Abstract:
There is provided a substrate processing apparatus, comprising: a processing chamber in which a plurality of substrates are housed, the substrate having thereon a lamination film composed of any one of copper-indium, copper-gallium, or copper-indium-gallium; a reaction tube formed so as to constitute the processing chamber; a gas supply tube configured to introduce elemental selenium-containing gas or elemental sulfur-containing gas to the processing chamber; an exhaust tube configured to exhaust an atmosphere in the processing chamber; and a heating section provided so as to surround the reaction tube, wherein a porous coating film having a void rate of 5% to 15% mainly composed of a mixture of chromium oxide (CrxOy:x, y are arbitrary integer of 1 or more) silica is formed on a surface exposed to at least the elemental selenium-containing gas or the elemental sulfur-containing gas, out of the surface of the reaction tube on the processing chamber side.
Abstract translation:提供了一种基板处理装置,包括:容纳多个基板的处理室,其上具有由铜铟,铜镓或铜铟镓中的任一种构成的层压膜的基板; 形成为构成处理室的反应管; 配置为将元素含硒气体或元素含硫气体引入所述处理室的气体供给管; 排气管,其构造成排出处理室中的气氛; 以及包围反应管的加热部,其特征在于,主要由氧化铬(Cr x O y:x,y为1以上的任意整数)的混合物构成的空隙率为5%〜15%的多孔质涂膜, 二氧化硅在暴露于至少含元素硒的气体或元素含硫气体的表面上形成在处理室侧的反应管表面之外。
Abstract:
In a method of and a system for unpacking bales each tied by at least one strap, a contact plate member provided with a strap sensor unit is mounted, through a biasing arrangement, on a body frame for movement relative thereto. The body frame is moved toward a confronting side face of the bale to bring the contact plate member into contact with the side face of the bale. The body frame is further moved toward the bale while increasing biasing force of the biasing arrangement, until contact pressure, with which the contact plate member is urged against the side face of the bale, reaches a predetermined value. When the contact plate member is urged by the bale in such a direction as to increase the biasing force during scanning of the strap sensor unit along the side face of the bale, the body frame is moved away from the bale to maintain the contact pressure at the predetermined value. When the strap sensor unit detects a position of the strap of the bale, the body frame is moved to bring a strap handling unit such as cutter or clamps mounted on the body frame, into engagement with the strap.
Abstract:
An exhaust gas purifier for a diesel engine is positioned in the middle of an inlet system for supplying air to a combustion chamber. The exhaust gas purifier includes an HC (hydrocarbon) supply source, and a zeolite catalyst converter, which is activated by the hydrocarbon as a reduction agent to crack NOx (oxides of nitrogen) in the exhaust gas, for thereby purifying the exhaust gas.
Abstract:
A member for a semiconductor manufacturing apparatus comprises a steel substrate and a composite oxide film formed on a surface thereof and comprised of silicon oxide-aluminum oxide-chromium oxide and a sintering aid.
Abstract:
A hydraulic system for retracting into and extending out of the body of an aircraft a landing gear for use in taking off and landing, comprises a housing unit which has a hydraulic pump, a hydraulic actuator, a shuttle valve, an emergency valve, an actuator pressure releasing mechanism, and a mechanically locking mechanism accommodated therein. The hydraulic actuator has a piston rod assembly received therein to be reciprocably moved by the hydraulic pump to assume a retraction position and an extended position. The shuttle valve is movable with respect to the housing unit for selectively changing the flow of the hydraulic fluid between the hydraulic pump and the hydraulic actuator. The emergency valve is movable with respect to the housing unit to assume two different positions for selectively changing the flow of the hydraulic fluid between the hydraulic pump and the hydraulic actuator and the flow of the hydraulic pump and the fluid pressure reservoir. The actuator pressure releasing mechanism serves to release the hydraulic pressure in the hydraulic actuator to allow the piston rod assembly to be freely moved with respect to the housing unit toward the extended position of the piston rod assembly. The mechanically locking mechanism is provided selectively to lock the piston rod assembly with the housing unit and to unlock the piston rod assembly from the housing unit to be freely moved.