公开(公告)号：US06546623B2

公开(公告)日：2003-04-15

申请号：US10095477

申请日：2002-03-13

Applicant: Stéphane Caplet ,  Marie-Thérèse Delaye

Inventor： Stéphane Caplet ,  Marie-Thérèse Delaye

IPC: H05K310

CPC classification number: G01L19/0069 ,  G01B7/003 ,  H01L21/76898 ,  H01L23/481 ,  H01L2924/0002 ,  Y10T29/49126 ,  Y10T29/49155 ,  Y10T29/49165 ,  H01L2924/00012 ,  H01L2924/00

Abstract: A process for manufacturing a structure equipped with at least one electrical contact, including forming on a substrate a first layer, forming on a front side of the first layer the structure equipped with at least one electrical contact, forming at least one hole though the substrate revealing a rear side of the first layer, and forming an electrical contact to the rear side in a cavity overhung by an edge of the at least one hole closest to the first layer, the edge allowing for electrical insulation of the electrical contact from the substrate.

Abstract translation: 一种用于制造装配有至少一个电接触的结构的方法，包括在基底上形成第一层，在第一层的正面上形成配备有至少一个电接触的结构，该结构至少形成一个穿过基底的孔 露出第一层的后侧，并且在由最靠近第一层的至少一个孔的边缘悬垂的空腔中形成与后侧的电接触，该边缘允许电接触从基底电绝缘 。

公开(公告)号：US06431005B1

公开(公告)日：2002-08-13

申请号：US09060607

申请日：1998-04-15

Applicant: Marie-Thérèse Delaye

Inventor： Marie-Thérèse Delaye

IPC: G01L912

CPC classification number: G06K9/0002 ,  G01L9/0042 ,  G01L9/0073

Abstract: A pressure sensor cell has a substrate including at least a first electrode and a deformable membrane. The membrane is fixed by its peripheral edge to the substrate and is spaced from the substrate to define a closed chamber around at least a part of the first electrode. A second electrode is provided formed on a wall of the membrane. The second electrode faces the first electrode and is kept separate from the first electrode if no pressure is exerted on the membrane. Finally, an electronic circuit is placed in the substrate under the first electrode.

Abstract translation: 压力传感器单元具有至少包括第一电极和可变形膜的基板。 膜通过其外围边缘固定到基底并且与基底间隔开以限定围绕第一电极的至少一部分的封闭腔室。 提供形成在膜的壁上的第二电极。 如果没有压力施加在膜上，则第二电极面对第一电极并与第一电极分离。 最后，在第一电极下方的基板中放置电子电路。

公开(公告)号：US07700457B2

公开(公告)日：2010-04-20

申请号：US10500196

申请日：2002-12-17

Applicant: Bernard Diem ,  Stephane Caplet ,  Marie-Thérèse Delaye

Inventor： Bernard Diem ,  Stephane Caplet ,  Marie-Thérèse Delaye

IPC: H01L21/30

CPC classification number: B81B7/0077

Abstract: The invention concerns a sealing zone between two microstructure substrates. Said sealing zone comprises at least the following parts: on a first wafer level (20), a lower edging (22A) made of an adhesive material capable of causing the first substrate (20) to adhere to a sealing material, said sealing material being adapted to spontaneously diffuse jointly with the material of the second wafer level (30); on said lower edging (22A), a layer of said sealing material; and on said layer of sealing material, a protuberance (36) formed on said second wafer level (30) containing a certain amount of sealing material. The invention is applicable to microstructures comprising vacuum-operated components.

Abstract translation: 本发明涉及两个微结构基片之间的密封区。 所述密封区域至少包括以下部分：在第一晶片级（20）上，由能够使第一基板（20）粘附到密封材料上的粘合剂材料制成的下边缘（22A），所述密封材料 适于与第二晶片级（30）的材料共同扩散; 在所述下边缘（22A）上形成一层所述密封材料; 并且在所述密封材料层上形成有包含一定量的密封材料的所述第二晶片级（30）上的突起（36）。 本发明适用于包括真空操作部件的微结构。

公开(公告)号：US06435033B1

公开(公告)日：2002-08-20

申请号：US09814780

申请日：2001-03-22

Applicant: Marie-Thérèse Delaye

Inventor： Marie-Thérèse Delaye

IPC: G01L900

Abstract: A process for manufacturing a microsystem for a pressure sensor includes the steps of deposit and forming a first conducting layer on a support. Deposit and forming a layer of sacrificial material covering the first conducting layer. Deposit and forming a second conducting layer on the layer of sacrificial material in the region located above the first conducting layer. Forming a first membrane layer covering and surrounding the layer of sacrificial material and the second conducting layer. Eliminating the layer of sacrificial material and forming the first membrane layer.

公开(公告)号：US06392158B1

公开(公告)日：2002-05-21

申请号：US09529411

申请日：2000-08-08

Applicant: Stéphane Caplet ,  Marie-Thérèse Delaye

Inventor： Stéphane Caplet ,  Marie-Thérèse Delaye

IPC: H05K103

CPC classification number: G01L19/0069 ,  G01B7/003 ,  H01L21/76898 ,  H01L23/481 ,  H01L2924/0002 ,  Y10T29/49126 ,  Y10T29/49155 ,  Y10T29/49165 ,  H01L2924/00012 ,  H01L2924/00

Abstract: A stack including a micro-system having an electrical contact to connect the micro-system to the outside world, a substrate having a first layer formed on the substrate, a through hole extending in an axial direction of the substrate and configured to reveal a rear side of the first layer and to provide a passage to electrically connect to the electrical contact, and a cavity located at an end of the through hole close to the first layer, wherein the cavity has dimensions transverse to the axial direction larger than a diameter of the through hole and forms an overhanging edge around the through hole.

Abstract translation: 一种包括具有用于将微系统连接到外界的电触点的微系统的堆叠，具有形成在基板上的第一层的基板，沿着基板的轴向方向延伸并且被配置为露出后部的通孔 并且提供电气连接到电接触的通道，以及位于靠近第一层的通孔端部的空腔，其中空腔具有横向于轴向方向的尺寸大于直径 该通孔在通孔周围形成伸出的边缘。