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公开(公告)号：US08308870B2
公开(公告)日：2012-11-13
申请号：US12610599
申请日：2009-11-02
IPC分类号： B08B3/08
CPC分类号： H01L21/67051
摘要： Disclosed are a cleaning apparatus and a cleaning method, which can collect a chemical liquid without reducing the throughput after a substrate is subjected to a cleaning treatment and dried by using a drying solvent, such as IPA. The disclosed cleaning apparatus carries out a chemical liquid cleaning treatment, a rinsing treatment, and a drying treatment with IPA, in order, on a wafer W while rotating wafer W, and includes a cleaning liquid supply device for supplying a cleaning liquid for cleaning the drain cup and the drain tube to the drain cup in a state where the cleaning liquid is not supplied to the wafer. Also, the apparatus further includes a control unit for controlling respective components of the cleaning apparatus. The control unit, after the cleaning treatment and then the rinsing treatment of wafer W, at the time when the drying treatment is performed by IPA, controls the cleaning liquid to be supplied to the drain cup.
摘要翻译： 公开了一种清洁装置和清洁方法，其可以在基板经受清洁处理之后收集化学液体而不降低生产量，并通过使用诸如IPA的干燥溶剂进行干燥。 所公开的清洁装置在旋转晶片W的同时在晶片W上进行化学液体清洗处理，漂洗处理和IPA干燥处理，并且包括用于提供用于清洁的清洁液的清洗液供给装置 排水杯和排水管排入排水杯，在清洗液未供给到晶片的状态下。 此外，该装置还包括用于控制清洁装置的各个部件的控制单元。 在通过IPA进行干燥处理之后，控制单元在进行清洁处理，然后进行晶片W的漂洗处理之后，控制向排水杯供给的清洗液。
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公开(公告)号：US20100108103A1
公开(公告)日：2010-05-06
申请号：US12610599
申请日：2009-11-02
IPC分类号： B08B3/00
CPC分类号： H01L21/67051
摘要： Disclosed are a cleaning apparatus and a cleaning method, which can collect a chemical liquid without reducing the throughput after a substrate is subjected to a cleaning treatment and dried by using a drying solvent, such as IPA. The disclosed cleaning apparatus carries out a chemical liquid cleaning treatment, a rinsing treatment, and a drying treatment with IPA, in order, on a wafer W while rotating wafer W, and includes a cleaning liquid supply device for supplying a cleaning liquid for cleaning the drain cup and the drain tube to the drain cup in a state where the cleaning liquid is not supplied to the wafer. Also, the apparatus further includes a control unit for controlling respective components of the cleaning apparatus. The control unit, after the cleaning treatment and then the rinsing treatment of wafer W, at the time when the drying treatment is performed by IPA, controls the cleaning liquid to be supplied to the drain cup.
摘要翻译： 公开了一种清洁装置和清洁方法，其可以在基板经受清洁处理之后收集化学液体而不降低生产量，并通过使用诸如IPA的干燥溶剂进行干燥。 所公开的清洁装置在旋转晶片W的同时在晶片W上进行化学液体清洗处理，漂洗处理和IPA干燥处理，并且包括用于提供用于清洁的清洁液的清洗液供给装置 排水杯和排水管排入排水杯，在清洗液未供给到晶片的状态下。 此外，该装置还包括用于控制清洁装置的各个部件的控制单元。 在通过IPA进行干燥处理之后，控制单元在进行清洁处理，然后进行晶片W的漂洗处理之后，控制向排水杯供给的清洗液。
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公开(公告)号：US5594460A
公开(公告)日：1997-01-14
申请号：US556098
申请日：1995-11-09
申请人： Kouichi Eguchi
发明人： Kouichi Eguchi
IPC分类号： G01S3/32 , G01S3/42 , G01S3/44 , H01Q1/18 , H01Q1/34 , H01Q3/08 , H01Q3/26 , H01Q21/00 , H01Q3/00
摘要： A tracking array antenna system is provided. When a signal from the target is received normally, control mode of an AZ axis and an electronic XEL axis is changed over according to whether or not a moving platform is inclined about the XEL axis for detecting inclination of the moving platform. When the moving platform is not inclined, beam-switch (BSW) about the electronic XEL axis is performed, and the beam-switch tracking (BST) about the AZ axis using the result with an angular rate feedback (ARFB) is performed. When the moving platform is inclined, zero rate control (ZRC) about the AZ axis and BST about the electronic XEL axis are performed. In this way, tracking and stabilization are performed without not only the gimbal-lock but also the use of a gyrocompass.
