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公开(公告)号：US20110042876A1
公开(公告)日：2011-02-24
申请号：US12902496
申请日：2010-10-12
CPC分类号： B25B1/00 , B65G49/061 , B65G2249/02
摘要： Provided is a substrate stage which can transfer a substrate at a high speed. In the substrate stage of the present invention, auxiliary mounting tables are attached to a main mounting table, and lower rails are arranged over on the main mounting table and above the auxiliary mounting tables. When both ends of the lower rails are bent upwardly by a vertically adjusting unit in order to prevent the both ends of the lower rails to be bent downwardly, the lower rails are made straight. Since the lower rail is not divided, the linearity is ensured and the moving plate does not stutter so that transfer of the substrate at high speed can be performed.
摘要翻译： 提供能够高速地转印基板的基板台。 在本发明的基板台中，辅助安装台安装在主安装台上，下导轨布置在主安装台上并在辅助安装台上方。 当下轨道的两端通过垂直调节单元向上弯曲，以防止下轨道的两端向下弯曲时，下导轨成直线。 由于下轨道未被分割，所以确保了线性，并且移动板不会开口，从而可以高速地传送基板。
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公开(公告)号：US20110048319A1
公开(公告)日：2011-03-03
申请号：US12877319
申请日：2010-09-08
IPC分类号： B05C13/00 , H01L21/677 , B05C5/00
CPC分类号： B65G49/065 , B65G2249/04 , G01N21/956 , H01L21/67742 , Y10T29/53961
摘要： A substrate transfer processing apparatus capable of processing a substrate at high speed is provided. A mounting table on which a substrate is mounted includes a plate-shaped main body and a recessed part formed in a rear surface of the plate-shaped main body. Since the mounting table is lightweight as compared to the mounting table before the recessed part is formed therein, the load on a motor is small and the running cost is low even when the mounting table is moved at high speed. Because the plate-shaped main body is made of granite, the mounting surface can be made flat and smooth by polishing. Since the mounting surface is flat and smooth, the accuracy in positioning the substrate is high.
摘要翻译： 提供能够高速处理基板的基板转印处理装置。 其上安装有基板的安装台包括形成在板状主体的后表面上的板状主体和凹部。 由于与在安装台形成凹部之前的安装台相比，由于安装台重量轻，所以即使在安装台高速移动的情况下，电动机的负荷也小，运行成本低。 由于板状主体由花岗岩制成，因此可以通过抛光使安装面平坦平滑。 由于安装面平坦光滑，因此基板的定位精度高。
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公开(公告)号：US08827254B2
公开(公告)日：2014-09-09
申请号：US12877319
申请日：2010-09-08
IPC分类号： B23Q1/25 , B65G49/06 , H01L21/677 , G01N21/956
CPC分类号： B65G49/065 , B65G2249/04 , G01N21/956 , H01L21/67742 , Y10T29/53961
摘要： A substrate transfer processing apparatus capable of processing a substrate at high speed is provided. A mounting table on which a substrate is mounted includes a plate-shaped main body and a recessed part formed in a rear surface of the plate-shaped main body. Since the mounting table is lightweight as compared to the mounting table before the recessed part is formed therein, the load on a motor is small and the running cost is low even when the mounting table is moved at high speed. Because the plate-shaped main body is made of granite, the mounting surface can be made flat and smooth by polishing. Since the mounting surface is flat and smooth, the accuracy in positioning the substrate is high.
摘要翻译： 提供能够高速处理基板的基板转印处理装置。 其上安装有基板的安装台包括形成在板状主体的后表面上的板状主体和凹部。 由于与在安装台形成凹部之前的安装台相比，由于安装台重量轻，所以即使在安装台高速移动的情况下，电动机的负荷也小，运行成本低。 由于板状主体由花岗岩制成，因此可以通过抛光使安装面平坦平滑。 由于安装面平坦光滑，因此基板的定位精度高。
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公开(公告)号：US08783674B2
公开(公告)日：2014-07-22
申请号：US12902496
申请日：2010-10-12
IPC分类号： B25B1/00
CPC分类号： B25B1/00 , B65G49/061 , B65G2249/02
摘要： Provided is a substrate stage which can transfer a substrate at a high speed. In the substrate stage of the present invention, auxiliary mounting tables are attached to a main mounting table, and lower rails are arranged over on the main mounting table and above the auxiliary mounting tables. When both ends of the lower rails are bent upwardly by a vertically adjusting unit in order to prevent the both ends of the lower rails to be bent downwardly, the lower rails are made straight. Since the lower rail is not divided, the linearity is ensured and the moving plate does not stutter so that transfer of the substrate at high speed can be performed.
摘要翻译： 提供可以高速地传送基板的基板台。 在本发明的基板台中，辅助安装台安装在主安装台上，下导轨布置在主安装台上并在辅助安装台上方。 当下轨道的两端通过垂直调节单元向上弯曲，以防止下轨道的两端向下弯曲时，下导轨成直线。 由于下轨道未被分割，所以确保了线性，并且移动板不会开口，从而可以高速地传送基板。
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公开(公告)号：US5896398A
公开(公告)日：1999-04-20
申请号：US950608
申请日：1997-10-15
申请人： Kuniyoshi Sekine
发明人： Kuniyoshi Sekine
CPC分类号： G11C29/52
摘要： A flash memory test system supplies test data to a flash memory under test to write the test data in the specified address of the memory and compares the data in the specified address with expected data to determined whether the data writing for the address is completed. If the data writing is unsuccessful, the write operation is repeated until the test data is correctly stored in the address or the predetermined maximum number of the write operation is reached. The number of repeated write operation is recorded for each address and displayed relative to the physical image of the flash memory under test. The flash memory test system includes a comparator for comparing the data in the flash memory under test with the expected data, a fail counter for counting the number of write operation, a fail analysis memory for storing fail information and the counted numbers, and a work station for processing the fail information and the counted numbers and displaying the results of the analysis with respect to a physical image of the flash memory under test.
摘要翻译： 闪存测试系统将测试数据提供给被测试的闪存，以将测试数据写入存储器的指定地址，并将指定地址中的数据与预期数据进行比较，以确定地址的写入是否完成。 如果数据写入不成功，则重复写入操作，直到测试数据被正确地存储在地址中或达到预定的最大写入操作次数。 针对每个地址记录重复写入操作的数量，并相对于被测闪存的物理图像显示。 闪速存储器测试系统包括比较器，用于将待测闪存中的数据与预期数据进行比较，用于对写入操作次数进行计数的故障计数器，用于存储故障信息的故障分析存储器和计数的数字，以及工作 用于处理故障信息和计数的数字并显示关于被测闪存的物理图像的分析结果。
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