公开(公告)号：US20070078269A1

公开(公告)日：2007-04-05

申请号：US11390365

申请日：2006-03-28

申请人： Yukako Harada ,  Ichiki Takemoto ,  Kouji Toishi

发明人： Yukako Harada ,  Ichiki Takemoto ,  Kouji Toishi

IPC分类号： C08K5/15 ,  C07D313/04 ,  C07D313/16

CPC分类号： C07D307/33 ,  C07C381/12 ,  C07D307/77 ,  C08K5/42 ,  G03F7/0045

摘要： The present invention provides a salt of the formula (I): wherein ring Y represents monocyclic or polycyclic hydrocarbon group having 3 to 30 carbon atoms, in which one —CH2— group is substituted with —COO— group, and at least one hydrogen atom in the monocyclic or polycyclic hydrocarbon group may optionally be substituted with alkyl group having 1 to 6 carbon atom, alkoxy group having 1 to 6 carbon atom, perfluoroalkyl group having 1 to 4 carbon atoms, hydroxyalkyl group having 1 to 6 carbon atoms, hydroxyl group or cyano group; Q1 and Q2 each independently represent fluorine atom or perfluoroalkyl group having 1 to 6 carbon atoms; A+ represents organic counter ion; and n shows an integer of 0 to 12. The present invention also provides a chemically amplified resist composition comprising the salt of the formula (I).

摘要翻译： 本发明提供式（I）的盐：其中环Y表示具有3-30个碳原子的单环或多环烃基，其中一个-CH 2 - 基团被-COO- 并且单环或多环烃基中的至少一个氢原子可以任选地被具有1至6个碳原子的烷基，具有1至6个碳原子的烷氧基，具有1至4个碳原子的全氟烷基取代，具有 1至6个碳原子，羟基或氰基; Q 1和Q 2各自独立地表示氟原子或具有1至6个碳原子的全氟烷基; A ^{+ 代表有机抗衡离子; 并且n表示0至12的整数。本发明还提供包含式（I）的盐的化学放大抗蚀剂组合物。}

公开(公告)号：US5998591A

公开(公告)日：1999-12-07

申请号：US81657

申请日：1998-05-20

申请人： Kouji Toishi ,  Nobutaka Kunimi ,  Yoshiteru Ohta

发明人： Kouji Toishi ,  Nobutaka Kunimi ,  Yoshiteru Ohta

IPC分类号： C09B62/01 ,  C09B62/03 ,  C09B62/09 ,  C09B62/25 ,  C09B62/44 ,  C09B62/513 ,  D06P1/38

CPC分类号： C09B62/01 ,  C09B62/03 ,  C09B62/09 ,  C09B62/25 ,  C09B62/4415 ,  C09B62/513

摘要： There is provided a bisazo compound which is useful as a reactive dye for dyeing or printing a fiber material in an orange to scarlet or red color; the bisazo compound being represented by the following formula (1): ##STR1## wherein m and n represents 0 or 1; W represents a divalent connecting group represented by --NH-- or --NHCONH--;D.sup.1 and D.sup.2 represent a group represented by the following formula (2a), (2b), (2c) or (2d) ##STR2## wherein Y represents --CH.dbd.CH.sub.2 or --CH.sub.2 CH.sub.2 L, in which L represents a group eliminatable by the action of an alkali.

摘要翻译： 提供双偶氮化合物，其可用作活性染料，用于将橙色至红色或红色的纤维材料染色或印刷; 双偶氮化合物由下式（1）表示：其中m和n表示0或1; W表示由-NH-或-NHCONH-表示的二价连接基团; D1和D2表示由下式（2a），（2b），（2c）或（2d）表示的基团，其中Y表示-CH = CH 2或-CH 2 CH 2 L，其中L表示可通过碱的作用消除的基团 。

公开(公告)号：US20060194982A1

公开(公告)日：2006-08-31

申请号：US11353010

申请日：2006-02-14

申请人： Yukako Harada ,  Ichiki Takemoto ,  Kouji Toishi

发明人： Yukako Harada ,  Ichiki Takemoto ,  Kouji Toishi

IPC分类号： C07C309/12

CPC分类号： C07C309/17 ,  C07C381/12 ,  C07C2603/74

摘要： The present invention provides a salt of the formula (I) wherein X represents —OH or —Y—OH, n shows an integer of 1 to 9, A+ represents an organic counter ion, Y represents a divalent saturated aliphatic hydrocarbon group having 1 to 6 carbon atoms. The present invention also provides a chemically amplified resist composition comprising the salt of the formula (I).

