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公开(公告)号：US20230253266A1
公开(公告)日：2023-08-10
申请号：US18015074
申请日：2020-10-28
Applicant: Yamaha Robotics Holdings Co., Ltd.
Inventor： Michael KIRKBY , Hiroshi MUNAKATA , Takuya ADACHI
CPC classification number: H01L22/12 , B06B1/0284 , G01N21/8851 , G01N21/8806 , G01N2021/8864 , G01N2021/8896
Abstract: An ultrasound vibrating-type defect detection apparatus (100) for detecting a defect in a semiconductor apparatus (10) is provided with: an ultrasound vibrator (42); a high-frequency power supply (40); a camera (45); and a controller (50) for adjusting the frequency of high-frequency power supplied from the high-frequency power supply (40) to the ultrasound vibrator (42), and for performing detection of a defect in the semiconductor apparatus (10). The controller (50) causes the camera (45) to capture an image of the semiconductor apparatus (10) while varying the frequency of high-frequency power supplied from the high-frequency power supply (40) to the ultrasound vibrator (42), and performs detection of a defect in the semiconductor apparatus (10) on the basis of the captured image.
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2.发明申请公开(公告)号：US20180052117A1
公开(公告)日：2018-02-22
申请号：US15555154
申请日：2016-03-14
Applicant: NEC Corporation
Inventor： Hiroshi IMAI
CPC classification number: G01N21/8851 , G01B11/30 , G01M5/0033 , G01M5/0075 , G01M5/0091 , G01N21/88 , G01N2021/8864 , G01N2021/8896
Abstract: The purpose of the present invention is to accurately detect structures from a remote location without contact while distinguishing between defects such as cracking, separation, and internal cavities. This status determination device includes: a displacement calculation unit that calculates a two-dimensional spatial distribution of displacement in time-series images, said time-series images being taken before and after a load is applied to a surface of a structure; a correction amount calculation unit that calculates a correction amount from the two-dimensional spatial distribution of displacement in the time-series images, said correction amount being based on the amount of movement of the structure surface in the normal direction as induced by said loading; a displacement correction unit that subtracts the correction amount from the two-dimensional spatial distribution of displacement in the time-series images, and extracts a two-dimensional spatial distribution of displacement of the structure surface; and an abnormality determination unit for identifying defects in the structure on the basis of a comparison of the two-dimensional spatial distribution of displacement of the structure surface and a pre-prepared spatial distribution of displacement.
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公开(公告)号：US09528942B2
公开(公告)日：2016-12-27
申请号：US14525673
申请日：2014-10-28
Applicant: KLA-Tencor Corporation
Inventor： Richard E. Bills , Neil Judell , Klaus R. Freischlad , James P. McNiven
CPC classification number: G01N21/9501 , G01N21/21 , G01N21/47 , G01N21/4738 , G01N21/474 , G01N21/55 , G01N21/88 , G01N21/8806 , G01N21/95 , G01N21/956 , G01N2021/4707 , G01N2021/4711 , G01N2021/4792 , G01N2021/556 , G01N2021/8809 , G01N2021/8848 , G01N2021/8864 , G01N2021/8877 , G01N2021/8896 , G01N2201/0612 , G01N2201/105 , G06T7/0004 , G06T2207/30148 , Y10T29/49826
Abstract: A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The optical collection and detection system features, in the front quartersphere, a light channel assembly for collecting light reflected from the surface of the workpiece, and a front collector and wing collectors for collecting light scattered from the surface, to greatly improve the measurement capabilities of the system. The light channel assembly has a switchable edge exclusion mask and a reflected light detection system for improved detection of the reflected light.
