器在700℃下加热。 含有PFC的废气被传导到填充有氧化铝基催化剂的催化剂层。 在从催化剂层排出的高温下，将PFC分解成HF，在冷却装置中冷却CO 2。 随后，将废气导入酸性气体去除装置中去除HF。 以这种方式，在将废气引入催化剂层之前，从排气中除去硅组分。 因此，可有效利用催化剂的表面，可以提高全氟化合物的分解反应。
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公开(公告)号：US20060120938A1
公开(公告)日：2006-06-08
申请号：US11334345
申请日：2006-01-19
申请人： Shuichi Kanno , Toshiaki Arato , Shinzo Ikeda , Ken Yasuda , Hisao Yamashita , Shigeru Azuhata , Shin Tamata , Kazuyoshi Irie
发明人： Shuichi Kanno , Toshiaki Arato , Shinzo Ikeda , Ken Yasuda , Hisao Yamashita , Shigeru Azuhata , Shin Tamata , Kazuyoshi Irie
IPC分类号： B01D53/70
CPC分类号： A62D3/20 , A62D2101/22 , A62D2101/49 , B01D53/8659 , B01D53/8662 , B01D53/8671 , B01D2255/2092 , B01D2257/204 , B01D2258/0216 , C01B7/191 , Y02C20/30
摘要： A gas stream containing at least one fluorine compound selected from the group consisting of compounds of carbon and fluorine, compounds of carbon, hydrogen and fluorine, compounds of sulfur and fluorine, compounds of nitrogen and fluorine and compounds of carbon, hydrogen, oxygen and fluorine is contacted with a catalyst comprising at least one of alumina, titania, zirconia and silica, preferably a catalyst comprising alumina and at least one of nickel oxide, zinc oxide and titania in the presence of steam, thereby hydrolyzing the fluorine compound at a relatively low temperature, e.g. 200°-800° C., to convert the fluorine of the fluorine compound to hydrogen fluoride.
摘要翻译： 含有选自碳和氟的化合物，碳，氢和氟的化合物，硫和氟的化合物，氮和氟的化合物，碳，氢，氧和氟的化合物的至少一种氟化合物的气流 与包含氧化铝，二氧化钛，氧化锆和二氧化硅中的至少一种的催化剂接触，优选在蒸汽存在下包含氧化铝和氧化镍，氧化锌和二氧化钛中的至少一种的催化剂，从而以相对低的水解水解氟化合物 温度，例如 200°-800℃，将氟化合物的氟转化成氟化氢。
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公开(公告)号：US07347980B2
公开(公告)日：2008-03-25
申请号：US10679297
申请日：2003-10-07
申请人： Shuichi Kanno , Toshiaki Arato , Shinzo Ikeda , Ken Yasuda , Hisao Yamashita , Shigeru Azuhata , Shin Tamata , Kazuyoshi Irie
发明人： Shuichi Kanno , Toshiaki Arato , Shinzo Ikeda , Ken Yasuda , Hisao Yamashita , Shigeru Azuhata , Shin Tamata , Kazuyoshi Irie
CPC分类号： A62D3/20 , A62D2101/22 , A62D2101/49 , B01D53/8659 , B01D53/8662 , B01D53/8671 , B01D2255/2092 , B01D2257/204 , B01D2258/0216 , C01B7/191 , Y02C20/30
摘要： A gas stream containing at least one fluorine compound selected from the group consisting of compounds of carbon and fluorine, compounds of carbon, hydrogen and fluorine, compounds of sulfur and fluorine, compounds of nitrogen and fluorine and compounds of carbon, hydrogen, oxygen and fluorine is contacted with a catalyst comprising at least one of alumina, titania, zirconia and silica, preferably a catalyst comprising alumina and at least one of nickel oxide, zinc oxide and titania in the presence of steam, thereby hydrolyzing the fluorine compound at a relatively low temperature, e.g. 200°–800° C., to convert the fluorine of the fluorine compound to hydrogen fluoride.
