公开(公告)号：US20080113518A1

公开(公告)日：2008-05-15

申请号：US11964794

申请日：2007-12-27

申请人： Satoshi Kume ,  Nobuyuki Hishinuma ,  Hiroshi Sugahara

发明人： Satoshi Kume ,  Nobuyuki Hishinuma ,  Hiroshi Sugahara

IPC分类号： H01L21/302

CPC分类号： H01L21/0206 ,  H01L21/31111

摘要： A substrate supporting film to be etched is held on a rotating stage. Ultraviolet light having a wavelength of 200 nm or shorter radiated from first lamps irradiates the film in air, thereby removing an organic coatings from the film and making the surface of the film hydrophilic. A chemical solution is applied to the hydrophilic film while rotating the substrate. Ultraviolet light having a wavelength longer than 200 nm is radiated from second lamps and onto the film through the chemical solution.

摘要翻译： 要蚀刻的基底支撑膜保持在旋转台上。 从第一灯辐射的波长为200nm或更短的紫外光在空气中照射该膜，由此从膜中除去有机涂层并使膜的表面亲水。 在旋转衬底的同时将化学溶液施加到亲水膜。 波长超过200nm的紫外光通过化学溶液从第二个灯辐射到膜上。

公开(公告)号：US06624428B2

公开(公告)日：2003-09-23

申请号：US10292630

申请日：2002-11-13

申请人： Nobuyuki Hishinuma

发明人： Nobuyuki Hishinuma

IPC分类号： H01J3700

CPC分类号： H05B3/0052 ,  B01J19/123 ,  C23C16/482

摘要： To advantageously eliminate the disadvantage of attenuation of the radiant light from dielectric barrier discharge lamps by a UV transmission component, a treatment device using dielectric barrier discharge lamps is provided with a lamp chamber in which dielectric barrier discharge lamps are located and in which there is an inert gas atmosphere; a treatment chamber, in which an article to be treated is located, is provided with a treatment gas atmosphere, and a UV transmission component by which the lamp chamber and the treatment chamber are separated from one another. In each of the lamp chamber and the treatment chamber there are devices for determining the gas pressure within the respective chamber, a supply arrangement for delivering gas to the inside the respective chamber and an arrangement for discharging gas from the respective chamber. A control device regulates the pressure of the gas atmosphere within the lamp chamber and the pressure of the gas atmosphere of the treatment chamber relative to one another by determining the gas pressures of the lamp chamber and the treatment chamber.

摘要翻译： 为了有利地消除通过UV透射部件衰减来自电介质阻挡放电灯的辐射光的缺点，使用介质阻挡放电灯的处理装置设置有灯室，其中介质阻挡放电灯位于其中，其中存在 惰性气体气氛; 在处理室中设置待处理物品，处理气体气氛和灯室与处理室相互分离的UV透射部件。 在灯室和处理室的每一个中，存在用于确定相应室内的气体压力的装置，用于将气体输送到相应室的内部的供应装置和用于从相应室排出气体的装置。 控制装置通过确定灯室和处理室的气体压力来调节灯室内的气体气氛的压力和处理室的气体气氛的压力。

公开(公告)号：US5581152A

公开(公告)日：1996-12-03

申请号：US303033

申请日：1994-09-08

申请人： Hiromitsu Matsuno ,  Tatsushi Igarashi ,  Tatsumi Hiramoto ,  Fumitoshi Takemoto ,  Nobuyuki Hishinuma ,  Yasuo Oonishi ,  Kunio Kasagi ,  Takashi Asahina ,  Yasuhiko Wakahata

发明人： Hiromitsu Matsuno ,  Tatsushi Igarashi ,  Tatsumi Hiramoto ,  Fumitoshi Takemoto ,  Nobuyuki Hishinuma ,  Yasuo Oonishi ,  Kunio Kasagi ,  Takashi Asahina ,  Yasuhiko Wakahata

IPC分类号： H01J65/00 ,  H01J65/04 ,  H01J61/067

CPC分类号： H01J65/046 ,  H01J65/00

摘要： In a dielectric barrier discharge lamp, in which a discharge vessel, in which a discharge gas forming "excimer" molecules is encapsulated, is provided with a dielectric provided with a netlike electrode and a window, through which the light goes, the first object of the invention is achieved by an arrangement in which a thickness of ends of the above-described netlike electrodes is greater than the average thickness of the entire electrode. Another object of the invention is achieved by an arrangement in which a holder incorporated in the discharge vessel has an outer dimension that is less than/equal to an outer dimension of the netlike electrodes. A further object of the invention is achieved by an arrangement by which the discharge vessel has a hollow cylindrical shape formed from an external tube and an internal tube and a means for hermetic sealing is arranged inside the internal tube.