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公开(公告)号：US20160321796A1
公开(公告)日：2016-11-03
申请号：US15130523
申请日：2016-04-15
Applicant: Joe Dordoni , Richard D. Diehr
Inventor： Joe Dordoni , Richard D. Diehr
CPC classification number: G06T7/0004 , G01B11/2504 , G01B11/254 , G01L1/24 , G01M11/081 , G01N21/8806 , G01N21/8851 , G01N21/9036 , G01N2021/8896 , G01N2201/06146 , G06T2207/30108 , H04N5/2256 , H04N5/23241 , H04N5/247 , H04N17/002
Abstract: A system for inspecting a glass container and methods of inspecting glass containers are provided. The system includes a panel including a plurality of light sources configured to illuminate the glass container. The system includes a camera configured to image the illuminated glass container. The system includes a controller configured to adjust the amount of power applied to each of the light sources individually. The system includes a processor configured to evaluate the image of the illuminated glass container for indications of defects in the container. Methods of calibrating the system are also provided.
Abstract translation: 提供了一种用于检查玻璃容器的系统和检查玻璃容器的方法。 该系统包括一个面板，包括多个被配置为照亮玻璃容器的光源。 该系统包括配置成对照明的玻璃容器成像的相机。 该系统包括控制器，其被配置为分别调整施加到每个光源的功率量。 该系统包括处理器，该处理器被配置为评估照明的玻璃容器的图像，用于指示容器中的缺陷。 还提供了校准系统的方法。
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5.发明申请公开(公告)号：US20160223468A1
公开(公告)日：2016-08-04
申请号：US15021341
申请日：2014-09-11
Applicant: KOH YOUNG TECHNOLOGY INC
Inventor： Seungwon JUNG , Jongjin CHOI , Heewook YOU
IPC: G01N21/88 , G01N21/956
CPC classification number: G01N21/8851 , G01N21/956 , G01N21/95607 , G01N21/95684 , G01N2021/8896 , G01N2021/95638 , G01N2201/121 , G06T5/006 , G06T2207/20076 , G06T2207/30141
Abstract: The present invention relates to a method for generating a compensation matrix during a substrate inspection. The method comprises the steps of: selecting information of N1 (N1≧2) feature objects which are randomly predetermined within a field of view (FOV) on a substrate; generating a first compensation matrix on the basis of information of the feature objects which are extracted on the substrate; comparing an offset value of each of all the feature objects with a predetermined reference value by applying all the feature objects within the FOV to the compensation matrix to count the number of the feature objects of which the offset value of the each of all the feature objects is less than the predetermined reference value; and repeatedly performing the above steps N2 times (N2≧1), and generating a second compensation matrix using information of the feature objects which have the offset value which is less than the predetermined reference value, in case the number of the counted feature objects is the maximum.
Abstract translation: 本发明涉及在衬底检查期间产生补偿矩阵的方法。 该方法包括以下步骤：在衬底上选择在视场（FOV）内随机地预定的N1（N1≥2）个特征对象的信息; 基于在所述基板上提取的特征对象的信息生成第一补偿矩阵; 通过将FOV内的所有特征对象应用于补偿矩阵来对所有特征对象中的每一个的偏移值与预定的参考值进行比较，以对所有特征对象中的每一个的偏移值进行计数的特征对象的数量 小于预定的参考值; 并重复执行上述步骤N2次（N2≥1），并且使用具有小于预定参考值的偏移值的特征对象的信息生成第二补偿矩阵，在计数特征对象的数量为 最大值。
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Patent Agency Ranking
公开(公告)号：US09239283B2
公开(公告)日：2016-01-19
申请号：US13993888
申请日：2011-11-08
Applicant: Toshifumi Honda , Yukihiro Shibata , Atsushi Taniguchi
Inventor： Toshifumi Honda , Yukihiro Shibata , Atsushi Taniguchi
IPC: G01N21/00 , G01N21/956 , G01N21/95 , G01N21/88
CPC classification number: G01N21/00 , G01N21/8851 , G01N21/9501 , G01N21/956 , G01N2021/8896
Abstract: To process a signal from a plurality of detectors without being affected by a variation in the height of a substrate, and to detect more minute defects on the substrate, a defect inspection device is provided with a photoelectric converter having a plurality of rows of optical sensor arrays in each of first and second light-collecting/detecting unit and a processing unit for processing a detection signal from the first and the second light-collecting/detecting unit to determine the extent to which the positions of the focal points of the first and the second light-collecting/detecting unit are misaligned with respect to the surface of a test specimen, and processing the detection signal to correct a misalignment between the first and the second light-collecting/detecting unit, and the corrected detection signal outputted from the first and the second light-collecting/detecting unit are combined together to detect the defects on the test specimen.
