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公开(公告)号：US08625089B2
公开(公告)日：2014-01-07
申请号：US12965393
申请日：2010-12-10
申请人： Yoshio Bamba , Masayuki Ochi , Shigehisa Nozawa
发明人： Yoshio Bamba , Masayuki Ochi , Shigehisa Nozawa
IPC分类号： G01N21/00
CPC分类号： G01N21/9501 , G01N21/94
摘要： A foreign-matter inspection apparatus is implemented which allows the stable detection sensitivity to be maintained. A laser beam emitted from a laser apparatus is applied to a beam irradiation sample via an irradiation unit and a mirror. Then, the laser beam is captured into a beam-capturing camera via an image-forming lens and a beam-direction switching mirror. Based on the captured beam image, an image computational processing unit judges inclination of the laser beam, then adjusting the irradiation unit thereby to correct the inclination of the laser beam. Also, the beam is captured into the beam-capturing camera in specified number-of-times while focus of the laser beam is being changed by an arbitrary amount by the irradiation unit. Based on the captured beam, the focus of the laser beam is corrected by adjusting the irradiation unit.
摘要翻译： 实现了能够维持稳定的检测灵敏度的异物检查装置。 从激光装置发射的激光束通过照射单元和反射镜施加到束照射样品。 然后，激光束经由图像形成透镜和光束方向切换镜被捕获到光束捕获相机中。 基于捕获的光束图像，图像计算处理单元判断激光束的倾斜，然后调整照射单元，从而校正激光束的倾斜度。 此外，当照射单元将激光束的焦点改变任意量时，光束被捕获到指定次数的光束捕获相机中。 基于捕获的光束，通过调整照射单元来校正激光束的焦点。
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公开(公告)号：US08314930B2
公开(公告)日：2012-11-20
申请号：US12941432
申请日：2010-11-08
IPC分类号： G01N21/00
CPC分类号： G01N21/9501 , G01N2021/8887 , G01N2021/8896 , G01N2201/1241
摘要： An inspection device for inspecting defects of an inspection object including a light source for irradiating a luminous flux to the inspection object; an optical system for guiding reflected light from the inspection object; a photoelectric image sensor having a plurality of photoelectric cells arranged, for converting the light guided to detection signals; a detection signal transfer unit having channels each constituted by a signal correction unit, a converter and an image formation unit, and corresponding to each of a plurality of regions formed by dividing the photoelectric image sensor, respectively; and an image synthesis unit for forming an image of the surface of the object by synthesizing partial images outputted; the inspection device inspecting defects of the object by processing the synthesized image; whereby it becomes possible to correct a detection signal from said photoelectric cell close to a predetermined reference target value.
摘要翻译： 一种检查装置，用于检查包括用于向检查对象照射光通量的光源的检查对象的缺陷; 用于引导来自检查对象的反射光的光学系统; 光电图像传感器，其具有布置用于将被引导的光转换成检测信号的多个光电单元; 检测信号传送单元，其具有各自由信号校正单元，转换器和图像形成单元构成的信道，并且分别对应于通过划分光电图像传感器形成的多个区域中的每一个; 以及图像合成单元，通过合成输出的部分图像来形成对象的表面的图像; 检查装置通过处理合成图像来检查物体的缺陷; 从而可以将来自所述光电单元的检测信号校正为接近预定的基准目标值。
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公开(公告)号：US08228496B2
公开(公告)日：2012-07-24
申请号：US12830204
申请日：2010-07-02
申请人： Shuichi Chikamatsu , Minori Noguchi , Masayuki Ochi , Kenji Aiko
发明人： Shuichi Chikamatsu , Minori Noguchi , Masayuki Ochi , Kenji Aiko
IPC分类号： G01N21/00
CPC分类号： G01N21/9501 , G01N2021/9513
摘要： Provided are a defect inspection apparatus having a large range for receiving light scattering from fine defects while securing a sufficiently large signal strength; and a defect inspection method for the same. The defect inspection apparatus includes: a stage part capable of traveling relative to optical systems with a substrate to be inspected mounted on the stage part; an illumination optical system for illuminating an inspection area on the substrate; a detection optical system for detecting light coming from the inspection area on the substrate; an image sensor for converting, to a signal, an image which is formed on the image sensor by the detection optical system; a signal processor for detecting defects by processing the signal from the image sensor; and a plane reflecting mirror, arranged between the detection optical system and the substrate, for transmitting the light, which comes from the substrate, to the detection optical system.