摘要翻译： 在其中封装了形成“准分子”分子的放电气体的放电容器的电介质阻挡放电灯中，设置有电介质，所述电介质设置有网状电极和窗，光通过该电介质，第一物体 本发明通过上述网状电极的端部的厚度大于整个电极的平均厚度的结构来实现。 本发明的另一个目的是通过一种结构实现的，其中结合在放电容器中的保持器的外形尺寸小于/等于网状电极的外部尺寸。 本发明的另一个目的是通过这样一种布置实现放电容器具有由外管和内管形成的中空圆筒形状，并且用于气密密封的装置设置在内管的内部。

公开(公告)号：US20050205521A1

公开(公告)日：2005-09-22

申请号：US11038191

申请日：2005-01-21

申请人： Satsohi Kume ,  Hiroshi Sugahara ,  Nobuyuki Hishinuma

发明人： Satsohi Kume ,  Hiroshi Sugahara ,  Nobuyuki Hishinuma

IPC分类号： H01L21/306 ,  B44C1/22

CPC分类号： H01L21/31111 ,  H01L21/31133 ,  H01L21/6708

摘要： A wet etching apparatus comprises a stage for fixing a substrate having a major surface covered with a film to be etched, a rotation mechanism for rotating the stage, a rotation controller for controlling rotation operation by the rotation mechanism, an ultraviolet irradiation unit having a light source for irradiating a portion of the major surface of the substrate with ultraviolet radiation, and an etching solution supply unit for supplying etching solution to the major surface of the substrate. The entire surface of the substrate can be irradiated with the ultraviolet radiation by a rotation of the stage.

摘要翻译： 湿法蚀刻装置包括用于固定主表面被被蚀刻膜覆盖的基板的台，用于旋转台的旋转机构，用于控制旋转机构的旋转操作的旋转控制器，具有光的紫外线照射单元 用于用紫外线辐射照射基板的主表面的一部分的源;以及用于将蚀刻溶液供应到基板的主表面的蚀刻溶液供应单元。 通过台的旋转可以用紫外线照射基板的整个表面。

公开(公告)号：US06787787B1

公开(公告)日：2004-09-07

申请号：US09530955

申请日：2000-05-16

申请人： Nobuyuki Hishinuma ,  Hiroshi Sugawara ,  Fumitosho Takemoto ,  Hiroaki Tokai ,  Jun Murase

发明人： Nobuyuki Hishinuma ,  Hiroshi Sugawara ,  Fumitosho Takemoto ,  Hiroaki Tokai ,  Jun Murase

IPC分类号： H01L21304

CPC分类号： H01L21/67115 ,  B08B17/00 ,  G21K5/02 ,  G21K5/04

摘要： An ultraviolet illumination equipment including a receptacle with a window, a dielectric-barrier discharge lamp located within the receptacle for emitting ultraviolet radiation through the window, and a heater for heating the window to at least 100° C.

摘要翻译： 一种紫外线照明设备，包括具有窗口的插座，位于插座内的介电阻挡放电灯，用于通过窗口发射紫外线辐射;以及加热器，用于将窗户加热至至少100℃。

公开(公告)号：US06525451B1

公开(公告)日：2003-02-25

申请号：US09610570

申请日：2000-07-05

申请人： Nobuyuki Hishinuma ,  Kunio Kasagi ,  Masahide Kiyose

发明人： Nobuyuki Hishinuma ,  Kunio Kasagi ,  Masahide Kiyose

IPC分类号： H01J1100

CPC分类号： H01J65/046 ,  H01J61/16

摘要： To enable the easy and adequately reliable cleaning of the inner surface of the chamber material, and as a result, to provide a dielectric barrier discharge lamp with good lighting characteristics and simplicity of manufacture, a dielectric barrier discharge lamp having a discharge chamber with a cylindrical, double-tube construction with an outer tube and an inner tube, in which the cylindrical discharge space formed between the outer tube and the inner tube is filled with a discharge gas in which excimer molecules are formed by a dielectric barrier discharge, two or more fluid distribution tube remnants connecting to each discharge chamber. It is preferable that the dielectric barrier discharge lamp described above have two or more fluid distribution tube remnants formed on opposite ends of the discharge chamber.

