公开(公告)号：US08606412B2

公开(公告)日：2013-12-10

申请号：US12307554

申请日：2007-06-13

申请人： Masaaki Nagase ,  Ryousuke Dohi ,  Nobukazu Ikeda ,  Kouji Nishino ,  Kaoru Hirata ,  Katsuyuki Sugita ,  Atsushi Matsumoto

发明人： Masaaki Nagase ,  Ryousuke Dohi ,  Nobukazu Ikeda ,  Kouji Nishino ,  Kaoru Hirata ,  Katsuyuki Sugita ,  Atsushi Matsumoto

IPC分类号： G05D7/00

CPC分类号： G05D7/0635 ,  G01F1/36 ,  G01F15/005 ,  G01F15/022

摘要： With a pressure type flow control apparatus, a valve on the downstream side of a throttle mechanism is released and a flow rate setting value Qe inputted to the pressure type flow control apparatus is changed to detect the magnitude ΔV of change of a flow rate output signal Qo from the pressure type flow control apparatus while the flow rate setting value Qe is changed, so that normal functioning of the releasing operations of the valve on the downstream side of the throttle mechanism is confirmed when the magnitude ΔV of change of the flow rate output signal Qo is above the predetermined value. If the releasing operations are malfunctioning, the magnitude ΔV of changes is found to be below the predetermined value.

摘要翻译： 利用压力式流量控制装置，释放节气门机构下游侧的阀，改变输入到压力式流量控制装置的流量设定值Qe，以检测流量输出信号的变化幅度DeltaV 当流量设定值Qe变化时，来自压力式流量控制装置的Qo，使得当流量输出的变化幅度DeltaV被确定时，在节气门机构的下游侧的阀的释放操作的正常功能被确认 信号Qo高于预定值。 如果释放操作发生故障，则发现变化幅度DeltaV低于预定值。

公开(公告)号：US20090292399A1

公开(公告)日：2009-11-26

申请号：US12307554

申请日：2007-06-13

申请人： Masaaki Nagase ,  Ryousuke Dohi ,  Nobukazu Ikeda ,  Kouji Nishino ,  Kaoru Hirata ,  Katsuyuki Sugita ,  Atsushi Matsumoto

发明人： Masaaki Nagase ,  Ryousuke Dohi ,  Nobukazu Ikeda ,  Kouji Nishino ,  Kaoru Hirata ,  Katsuyuki Sugita ,  Atsushi Matsumoto

IPC分类号： G05D7/06

CPC分类号： G05D7/0635 ,  G01F1/36 ,  G01F15/005 ,  G01F15/022

摘要： With a pressure type flow control apparatus, a valve on the downstream side of a throttle mechanism is released and a flow rate setting value Qe inputted to the pressure type flow control apparatus is changed to detect the magnitude ΔV of change of a flow rate output signal Qo from the pressure type flow control apparatus while the flow rate setting value Qe is changed, so that normal functioning of the releasing operations of the valve on the downstream side of the throttle mechanism is confirmed when the magnitude ΔV of change of the flow rate output signal Qo is above the predetermined value. If the releasing operations are malfunctioning, the magnitude ΔV of changes is found to be below the predetermined value.

摘要翻译： 利用压力式流量控制装置，释放节气门机构下游侧的阀，改变输入到压力式流量控制装置的流量设定值Qe，以检测流量输出信号的变化幅度DeltaV 当流量设定值Qe变化时，来自压力式流量控制装置的Qo，使得当流量输出的变化幅度DeltaV被确定时，节气门机构的下游侧的阀的释放操作的正常功能被确认 信号Qo高于预定值。 如果释放操作发生故障，则发现变化幅度DeltaV低于预定值。

公开(公告)号：US07945414B2

公开(公告)日：2011-05-17

申请号：US12065438

申请日：2006-08-28

申请人： Masaaki Nagase ,  Ryousuke Dohi ,  Nobukazu Ikeda ,  Kouji Nishino ,  Kaoru Hirata ,  Katsuyuki Sugita ,  Atsushi Matsumoto

