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公开(公告)号:US11977043B2
公开(公告)日:2024-05-07
申请号:US17253024
申请日:2019-08-02
IPC分类号: G01N27/12 , B81B3/00 , G01N27/414 , G01N33/00
CPC分类号: G01N27/129 , B81B3/0035 , G01N27/12 , G01N27/122 , G01N27/414 , G01N33/004 , G01N33/005 , B81B2201/02 , B81B2201/10
摘要: The MEMS type semiconductor gas detection element of the invention is a MEMS type semiconductor gas detection element 1 having a MEMS structure, for detecting hydrogen gas, comprising: a substrate 2; a gas sensitive portion 3 mainly made of a metal oxide semiconductor and provided to the substrate 2; a heating portion 4 for heating the gas sensitive portion 3; an inactive film 5 having hydrogen-permselective and formed outside the gas sensitive portion 3; a protective film 6 formed outside the inactive film 5, for suppressing deterioration of the gas sensitive portion 3.
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公开(公告)号:US11940432B2
公开(公告)日:2024-03-26
申请号:US17267059
申请日:2019-07-25
发明人: Masato Takeuchi , Junpei Furuno , Kenta Fukui , Kuniyuki Izawa , Masakazu Sai , Hirokazu Mitsuhashi , Takafumi Taniguchi
CPC分类号: G01N33/0014 , B01D71/08 , B01D71/22
摘要: A gas detector comprises a gas detection unit and a filter introducing surrounding atmosphere to the gas detection unit. The filter comprises a gas-permeable organic polymer membrane having an acidic group or a basic group.
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公开(公告)号:US20210310906A1
公开(公告)日:2021-10-07
申请号:US17264868
申请日:2020-05-01
发明人: Masato TAKEUCHI , Junpei FURUNO , Kenta FUKUI , Kenichi YOSHIOKA , Tatsuya TANIHIRA , Masakazu SAI , Takafumi TANIGUCHI , Hirokazu MITSUHASHI
摘要: Siloxane compounds are removed from the atmospheres by silica supporting an organic sulfonic acid compound. The silica with the organic sulfonic acid compound has a specific surface area down to 500 m2/g and up to 750 m2/g and a pore volume down to 0.8 m3/g and up to 1.2 m3/g, both measured by nitrogen gas adsorption method and has a pore diameter down to 4 nm and up to 8 nm, at the peak of differential pore volume measured by nitrogen gas adsorption method. The durability of gas sensing element against siloxanes is improved.
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公开(公告)号:US20210116405A1
公开(公告)日:2021-04-22
申请号:US17253024
申请日:2019-08-02
摘要: The MEMS type semiconductor gas detection element of the invention is a MEMS type semiconductor gas detection element 1 having a MEMS structure, for detecting hydrogen gas, comprising: a substrate 2; a gas sensitive portion 3 mainly made of a metal oxide semiconductor and provided to the substrate 2; a heating portion 4 for heating the gas sensitive portion 3; an inactive film 5 having hydrogen-permselective and formed outside the gas sensitive portion 3; a protective film 6 formed outside the inactive film 5, for suppressing deterioration of the gas sensitive portion 3.
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公开(公告)号:US10928339B2
公开(公告)日:2021-02-23
申请号:US15775701
申请日:2016-11-14
摘要: The present invention provides a catalytic conversion-type sensor that detects a detection target gas by detecting a conversion gas produced through a reaction, the catalytic conversion-type sensor including: a gas flow path that allows the detection target gas to flow down; and a conversion portion that is connected to the gas flow path, the conversion portion including, on a side partitioned by a diffusion means that allows the detection target gas to naturally diffuse, a heated catalyst portion that produces a conversion gas by causing the detection target gas to come into contact with a heated catalyst and react with the heated catalyst, and a sensor element portion that is capable of detecting the conversion gas produced through the reaction.
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公开(公告)号:US11977007B2
公开(公告)日:2024-05-07
申请号:US17264868
申请日:2020-05-01
发明人: Masato Takeuchi , Junpei Furuno , Kenta Fukui , Kenichi Yoshioka , Tatsuya Tanihira , Masakazu Sai , Takafumi Taniguchi , Hirokazu Mitsuhashi
CPC分类号: G01N1/2205 , B01D53/0407 , B01J20/22 , B01J20/28064 , B01J20/28073 , B01J20/28076 , G01N27/16
摘要: Siloxane compounds are removed from the atmospheres by silica supporting an organic sulfonic acid compound. The silica with the organic sulfonic acid compound has a specific surface area down to 500 m2/g and up to 750 m2/g and a pore volume down to 0.8 m3/g and up to 1.2 m3/g, both measured by nitrogen gas adsorption method and has a pore diameter down to 4 nm and up to 8 nm, at the peak of differential pore volume measured by nitrogen gas adsorption method. The durability of gas sensing element against siloxanes is improved.
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公开(公告)号:US20210164951A1
公开(公告)日:2021-06-03
申请号:US17267059
申请日:2019-07-25
发明人: Masato TAKEUCHI , Junpei FURUNO , Kenta FUKUI , Kuniyuki IZAWA , Masakazu SAI , Hirokazu MITSUHASHI , Takafumi TANIGUCHI
摘要: A gas detector comprises a gas detection unit and a filter introducing surrounding atmosphere to the gas detection unit. The filter comprises a gas-permeable organic polymer membrane having an acidic group or a basic group.
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公开(公告)号:US20210164929A1
公开(公告)日:2021-06-03
申请号:US17267060
申请日:2019-07-25
发明人: Masato TAKEUCHI , Junpei FURUNO , Kenta FUKUI , Kuniyuki IZAWA , Masakazu SAI , Hirokazu MITSUHASHI , Takafumi TANIGUCHI
摘要: A gas detection unit is accommodated within a housing of a gas sensor and the outside atmosphere of the housing is introduced through the filter to the gas detection unit. The filter comprises an organic polymer gas-permeable filter removing siloxanes and an inorganic filter removing alcohols and passing gases to be detected.
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