摘要翻译： 含有选自碳和氟的化合物，碳，氢和氟的化合物，硫和氟的化合物，氮和氟的化合物，碳，氢，氧和氟的化合物的至少一种氟化合物的气流 与包含氧化铝，二氧化钛，氧化锆和二氧化硅中的至少一种的催化剂接触，优选在蒸汽存在下包含氧化铝和氧化镍，氧化锌和二氧化钛中的至少一种的催化剂，从而以相对低的水解水解氟化合物 温度，例如 200°-800℃，将氟化合物的氟转化成氟化氢。
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公开(公告)号：US07141221B2
公开(公告)日：2006-11-28
申请号：US09855673
申请日：2001-05-16
申请人： Kazuyoshi Irie , Toshihiro Mori , Hisao Yokoyama , Takayuki Tomiyama , Toshihide Takano , Shin Tamata , Shuichi Kanno
发明人： Kazuyoshi Irie , Toshihiro Mori , Hisao Yokoyama , Takayuki Tomiyama , Toshihide Takano , Shin Tamata , Shuichi Kanno
IPC分类号： B01D53/34
CPC分类号： B01J4/002 , B01D53/8659 , B01D53/8662 , B01J8/0221 , B01J8/025 , B01J8/0278 , B01J8/0285 , B01J19/26 , B01J2208/00061 , B01J2208/00203 , B01J2208/00362 , B01J2208/00407 , B01J2208/00415 , B01J2208/00495 , B01J2208/0053 , B01J2208/00814 , B01J2208/0084 , B01J2208/00884 , B01J2219/00006 , Y02C20/30
摘要： An exhaust gas containing a perfluoride component (PFC) and SiF4 is conducted into a silicon remover and brought into contact with water. A reaction water supplied from a water supplying piping and air supplied from an air supplying piping are mixed with the exhaust gas exhausted from the silicon remover. The exhaust gas containing water, air, and CF4 is heated at 700° C. by a heater. The exhaust gas containing PFC is conducted to a catalyst layer filled with an alumina group catalyst. The PFC is decomposed to HF and CO2 at a high temperature exhausted from the catalyst layer is cooled in a cooling apparatus. Subsequently, the exhaust gas is conducted to an acidic gas removing apparatus to remove HF. In this way, the silicon component is removed from the exhaust gas before introducing the exhaust gas into the catalyst layer. Therefore, the surface of the catalyst can be utilized effectively, and the decomposition reaction of the perfluoride compound can be improved.
摘要翻译： 将含有全氟化物组分（PFC）和SiF 4 N的废气导入硅去除剂中并与水接触。 从供水管道供应的反应水和从供气管道供应的空气与从硅去除器排出的废气混合。 含有水，空气和CF 4 N的废气通过加热器在700℃下加热。 含有PFC的废气被传导到填充有氧化铝基催化剂的催化剂层。 在从催化剂层排出的高温下，将PFC分解成HF，在冷却装置中冷却CO 2。 随后，将废气导入酸性气体去除装置中去除HF。 以这种方式，在将废气引入催化剂层之前，从排气中除去硅组分。 因此，可有效利用催化剂的表面，可以提高全氟化合物的分解反应。
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公开(公告)号：US07641867B2
公开(公告)日：2010-01-05
申请号：US11473072
申请日：2006-06-23
申请人： Kazuyoshi Irie , Toshihiro Mori , Hisao Yokoyama , Takayuki Tomiyama , Toshihide Takano , Shin Tamata , Shuichi Kanno
发明人： Kazuyoshi Irie , Toshihiro Mori , Hisao Yokoyama , Takayuki Tomiyama , Toshihide Takano , Shin Tamata , Shuichi Kanno
CPC分类号： B01J4/002 , B01D53/8659 , B01D53/8662 , B01J8/0221 , B01J8/025 , B01J8/0278 , B01J8/0285 , B01J19/26 , B01J2208/00061 , B01J2208/00203 , B01J2208/00362 , B01J2208/00407 , B01J2208/00415 , B01J2208/00495 , B01J2208/0053 , B01J2208/00814 , B01J2208/0084 , B01J2208/00884 , B01J2219/00006 , Y02C20/30
摘要： An exhaust gas containing a perfluoride component (PFC) and SiIF4 is conducted into a silicon remover and brought into contact with water. A reaction water supplied from a water supplying piping and air supplied from an air supplying piping are mixed with the exhaust gas exhausted from the silicon remover. The exhaust gas containing water, air, and CF4 is heated at 700° C. by a heater. The exhaust gas containing PFC is conducted to a catalyst layer filled with an alumina group catalyst. The PFC is decomposed to HF and CO2 at a high temperature exhausted from the catalyst layer is cooled in a cooling apparatus. Subsequently, the exhaust gas is conducted to an acidic gas removing apparatus to remove HF. In this way, the silicon component is removed from the exhaust gas before introducing the exhaust gas into the catalyst layer. Therefore, the surface of the catalyst can be utilized effectively, and the decomposition reaction of the perfluoride compound can be improved.
