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公开(公告)号：US20130224042A1
公开(公告)日：2013-08-29
申请号：US13882413
申请日：2011-12-19
Applicant: Masaki Ohfuji , Toshifumi Hashimoto , Shingo Tanaka
Inventor： Masaki Ohfuji , Toshifumi Hashimoto , Shingo Tanaka
IPC: F04D15/00
CPC classification number: F04D27/0292 , F04D19/042 , F04D19/048 , F04D27/001 , F04D29/644
Abstract: A vacuum pump includes: a rotor that is rotated to perform evacuation; a pump disassembly detection circuit that detects a disassembled state in which the vacuum pump is disassembled; and a pump operation prohibition circuit that prohibits rotary drive of the rotor when the pump operation prohibition circuit determines that the pump disassembly detection circuit has detected the disassembled state.
Abstract translation: 真空泵包括：旋转以进行抽真空的转子; 泵拆卸检测电路，其检测真空泵被拆卸的拆卸状态; 以及泵操作禁止电路，当泵操作禁止电路确定泵拆卸检测电路检测到拆卸状态时，禁止转子的旋转驱动。
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公开(公告)号：US07965054B2
公开(公告)日：2011-06-21
申请号：US11878700
申请日：2007-07-26
Applicant: Yoshio Tsunazawa , Akira Arakawa , Junichiro Kozaki , Masaki Ohfuji
Inventor： Yoshio Tsunazawa , Akira Arakawa , Junichiro Kozaki , Masaki Ohfuji
CPC classification number: F04D19/042 , F04D27/001 , F04D29/053 , H02K11/25
Abstract: A vacuum pump capable of accurately detecting a rotor temperature based on a change in permeability of a magnetic material. Two targets are fixed to a nut opposed to a gap sensor. The nut is made of pure iron, and a surface of the nut opposed to the gap sensor serves as a target. The target has a Curie temperature greater than a temperature monitoring range, and each of the targets has a Curie temperature falling within the temperature monitoring range. When the targets become opposed to the gap sensor in turn according to rotation of a rotor, three types of signals are output from the gap sensor. The difference-signal generation means generates a difference signal of each the targets, on the basis of a signal of the target. The difference signal is compared with a reference signal V0 for detecting the Curie temperatures to detect a rotor temperature.
Abstract translation: 一种能够基于磁性材料的磁导率的变化精确地检测转子温度的真空泵。 两个目标固定在与间隙传感器相对的螺母上。 螺母由纯铁制成，与间隙传感器相对的螺母表面作为目标。 目标的居里温度大于温度监控范围，每个目标的居里温度落在温度监控范围内。 当目标根据转子的旋转依次与间隙传感器相对时，从间隙传感器输出三种类型的信号。 差分信号产生装置根据目标信号产生每个目标的差分信号。 将差分信号与用于检测居里温度的参考信号V0进行比较，以检测转子温度。
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公开(公告)号：US20080088398A1
公开(公告)日：2008-04-17
申请号：US11936514
申请日：2007-11-07
Applicant: Junichiro KOZAKI , Masaki OHFUJI
Inventor： Junichiro KOZAKI , Masaki OHFUJI
IPC: H01F7/04
CPC classification number: F04D29/048 , F04D19/042 , F04D29/058 , F16C32/0451 , F16C2360/45
Abstract: Disclosed is a magnetic bearing system capable of simplifying a demodulation operation and reducing a processing load associated with a magnetic levitation control. A carrier signal having a frequency fc is apply to a sensor through a filter. The sensor operates to modulate the carrier signal, and a difference amplifier operates to calculate a difference between the amplitude-modulated signal FAM (t) and a sensor reference signal Fstd (t). An A/D converter operates to A/D convert a difference signal Fsub (t) output from the difference amplifier to a discretized sensor signal. In the A/D conversion, a sampling frequency fs is set to satisfy the following relation: fc: fc=n·fs or fc=fs/2 (n is a natural number). Thus, the discretized sensor signal includes no carrier wave, and therefore a demodulation operation which has been previously essential can be simplified.
