公开(公告)号：US09281164B2

公开(公告)日：2016-03-08

申请号：US12966906

申请日：2010-12-13

Applicant: Sean X. Wu ,  Kini Vivekanand

Inventor： Sean X. Wu ,  Kini Vivekanand

IPC: H01J37/28 ,  H01J37/26 ,  H01L21/66

CPC classification number: H01J37/222 ,  H01J37/06 ,  H01J37/265 ,  H01J37/285 ,  H01J37/292 ,  H01J2237/10 ,  H01J2237/202 ,  H01J2237/2813 ,  H01J2237/2817 ,  H01L22/12

Abstract: One embodiment relates to a method of automated inspection of scattered hot spot areas on a manufactured substrate using an electron beam apparatus. A stage holding the substrate is moved along a swath path so as to move a field of view of the electron beam apparatus such that the moving field of view covers a target area on the substrate. Off-axis imaging of the hot spot areas within the moving field of view is performed. A number of hot spot areas within the moving field of view may be determined, and the speed of the stage movement may be adjusted based on the number of hot spot areas within the moving field of view. Another embodiment relates to an electron beam apparatus for inspecting scattered areas on a manufactured substrate. Other embodiments, aspects and features are also disclosed.

Abstract translation: 一个实施例涉及一种使用电子束装置自动检查制造的衬底上的散射热点区域的方法。 保持基板的台阶沿着条带路径移动，以便移动电子束装置的视野，使得移动视场覆盖基板上的目标区域。 执行移动视野内的热点区域的离轴成像。 可以确定运动视场内的多个热点区域，并且可以基于运动视场内的热点区域的数量来调整平台运动的速度。 另一实施例涉及一种用于检查制造的基板上的散射区域的电子束装置。 还公开了其它实施例，方面和特征。

公开(公告)号：US20120145894A1

公开(公告)日：2012-06-14

申请号：US12966906

申请日：2010-12-13

Applicant: Sean X. WU ,  Kini VIVEKANAND

Inventor： Sean X. WU ,  Kini VIVEKANAND

IPC: G01N23/00

CPC classification number: H01J37/222 ,  H01J37/06 ,  H01J37/265 ,  H01J37/285 ,  H01J37/292 ,  H01J2237/10 ,  H01J2237/202 ,  H01J2237/2813 ,  H01J2237/2817 ,  H01L22/12

Abstract: One embodiment relates to a method of automated inspection of scattered hot spot areas on a manufactured substrate using an electron beam apparatus. A stage holding the substrate is moved along a swath path so as to move a field of view of the electron beam apparatus such that the moving field of view covers a target area on the substrate. Off-axis imaging of the hot spot areas within the moving field of view is performed. A number of hot spot areas within the moving field of view may be determined, and the speed of the stage movement may be adjusted based on the number of hot spot areas within the moving field of view. Another embodiment relates to an electron beam apparatus for inspecting scattered areas on a manufactured substrate. Other embodiments, aspects and features are also disclosed.

Abstract translation: 一个实施例涉及一种使用电子束装置自动检查制造的衬底上的散射热点区域的方法。 保持基板的台阶沿着条带路径移动，以便移动电子束装置的视野，使得移动视场覆盖基板上的目标区域。 执行移动视野内的热点区域的离轴成像。 可以确定运动视场内的多个热点区域，并且可以基于运动视场内的热点区域的数量来调整平台运动的速度。 另一实施例涉及一种用于检查制造的基板上的散射区域的电子束装置。 还公开了其它实施例，方面和特征。