摘要翻译： 提供跟踪阵列天线系统。 当来自目标的信号被正常地接收时，根据移动平台是否围绕XEL轴倾斜以检测移动平台的倾斜度，AZ轴和电子XEL轴的控制模式被切换。 当移动平台不倾斜时，执行关于电子XEL轴的光束开关（BSW），并且使用具有角速率反馈（ARFB）的结果执行关于AZ轴的光束切换跟踪（BST）。 当移动平台倾斜时，执行关于AZ轴的零速率控制（ZRC）和关于电子XEL轴的BST。 以这种方式，跟踪和稳定不仅执行万向锁，而且还使用陀螺罗经。
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公开(公告)号：US5227806A
公开(公告)日：1993-07-13
申请号：US850887
申请日：1992-03-13
申请人： Kouichi Eguchi
发明人： Kouichi Eguchi
IPC分类号： H01Q1/18
CPC分类号： H01Q1/18
摘要： A stabilized antenna system. An inclination angle detector is mounted on an AZ frame and detects an inclination angle around an elevation, and the elevation of the antenna is controlled by a successive addition of the detected inclination angle to simplify control algorithm. Furthermore, the inclination angle detector includes a reciprocal combination filter for combining outputs of an inclinometer and a rate sensor. The reciprocal combination filter includes two reciprocal filters, and parameters of the reciprocal filters are adaptively controlled depending on frequency and amplitude of the inclination to ensure the reciprocity in a necessary frequency range.
摘要翻译： 稳定的天线系统。 倾斜角度检测器安装在AZ框架上并检测围绕高度的倾斜角度，并且通过连续添加所检测的倾斜角度来控制天线的仰角以简化控制算法。 此外，倾斜角检测器包括用于组合倾斜计的输出和速率传感器的倒数组合滤波器。 互逆组合滤波器包括两个倒数滤波器，并且根据倾斜的频率和振幅自适应地控制倒数滤波器的参数，以确保在必要的频率范围内的互易。
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公开(公告)号：US07577009B2
公开(公告)日：2009-08-18
申请号：US11628480
申请日：2005-05-31
申请人： Eiji Yamamoto , Hidenori Hara , Kouichi Eguchi
发明人： Eiji Yamamoto , Hidenori Hara , Kouichi Eguchi
IPC分类号： H02M5/297
摘要： It is an object of the present invention to provide a PWM cycloconverter that can compensate an error between a voltage command and a real voltage generated by a commuting operation.The PWM cycloconverter for solving the above-described problem includes: an input voltage phase detector (6) for detecting the phase of the voltage of a three-phase ac power source (1); a current direction detector (7) for detecting the direction of a current supplied to a two-way semiconductor switch (3); and a commutation compensator (11) for receiving the outputs of the input voltage phase detector and the current detector as inputs to compensate for a voltage command.
摘要翻译： 本发明的目的是提供一种可以补偿电压指令与通勤操作产生的实际电压之间的误差的PWM周波变换器。 用于解决上述问题的PWM周波变换器包括：用于检测三相交流电源（1）的电压的相位的输入电压相位检测器（6）; 用于检测提供给双向半导体开关（3）的电流的方向的电流方向检测器（7）; 以及用于接收输入电压相位检测器和电流检测器的输出作为输入以补偿电压指令的换向补偿器（11）。
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6.发明申请公开(公告)号：US20070139022A1
公开(公告)日：2007-06-21
申请号：US10583253
申请日：2004-12-16
申请人： Eiji Yamamoto , Hidenori Hara , Kouichi Eguchi
发明人： Eiji Yamamoto , Hidenori Hara , Kouichi Eguchi
IPC分类号： G05F1/00
CPC分类号： H02M5/297 , H02M2001/0022
摘要： An input voltage detection method, for a PWM cycloconverter whose operation can be stably continued though a power voltage sharply fluctuates, and an apparatus therefor are provided. For a PWM cycloconverter, provided are: an input power voltage phase detector 41, for detecting the phase of three-phase AC power; an artificial DC bus voltage detector 42, for detecting the magnitude of the three-phase AC power; an input voltage upper and lower limit calculator 43, for employing the output of the artificial DC bus voltage detector to calculate upper and lower limits for an input voltage; and a voltage comparator 46, for comparing a voltage value, detected by the artificial DC bus voltage detector, with the upper and lower limit values obtained by the input voltage upper and lower limit calculator. The output of the voltage comparator is adjusted, so that the voltage value detected by the artificial DC bus voltage detector falls within the upper and lower limit values obtained by the input voltage upper and lower limit calculator.
摘要翻译： 一种用于PWM循环变换器的输入电压检测方法，其工作可以通过电源电压急剧波动地稳定地继续，并提供其设备。 对于PWM循环变频器，提供了：用于检测三相AC电力的相位的输入电源电压相位检测器41; 用于检测三相AC电力的大小的人造直流母线电压检测器42; 输入电压上限和下限计算器43，用于使用人造直流总线电压检测器的输出来计算输入电压的上限和下限; 以及电压比较器46，用于将由人造直流总线电压检测器检测的电压值与由输入电压上限和下限计算器获得的上限值和下限值进行比较。 调整电压比较器的输出，使得由人造直流母线电压检测器检测的电压值落入由输入电压上下限计算器获得的上限和下限值内。
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公开(公告)号：US5223845A
公开(公告)日：1993-06-29
申请号：US774598
申请日：1991-10-10
申请人： Kouichi Eguchi
发明人： Kouichi Eguchi
摘要： An array antenna can control directions of beams by phase-shifting signals received and/or transmitted by a plurality of antenna elements. When the antenna elements are arranged two-dimensionally, sidelobes and beamwidth are determined according a distance between two adjacent antenna element columns. The distance between the adjacent columns can be reduced by arranging the antenna elements in a staggered manner, thereby suppressing the sidelobes, and enlarging the width of beams around an XEL axis. A stabilized antenna system controls the direction of the array antenna and beam directivity by compensating for inclination of a moving platform, so that the array antenna can always track a satellite reliably.
