SUBSTRATE PROCESSING APPARATUS AND METHOD FOR FORMING COATING FILM ON SURFACE OF REACTION TUBE USED FOR THE SUBSTRATE PROCESSING APPARATUS
    1.
    发明申请
    SUBSTRATE PROCESSING APPARATUS AND METHOD FOR FORMING COATING FILM ON SURFACE OF REACTION TUBE USED FOR THE SUBSTRATE PROCESSING APPARATUS 审中-公开
    基板加工装置及用于基板加工装置的反应管表面上形成涂膜的方法

    公开(公告)号:US20120258565A1

    公开(公告)日:2012-10-11

    申请号:US13431438

    申请日:2012-03-27

    Abstract: There is provided a substrate processing apparatus, comprising: a processing chamber in which a plurality of substrates are housed, the substrate having thereon a lamination film composed of any one of copper-indium, copper-gallium, or copper-indium-gallium; a reaction tube formed so as to constitute the processing chamber; a gas supply tube configured to introduce elemental selenium-containing gas or elemental sulfur-containing gas to the processing chamber; an exhaust tube configured to exhaust an atmosphere in the processing chamber; and a heating section provided so as to surround the reaction tube, wherein a porous coating film having a void rate of 5% to 15% mainly composed of a mixture of chromium oxide (CrxOy:x, y are arbitrary integer of 1 or more) silica is formed on a surface exposed to at least the elemental selenium-containing gas or the elemental sulfur-containing gas, out of the surface of the reaction tube on the processing chamber side.

    Abstract translation: 提供了一种基板处理装置,包括:容纳多个基板的处理室,其上具有由铜铟,铜镓或铜铟镓中的任一种构成的层压膜的基板; 形成为构成处理室的反应管; 配置为将元素含硒气体或元素含硫气体引入所述处理室的气体供给管; 排气管,其构造成排出处理室中的气氛; 以及包围反应管的加热部,其特征在于,主要由氧化铬(Cr x O y:x,y为1以上的任意整数)的混合物构成的空隙率为5%〜15%的多孔质涂膜, 二氧化硅在暴露于至少含元素硒的气体或元素含硫气体的表面上形成在处理室侧的反应管表面之外。

    Bale unpacking method and system therefor
    2.
    发明授权
    Bale unpacking method and system therefor 失效
    包装拆包方法及其系统

    公开(公告)号:US4838751A

    公开(公告)日:1989-06-13

    申请号:US193048

    申请日:1988-05-12

    CPC classification number: B65B69/0025 Y10S83/909

    Abstract: In a method of and a system for unpacking bales each tied by at least one strap, a contact plate member provided with a strap sensor unit is mounted, through a biasing arrangement, on a body frame for movement relative thereto. The body frame is moved toward a confronting side face of the bale to bring the contact plate member into contact with the side face of the bale. The body frame is further moved toward the bale while increasing biasing force of the biasing arrangement, until contact pressure, with which the contact plate member is urged against the side face of the bale, reaches a predetermined value. When the contact plate member is urged by the bale in such a direction as to increase the biasing force during scanning of the strap sensor unit along the side face of the bale, the body frame is moved away from the bale to maintain the contact pressure at the predetermined value. When the strap sensor unit detects a position of the strap of the bale, the body frame is moved to bring a strap handling unit such as cutter or clamps mounted on the body frame, into engagement with the strap.

    Abstract translation: 在每个捆绑有至少一个带的捆包的方法和系统中,设置有带传感器单元的接触板构件通过偏置装置安装在主体框架上以相对于其移动。 身体框架朝向捆包的面对侧移动以使接触板构件与捆的侧面接触。 在增加偏置装置的偏压力的同时,使主体框架进一步朝向捆包移动,直到接触板构件抵抗捆包侧面的接触压力达到预定值。 当接触板构件沿捆包被沿着沿着捆包的侧面扫描期间增加偏压力的方向被推动时,主体框架从捆包移动以将接触压力保持在 预定值。 当带传感器单元检测到捆包的条带的位置时,主体框架被移动以使带状物处理单元(例如安装在主体框架上的切割器或夹具)与带接合。

    Hydraulic system
    5.
    发明授权
    Hydraulic system 失效
    液压系统

    公开(公告)号:US6059228A

    公开(公告)日:2000-05-09

    申请号:US94485

    申请日:1998-06-10

    CPC classification number: B64C25/22

    Abstract: A hydraulic system for retracting into and extending out of the body of an aircraft a landing gear for use in taking off and landing, comprises a housing unit which has a hydraulic pump, a hydraulic actuator, a shuttle valve, an emergency valve, an actuator pressure releasing mechanism, and a mechanically locking mechanism accommodated therein. The hydraulic actuator has a piston rod assembly received therein to be reciprocably moved by the hydraulic pump to assume a retraction position and an extended position. The shuttle valve is movable with respect to the housing unit for selectively changing the flow of the hydraulic fluid between the hydraulic pump and the hydraulic actuator. The emergency valve is movable with respect to the housing unit to assume two different positions for selectively changing the flow of the hydraulic fluid between the hydraulic pump and the hydraulic actuator and the flow of the hydraulic pump and the fluid pressure reservoir. The actuator pressure releasing mechanism serves to release the hydraulic pressure in the hydraulic actuator to allow the piston rod assembly to be freely moved with respect to the housing unit toward the extended position of the piston rod assembly. The mechanically locking mechanism is provided selectively to lock the piston rod assembly with the housing unit and to unlock the piston rod assembly from the housing unit to be freely moved.

    Abstract translation: 一种液压系统,用于从飞机的身体伸出并伸出用于起飞和着陆的起落架,包括具有液压泵,液压致动器,梭阀,紧急阀,致动器的壳体单元 压力释放机构和容纳在其中的机械锁定机构。 液压致动器具有容纳在其中的活塞杆组件,以通过液压泵往复移动以呈现缩回位置和延伸位置。 梭阀可相对于壳体单元移动,用于选择性地改变液压泵和液压致动器之间的液压流体的流动。 紧急阀相对于壳体单元可移动以呈现两个不同的位置,用于选择性地改变液压泵和液压致动器之间的液压流体的流动以及液压泵和流体压力储存器的流动。 致动器压力释放机构用于释放液压致动器中的液压,以允许活塞杆组件相对于壳体单元自由地朝向活塞杆组件的延伸位置移动。 选择性地设置机械锁定机构以将活塞杆组件与壳体单元锁定,并且将活塞杆组件从壳体单元解锁以自由移动。

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