Abstract translation: 公开了一种能够简化解调操作并降低与磁悬浮控制相关联的处理负荷的磁轴承系统。 具有频率fc的载波信号通过滤波器应用于传感器。 传感器用于调制载波信号，并且差分放大器用于计算幅度调制信号F SUB AM（t）和传感器参考信号Fstd（t）之间的差值。 A / D转换器用于将从差分放大器输出的差分信号Fsub（t）A / D转换为离散化的传感器信号。 在A / D转换中，采样频率fs被设定为满足以下关系：fc：fc = n.fs或fc = fs / 2（n是自然数）。 因此，离散的传感器信号不包括载波，因此可以简化先前必要的解调操作。
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公开(公告)号：US07564670B2
公开(公告)日：2009-07-21
申请号：US11790977
申请日：2007-04-30
Applicant: Junichiro Kozaki , Masaki Ohfuji , Nobuhiko Moriyama
Inventor： Junichiro Kozaki , Masaki Ohfuji , Nobuhiko Moriyama
IPC: H01H47/00
CPC classification number: F16C32/0455 , F16C32/0446 , F16C2360/44 , F16C2360/45
Abstract: A magnetic bearing system for use in a vacuum pump including a motor provided with a rotary blade. The magnetic bearing system including a rotary shaft rotationally holding said rotor, a motor for rotationally driving said rotary shaft, a magnetic levitation section for supporting said rotor relative to a stator through said rotary shaft in a non-contact manner, a rotation detection section for detecting a rotational speed of said rotor, a rotor-temperature detection section for detecting a temperature of said rotor; a carrier-wave generation section for supplying a common carrier wave to each of a plurality of sensors provided in said magnetic levitation section, said rotation detection section and said rotor-temperature detection section, and an A/D conversion section for sampling a sensor signal output from each of said sensors, in synchronization with said carrier wave.
Abstract translation: 一种用于真空泵的磁性轴承系统，包括具有旋转叶片的马达。 磁轴承系统包括旋转地保持所述转子的旋转轴，用于旋转地驱动所述旋转轴的电动机，用于以非接触方式通过所述旋转轴相对于定子支撑所述转子的磁悬浮部分，用于 检测所述转子的转速;转子温度检测部，用于检测所述转子的温度; 用于向设置在所述磁悬浮部分，所述旋转检测部分和转子温度检测部分中的多个传感器中的每个传感器提供公共载波的载波产生部分和用于对传感器信号进行采样的A / D转换部分 与所述载波同步地从每个所述传感器输出。
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公开(公告)号：US07417398B2
公开(公告)日：2008-08-26
申请号：US11606014
申请日：2006-11-30
Applicant: Junichiro Kozaki , Yoshio Tsunazawa , Akira Arakawa , Masaki Ohfuji
Inventor： Junichiro Kozaki , Yoshio Tsunazawa , Akira Arakawa , Masaki Ohfuji
CPC classification number: F04D19/042 , F04C2220/12 , F04C2270/11 , F04C2270/19 , F04D29/058
Abstract: A vacuum pump includes at least one magnetic body located on a circle about a rotor rotational axis and having a Curie temperature within a rotor temperature monitoring range; an inductance detecting portion facing the circle so as to establish a gap between the circle and the inductance detecting portion, for detecting a change of magnetic permeability of the magnetic body as an inductance change when the magnetic body rotates; and a carrier generation device generating a carrier signal for providing in the inductance detecting portion. An A/D conversion device samples a detection signal of the inductance detecting portion synchronously with a carrier generation by the carrier generation device, and converts the detection signal to a digital signal. A determination device determines whether or not a temperature of the rotor exceeds a predetermined temperature, based on the change of the magnetic permeability of the magnetic body.