摘要翻译： 将含有全氟化物成分（PFC）和SiIF 4的废气导入硅去除剂中并与水接触。 从供水管道供应的反应水和从供气管道供应的空气与从硅去除器排出的废气混合。 含有水，空气和CF4的废气通过加热器在700℃加热。 含有PFC的废气被传导到填充有氧化铝基催化剂的催化剂层。 将PFC分解成HF，并在从催化剂层排出的高温下将CO 2在冷却装置中冷却。 随后，将废气导入酸性气体去除装置中去除HF。 以这种方式，在将废气引入催化剂层之前，从排气中除去硅组分。 因此，可有效利用催化剂的表面，可以提高全氟化合物的分解反应。
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8.发明授权Method and apparatus for disposing of fluorine-containing compound by decomposition 失效通过分解处理含氟化合物的方法和装置公开(公告)号：US07294315B1
公开(公告)日：2007-11-13
申请号：US09936426
申请日：1999-06-09
申请人： Shuichi Kanno , Akio Honji , Hisao Yamashita , Shigeru Azuhata , Shin Tamata , Kazuyoshi Irie
发明人： Shuichi Kanno , Akio Honji , Hisao Yamashita , Shigeru Azuhata , Shin Tamata , Kazuyoshi Irie
IPC分类号： B01D53/34
摘要： Fluorine compounds such as C2F6, CF4, CHF3, SF6 and NF3, are made in contact with a fluorine compound decomposition catalyst and a catalyst the decomposition oft least one of CO, SO2F2 and N2O in the presence of water or in the presence of water and oxygen. The catalyst the decomposition oft least one of CO, SO2F2 and N2O preferably contains at least one selected from Pd, Pt, Cu, Mn, Fe, Co, Rh, Ir and Au in the form of a metal or an oxide. According to the invention, the fluorine compound can be converted to HF, which is liable to be absorbed by water or an alkaline aqueous solution, and a substance, such as CO, SO2F2 and N2O, formed by decomposition of the fluorine compound can also be decomposed.