Abstract translation: 为了处理来自多个检测器的信号而不受基板高度的变化的影响，并且在基板上检测更多的微小缺陷，缺陷检查装置设置有具有多行光学传感器的光电转换器 在第一和第二集光/检测单元中的每一个中的阵列，以及处理单元，用于处理来自第一和第二聚光/检测单元的检测信号，以确定第一和第二聚光/ 第二聚光/检测单元相对于试样的表面不对准，并且处理检测信号以校正第一和第二聚光/检测单元之间的未对准，并且校正的检测信号从 第一和第二聚光/检测单元组合在一起以检测试样上的缺陷。
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公开(公告)号：US20150310604A1
公开(公告)日：2015-10-29
申请号：US14260624
申请日：2014-04-24
Applicant: General Electric Company
Inventor： Ser Nam Lim , Jose Abiel Garza , David Scott Diwinsky , Li Guan , Shubao Liu , Xingwei Yang , Jens Rittscher
CPC classification number: G06T7/0004 , G01N2021/8896 , G06K9/52 , G06T7/001 , G06T7/80 , G06T17/00 , G06T19/00 , G06T2200/24 , G06T2207/30164 , G06T2207/30204 , G06T2219/012 , H04N17/00
Abstract: A method for image based inspection of an object includes receiving an image of an object from an image capture device, wherein the image includes a representation of the object with mil-level precision. The method further includes projecting a measurement feature of the object from the image onto a three-dimensional (3D) model of the object based on a final projection matrix; determining a difference between the projected measurement feature and an existing measurement feature on the 3D model; and sending a notification including the difference between the projected measurement feature and the existing measurement feature.
Abstract translation: 一种用于对对象进行图像检查的方法包括从图像捕获装置接收对象的图像，其中所述图像包括具有密度级精度的对象的表示。 所述方法还包括基于最终投影矩阵将所述对象的测量特征从所述图像投影到所述对象的三维（3D）模型上; 确定投影测量特征与3D模型上现有测量特征之间的差异; 并发送包括预测测量特征与现有测量特征之间的差异的通知。
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公开(公告)号：US20150042987A1
公开(公告)日：2015-02-12
申请号：US14525673
申请日：2014-10-28
Applicant: KLA-Tencor Corporation
Inventor： Richard E. Bills , Neil Judell , Klaus R. Freischlad , James P. McNiven
CPC classification number: G01N21/9501 , G01N21/21 , G01N21/47 , G01N21/4738 , G01N21/474 , G01N21/55 , G01N21/88 , G01N21/8806 , G01N21/95 , G01N21/956 , G01N2021/4707 , G01N2021/4711 , G01N2021/4792 , G01N2021/556 , G01N2021/8809 , G01N2021/8848 , G01N2021/8864 , G01N2021/8877 , G01N2021/8896 , G01N2201/0612 , G01N2201/105 , G06T7/0004 , G06T2207/30148 , Y10T29/49826
Abstract: A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The optical collection and detection system features, in the front quartersphere, a light channel assembly for collecting light reflected from the surface of the workpiece, and a front collector and wing collectors for collecting light scattered from the surface, to greatly improve the measurement capabilities of the system. The light channel assembly has a switchable edge exclusion mask and a reflected light detection system for improved detection of the reflected light.
