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    Magnetron sputtering cathode with magnet disposed between two yoke plates
    1.
    发明授权
    Magnetron sputtering cathode with magnet disposed between two yoke plates 有权
    磁控溅射阴极，配有两个磁轭之间的磁铁

    公开(公告)号：US06344114B1

    公开(公告)日：2002-02-05

    申请号：US09331453

    申请日：1999-08-30

    申请人： Eggo Sichmann ,  Michael Muecke ,  Wolfgang Becker ,  Klaus Truckenmueller

    发明人： Eggo Sichmann ,  Michael Muecke ,  Wolfgang Becker ,  Klaus Truckenmueller

    IPC分类号： C23C1434

    CPC分类号： H01J37/3455 ,  C23C14/35 ,  H01J37/3408 ,  H01J37/3458

    摘要： A method of coating a substrate by magnetron cathode sputtering includes a sputtering cathode having pole shoes and being arranged in a vacuum chamber. A target and a magnetic field are provided in an area of the surface of the target and the magnetic field is varied stepwise and/or continuously to displace the plasma radially such that the erosion groove is likewise displaced radially. The variable magnetic field is generated by coils between the back surface of the target and a yoke plate while a static magnetic field is gernated by an annularly arranged magnet in the area of the yoke plate and a target space between the target and the substrate is shielded by means of an iron core which also increases the field strength of the variable magnetic field.

    摘要翻译： 通过磁控管阴极溅射涂覆基板的方法包括具有极靴并设置在真空室中的溅射阴极。 在靶的表面的区域中设置靶和磁场，并且磁场逐步和/或连续地变化以使等离子体径向偏移，使得侵蚀槽同样地径向偏移。 可变磁场由目标的背面和磁轭板之间的线圈产生，而磁轭在磁轭板的区域中被环形排列的磁体所固定，并且目标和衬底之间的目标空间被屏蔽 借助于铁心也增加了可变磁场的场强。

    METHOD AND DEVICE FOR PRODUCING A COMPONENT
    2.
    发明申请
    METHOD AND DEVICE FOR PRODUCING A COMPONENT 审中-公开
    用于生产组件的方法和装置

    公开(公告)号：US20130055568A1

    公开(公告)日：2013-03-07

    申请号：US13583411

    申请日：2011-03-07

    申请人： Karl-Heinz Dusel ,  Roland Huttner ,  Erwin Bayer ,  Michael Muecke

    发明人： Karl-Heinz Dusel ,  Roland Huttner ,  Erwin Bayer ,  Michael Muecke

    IPC分类号： B05D3/06 ,  B23P17/00 ,  B05C11/00 ,  B23K37/00

    CPC分类号： B22F3/1055 ,  B22F5/009 ,  B22F2003/1056 ,  B22F2003/1057 ,  B33Y10/00 ,  B33Y30/00 ,  B33Y80/00 ,  Y02P10/295 ,  Y10T29/49236 ,  Y10T29/49764

    摘要： A method for manufacturing a component, in particular a component of a turbine or a compressor, in which at least these steps are carried out: application in layers of at least one powdered component material to a component platform in the area of a buildup and joining zone; melting and/or sintering locally in layers of the component material by supplying energy with the aid of at least one electron beam in the area of the buildup and joining zone; lowering of the component platform in layers by a predefined layer thickness; and repeating steps a) through c) until completion of the component. During the manufacturing, electrons emitted due to the interaction of the electron beam with the component material are detected, after which material information, characterizing the topography of the melted and/or sintered component material, is ascertained on the basis of the emitted electrons. Alternatively or additionally, the component material is melted and/or sintered by at least two, preferably at least four electron beams.

    摘要翻译： 至少进行这些步骤的部件，特别是涡轮机或压缩机的部件的制造方法：在积聚和连接的区域中将至少一种粉末状组分材料的层施加到部件平台 区; 通过在积聚和接合区域的区域中借助于至少一个电子束提供能量来局部地在组分材料的层中熔融和/或烧结; 组件平台在层中降低预定层厚度; 并重复步骤a）至c）直到组件完成。 在制造过程中，检测到由于电子束与组分材料的相互作用而发射的电子，之后基于发射的电子来确定表征熔融和/或烧结的组分材料的形貌的材料信息。 或者或另外，组分材料通过至少两个，优选至少四个电子束熔化和/或烧结。