发明人： Masaaki Nagase ,  Ryousuke Dohi ,  Nobukazu Ikeda ,  Kouji Nishino ,  Kaoru Hirata ,  Katsuyuki Sugita ,  Atsushi Matsumoto

IPC分类号： G06F3/48

CPC分类号： G01F1/42 ,  F16K37/0091 ,  G05D7/0635

摘要： A method for detecting abnormality in a fluid supply line is provided that uses a fluid control apparatus with a pressure sensor so that abnormality of malfunction and sheet leaks of a plurality of valves incorporated into the fluid supply line can be checked easily, promptly and accurately by operating the flow rate control apparatus possessing the pressure sensor. Specifically, using a fluid supply line provided with the flow rate control apparatus possessing the pressure sensor equipped with a flow rate setting mechanism, a flow rate/pressure display mechanism, and/or a flow rate self-diagnosis mechanism, abnormality of the control valves, installed with the flow rate control apparatus and on the upstream side and downstream side thereof, is detected by using the pressure value displayed and/or the value diagnosed with a self-diagnosis mechanism of the flow rate control apparatus.

摘要翻译： 提供了一种用于检测流体供应管线中的异常的方法，其使用具有压力传感器的流体控制装置，使得能够容易地，迅速和准确地检查结合到流体供应管线中的多个阀的故障和片材泄漏的异常 操作具有压力传感器的流量控制装置。 具体而言，使用设有具有流量设定机构，流量/压力显示机构和/或流量自诊断机构的压力传感器的流量控制装置的流体供给管线，控制阀的异常 通过使用显示的压力值和/或用流量控制装置的自诊断机构诊断的值来检测安装有流量控制装置并且在其上游侧和下游侧。

公开(公告)号：US20090326719A1

公开(公告)日：2009-12-31

申请号：US12065438

申请日：2006-08-28

申请人： Masaaki Nagase ,  Ryousuke Dohi ,  Nobukazu Ikeda ,  Kouji Nishino ,  Kaoru Hirata ,  Katsuyuki Sugita ,  Atsushi Matsumoto

发明人： Masaaki Nagase ,  Ryousuke Dohi ,  Nobukazu Ikeda ,  Kouji Nishino ,  Kaoru Hirata ,  Katsuyuki Sugita ,  Atsushi Matsumoto

IPC分类号： G05D7/06 ,  G06F3/048

CPC分类号： G01F1/42 ,  F16K37/0091 ,  G05D7/0635

摘要： A method for detecting abnormality in a fluid supply line is provided that uses a fluid control apparatus with a pressure sensor so that abnormality of malfunction and sheet leaks of a plurality of valves incorporated into the fluid supply line can be checked easily, promptly and accurately by operating the flow rate control apparatus possessing the pressure sensor. Specifically, using a fluid supply line provided with the flow rate control apparatus possessing the pressure sensor equipped with a flow rate setting mechanism, a flow rate/pressure display mechanism, and/or a flow rate self-diagnosis mechanism, abnormality of the control valves, installed with the flow rate control apparatus and on the upstream side and downstream side thereof. is detected by using the pressure value displayed and/or the value diagnosed with a self-diagnosis mechanism of the flow rate control apparatus.

摘要翻译： 提供了一种用于检测流体供应管线中的异常的方法，其使用具有压力传感器的流体控制装置，使得能够容易地，迅速和准确地检查结合到流体供应管线中的多个阀的故障和片材泄漏的异常 操作具有压力传感器的流量控制装置。 具体而言，使用设有具有流量设定机构，流量/压力显示机构和/或流量自诊断机构的压力传感器的流量控制装置的流体供给管线，控制阀的异常 安装有流量控制装置，并且在其上游侧和下游侧。 通过使用显示的压力值和/或用流量控制装置的自诊断机构诊断的值来检测。