摘要翻译： 本发明提供式（I）的盐，其中X表示-OH或-Y-OH，n表示1〜9的整数，A +表示有机抗衡离子，Y表示 具有1至6个碳原子的二价饱和脂族烃基。 本发明还提供了包含式（I）的盐的化学放大抗蚀剂组合物。

公开(公告)号：US06893792B2

公开(公告)日：2005-05-17

申请号：US10366673

申请日：2003-02-14

申请人： Yoshiko Miya ,  Kouji Toishi ,  Kazuhiko Hashimoto

发明人： Yoshiko Miya ,  Kouji Toishi ,  Kazuhiko Hashimoto

IPC分类号： G03F7/004 ,  G03F7/039

CPC分类号： G03F7/0046 ,  G03F7/0045 ,  G03F7/0395 ,  Y10S430/108

摘要： The present invention provides a positive resist composition comprising a resin which itself is insoluble or poorly soluble in an alkali aqueous solution but becomes soluble in an alkali aqueous solution by the action of an acid, and an acid generator, wherein the content of halogen atoms in the resin is 40% by weight or more, at least one of structural units constituting the resin is a structural unit having an alicyclic hydrocarbon skeleton, and the structural unit having an alicyclic hydrocarbon skeleton contains therein at least one group rendering the resin soluble in an alkali aqueous solution by the action of an acid, and at least one halogen atom.

摘要翻译： 本发明提供一种正型抗蚀剂组合物，其包含本身在碱性水溶液中不溶或难溶于但通过酸作用而在碱性水溶液中溶解的树脂，和酸产生剂，其中卤素原子的含量 树脂为40重量％以上，构成树脂的结构单元中的至少一个为具有脂环烃骨架的结构单元，具有脂环烃骨架的结构单元含有至少一个使树脂溶于 碱水溶液，通过酸的作用和至少一个卤素原子。

公开(公告)号：US07129014B2

公开(公告)日：2006-10-31

申请号：US10404671

申请日：2003-04-02

申请人： Kouji Toishi ,  Yoshiko Miya ,  Yasunori Uetani

发明人： Kouji Toishi ,  Yoshiko Miya ,  Yasunori Uetani

IPC分类号： G03C1/71

CPC分类号： G03F7/0045 ,  C08F8/44 ,  G03F7/0046 ,  G03F7/0395 ,  Y10S430/108

摘要： The present invention provides a positive resist composition comprising a resin which itself is insoluble or poorly soluble in an alkali aqueous solution but becomes soluble in an alkali aqueous solution by the action of an acid, an acid generator, and multifunctional epoxy compound, wherein the content of halogen atoms in the resin is 40% by weight or more, at least one of structural units constituting the resin is a structural unit having an alicyclic hydrocarbon skeleton, and the structural unit having an alicyclic hydrocarbon skeleton contains therein at least one group rendering the resin soluble in an alkali aqueous solution by the action of an acid, and at least one halogen atom.

公开(公告)号：US5886159A

公开(公告)日：1999-03-23

申请号：US912670

申请日：1997-08-18

申请人： Nobutaka Kunimi ,  Kouji Toishi

发明人： Nobutaka Kunimi ,  Kouji Toishi

IPC分类号： C09B62/44 ,  C09B62/513 ,  C09B62/09 ,  D06P1/38

CPC分类号： C09B62/513 ,  C09B62/4415

摘要： A bisazo compound represented by the following general formula (I) or its salt is a useful fiber-reactive dye: ##STR1## where D is a phenyl or naphthyl group; B is a phenylene group, etc.; U is an aliphatic or aromatic linking group; Z is a vinyl group, etc.; and X and Y are a halogen atom, a pyridinio group, etc.

摘要翻译： 由以下通式（I）表示的双偶氮化合物或其盐是有用的纤维活性染料：其中D是苯基或萘基; B是亚苯基等; U是脂族或芳族连接基团; Z是乙烯基等; X和Y是卤素原子，吡啶基等

公开(公告)号：US07579497B2

公开(公告)日：2009-08-25

申请号：US11390365

申请日：2006-03-28

申请人： Yukako Harada ,  Ichiki Takemoto ,  Kouji Toishi

发明人： Yukako Harada ,  Ichiki Takemoto ,  Kouji Toishi

IPC分类号： C07C69/74 ,  C07C69/00 ,  G03C1/00

CPC分类号： C07D307/33 ,  C07C381/12 ,  C07D307/77 ,  C08K5/42 ,  G03F7/0045

摘要： The present invention provides a salt of the formula (I): wherein ring Y represents monocyclic or polycyclic hydrocarbon group having 3 to 30 carbon atoms, in which one —CH2— group is substituted with —COO— group, and at least one hydrogen atom in the monocyclic or polycyclic hydrocarbon group may optionally be substituted with alkyl group having 1 to 6 carbon atom, alkoxy group having 1 to 6 carbon atom, perfluoroalkyl group having 1 to 4 carbon atoms, hydroxyalkyl group having 1 to 6 carbon atoms, hydroxyl group or cyano group; Q1 and Q2 each independently represent fluorine atom or perfluoroalkyl group having 1 to 6 carbon atoms; A+ represents organic counter ion; and n shows an integer of 0 to 12. The present invention also provides a chemically amplified resist composition comprising the salt of the formula (I).