Abstract translation: 真空泵包括至少一个磁体，其位于围绕转子旋转轴线的圆周上，并具有转子温度监控范围内的居里温度; 电感检测部分，面对所述圆形，以便在所述圆和所述电感检测部分之间建立间隙，用于当所述磁体旋转时检测作为电感变化的所述磁体的磁导率的变化; 以及载波生成装置，其生成用于在电感检测部中提供的载波信号。 A / D转换装置与载波生成装置的载波生成同步地对电感检测部的检测信号进行采样，并将检测信号转换为数字信号。 判定装置基于磁体的导磁率的变化来判定转子的温度是否超过规定的温度。
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Patent Agency Ranking
公开(公告)号：US20070278884A1
公开(公告)日：2007-12-06
申请号：US11790977
申请日：2007-04-30
Applicant: Junichiro Kozaki , Masaki Ohfuji , Nobuhiko Moriyama
Inventor： Junichiro Kozaki , Masaki Ohfuji , Nobuhiko Moriyama
IPC: H02K7/09
CPC classification number: F16C32/0455 , F16C32/0446 , F16C2360/44 , F16C2360/45
Abstract: Disclosed is a magnetic bearing system for use in a vacuum pump including a rotor provided with a rotary blade. The magnetic bearing system comprises a rotary shaft rotationally holding the rotor, a motor for rotationally driving the rotary shaft, a magnetic levitation section for supporting the rotor relative to a stator through the rotary shaft in a non-contact manner, a rotation detection section for detecting a magnetic pole position of the motor, a rotor-temperature detection section for detecting a temperature of the rotor, a carrier-wave generation section for supplying a common carrier wave to each of a plurality of sensors provided in the magnetic levitation section, the rotation detection section and the rotor-temperature detection section, and an A/D conversion section for sampling a sensor signal output from each of the sensors, in synchronization with the carrier wave. Each of the sensors provided in the magnetic levitation section, the rotation detection section and the rotor-temperature detection section is operable to fix a relative phase relationship between respective AM modulated waves. i.e., sensor signals output from the sensors by receiving the carrier wave generated by the carrier-wave generation section
Abstract translation: 公开了一种用于真空泵的磁轴承系统，该真空泵包括具有旋转叶片的转子。 磁轴承系统包括旋转地保持转子的旋转轴，用于旋转驱动旋转轴的电动机，用于以非接触方式通过旋转轴相对于定子支撑转子的磁悬浮部分，用于 检测电动机的磁极位置，用于检测转子温度的转子温度检测部分，用于向设置在磁悬浮部分中的多个传感器中的每一个提供公共载波的载波产生部分， 旋转检测部和转子温度检测部，以及与载波同步地对从各传感器输出的传感器信号进行采样的A / D转换部。 提供在磁悬浮部分中的每个传感器，旋转检测部分和转子温度检测部分可操作以固定相应AM调制波之间的相对相位关系。 即通过接收由载波产生部产生的载波从传感器输出的传感器信号
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公开(公告)号：US20070145929A1
公开(公告)日：2007-06-28
申请号：US11606014
申请日：2006-11-30
Applicant: Junichiro Kozaki , Yoshio Tsunazawa , Akira Arakawa , Masaki Ohfuji
Inventor： Junichiro Kozaki , Yoshio Tsunazawa , Akira Arakawa , Masaki Ohfuji
IPC: F04B49/10
CPC classification number: F04D19/042 , F04C2220/12 , F04C2270/11 , F04C2270/19 , F04D29/058
Abstract: A vacuum pump includes at least one magnetic body located on a circle about a rotor rotational axis and having a Curie temperature within a rotor temperature monitoring range; an inductance detecting portion facing the circle so as to establish a gap between the circle and the inductance detecting portion, for detecting a change of magnetic permeability of the magnetic body as an inductance change when the magnetic body rotates; and a carrier generation device generating a carrier signal for providing in the inductance detecting portion. An A/D conversion device samples a detection signal of the inductance detecting portion synchronously with a carrier generation by the carrier generation device, and converts the detection signal to a digital signal. A determination device determines whether or not a temperature of the rotor exceeds a predetermined temperature, based on the change of the magnetic permeability of the magnetic body.
Abstract translation: 真空泵包括至少一个磁体，其位于围绕转子旋转轴线的圆周上，并具有转子温度监控范围内的居里温度; 电感检测部分，面对所述圆形，以便在所述圆和所述电感检测部分之间建立间隙，用于当所述磁体旋转时检测作为电感变化的所述磁体的磁导率的变化; 以及载波生成装置，其生成用于在电感检测部中提供的载波信号。 A / D转换装置与载波生成装置的载波生成同步地对电感检测部的检测信号进行采样，并将检测信号转换为数字信号。 判定装置基于磁体的导磁率的变化来判定转子的温度是否超过规定的温度。
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公开(公告)号：US10352327B2
公开(公告)日：2019-07-16
申请号：US13882413
申请日：2011-12-19
Applicant: Masaki Ohfuji , Toshifumi Hashimoto , Shingo Tanaka
Inventor： Masaki Ohfuji , Toshifumi Hashimoto , Shingo Tanaka
Abstract: A vacuum pump includes: a rotor that is rotated to perform evacuation; a pump disassembly detection circuit that detects a disassembled state in which the vacuum pump is disassembled; and a pump operation prohibition circuit that prohibits rotary drive of the rotor when the pump operation prohibition circuit determines that the pump disassembly detection circuit has detected the disassembled state.