公开(公告)号：US09133951B2

公开(公告)日：2015-09-15

申请号：US11913271

申请日：2006-05-10

申请人： Tadahiro Ohmi ,  Kouji Nishino ,  Ryousuke Dohi ,  Nobukazu Ikeda ,  Masaaki Nagase ,  Kaoru Hirata ,  Katsuyuki Sugita ,  Tsutomu Shinohara ,  Takashi Hirose ,  Tomokazu Imai ,  Toshihide Yoshida ,  Hisashi Tanaka

发明人： Tadahiro Ohmi ,  Kouji Nishino ,  Ryousuke Dohi ,  Nobukazu Ikeda ,  Masaaki Nagase ,  Kaoru Hirata ,  Katsuyuki Sugita ,  Tsutomu Shinohara ,  Takashi Hirose ,  Tomokazu Imai ,  Toshihide Yoshida ,  Hisashi Tanaka

IPC分类号： F16K27/00 ,  F16L55/027 ,  G01F1/36 ,  G01F15/00 ,  G05D7/06

CPC分类号： F16K27/003 ,  F16L55/02718 ,  G01F1/36 ,  G01F15/001 ,  G01F15/005 ,  G05D7/0635

摘要： An orifice changeable pressure type flow rate control apparatus comprises a valve body of a control valve for a pressure type flow rate control apparatus installed between an inlet side fitting block provided with a coupling part of a fluid supply pipe and an outlet side fitting block provided with a coupling part of a fluid takeout pipe; a fluid inlet side of the valve body and the inlet side fitting block, and a fluid outlet side of the valve body and the outlet side fitting block are detachably and hermitically connected respectively so a flow passage for gases through the control valve is formed; and, a gasket type orifice for a pressure type flow rate control apparatus is removably inserted between a gasket type orifice insertion hole provided on the outlet side of the valve body and a gasket type orifice insertion hole of the outlet side fitting block.

摘要翻译： 节流孔可变压力型流量控制装置包括安装在设置有流体供给管的联接部的入口侧配件块和设置有流体供给管的出口侧配件块之间的压力型流量控制装置的控制阀的阀体 流体取出管的联接部分; 阀体和入口侧配件块的流体入口侧和阀体和出口侧配件块的流体出口侧分别可拆卸地和隐蔽地连接，从而形成用于通过控制阀的气体的流动通道; 并且用于压力式流量控制装置的垫圈型孔口可移除地插入设置在阀体的出口侧的垫圈型孔插入孔和出口侧配件块的衬垫型孔插入孔之间。

公开(公告)号：US08418714B2

公开(公告)日：2013-04-16

申请号：US11913277

申请日：2006-06-22

申请人： Tadahiro Ohmi ,  Masahito Saito ,  Shoichi Hino ,  Tsuyoshi Shimazu ,  Kazuyuki Miura ,  Kouji Nishino ,  Masaaki Nagase ,  Katsuyuki Sugita ,  Kaoru Hirata ,  Ryousuke Dohi ,  Takashi Hirose ,  Tsutomu Shinohara ,  Nobukazu Ikeda ,  Tomokazu Imai ,  Toshihide Yoshida ,  Hisashi Tanaka

发明人： Tadahiro Ohmi ,  Masahito Saito ,  Shoichi Hino ,  Tsuyoshi Shimazu ,  Kazuyuki Miura ,  Kouji Nishino ,  Masaaki Nagase ,  Katsuyuki Sugita ,  Kaoru Hirata ,  Ryousuke Dohi ,  Takashi Hirose ,  Tsutomu Shinohara ,  Nobukazu Ikeda ,  Tomokazu Imai ,  Toshihide Yoshida ,  Hisashi Tanaka

