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公开(公告)号:US08618498B2
公开(公告)日:2013-12-31
申请号:US13197632
申请日:2011-08-03
申请人: Gerrit Cornelis Van Hoften , Michael Alwin William Stekelenburg , Richard Henderson , Gregory James McMullan , Abdul Raffey Faruqi , Renato Andrea Danilo Turchetta , Nicola Carlo Guerrini , Joeri Lof , Frank Jeroen Pieter Schuurmans
发明人: Gerrit Cornelis Van Hoften , Michael Alwin William Stekelenburg , Richard Henderson , Gregory James McMullan , Abdul Raffey Faruqi , Renato Andrea Danilo Turchetta , Nicola Carlo Guerrini , Joeri Lof , Frank Jeroen Pieter Schuurmans
IPC分类号: H01J37/244
CPC分类号: H01J37/244 , H01J37/22 , H01J37/26 , H01J37/263 , H01J2237/2441 , H01J2237/24455 , H01J2237/2446 , H01J2237/2447 , H01J2237/24578 , H01J2237/26 , H01J2237/2802
摘要: In a direct electron detector, backscattering of electrons into the detector volume from below the sensor is prevented. In some embodiments, an empty space is maintained below the sensor. In other embodiments, a structure below the sensor includes geometry, such as multiple high aspects ratio channels, either extending to or from the sensor to trap electrons, or a structure of angled surfaces to deflect the electrons that pass through the sensor.
摘要翻译: 在直接电子检测器中,防止电子从传感器下方向检测器体积的后向散射。 在一些实施例中,在传感器下面保持空的空间。 在其他实施例中,传感器下面的结构包括几何,例如多个高方面比例的通道,延伸到传感器或从传感器捕获电子,或倾斜表面的结构以偏转通过传感器的电子。
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公开(公告)号:US20120032078A1
公开(公告)日:2012-02-09
申请号:US13197632
申请日:2011-08-03
申请人: Michael Alwin William Stekelenburg , Gerrit Cornelis Van Hoften , Richard Henderson , Renato Andrea Danilo Turchetta , Nicola Carlo Guerrini , Joeri Lof , Frank Jeroen Pieter Schuurmans , Abdul Raffey Faruqi , Gregory James McMullan
发明人: Michael Alwin William Stekelenburg , Gerrit Cornelis Van Hoften , Richard Henderson , Renato Andrea Danilo Turchetta , Nicola Carlo Guerrini , Joeri Lof , Frank Jeroen Pieter Schuurmans , Abdul Raffey Faruqi , Gregory James McMullan
IPC分类号: G01N23/04
CPC分类号: H01J37/244 , H01J37/22 , H01J37/26 , H01J37/263 , H01J2237/2441 , H01J2237/24455 , H01J2237/2446 , H01J2237/2447 , H01J2237/24578 , H01J2237/26 , H01J2237/2802
摘要: In a direct electron detector, backscattering of electrons into the detector volume from below the sensor is prevented. In some embodiments, an empty space is maintained below the sensor. In other embodiments, a structure below the sensor includes geometry, such as multiple high aspects ratio channels, either extending to or from the sensor to trap electrons, or a structure of angled surfaces to deflect the electrons that pass through the sensor.
摘要翻译: 在直接电子检测器中,防止电子从传感器下方向检测器体积的后向散射。 在一些实施例中,在传感器下面保持空的空间。 在其他实施例中,传感器下面的结构包括几何,例如多个高方面比例的通道,延伸到传感器或从传感器捕获电子,或倾斜表面的结构以偏转通过传感器的电子。
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