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公开(公告)号：US20120321442A1
公开(公告)日：2012-12-20
申请号：US13581973
申请日：2010-03-11
Applicant: Yoshihiro Nagano , Masaki Ohfuji , Junichiro Kozaki
Inventor： Yoshihiro Nagano , Masaki Ohfuji , Junichiro Kozaki
IPC: F04D19/00
CPC classification number: F04D19/042 , F04D25/068 , F04D29/5813
Abstract: A turbomolecular pump device includes: a turbomolecular pump main body; a power unit that drives the turbomolecular pump main body; and a water cooling unit that is provided between the turbomolecular pump main body and the power unit, wherein components provided in a casing of the power unit are classified into an intensive cooling required component that requires intensive cooling, a moderate cooling required component that requires moderate cooling, and a no cooling required component that requires substantially no cooling, the intensive cooling required component is mounted on a first high-conductivity substrate contacting to the water cooling unit, the moderate cooling required component is mounted on a second high heat-conductive substrate contacting to an inner surface of the casing, and the no cooling required component is mounted on a substrate arranged in a space between the first high heat-conductive substrate and the second high heat-conductive substrate.
Abstract translation: 涡轮分子泵装置包括：涡轮分子泵主体; 驱动涡轮分子泵主体的动力单元; 以及设置在所述涡轮分子泵主体和所述动力单元之间的水冷单元，其中设置在所述动力单元的壳体中的部件被分类为需要强制冷却的强制冷却需要部件，需要适度的中等冷却要求的部件 冷却和基本上不需要冷却的不需要冷却的部件，将强制冷却所需要的部件安装在与水冷却单元接触的第一高导电性基板上，将适度的冷却需要部件安装在第二高导热基板上 与壳体的内表面接触，并且在布置在第一高导热基板和第二高导热基板之间的空间中的基板上安装无冷却要求的部件。
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公开(公告)号：US07679248B2
公开(公告)日：2010-03-16
申请号：US11936514
申请日：2007-11-07
Applicant: Junichiro Kozaki , Masaki Ohfuji
Inventor： Junichiro Kozaki , Masaki Ohfuji
CPC classification number: F04D29/048 , F04D19/042 , F04D29/058 , F16C32/0451 , F16C2360/45
Abstract: Disclosed is a magnetic bearing system capable of simplifying a demodulation operation and reducing a processing load associated with a magnetic levitation control. A carrier signal having a frequency fc is apply to a sensor through a filter. The sensor operates to modulate the carrier signal, and a difference amplifier operates to calculate a difference between the amplitude-modulated signal FAM (t) and a sensor reference signal Fstd (t). An A/D converter operates to A/D convert a difference signal Fsub (t) output from the difference amplifier to a discretized sensor signal. In the A/D conversion, a sampling frequency fs is set to satisfy the following relation: fc: fc=n·fs or fc=fs/2 (n is a natural number). Thus, the discretized sensor signal includes no carrier wave, and therefore a demodulation operation which has been previously essential can be simplified.
Abstract translation: 公开了一种能够简化解调操作并降低与磁悬浮控制相关联的处理负荷的磁轴承系统。 具有频率fc的载波信号通过滤波器应用于传感器。 传感器操作以调制载波信号，并且差分放大器用于计算幅度调制信号FAM（t）和传感器参考信号Fstd（t）之间的差。 A / D转换器用于将从差分放大器输出的差分信号Fsub（t）A / D转换为离散化的传感器信号。 在A / D转换中，将采样频率fs设定为满足以下关系：fc：fc = n·fs或fc = fs / 2（n为自然数）。 因此，离散的传感器信号不包括载波，因此可以简化先前必要的解调操作。
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