摘要翻译： 为了能够容易且充分地可靠地清洁室材料的内表面，结果，提供具有良好的照明特性和制造简单性的电介质阻挡放电灯，具有具有圆柱形的放电室的电介质阻挡放电灯 ，具有外管和内管的双管结构，其中形成在外管和内管之间的圆柱形放电空间填充有放电气体，其中通过介电阻挡放电形成准分子分子，两个或更多个 流体分配管残留物连接到每个排放室。 优选上述介电阻挡放电灯具有形成在放电室的相对端上的两个以上的流体分配管残留物。

公开(公告)号：US5763999A

公开(公告)日：1998-06-09

申请号：US531374

申请日：1995-09-20

申请人： Hiromitsu Matsuno ,  Nobuyuki Hishinuma ,  Masashi Okamoto ,  Tatsushi Igarashi ,  Fumitoshi Takemoto

发明人： Hiromitsu Matsuno ,  Nobuyuki Hishinuma ,  Masashi Okamoto ,  Tatsushi Igarashi ,  Fumitoshi Takemoto

IPC分类号： G21K5/00 ,  H01J65/00 ,  H01J65/04 ,  H01J61/067

CPC分类号： H01J65/046

摘要： A light source device in which the radiated light from the dielectric barrier discharge lamp can always be stabilized even if the discharge vessel of the dielectric barrier discharge lamp is large or the load on the tube wall within the discharge vessel is small. This is achieved according to the invention by the provision of a light source device having a discharge lamp which has a generally cylindrical, coaxial double-tube arrangement of an outer tube and an inner tube, in which there is an outer electrode on the outer tube, in which there is an inner electrode on the inner tube, and in which a discharge space between the inner and outer tubes is filled with a discharge gas for formation of excimer molecules by a dielectric barrier discharge, and of a power source for operating this discharge lamp in accordance with the relationship: Vs/Vp.ltoreq.0.5 where Vs is the starting voltage and Vp is the voltage applied to the discharge lamp during steady-state luminous operation.

摘要翻译： 即使介电阻挡放电灯的放电容量大或者放电容器内的管壁上的负荷较小，来自电介质阻挡放电灯的辐射光总能稳定的光源装置。 根据本发明，通过提供一种具有放电灯的光源装置来实现，所述放电灯具有外管和内管的大致圆筒形同轴双管布置，其中在外管上具有外电极 其中在内管上存在内电极，并且其中内管和外管之间的放电空间填充有用于通过电介质阻挡放电形成准分子的放电气体，以及用于操作该电极的电源 放电灯按照Vs / Vp

公开(公告)号：US5666026A

公开(公告)日：1997-09-09

申请号：US530655

申请日：1995-09-20

申请人： Hiromitsu Matsuno ,  Nobuyuki Hishinuma ,  Kenichi Hirose ,  Kunio Kasagi ,  Fumitoshi Takemoto ,  Yoshinori Aiura ,  Tatsushi Igarashi

发明人： Hiromitsu Matsuno ,  Nobuyuki Hishinuma ,  Kenichi Hirose ,  Kunio Kasagi ,  Fumitoshi Takemoto ,  Yoshinori Aiura ,  Tatsushi Igarashi

IPC分类号： G21K5/00 ,  H01J65/00 ,  H01J65/04 ,  H01J17/16 ,  H01J61/06

CPC分类号： H01J65/046

摘要： A dielectric barrier discharge lamp having a generally cylindrical double-tube arrangement of an outer tube coaxially disposed about an inner tube, with an outer electrode disposed on an outside surface of the outer tube, an inner electrode disposed on an inside surface of the inner tube, and a discharge space provided between the outer tube and the inner tube which is filled with a discharge gas for formation of excimer molecules by dielectric barrier discharge achieves firm engagement of the inner electrode against the inner tube and a stable discharge over a long time even if part of the electrode corrodes due to the ozone produced or it wears. This is achieved by embodiments in which the inner electrode is a generally tubular part which is slit in an axial direction along the full length thereof. The tubular part can be a single cylindrically sheet having opposite longitudinally extending edges spaced from each other by a gap or overlapped. Alternatively, the tubular part can be formed of a pair of substantially semi-cylindrical parts which are separated by a gap between each pair of longitudinally extending edges.