摘要翻译： 本发明提供式（I）的盐：其中环Y表示具有3-30个碳原子的单环或多环烃基，其中一个-CH 2 - 基团被-COO-基团取代，并且至少一个氢原子 在单环或多环烃基中可以任选地被具有1-6个碳原子的烷基，具有1-6个碳原子的烷氧基，具有1至4个碳原子的全氟烷基，具有1至6个碳原子的羟基烷基，羟基 或氰基; Q1和Q2各自独立地表示氟原子或具有1至6个碳原子的全氟烷基; A +代表有机抗衡离子; 并且n表示0至12的整数。本发明还提供包含式（I）的盐的化学放大抗蚀剂组合物。

公开(公告)号：US07304175B2

公开(公告)日：2007-12-04

申请号：US11353010

申请日：2006-02-14

申请人： Yukako Harada ,  Ichiki Takemoto ,  Kouji Toishi

发明人： Yukako Harada ,  Ichiki Takemoto ,  Kouji Toishi

IPC分类号： C07C69/00

CPC分类号： C07C309/17 ,  C07C381/12 ,  C07C2603/74

摘要： The present invention provides a salt of the formula (I) wherein X represents —OH or —Y—OH, n shows an integer of 1 to 9, A+ represents an organic counter ion, Y represents a divalent saturated aliphatic hydrocarbon group having 1 to 6 carbon atoms. The present invention also provides a chemically amplified resist composition comprising the salt of the formula (I).

摘要翻译： 本发明提供式（I）的盐，

公开(公告)号：US20070088131A1

公开(公告)日：2007-04-19

申请号：US11638543

申请日：2006-12-14

申请人： Kouji Toishi ,  Yasunori Uetani

发明人： Kouji Toishi ,  Yasunori Uetani

IPC分类号： C08F214/18

CPC分类号： G03F7/0395 ,  G03F7/0045 ,  G03F7/0046

摘要： The present invention provides a sulfonate of the formula (I): wherein Q1, Q2, Q3, Q4 and Q5 each independently represent hydrogen, alkyl having 1 to 16 carbon atoms, alkoxy having 1 to 16 carbon atoms, halogen, aryl having 6 to 12 carbon atoms, aralkyl having 7 to 12 carbon atoms, cyano, sulfide, hydroxy, nitro or a group of the formula (I′) —COO—X—Cy1   (I′) wherein X represents alkylene and at least one —CH2— in the alkylene may be substituted by —O— or —S—, and Cy1 represents alicyclic hydrocarbon having 3 to 20 carbon atoms, and A+ represents a counter ion, with the proviso that at least one of Q1, Q2, Q3, Q4 and Q5 is the group of the formula (I′). The present invention also provides a chemical amplification type positive resist composition comprising a sulfonate of the formula (I) and resin which contains a structural unit having an acid labile group and which itself is insoluble or poorly soluble in an alkali aqueous solution but becomes soluble in an alkali aqueous solution by the action of an acid

摘要翻译： 本发明提供式（I）的磺酸盐：其中Q 1，Q 2，Q 3，Q 4， 各自独立地表示氢，具有1至16个碳原子的烷基，具有1至16个碳原子的烷氧基，卤素，具有6至12个碳原子的芳基，具有7-12个碳原子的芳烷基 原子，氰基，硫化物，羟基，硝基或式（I'）的基团<？in-line-formula description =“In-line formula”end =“lead”→COO-X-Cy < （I'）<？in-line-formula description =“In-line Formulas”end =“tail”？>其中X表示亚烷基和至少一个-CH 2 - 在亚烷基中可以被-O-或-S-取代，Cy1表示具有3〜20个碳原子的脂环族烃基，A + O表示抗衡离子， 条件是Q 1，Q 2，Q 3，Q 4和Q 3中的至少一个， SUP> 5 是式（I'）的基团。 本发明还提供一种化学扩增型正性抗蚀剂组合物，其包含式（I）的磺酸盐和含有具有酸不稳定基团的结构单元的树脂，其本身在碱性水溶液中不溶或难溶于但溶于 碱性水溶液通过酸的作用

公开(公告)号：US07132218B2

公开(公告)日：2006-11-07

申请号：US11082835

申请日：2005-03-18

申请人： Kouji Toishi ,  Yoshiyuki Takata ,  Satoshi Yamaguchi

发明人： Kouji Toishi ,  Yoshiyuki Takata ,  Satoshi Yamaguchi

IPC分类号： G03F7/004

CPC分类号： G03F7/0045 ,  G03F7/0397 ,  Y10S430/106 ,  Y10S430/111

摘要： The present invention provide a chemically amplified positive resist composition comprising a resin which contains a structural unit having an acid labile group and which itself is insoluble or poorly soluble in an alkali aqueous solution and becomes soluble in an alkali aqueous solution by the action of an acid; an acid generator; and a compound of the formula (C-1) wherein R1 and R2 each independently represents a hydrogen or an alkyl having 1 to 4 carbon atoms, R3, R4 and R5 each independently represents a hydrogen or a hydroxyl.

摘要翻译： 本发明提供了一种化学放大型正性抗蚀剂组合物，其包含含有具有酸不稳定基团的结构单元的树脂，其本身在碱性水溶液中不溶或难溶，并且通过酸的作用变得可溶于碱性水溶液 ; 酸发生器; 和其中R 1和R 2各自独立地表示氢或具有1至4个碳原子的烷基的式（C-1）化合物， R 4，R 4和R 5各自独立地表示氢或羟基。