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公开(公告)号：US5042308A
公开(公告)日：1991-08-27
申请号：US369847
申请日：1989-06-22
CPC分类号： G01L9/0073 , G01L9/125
摘要： A pressure detector for measuring the pressure of a pressurized fluid by means of electrostatic capacitance comprising a diaphragm displaceable in response to the pressure, and a pair of fixed electrodes, one of each of the fixed electrodes being located on each side of the diaphragm and being electrostatically capacitively coupled to the diaphragm, each of the fixed electrodes being shaped to essentially eliminate electrostatic capacitances that are not differentially linear with respect to the pressure.
摘要翻译： 一种压力检测器，用于通过静电电容来测量加压流体的压力，所述静电电容包括响应于所述压力而可移动的隔膜;以及一对固定电极，每个所述固定电极中的每一个位于所述隔膜的每一侧上，并且是 静电电容耦合到隔膜，每个固定电极被成形为基本上消除了相对于压力没有差异线性的静电电容。
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公开(公告)号：US5925824A
公开(公告)日：1999-07-20
申请号：US884355
申请日：1997-06-27
CPC分类号： G01L9/0075
摘要： In a capacitive differential pressure detector, an insulating plate (1) of a fixed electrode is covered with a gold conductive film. A conductive film (2) integrally includes an entire inner area (2a) of a center hole (1a), a square ring-shaped area (2b) surrounding the center hole (1a) on the side opposite to the conductive plate (12) and a band-shaped area (2c) extending therefrom in a centrifugal direction to reach the outer periphery. The conductive film (2) is electrically communicated with the conductive plate at the terminating position of the entire inner area (2a) and also with aluminum films at the terminating position of the band-shaped area (2c). Therefore, the total area of the ring-shaped area (2b) and the band-shaped area (2c) can be decreased so that Cs1+Cs2 is decreased to improve the static pressure span characteristic.
摘要翻译： 在电容差压检测器中，固定电极的绝缘板（1）被金导电膜覆盖。 导电膜（2）整体地包括中心孔（1a）的整个内部区域（2a），围绕中心孔（1a）的与导电板（12）相对的一侧的方形环形区域（2b） 以及从离心方向向外延伸的带状区域（2c）。 导电膜（2）在整个内部区域（2a）的终止位置处与导电板电连通，并且还在带状区域（2c）的终止位置处与铝膜电连通。 因此，可以减小环状区域（2b）和带状区域（2c）的总面积，使得Cs1 + Cs2降低，以提高静压跨度特性。
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公开(公告)号：US5343756A
公开(公告)日：1994-09-06
申请号：US917276
申请日：1992-07-23
CPC分类号： G01L9/0073
摘要： An electrostatic capacity type differential pressure detector wherein capacitances are formed between a diaphragm as a movable electrode which is subjected to displacement depending on a differential pressure and fixed electrodes which are arranged on opposite sides of the diaphragm. Each of the fixed electrodes has a first electrically conductive plate closely adjoining and confronting a surface of a central portion of the diaphragm. An annular support is joined to the surface of a circumferential edge portion of the diaphragm and is spaced from and surrounds the outer circumferential surface of the first electrically conductive plate. A solid insulator completely fills an annular space between the first electrically conductive plate and the annular support and is spaced from the diaphragm. An insulating plate is commonly joined to each surface of the annular support and the first electrically conductive plate on the side of the annular support and conductive plate opposite the diaphragm; and a second electrically conductive plate is joined to the surface of the insulating plate opposite the diaphragm and is electrically connected with the first electrically conductive plate. There is a pressure introducing hole extending through the first and second electrically conductive plates and through the insulating plate. Both the first electrically conductive plate and the annular support are composed of silicon, the insulator being composed of a glass material which has a thermal expansion coefficient substantially that of silicon.