摘要翻译： 提供一种具有大范围的缺陷检查装置，用于在确保足够大的信号强度的同时从细小的缺陷接收光散射; 及其缺陷检查方法。 缺陷检查装置包括：能够相对于光学系统行进的载台部件，其中待检查的基板安装在平台部分上; 用于照射基板上的检查区域的照明光学系统; 用于检测来自基板上的检查区域的光的检测光学系统; 用于通过检测光学系统将形成在图像传感器上的图像转换成信号的图像传感器; 信号处理器，用于通过处理来自图像传感器的信号来检测缺陷; 以及布置在检测光学系统和基板之间的用于将来自基板的光传输到检测光学系统的平面反射镜。
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公开(公告)号：US07876431B2
公开(公告)日：2011-01-25
申请号：US12543889
申请日：2009-08-19
申请人： Yoshio Bamba , Masayuki Ochi , Shigehisa Nozawa
发明人： Yoshio Bamba , Masayuki Ochi , Shigehisa Nozawa
IPC分类号： G01N21/00
CPC分类号： G01N21/9501 , G01N21/94
摘要： A foreign-matter inspection apparatus is implemented which allows the stable detection sensitivity to be maintained. A laser beam emitted from a laser apparatus is applied to a beam irradiation sample via an irradiation unit and a mirror. Then, the laser beam is captured into a beam-capturing camera via an image-forming lens and a beam-direction switching mirror. Based on the captured beam image, an image computational processing unit judges inclination of the laser beam, then adjusting the irradiation unit thereby to correct the inclination of the laser beam. Also, the beam is captured into the beam-capturing camera in specified number-of-times while focus of the laser beam is being changed by an arbitrary amount by the irradiation unit. Based on the captured beam, the focus of the laser beam is corrected by adjusting the irradiation unit.
摘要翻译： 实现了能够维持稳定的检测灵敏度的异物检查装置。 从激光装置发射的激光束通过照射单元和反射镜施加到束照射样品。 然后，激光束经由图像形成透镜和光束方向切换镜被捕获到光束捕获相机中。 基于捕获的光束图像，图像计算处理单元判断激光束的倾斜，然后调整照射单元，从而校正激光束的倾斜度。 此外，当照射单元将激光束的焦点改变任意量时，光束被捕获到指定次数的光束捕获相机中。 基于捕获的光束，通过调整照射单元来校正激光束的焦点。
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公开(公告)号：US07847927B2
公开(公告)日：2010-12-07
申请号：US12038274
申请日：2008-02-27
申请人： Shuichi Chikamatsu , Minori Noguchi , Masayuki Ochi , Kenji Aiko
发明人： Shuichi Chikamatsu , Minori Noguchi , Masayuki Ochi , Kenji Aiko
IPC分类号： G01N21/00
CPC分类号： G01N21/9501 , G01N2021/9513
摘要： Provided are a defect inspection apparatus having a large range for receiving light scattering from fine defects while securing a sufficiently large signal strength; and a defect inspection method for the same. The defect inspection apparatus includes: a stage part capable of traveling relative to optical systems with a substrate to be inspected mounted on the stage part; an illumination optical system for illuminating an inspection area on the substrate; a detection optical system for detecting light coming from the inspection area on the substrate; an image sensor for converting, to a signal, an image which is formed on the image sensor by the detection optical system; a signal processor for detecting defects by processing the signal from the image sensor; and a plane reflecting mirror, arranged between the detection optical system and the substrate, for transmitting the light, which comes from the substrate, to the detection optical system.