摘要翻译： 氟化合物如C 2 F 6，CF 4，CH 3，SF 6， SUB＆gt;和NF 3 3与氟化合物分解催化剂和催化剂接触，分解为CO，SO 2/2 / 在水的存在下或在水和氧的存在下，将其与N 2 O 2 O反应。 CO，SO 2 H 2 N 2和N 2 O 2中的至少一种的分解催化剂优选含有选自Pd，Pt， Cu，Mn，Fe，Co，Rh，Ir和Au。 根据本发明，氟化合物可以转化成易于被水或碱性水溶液吸收的HF，以及CO，SO 2 F 2等物质 由氟化合物分解形成的N和N 2 O也可以分解。
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公开(公告)号：US06942841B2
公开(公告)日：2005-09-13
申请号：US10215045
申请日：2002-08-09
申请人： Shuichi Kanno , Toshiaki Arato , Shinzo Ikeda , Ken Yasuda , Hisao Yamashita , Shigeru Azuhata , Shin Tamata , Kazuyoshi Irie
发明人： Shuichi Kanno , Toshiaki Arato , Shinzo Ikeda , Ken Yasuda , Hisao Yamashita , Shigeru Azuhata , Shin Tamata , Kazuyoshi Irie
IPC分类号： A62D3/00 , A62D3/20 , A62D101/22 , A62D101/49 , B01D53/86 , B01D53/48 , B01D53/68
CPC分类号： A62D3/20 , A62D2101/22 , A62D2101/49 , B01D53/8659 , B01D53/8662 , B01D53/8671 , B01D2255/2092 , B01D2257/204 , B01D2258/0216 , C01B7/191 , Y02C20/30
摘要： A gas stream containing at least one fluorine compound selected from the group consisting of compounds of carbon and fluorine, compounds of carbon, hydrogen and fluorine, compounds of sulfur and fluorine, compounds of nitrogen and fluorine and compounds of carbon, hydrogen, oxygen and fluorine is contacted with a catalyst comprising at least one of alumina, titania, zirconia and silica, preferably a catalyst comprising alumina and at least one of nickel oxide, zinc oxide and titania in the presence of steam, thereby hydrolyzing the fluorine compound at a relatively low temperature, e.g. 200°-800° C., to convert the fluorine of the fluorine compound to hydrogen fluoride.
摘要翻译： 含有选自碳和氟的化合物，碳，氢和氟的化合物，硫和氟的化合物，氮和氟的化合物，碳，氢，氧和氟的化合物的至少一种氟化合物的气流 与包含氧化铝，二氧化钛，氧化锆和二氧化硅中的至少一种的催化剂接触，优选在蒸汽存在下包含氧化铝和氧化镍，氧化锌和二氧化钛中的至少一种的催化剂，从而以相对低的水解水解氟化合物 温度，例如 200°-800℃，将氟化合物的氟转化成氟化氢。
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公开(公告)号：US20050089461A1
公开(公告)日：2005-04-28
申请号：US10987156
申请日：2004-11-15
申请人： Shuichi Kanno , Akio Honji , Hisao Yamashita , Shigeru Azuhata , Shin Tamata , Kazuyoshi Irie
发明人： Shuichi Kanno , Akio Honji , Hisao Yamashita , Shigeru Azuhata , Shin Tamata , Kazuyoshi Irie
IPC分类号： B01J23/40 , B01J23/63 , B01J23/652 , B01J23/66 , B01J23/70 , C01B7/19 , C07C17/38 , C01B7/00
摘要： Fluorine compounds such as C2F6, CF4, CHF3, SF6 and NF3, are made in contact with a fluorine compound decomposition catalyst and a catalyst the decomposition oft least one of CO, SO2F2 and N2O in the presence of water or in the presence of water and oxygen. The catalyst the decomposition oft least one of CO, SO2F2 and N2O preferably contains at least one selected from Pd, Pt, Cu, Mn, Fe, Co, Rh, Ir and Au in the form of a metal or an oxide. According to the invention, the fluorine compound can be converted to HF, which is liable to be absorbed by water or an alkaline aqueous solution, and a substance, such as CO, SO2F2 and N2O, formed by decomposition of the fluorine compound can also be decomposed.
摘要翻译： 氟化合物如C 2 F 6，CF 4，CH 3，SF 6， SUB＆gt;和NF 3 3与氟化合物分解催化剂和催化剂接触，分解为CO，SO 2/2 / 在水的存在下或在水和氧的存在下，将其与N 2 O 2 O反应。 CO，SO 2 H 2 N 2和N 2 O 2中的至少一种的分解催化剂优选含有选自Pd，Pt， Cu，Mn，Fe，Co，Rh，Ir和Au。 根据本发明，氟化合物可以转化成易于被水或碱性水溶液吸收的HF，以及CO，SO 2 F 2等物质 由氟化合物分解形成的N和N 2 O也可以分解。
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