摘要翻译： 一种静电电容型差压检测器，其中电容被形成在作为根据差压的位移的可动电极的膜片和布置在隔膜的相对侧上的固定电极之间。 每个固定电极具有紧密邻接并面对隔膜的中心部分的表面的第一导电板。 环形支撑件连接到隔膜的周向边缘部分的表面，并且与第一导电板的外周表面间隔开并且围绕第一导电板的外周表面。 固体绝缘体完全填充第一导电板和环形支撑件之间的环形空间并且与隔膜间隔开。 绝缘板通常连接到环形支撑件的每个表面，并且第一导电板在与隔膜相对的环形支撑件和导电板的侧面上; 并且第二导电板接合到与隔膜相对的绝缘板的表面，并与第一导电板电连接。 存在延伸穿过第一和第二导电板并通过绝缘板的压力引入孔。 第一导电板和环形支撑件都由硅组成，绝缘体由具有基本上为硅的热膨胀系数的玻璃材料组成。
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公开(公告)号：US5056369A
公开(公告)日：1991-10-15
申请号：US507843
申请日：1990-04-12
申请人： Mitsuru Tamai , Tadanori Yuhara , Kimihiro Nakamura , Kazuaki Kitamura , Toshiyuki Takano , Teizo Takahama , Mikihiko Matsuda , Shinichi Souma
发明人： Mitsuru Tamai , Tadanori Yuhara , Kimihiro Nakamura , Kazuaki Kitamura , Toshiyuki Takano , Teizo Takahama , Mikihiko Matsuda , Shinichi Souma
CPC分类号： G01L9/0073
摘要： The present invention is directed to a capacitive differential pressure detector comprising a diaphragm disposed between two electrodes. In a first embodiment, each of the electrodes comprises two conductive plates with an insulator disposed therebetween. Step-like portions are formed in the conductive plate nearest the diaphragm. In a second embodiment, the plate nearest the diaphragm is insulative with a conductive film formed thereon. In a third embodiment, at least one groove is formed in the plate nearest the diaphragm. The groove is formed in a surface of the plate which faces the diaphragm. The groove also intersects a pressure guide hole. In a fourth embodiment, a substrate is disposed on a surface of the plate farthest from said diaphragm. In a fifth embodiment, an insulating layer has the same coefficient of thermal expansion as the conductive plates. In a sixth embodiment, the diaphragm is etched in order to form a circular flexible part, a centrally disposed displacing part, and a bonding part.
摘要翻译： 本发明涉及一种电容差压检测器，其包括设置在两个电极之间的隔膜。 在第一实施例中，每个电极包括两个导电板，绝缘体位于它们之间。 在最靠近隔膜的导电板中形成阶梯状部分。 在第二实施例中，最靠近隔膜的板是绝缘的，其上形成有导电膜。 在第三实施例中，在最靠近隔膜的板中形成至少一个凹槽。 凹槽形成在板的面向隔膜的表面中。 凹槽还与压力导向孔相交。 在第四实施例中，基板设置在距所述隔膜最远的板的表面上。 在第五实施例中，绝缘层具有与导电板相同的热膨胀系数。 在第六实施例中，为了形成圆形柔性部分，中心设置的位移部分和接合部分，蚀刻隔膜。
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5.发明授权Pressure detecting apparatus for measuring pressure based on detected capacitance 失效基于检测到的电容来测量压力的压力检测装置
公开(公告)号：US5992240A
公开(公告)日：1999-11-30
申请号：US754495
申请日：1996-11-20
申请人： Michihiko Tsuruoka , Takahiro Kudo , Masato Takahashi , Nobuhisa Kato , Kimihiro Nakamura , Shuji Tsukamoto
发明人： Michihiko Tsuruoka , Takahiro Kudo , Masato Takahashi , Nobuhisa Kato , Kimihiro Nakamura , Shuji Tsukamoto
CPC分类号： G01L9/0073 , G01L9/125
摘要： A capacitance-based pressure detecting apparatus detects a pressure applied to a diaphragm based on a capacitance which varies depending on the change in portion of the diaphragm. The pressure detecting apparatus comprises a diaphragm which changes position depending on a differential pressure between a first pressure and a second pressure, a first electrode which is provided opposite a first plane of the diaphragm and forms, together with the diaphragm, a first capacitor, a second electrode which is provided opposite a second plane of the diaphragm and forms, together with the diaphragm, a second capacitor, a third capacitor altering a capacitance according to the first pressure, a detecting unit for detecting the capacitance of the first through third capacitors, and an operation unit for obtaining a pressure applied to the diaphragm based on the capacitance of the first and second capacitors, and amending the obtained pressure based on the capacitance of the third capacitor.