摘要翻译： 提供一种具有大范围的缺陷检查装置，用于在确保足够大的信号强度的同时从细小的缺陷接收光散射; 及其缺陷检查方法。 缺陷检查装置包括：能够相对于光学系统行进的载台部件，其中待检查的基板安装在平台部分上; 用于照射基板上的检查区域的照明光学系统; 用于检测来自基板上的检查区域的光的检测光学系统; 用于通过检测光学系统将形成在图像传感器上的图像转换成信号的图像传感器; 信号处理器，用于通过处理来自图像传感器的信号来检测缺陷; 以及布置在检测光学系统和基板之间的用于将来自基板的光传输到检测光学系统的平面反射镜。
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公开(公告)号：US20100271627A1
公开(公告)日：2010-10-28
申请号：US12830204
申请日：2010-07-02
申请人： Shuichi CHIKAMATSU , Minori Noguchi , Masayuki Ochi , Kenji Aiko
发明人： Shuichi CHIKAMATSU , Minori Noguchi , Masayuki Ochi , Kenji Aiko
CPC分类号： G01N21/9501 , G01N2021/9513
摘要： Provided are a defect inspection apparatus having a large range for receiving light scattering from fine defects while securing a sufficiently large signal strength; and a defect inspection method for the same. The defect inspection apparatus includes: a stage part capable of traveling relative to optical systems with a substrate to be inspected mounted on the stage part; an illumination optical system for illuminating an inspection area on the substrate; a detection optical system for detecting light coming from the inspection area on the substrate; an image sensor for converting, to a signal, an image which is formed on the image sensor by the detection optical system; a signal processor for detecting defects by processing the signal from the image sensor; and a plane reflecting mirror, arranged between the detection optical system and the substrate, for transmitting the light, which comes from the substrate, to the detection optical system.
摘要翻译： 提供一种具有大范围的缺陷检查装置，用于在确保足够大的信号强度的同时从细小的缺陷接收光散射; 及其缺陷检查方法。 缺陷检查装置包括：能够相对于光学系统行进的载台部件，其中待检查的基板安装在平台部分上; 用于照射基板上的检查区域的照明光学系统; 用于检测来自基板上的检查区域的光的检测光学系统; 用于通过检测光学系统将形成在图像传感器上的图像转换成信号的图像传感器; 信号处理器，用于通过处理来自图像传感器的信号来检测缺陷; 以及布置在检测光学系统和基板之间的用于将来自基板的光传输到检测光学系统的平面反射镜。
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公开(公告)号：US08345233B2
公开(公告)日：2013-01-01
申请号：US13312663
申请日：2011-12-06
IPC分类号： G01N21/00
CPC分类号： G03F7/70858 , G01N21/9501 , G01N21/95623 , G01N2201/0231 , H01L21/67248
摘要： A defect inspection apparatus emits light to a test object, detects reflected of scattered light from the test object and detects a defect in the test object The apparatus comprises a temperature-controlled part accommodating section that accommodates parts having a need for controlling a temperature, which is out of a plurality of parts in the defect inspection apparatus. A first temperature measuring instrument measures a temperature in the temperature-controlled part accommodating section; and a temperature control unit controls a temperature of the interior of the temperature-controlled part accommodating section at a prescribed temperature according to the temperature measured by the first temperature measuring instrument. Accordingly, a defect inspection apparatus can efficiently perform temperature control without involving an enlarged size can be achieved.
摘要翻译： 缺陷检查装置向被检体发光，检测来自被检体的散射光的反射，检测被检体内的缺陷。该装置包括：温度控制部容纳部，容纳需要控制温度的部位， 在缺陷检查装置中的多个部分之外。 第一温度测量仪器测量温度控制部分容纳部分中的温度; 并且温度控制单元根据由第一温度测量仪器测量的温度将温度控制部分容纳部分的内部温度控制在规定的温度。 因此，可以有效地执行不需要扩大尺寸的温度控制的缺陷检查装置。
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公开(公告)号：US20120140212A1
公开(公告)日：2012-06-07
申请号：US13312663
申请日：2011-12-06
IPC分类号： G01N21/88
CPC分类号： G03F7/70858 , G01N21/9501 , G01N21/95623 , G01N2201/0231 , H01L21/67248
摘要： A defect inspection apparatus emits light to a test object, detects reflected of scattered light from the test object and detects a defect in the test object The apparatus comprises a temperature-controlled part accommodating section that accommodates parts having a need for controlling a temperature, which is out of a plurality of parts in the defect inspection apparatus. A first temperature measuring instrument measures a temperature in the temperature-controlled part accommodating section; and a temperature control unit controls a temperature of the interior of the temperature-controlled part accommodating section at a prescribed temperature according to the temperature measured by the first temperature measuring instrument. Accordingly, a defect inspection apparatus can efficiently perform temperature control without involving an enlarged size can be achieved.