摘要翻译： 阵列天线可以通过由多个天线元件接收和/或发送的相移信号来控制波束的方向。 当天线元件二维布置时，旁瓣和波束宽度根据两个相邻天线元件列之间的距离确定。 可以通过以天线方式布置天线元件来减少相邻列之间的距离，从而抑制旁瓣，并且增大XEL轴周围的光束的宽度。 稳定的天线系统通过补偿移动平台的倾斜来控制阵列天线的方向和波束方向性，使得阵列天线可以始终可靠地跟踪卫星。
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公开(公告)号：US5537122A
公开(公告)日：1996-07-16
申请号：US503731
申请日：1995-07-18
申请人： Kouichi Eguchi
发明人： Kouichi Eguchi
CPC分类号： H01Q1/3275 , G01S3/325 , H01Q3/04
摘要： An array antenna system is provided with a function for tracking a target. The system captures the target by first carrying out search control immediately after a power supply is turned on. After capturing the target, the system performs tracking control using a beam switch controller about an azimuth. An output of a rate sensor is filtered by a high-pass filter and then reflected on a tracking signal for the tracking control. It is possible to keep an angular rate of the array antenna around an azimuth axis to nearly 0 even while no signals can be received from the target. Even when signals can be received from the target, a control system is stabilized by feedback of the angular rate.
摘要翻译： 阵列天线系统具有跟踪目标的功能。 系统通过在电源打开后立即进行搜索控制来捕获目标。 捕获目标后，系统使用关于方位角的光束开关控制器执行跟踪控制。 速率传感器的输出被高通滤波器滤波，然后在用于跟踪控制的跟踪信号上反射。 即使没有信号可以从目标接收，也可以将阵列天线的方位角的角速度保持在接近0。 即使可以从目标接收信号，通过角速率的反馈来稳定控制系统。
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公开(公告)号：US5359337A
公开(公告)日：1994-10-25
申请号：US796704
申请日：1991-11-21
申请人： Kouichi Eguchi
发明人： Kouichi Eguchi
CPC分类号： H01Q1/18
摘要： A stabilized antenna system is installed on a moving platform such as a ship to track a communication satellite. The antenna system examply employs either X1-Y-X2 or Y1-X-Y2 antenna mount. Rolling and pitching of the moving platform are offset by mechanically steering outside and intermediate axes, X1 and X, or Y1 and Y axes. The innermost axis is electronically steered to prevent instability which is caused by the mechanical steering, thereby improving reliability of the antenna system. The frame for rotatable supporting the array antenna is also supported by the radome rotatably. Further, the access hutch for maintainance is opened at the center of the radome and just below the array antenna.
摘要翻译： 稳定的天线系统安装在诸如船舶的移动平台上以跟踪通信卫星。 天线系统通过X1-Y-X2或Y1-X-Y2天线安装。 移动平台的滚动和俯仰通过机械转向外部和中间轴X1和X或Y1和Y轴来抵消。 最内侧的轴线被电子控制以防止由机械转向引起的不稳定性，从而提高天线系统的可靠性。 可旋转地支撑阵列天线的框架也可旋转地支撑在天线罩上。 此外，维护的通道在天线罩的中心打开，并且正好在阵列天线的下方。
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公开(公告)号：US4334226A
公开(公告)日：1982-06-08
申请号：US181665
申请日：1980-08-26
申请人： Kouichi Eguchi , Tsuguya Inoie
发明人： Kouichi Eguchi , Tsuguya Inoie
摘要： In an antenna support device including a horizontal stabilized platform supported by two orthogonal corrective shafts and provided with a flywheel driven by a motor whose spin vector is directed at right angles to the plane of the platform, one of the corrective shafts is actively controlled in response to a tilt of the platform about the other corrective shaft, while the other corrective shaft is actively controlled in response to a tilt of the platform about said one corrective shaft, and axes of an azimuthal shaft directed at right angles to the plane of the platform for supporting an antenna from the platform and the two corrective shafts intersect with each other substantially at one point, whereby torques induced by gravity and linear acceleration may be substantially counter-balanced within almost all the movable ranges about the two corrective shafts.
摘要翻译： 在包括由两个正交校正轴支撑并具有由电动机驱动的飞轮的天线支撑装置中，该电动机的自旋向量与平台的平面成直角，校正轴中的一个被主动控制 相对于平台围绕另一个校正轴的倾斜，而另一个校正轴响应于平台围绕所述一个校正轴的倾斜而被主动地控制，方位角轴与平台的平面成直角 用于从平台支撑天线，并且两个校正轴基本上在一个点处彼此相交，由此由重力和线性加速度引起的扭矩可以在围绕两个校正轴的几乎所有可移动范围内基本上相反平衡。
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