SINGLE ELEMENT THREE TERMINAL PIEZORESISTIVE PRESSURE SENSOR
    1.
    发明申请
    SINGLE ELEMENT THREE TERMINAL PIEZORESISTIVE PRESSURE SENSOR 有权
    单元三端式压力传感器

    公开(公告)号:US20100308791A1

    公开(公告)日:2010-12-09

    申请号:US12794288

    申请日:2010-06-04

    IPC分类号: G01R29/22 H01L21/302

    CPC分类号: G01L9/0055 G01L1/2293

    摘要: Embodiments of the invention provide for three-terminal pressure sensors (“3-TPS”), a method of measuring a pressure with a 3-TPS, and a method of manufacturing a 3-TPS. In some embodiments, the 3-TPS includes a semiconducting layer with cavity and a 3-TPS element having at least one piezoresistive layer overlapping at least a portion of the cavity and oriented at an angle selected to provide a desired sensitivity for the 3-TPS. The method of measuring a pressure with a 3-TPS is performed with a 3-TPS that includes an input terminal, first and second output terminals, and a 3-TPS element, the 3-TPS element overlapping at least a portion of a cavity at a predetermined angle. The method comprises providing an input signal to the input terminal of the 3-TPS, determining a difference between two output signals from the respective output terminals of the 3-TPS, and correlating the determined difference to a pressure.

    摘要翻译: 本发明的实施例提供三端压力传感器(“3-TPS”),使用3-TPS测量压力的方法和制造3-TPS的方法。 在一些实施例中,3-TPS包括具有空腔的半导体层和具有至少一个压阻层的3-TPS元件,该至少一个压阻层与空腔的至少一部分重叠并且以选定的角度定向以为3-TPS提供期望的灵敏度 。 使用3-TPS测量压力的方法是使用包括输入端子,第一和第二输出端子以及3-TPS元件的3-TPS进行的,所述3-TPS元件与空腔的至少一部分重叠 以预定角度。 该方法包括向3-TPS的输入端提供输入信号,确定来自3-TPS的相应输出端的两个输出信号之间的差值,并将所确定的差与压力相关。

    Small-sized self-propelled watercraft
    3.
    发明授权
    Small-sized self-propelled watercraft 失效
    小型自行式船舶

    公开(公告)号:US4971586A

    公开(公告)日:1990-11-20

    申请号:US374646

    申请日:1989-06-30

    申请人: Kevin M. Walsh

    发明人: Kevin M. Walsh

    IPC分类号: B63B35/79 F02B61/00

    CPC分类号: B63B35/7943 F02B61/00

    摘要: A self-propelled portable watercraft, including a deck and hull, an engine, and a waterjet propulsion system, capable of operating while a supply of air is unavailable. The air substitute, consisting of a mixture of oxidizing gas and recycled exhaust gas, is delivered to the engine through a self-actuated control valve. In addition, the waterjet propulsion system is equipped with an intake port at the terminus of a narrow, elongated, hollow downward extension of the hull. The purpose of the extension being to minimize the occurrence of a loss of thrust which can result when the craft is vertically displaced above the surface of the surrounding water.

    摘要翻译: 一种自行式便携式船舶,包括甲板和船体,发动机和水射流推进系统,能够在空气供应不可用的情况下运行。 由氧化气体和再循环废气的混合物组成的空气替代物通过自动控制阀输送到发动机。 此外,水射流推进系统在船体的狭窄,细长,中空向下延伸的终点设有进气口。 延伸的目的是最小化当船舶垂直移动在周围水面上方时可能导致的推力损失的发生。

    Radiation detector based on charge amplification in a gaseous medium
    5.
    发明授权
    Radiation detector based on charge amplification in a gaseous medium 失效
    基于气体介质中电荷放大的辐射检测器

    公开(公告)号:US5614722A

    公开(公告)日:1997-03-25

    申请号:US551472

    申请日:1995-11-01

    IPC分类号: G01T1/185 G01T1/85

    CPC分类号: G01T1/185

    摘要: A radiation detector includes a substrate having a cavity defined therein, an anode surface positioned in the bottom of the cavity and a cathode positioned adjacent the cavity opening. A drift electrode is juxtaposed over the substrate opposite the cavity and defines a region containing a gaseous medium. As ionized charge pairs are established in the gaseous medium due to radiation provided by an external radiation source, electrons drift toward the anode under the influence of a first electric field established between the anode and drift electrode. Thereafter, the electron undergoes avalanche multiplication with the gaseous medium in an avalanche region defined by a second intense electric field established between the anode and cathode. The structure of the present invention provides an electric field gradient geometry which permits optimal design of the avalanche region geometry, and which further minimizes photon feedback from the cathode.

    摘要翻译: 辐射检测器包括具有限定在其中的腔的衬底,位于空腔底部的阳极表面和邻近腔开口定位的阴极。 漂移电极并置在与空腔相对的衬底上,并限定含有气体介质的区域。 由于由外部辐射源提供的辐射而在气体介质中建立电离电荷对,在阳极和漂移电极之间建立的第一电场的影响下,电子向阳极漂移。 此后,电子在由在阳极和阴极之间建立的第二强电场限定的雪崩区域中与气态介质进行雪崩倍增。 本发明的结构提供电场梯度几何形状,其允许雪崩区域几何的最佳设计,并进一步使来自阴极的光子反馈最小化。

    Optical imaging system utilizing a charge amplification device
    8.
    发明授权
    Optical imaging system utilizing a charge amplification device 失效
    利用电荷放大装置的光学成像系统

    公开(公告)号:US5602397A

    公开(公告)日:1997-02-11

    申请号:US551556

    申请日:1995-11-01

    IPC分类号: H01J47/02

    CPC分类号: H01J47/02

    摘要: An optical imaging system includes an array of optical imaging devices each comprising a device for providing charge amplification in a gaseous medium. A preferred embodiment of such a charge amplification device includes a substrate having a cavity defined therein, an anode surface positioned in the bottom of the cavity and a cathode positioned adjacent the cavity opening. A drift electrode is juxtaposed over the substrate opposite the cavity and defines a region containing a gaseous medium. As ionized charge pairs are established in the gaseous medium due to radiation provided by an external radiation source, electrons are attracted toward the anode where they undergo avalanche multiplication with the gaseous medium under the influence of an intense electric field established between the anode and cathode. As a result of the avalanche process, the gaseous medium within the avalanche region emits photons, predominately in the UV region, which are collected by the substrate and provided to a photon detector coupled thereto. The substrate is preferably provided with a wavelength shifting material operable to shift the UV light to the visible region, where it is thereafter imaged by the photon detector using, for example, conventional CCD camera technology.

    摘要翻译: 光学成像系统包括一组光学成像装置,每个光学成像装置包括用于在气体介质中提供电荷放大的装置。 这种电荷放大装置的优选实施例包括其中限定有空腔的基板,位于空腔底部的阳极表面和邻近腔开口定位的阴极。 漂移电极并置在与空腔相对的衬底上,并限定含有气体介质的区域。 由于由外部辐射源提供的辐射而在气体介质中建立了电离电荷对,电子被吸引到阳极,在阳极处,在阳极和阴极之间建立的强电场的影响下,电子对与气体介质进行雪崩倍增。 作为雪崩过程的结果,雪崩区域内的气体介质发射主要在UV区域中的光子,其由衬底收集并提供给耦合到其上的光子检测器。 衬底优选地设置有波长移动材料,其可操作以将UV光移动到可见光区域,此后,其使用例如常规CCD照相机技术由光子检测器成像。