摘要翻译： 缺陷检查装置向被检体发光，检测来自被检体的散射光的反射，检测被检体内的缺陷。该装置包括：温度控制部容纳部，容纳需要控制温度的部位， 在缺陷检查装置中的多个部分之外。 第一温度测量仪器测量温度控制部分容纳部分中的温度; 并且温度控制单元根据由第一温度测量仪器测量的温度将温度控制部分容纳部分的内部温度控制在规定的温度。 因此，可以有效地执行不需要扩大尺寸的温度控制的缺陷检查装置。
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公开(公告)号：US08102522B2
公开(公告)日：2012-01-24
申请号：US11989018
申请日：2007-06-29
IPC分类号： G01N21/00
CPC分类号： G03F7/70858 , G01N21/9501 , G01N21/95623 , G01N2201/0231 , H01L21/67248
摘要： A defect inspection apparatus enable to efficiently perform a temperature control without involving an enlarged size can be achieved.The parts constituting the defect inspection apparatus are classified into parts need temperature control and parts not to need temperature control; all the parts need temperature control are accommodated together into a temperature-controlled part accommodating section 604, and the parts not to need temperature control are arranged in a heat radiating unit 605. The temperature in the temperature-controlled part accommodating section 604 is measured by a temperature measuring instrument 603 and a control CPU 602 in a temperature control unit 601 carries out control according to the measured temperature so that the interior of the temperature-controlled part accommodating section 604 is kept at a fixed temperature. Therefore, it becomes easy to keep the fixed temperature, when compared with a case in which individual parts are temperature-controlled separately by being heated or cooled, yielding an energy saving effect.
摘要翻译： 可以实现能够有效地执行不涉及放大尺寸的温度控制的缺陷检查装置。 构成缺陷检查装置的部件分为需要温度控制的部件和不需要温度控制的部件; 将所有需要温度控制的部件一起放入温度控制部件容纳部分604中，并且不需要温度控制的部件被布置在散热单元605中。温度控制部件容纳部分604中的温度由 温度控制单元601中的温度测量装置603和控制CPU 602根据测量的温度执行控制，使得温度控制部分容纳部分604的内部保持在固定温度。 因此，与单独部件通过加热或冷却分别进行温度控制的情况相比，容易保持固定温度，产生节能效果。
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公开(公告)号：US07953567B2
公开(公告)日：2011-05-31
申请号：US12683455
申请日：2010-01-07
申请人： Kei Shimura , Minori Noguchi , Masaaki Ito , Kenji Aiko , Shuichi Chikamatsu , Shigeo Otsuki , Shigeru Abe , Masayuki Ochi , Takuaki Sekiguchi , Hiroyuki Yamashita
发明人： Kei Shimura , Minori Noguchi , Masaaki Ito , Kenji Aiko , Shuichi Chikamatsu , Shigeo Otsuki , Shigeru Abe , Masayuki Ochi , Takuaki Sekiguchi , Hiroyuki Yamashita
CPC分类号： G01N21/9501 , G01N21/94 , G01N21/95607 , G01N21/95623 , G06K9/2036 , G06K2209/19 , G06T7/0006 , G06T2207/30148
摘要： A defect inspection apparatus includes: stages each mounting an inspecting object on which a circuit pattern having a group of parallel lines is formed, and each running perpendicular or parallel to the group of lines; an illumination optical system which illuminating a surface of the inspecting object with a slit beam being slit light so that a longitudinal direction of the slit beam is substantially perpendicular to the running directions of the stages, and which has a first inclined angle formed by the direction of the group of lines and a projection line, of an optical axis of the slit beam, to the inspecting object; a spatial filter that shields or transmits reflected and scattered light of the inspecting object according to a difference in distribution of orientation; and a detection optical system that detects the reflected and scattered light transmitted through the spatial filter by image sensors. Moreover, the illumination optical system illuminates the inspecting object with another slit beam from a direction opposite to an incident direction of the slit beam on a plane.
摘要翻译： 缺陷检查装置包括：各自安装检查对象的阶段，在其上形成具有一组平行线的电路图案，并且每个行与该组线垂直或平行; 照明光学系统，其利用狭缝光照射被检查物体的表面，使得狭缝光束的纵向方向基本上垂直于台阶的行进方向，并且具有由方向形成的第一倾斜角 并且将所述狭缝光束的光轴的投影线和所述检查对象的投影线， 空间滤波器，根据取向分布的差异来屏蔽或发射检测对象的反射和散射光; 以及检测光学系统，其通过图像传感器检测透过空间滤波器的反射和散射光。 此外，照明光学系统在与平面上的狭缝光束的入射方向相反的方向上用另一个狭缝光照射检查对象。
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