摘要翻译： 电容式压力检测装置基于根据膜片部分的变化而变化的电容来检测施加到隔膜的压力。 压力检测装置包括：隔膜，其根据第一压力和第二压力之间的压差改变位置;第一电极，其设置成与隔膜的第一平面相对，并与隔膜一起形成第一电容器， 与隔膜的第二平面相对设置的第二电极，与隔膜一起形成第二电容器，根据第一压力改变电容的第三电容器，用于检测第一至第三电容器的电容的检测单元， 以及操作单元，用于基于第一和第二电容器的电容获得施加到隔膜的压力，并且基于第三电容器的电容来修正获得的压力。
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公开(公告)号：US5963510A
公开(公告)日：1999-10-05
申请号：US922857
申请日：1997-09-03
CPC分类号： G04F10/005 , G04F10/04 , G01R23/02 , G01R29/02
摘要： A time measurement device for measuring a duration of an input signal based on a clock signal comprises a first gate for outputting a gate signal based on an input signal; a first holding circuit for holding the gate signal at the time of falling of the clock signal; a second holding circuit for holding the gate signal at the time of rising of the clock signal; a second gate for passing the clock signal according to either of the widths of output signals of the first and second holding circuits; a third holding circuit for holding an output state of the second holding circuit at the timing of a leading edge of an output of the first holding circuit; a fourth holding circuit for holding an output state of the second holding circuit at the timing of a trailing edge of an output of the first holding circuit; and a counter for counting the clock signal output from the second gate. The count value is corrected based on the outputs of the third and fourth holding circuits.
摘要翻译： 用于基于时钟信号测量输入信号的持续时间的时间测量装置包括：用于基于输入信号输出门信号的第一门; 第一保持电路，用于在时钟信号下降时保持该门信号; 第二保持电路，用于在时钟信号上升时保持该门信号; 第二栅极，用于根据第一和第二保持电路的输出信号的宽度中的任一个传递时钟信号; 第三保持电路，用于在第一保持电路的输出的前沿的定时保持第二保持电路的输出状态; 第四保持电路，用于在第一保持电路的输出的后沿的定时处保持第二保持电路的输出状态; 以及用于对从第二门输出的时钟信号进行计数的计数器。 基于第三和第四保持电路的输出校正计数值。
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公开(公告)号：US4903532A
公开(公告)日：1990-02-27
申请号：US226915
申请日：1988-08-01
CPC分类号： G01L9/0042 , G01L9/0073
摘要： An electrostatic capacity type pressure detector having a central diaphragm, which is deformed by pressure, and a fixed electrode on each side of the diaphragm. Each of the fixed electrodes includes a first electrically conductive plate confronting the diaphragm, an insulating plate joined to the first conductive plate, and a second electrically conductive plate joined to the first plate. An annular support joined to the diaphragm and to the insulating plate surrounds but is insulated from the first electrically conductive plate. A hole in the electrode introdues pressure into a space defined by the electrode and the diaphragm.
摘要翻译： 具有通过压力变形的中央隔膜的静电电容式压力检测器和在隔膜的每一侧上的固定电极。 每个固定电极包括面对隔膜的第一导电板，连接到第一导电板的绝缘板和连接到第一板的第二导电板。 接合到隔膜和绝缘板的环形支撑件包围但与第一导电板绝缘。 电极中的孔将压力引入由电极和隔膜限定的空间中。
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公开(公告)号：US4769738A
公开(公告)日：1988-09-06
申请号：US127262
申请日：1987-12-01
CPC分类号： G01L9/0073
摘要： An electrostatic capacitive pressure sensor having two silicon diaphragms electrostatically bonded to opposite faces of an insulating member to form two measuring chambers. A silicon base is coupled to the first diaphragm to form a pressure chamber. The insulating member is provided with a through-hole electrode. The electrode and the two silicon diaphragms are operative to measure pressure in the pressure chamber by measuring changes in capacity in the measuring chambers.
摘要翻译： 一种具有两个硅隔膜的静电电容式压力传感器，其静电结合到绝缘构件的相对面以形成两个测量室。 硅基底连接到第一隔膜以形成压力室。 绝缘构件设置有通孔电极。 电极和两个硅隔膜通过测量测量室中容量的变化来操作以测量压力室中的压力。
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