MEMS TYPE SEMICONDUCTOR GAS DETECTION ELEMENT

    公开(公告)号:US20210116405A1

    公开(公告)日:2021-04-22

    申请号:US17253024

    申请日:2019-08-02

    IPC分类号: G01N27/12 B81B3/00

    摘要: The MEMS type semiconductor gas detection element of the invention is a MEMS type semiconductor gas detection element 1 having a MEMS structure, for detecting hydrogen gas, comprising: a substrate 2; a gas sensitive portion 3 mainly made of a metal oxide semiconductor and provided to the substrate 2; a heating portion 4 for heating the gas sensitive portion 3; an inactive film 5 having hydrogen-permselective and formed outside the gas sensitive portion 3; a protective film 6 formed outside the inactive film 5, for suppressing deterioration of the gas sensitive portion 3.

    Catalytic-conversion-type sensor
    7.
    发明授权

    公开(公告)号:US10928339B2

    公开(公告)日:2021-02-23

    申请号:US15775701

    申请日:2016-11-14

    摘要: The present invention provides a catalytic conversion-type sensor that detects a detection target gas by detecting a conversion gas produced through a reaction, the catalytic conversion-type sensor including: a gas flow path that allows the detection target gas to flow down; and a conversion portion that is connected to the gas flow path, the conversion portion including, on a side partitioned by a diffusion means that allows the detection target gas to naturally diffuse, a heated catalyst portion that produces a conversion gas by causing the detection target gas to come into contact with a heated catalyst and react with the heated catalyst, and a sensor element portion that is capable of detecting the conversion gas produced through the reaction.