High-voltage pulse generator, gas laser apparatus, and method for manufacturing electronic device

    公开(公告)号:US12244117B2

    公开(公告)日:2025-03-04

    申请号:US17397375

    申请日:2021-08-09

    Abstract: A high-voltage pulse generation device configured to apply a pulsed high voltage to the space between a pair of discharge electrodes disposed in a laser chamber of a gas laser apparatus includes n transformer cores that form a transformer, where n is a natural number greater than or equal to two, n primary electric circuits of the transformer, the n primary electric circuits each having a first terminal connected to a reference potential and a second terminal connected to a charger, the n primary electric circuits each including one or more primary coils, one or more diodes connected in parallel to the one or more primary coils, and one or more pulse generators connected in parallel to the one or more primary coils, and a secondary electric circuit of the transformer, the secondary electric circuit including a secondary coil and connected to the pair of discharge electrodes.

    POWER CONVERTER
    2.
    发明申请

    公开(公告)号:US20240413759A1

    公开(公告)日:2024-12-12

    申请号:US18700721

    申请日:2021-11-09

    Abstract: In a DAB circuit including a first bridge and a second bridge, a boost circuit is shared by connecting reactors between a storage battery and the first bridge. In each leg of the first bridge, in order to increase an absolute value of a reactor current, an ON period of one switching element of a switching element on a high voltage side and a switching element on a low voltage side is provided, and then, an ON period of the other switching element is provided. An ON period length of the one switching element is set according to a control command value of a DC voltage input to the first bridge. An ON period length of the other switching element is set to a time length until an absolute value of the reactor current that has increased during the ON period of the one switching element returns to zero.

    POWER CONVERSION DEVICE
    5.
    发明公开

    公开(公告)号:US20230402942A1

    公开(公告)日:2023-12-14

    申请号:US18033586

    申请日:2021-11-18

    CPC classification number: H02M7/5395 H02P27/08 H02M1/0058

    Abstract: A power conversion device comprises: power conversion circuitry for converting DC power into AC power and supplying it into a load according to a switching state quantity defined by combinations among switching parameters of switching devices; a voltage output calculation device for calculating a voltage output value on the power conversion circuitry, based on the switching state quantity; an integration value calculation device for acquiring a voltage reference integration value and a voltage output integration value by integrating a voltage reference value and the calculated voltage output value; a switching update-determination unit for outputting an update signal of the switching state quantity, based on the voltage reference integration value, its allowance value, and the voltage output integration value; and a switching determination table for determining a switching state quantity of the switching devices, based on the voltage reference integration value, the voltage output integration value and the update signal.

    HIGH-VOLTAGE PULSE GENERATOR, GAS LASER APPARATUS, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE

    公开(公告)号:US20210367394A1

    公开(公告)日:2021-11-25

    申请号:US17397375

    申请日:2021-08-09

    Abstract: A high-voltage pulse generation device configured to apply a pulsed high voltage to the space between a pair of discharge electrodes disposed in a laser chamber of a gas laser apparatus includes n transformer cores that form a transformer, where n is a natural number greater than or equal to two, n primary electric circuits of the transformer, the n primary electric circuits each having a first terminal connected to a reference potential and a second terminal connected to a charger, the n primary electric circuits each including one or more primary coils, one or more diodes connected in parallel to the one or more primary coils, and one or more pulse generators connected in parallel to the one or more primary coils, and a secondary electric circuit of the transformer, the secondary electric circuit including a secondary coil and connected to the pair of discharge electrodes.

    Three-phase inverter with reduced DC bus capacitor ripple

    公开(公告)号:US10778116B2

    公开(公告)日:2020-09-15

    申请号:US16279179

    申请日:2019-02-19

    Abstract: A three-phase inverter includes three series circuits that are connected in parallel to a capacitor connected in parallel to a DC voltage source. Each of the three series circuits includes two semiconductor switching elements connected in series. A connection point between the two semiconductor switching elements is used as an AC output terminal for each phase. The three-phase inverter generates PWM pulses of three phases including a PWM pulse of one phase, whose pulse width of a positive side pulse in one switching cycle is the largest, and including PWM pulses of the other two phases such that a positional relationship between positive side pulses of the other two phases is a positional relationship in which an overlapping range on a time axis is smaller as compared with a state in which a positive side pulse of one phase encompasses a positive side pulse of the other pulse.

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