Abstract translation: 提供了表面检查系统，以及相关的部件和方法。 表面检查系统包括光束源子系统，光束扫描子系统，工件运动子系统，光学收集和检测子系统以及处理子系统。 光学收集和检测系统在前四分之一区域中具有用于收集从工件表面反射的光的光通道组件，以及用于收集从表面散射的光的前收集器和翼收集器，以大大提高测量能力 系统。 光通道组件具有可切换的边缘排除掩模和用于改进反射光检测的反射光检测系统。
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9.发明申请SUBSTRATE INSPECTION METHOD, SUBSTRATE MANUFACTURING METHOD AND SUBSTRATE INSPECTION DEVICE 审中-公开基板检查方法，基板制造方法和基板检查装置公开(公告)号：US20150029324A1
公开(公告)日：2015-01-29
申请号：US14337520
申请日：2014-07-22
Applicant: HOYA CORPORATION
Inventor： Masaru TANABE
CPC classification number: G01N21/8851 , G01N21/95692 , G01N2021/8896 , G02B21/365 , G06T3/4053 , G06T7/0004 , G06T7/001 , G06T2207/10056 , G06T2207/20221 , G06T2207/30141
Abstract: There is provided a substrate inspection method for inspecting a substrate having a plurality of holes formed on a plate-shaped material, including: an image acquisition step (S103) of picking-up an image of the holes formed on the substrate via an optical system including a microscope having an objective lens of a specific magnification, from one surface side of the substrate; a super resolution image processing step (S104) of obtaining a super resolution image corresponding to a picked-up image via an optical system including a microscope having an objective lens of higher magnification than the specific magnification, by applying super resolution image processing to the image obtained in the image acquisition step (S103); and an inspection step (S108) of inspecting a proper or improper hole formed on the substrate using the super resolution image obtained in the super resolution image processing step (S104).
Abstract translation: 提供了一种用于检查形成在板状材料上的具有多个孔的基板的基板检查方法，包括：图像获取步骤（S103），其通过光学系统拍摄形成在基板上的孔的图像 包括具有特定放大倍数的物镜的显微镜，从所述基板的一个表面侧; 超分辨率图像处理步骤（S104），通过对包含具有比特定倍率高的倍率的物镜的显微镜的光学系统获得与拾取图像相对应的超分辨率图像，通过对图像应用超分辨率图像处理 在图像获取步骤（S103）中获得; 以及使用超分辨率图像处理步骤（S104）中获得的超分辨率图像来检查形成在基板上的适当或不正确的孔的检查步骤（S108）。
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公开(公告)号：US20100265518A1
公开(公告)日：2010-10-21
申请号：US12570465
申请日：2009-09-30
Applicant: Richard Earl Bills , Neil Judell , Klaus Reinhard Rreischlad , James Peter McNiven
Inventor： Richard Earl Bills , Neil Judell , Klaus Reinhard Rreischlad , James Peter McNiven
CPC classification number: G01N21/9501 , G01N21/21 , G01N21/47 , G01N21/4738 , G01N21/474 , G01N21/55 , G01N21/88 , G01N21/8806 , G01N21/95 , G01N21/956 , G01N2021/4707 , G01N2021/4711 , G01N2021/4792 , G01N2021/556 , G01N2021/8809 , G01N2021/8848 , G01N2021/8864 , G01N2021/8877 , G01N2021/8896 , G01N2201/0612 , G01N2201/105 , G06T7/0004 , G06T2207/30148 , Y10T29/49826
Abstract: A surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The optical collection and detection system features back collectors disposed in the back quartersphere, outside the incident plane, for collecting light scattered from the surface of the workpiece. The back collectors are disposed at a relative minimum in the portion of scattered light attributable to haze relative to the portion of scattered light attributable to defect scatter portion, or, alternatively, at a relative minimum in the Rayleigh scatter.
Abstract translation: 表面检查系统包括光束源子系统，光束扫描子系统，工件运动子系统，光学收集和检测子系统以及处理子系统。 光学收集和检测系统具有设置在后四分之一圆周的入射平面外部的后收集器，用于收集从工件表面散射的光。 背部收集器相对于归因于缺陷散射部分的散射光部分的雾度部分的散射光部分相对最小设置，或者在瑞利散射中相对最小。
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