IPC分类号： F16K31/12 ,  F16K31/36

CPC分类号： G05D7/0641 ,  G01F1/363 ,  G01F1/6842 ,  G01F1/6847 ,  G01F5/005 ,  G01F7/005 ,  G05D7/0635 ,  G05D7/0647 ,  G05D23/1927 ,  Y10T137/0379 ,  Y10T137/7759 ,  Y10T137/776 ,  Y10T137/8593 ,  Y10T137/86734 ,  Y10T137/86815 ,  Y10T137/87265 ,  Y10T137/87314 ,  Y10T137/8741 ,  Y10T137/87499 ,  Y10T137/87684

摘要： A pressure type flow rate control apparatus is provided wherein flow rate of fluid passing through an orifice is computed as Qc=KP1 (where K is a proportionality constant) or as Qc=KP2m(P1−P2)n (where K is a proportionality constant, m and n constants) by using orifice upstream side pressure P1 and/or orifice downstream side pressure P2. A fluid passage between the downstream side of a control valve and a fluid supply pipe of the pressure type flow rate control apparatus comprises at least 2 fluid passages in parallel, and orifices having different flow rate characteristics are provided for each of these fluid passages, wherein fluid in a small flow quantity area flows to one orifice for flow control of fluid in the small flow quantity area, while fluid in a large flow quantity area flows to the other orifice for flow control of fluid in the large flow quantity area.

摘要翻译： 提供一种压力式流量控制装置，其中通过孔口的流体流量计算为Qc = KP1（其中K是比例常数）或Qc = KP2m（P1-P2）n（其中K是比例常数 ，m和n常数）通过使用孔口上游侧压力P1和/或孔口下游侧压力P2。 控制阀的下游侧和压力式流量控制装置的流体供给管之间的流体通道平行地包括至少2个流体通道，并且为每个这些流体通道设置具有不同流量特性的孔，其中 小流量区域中的流体流向一个孔，用于在小流量区域中的流体的流量控制，而大流量区域中的流体流向另一个孔口，用于大流量区域中的流体的流量控制。

公开(公告)号：US20100192854A1

公开(公告)日：2010-08-05

申请号：US12680159

申请日：2008-07-17

申请人： Kouji Nishino ,  Ryousuke Dohi ,  Masaaki Nagase ,  Kaoru Hirata ,  Katsuyuki Sugita ,  Nobukazu Ikeda

发明人： Kouji Nishino ,  Ryousuke Dohi ,  Masaaki Nagase ,  Kaoru Hirata ,  Katsuyuki Sugita ,  Nobukazu Ikeda

IPC分类号： H01L51/40

CPC分类号： C23C16/455 ,  C23C16/45561 ,  C23C16/52

摘要： A gas supply system includes a main gas supply line; a vent gas supply line; a plurality of gas supply mechanisms disposed in middle of both gas supply lines; a pressure type flow-rate control system disposed on an inlet side of the main gas supply line so a flow of carrier gas is supplied to the main gas supply line; a pressure control system disposed on an inlet side of the vent gas supply line, a carrier gas having a predetermined pressure is supplied to the vent gas supply line while the pressure control system performs a pressure adjustment, a gas pressure of the main gas supply line detected downstream from an orifice of the pressure type flow-rate control system and a gas pressure of the vent gas supply line are compared, and the gas pressure of the vent gas supply line is adjusted so a difference therebetween becomes zero.

摘要翻译： 气体供应系统包括主气供应管线; 排气供气管线; 设置在两个气体供给管线的中间的多个气体供给机构; 压力型流量控制系统，设置在主气体供给管线的入口侧，从而将载气流供应到主气体供应管线; 设置在排出气体供给管路的入口侧的压力控制系统，在压力控制系统进行压力调节，主气体供给管线的气体压力的情况下，将具有规定压力的载气供给到排气供给管线 从压力式流量控制系统的孔口下游检测出气体供给管路的气体压力，调整排出气体供给管路的气体压力，使其间的差为零。