摘要翻译： 一种电介质阻挡放电灯，其具有大致圆柱形的双管布置，外管同轴地设置在内管周围，外电极设置在外管的外表面上，内电极设置在内管的内表面上 并且设置在外管和内管之间的放电空间，其填充有用于通过电介质阻挡放电形成准分子分子的放电气体，使得内部电极与内管牢固接合，并且长时间稳定地放电甚至 如果电极的一部分由于产生的臭氧或其磨损而腐蚀。 这是通过其中内部电极是沿着其整个长度沿轴向方向狭缝的大致管状部分的实施例来实现的。 管状部件可以是单个圆柱形片材，其具有彼此间隔开或重叠的相对的纵向延伸边缘。 或者，管状部分可以由一对基本上半圆柱形的部分形成，这些部分由每对纵向延伸边缘之间的间隙分开。

公开(公告)号：US5757132A

公开(公告)日：1998-05-26

申请号：US725039

申请日：1996-10-02

申请人： Hiromitsu Matsuno ,  Nobuyuki Hishinuma ,  Kenichi Hirose ,  Kunio Kasagi ,  Fumitoshi Takemoto ,  Yoshinori Aiura ,  Tatsushi Igarashi

发明人： Hiromitsu Matsuno ,  Nobuyuki Hishinuma ,  Kenichi Hirose ,  Kunio Kasagi ,  Fumitoshi Takemoto ,  Yoshinori Aiura ,  Tatsushi Igarashi

IPC分类号： H01J65/00 ,  H01J61/067

CPC分类号： H01J65/046

摘要： To maintain the relative positional relationship between an inner tube and an inner electrode of a dielectric barrier discharge tube having a roughly cylindrical, double tube arrangement of an outer tube coaxially arranged about an inner tube with a discharge space defined therebetween, an outer electrode on an outer surface of the outer tube, an inner electrode on an inner surface of the inner tube, and a discharge gas which forms excimer molecules by a dielectric barrier discharge filling said discharge space, despite repeated expansion and contraction of the inner electrode due to the dielectric barrier discharge lamp being repeatedly turned on and off, according to the invention, the inner electrode is formed of a substantially tubular metal component or the like, and a motion preventing component is provided at opposite ends of the inner electrode for maintaining an axial position of the inner electrode relative to the inner tube.

摘要翻译： 为了保持介质阻挡放电管的内管和内电极之间的相对位置关系，所述介质阻挡放电管具有围绕内管同轴布置的外管的大致圆筒形双管布置，其间限定有放电空间，外电极 外管的外表面，内管的内表面上的内电极和通过填充所述放电空间的介电阻挡放电形成准分子分子的放电气体，尽管内电极由于电介质的反复膨胀和收缩 根据本发明，根据本发明，内部电极由基本上管状的金属部件等形成，并且在内部电极的相对端设置防止运动部件，用于保持轴向位置 内部电极相对于内管。

公开(公告)号：US07935266B2

公开(公告)日：2011-05-03

申请号：US11964794

申请日：2007-12-27

申请人： Satoshi Kume ,  Nobuyuki Hishinuma ,  Hiroshi Sugahara

发明人： Satoshi Kume ,  Nobuyuki Hishinuma ,  Hiroshi Sugahara

IPC分类号： B44C1/22 ,  C03C15/00 ,  C03C25/68 ,  C23F1/00 ,  C23F3/00

CPC分类号： H01L21/0206 ,  H01L21/31111

摘要： A substrate supporting film to be etched is held on a rotating stage. Ultraviolet light having a wavelength of 200 nm or shorter radiated from first lamps irradiates the film in air, thereby removing an organic coatings from the film and making the surface of the film hydrophilic. A chemical solution is applied to the hydrophilic film while rotating the substrate. Ultraviolet light having a wavelength longer than 200 nm is radiated from second lamps and onto the film through the chemical solution.

摘要翻译： 要蚀刻的基底支撑膜保持在旋转台上。 从第一灯辐射的波长为200nm或更短的紫外光在空气中照射该膜，由此从膜中除去有机涂层并使膜的表面亲水。 在旋转衬底的同时将化学溶液施加到亲水膜。 波长超过200nm的紫外光通过化学溶液从第二个灯辐射到膜上。