公开(公告)号：US20100139775A1

公开(公告)日：2010-06-10

申请号：US11913277

申请日：2006-06-22

申请人： Tadahiro Ohmi ,  Masahito Saito ,  Shoichi Hino ,  Tsuyoshi Shimazu ,  Kazuyuki Miura ,  Kouji Nishino ,  Masaaki Nagase ,  Katsuyuki Sugita ,  Kaoru Hirata ,  Ryousuke Dohi ,  Takashi Hirose ,  Tsutomu Shinohara ,  Nobukazu Ikeda ,  Tomokazu Imai ,  Toshihide Yoshida ,  Hisashi Tanaka

发明人： Tadahiro Ohmi ,  Masahito Saito ,  Shoichi Hino ,  Tsuyoshi Shimazu ,  Kazuyuki Miura ,  Kouji Nishino ,  Masaaki Nagase ,  Katsuyuki Sugita ,  Kaoru Hirata ,  Ryousuke Dohi ,  Takashi Hirose ,  Tsutomu Shinohara ,  Nobukazu Ikeda ,  Tomokazu Imai ,  Toshihide Yoshida ,  Hisashi Tanaka

IPC分类号： F15D1/00

CPC分类号： G05D7/0641 ,  G01F1/363 ,  G01F1/6842 ,  G01F1/6847 ,  G01F5/005 ,  G01F7/005 ,  G05D7/0635 ,  G05D7/0647 ,  G05D23/1927 ,  Y10T137/0379 ,  Y10T137/7759 ,  Y10T137/776 ,  Y10T137/8593 ,  Y10T137/86734 ,  Y10T137/86815 ,  Y10T137/87265 ,  Y10T137/87314 ,  Y10T137/8741 ,  Y10T137/87499 ,  Y10T137/87684

摘要： A pressure type flow control device enabling a reduction in size and an installation cost by accurately controlling the flow of a fluid in a wide flow range. Specifically, the flow of the fluid flowing in an orifice (8) is calculated as Qc=KP1 (K is a proportionality factor) or Qc=KP2m(P1−P2)n (K is a proportionality factor and m and n are constants) by using a pressure P1 on the upstream side of the orifice and a pressure P2 on the downstream side of the orifice. A fluid passage between the downstream side of the control valve of the flow control device and a fluid feed pipe is formed of at least two or more fluid passages positioned parallel with each other. Orifices with different fluid flow characteristics are interposed in the fluid passages positioned parallel with each other. For the control of the fluid in a small flow area, the fluid in the small flow area is allowed to flow to one orifice. For the control of the flow in the large flow area, the fluid in the large flow area is allowed to flow to the other orifice by switching the fluid passages.

摘要翻译： 一种压力式流量控制装置，通过精确地控制在大流量范围内的流体的流动，能够减小尺寸和安装成本。 具体地说，在孔（8）中流动的流体的流量被计算为Qc = KP1（K是比例因子）或Qc = KP2m（P1-P2）n（K是比例因子，m和n是常数） 通过使用孔口上游侧的压力P1和孔口下游侧的压力P2。 在流量控制装置的控制阀的下游侧和流体供给管之间的流体通道由彼此平行定位的至少两个或更多个流体通道形成。 具有不同流体流动特性的孔口插入彼此平行定位的流体通道中。 为了控制小流量区域中的流体，允许小流量区域中的流体流到一个孔口。 为了控制大流量区域中的流动，通过切换流体通道允许大流量区域中的流体流向另一个孔口。

公开(公告)号：US08601976B2

公开(公告)日：2013-12-10

申请号：US12680159

申请日：2008-07-17

申请人： Kouji Nishino ,  Ryousuke Dohi ,  Masaaki Nagase ,  Kaoru Hirata ,  Katsuyuki Sugita ,  Nobukazu Ikeda

发明人： Kouji Nishino ,  Ryousuke Dohi ,  Masaaki Nagase ,  Kaoru Hirata ,  Katsuyuki Sugita ,  Nobukazu Ikeda

IPC分类号： C23C16/52 ,  H01L21/306 ,  C23F1/00 ,  C23C16/06 ,  C23C16/22

CPC分类号： C23C16/455 ,  C23C16/45561 ,  C23C16/52

摘要： A gas supply system includes a main gas supply line; a vent gas supply line; a plurality of gas supply mechanisms disposed in middle of both gas supply lines; a pressure type flow-rate control system disposed on an inlet side of the main gas supply line so a flow of carrier gas is supplied to the main gas supply line; a pressure control system disposed on an inlet side of the vent gas supply line, a carrier gas having a predetermined pressure is supplied to the vent gas supply line while the pressure control system performs a pressure adjustment, a gas pressure of the main gas supply line detected downstream from an orifice of the pressure type flow-rate control system and a gas pressure of the vent gas supply line are compared, and the gas pressure of the vent gas supply line is adjusted so a difference therebetween becomes zero.

摘要翻译： 气体供应系统包括主气供应管线; 排气供气管线; 设置在两个气体供给管线的中间的多个气体供给机构; 压力型流量控制系统，设置在主气体供给管线的入口侧，从而将载气流供应到主气体供应管线; 设置在排出气体供给管路的入口侧的压力控制系统，在压力控制系统进行压力调整，主气体供给管线的气体压力的情况下，将具有规定压力的载气供给到排气供给管线 从压力式流量控制系统的孔口下游检测出气体供给管路的气体压力，调整排出气体供给管路的气体压力，使其间的差为零。

公开(公告)号：US20090171507A1

公开(公告)日：2009-07-02

申请号：US11913271

申请日：2006-05-10

申请人： Tadahiro Ohmi ,  Kouji Nishino ,  Ryousuke Dohi ,  Nobukazu Ikeda ,  Masaaki Nagase ,  Kaoru Hirata ,  Katsuyuki Sugita ,  Tsutomu Shinohara ,  Takashi Hirose ,  Tomokazu Imai ,  Toshihide Yoshida ,  Hisashi Tanaka

发明人： Tadahiro Ohmi ,  Kouji Nishino ,  Ryousuke Dohi ,  Nobukazu Ikeda ,  Masaaki Nagase ,  Kaoru Hirata ,  Katsuyuki Sugita ,  Tsutomu Shinohara ,  Takashi Hirose ,  Tomokazu Imai ,  Toshihide Yoshida ,  Hisashi Tanaka

IPC分类号： G05D7/06 ,  F16L55/027 ,  F16K31/12

CPC分类号： F16K27/003 ,  F16L55/02718 ,  G01F1/36 ,  G01F15/001 ,  G01F15/005 ,  G05D7/0635

摘要： An orifice changeable pressure type flow rate control apparatus comprises a valve body of a control valve for a pressure type flow rate control apparatus installed between an inlet side fitting block provided with a coupling part of a fluid supply pipe and an outlet side fitting block provided with a coupling part of a fluid takeout pipe; a fluid inlet side of the valve body and the inlet side fitting block, and a fluid outlet side of the valve body and the outlet side fitting block are detachably and hermitically connected respectively so a flow passage for gases through the control valve is formed; and, a gasket type orifice for a pressure type flow rate control apparatus is removably inserted between a gasket type orifice insertion hole provided on the outlet side of the valve body and a gasket type orifice insertion hole of the outlet side fitting block.

摘要翻译： 节流孔可变压力型流量控制装置包括安装在设置有流体供给管的联接部的入口侧配件块和设置有流体供给管的出口侧配件块之间的压力型流量控制装置的控制阀的阀体 流体取出管的联接部分; 阀体和入口侧配件块的流体入口侧和阀体和出口侧配件块的流体出口侧分别可拆卸地和隐蔽地连接，从而形成用于通过控制阀的气体的流动通道; 并且用于压力式流量控制装置的垫圈型孔口可移除地插入设置在阀体的出口侧的垫圈型孔插入孔和出口侧配件块的衬垫型孔插入孔之间。