公开(公告)号：US08450197B2

公开(公告)日：2013-05-28

申请号：US12962968

申请日：2010-12-08

Applicant: Axel Preusse ,  Norbert Schroeder ,  Uwe Stoeckgen

Inventor： Axel Preusse ,  Norbert Schroeder ,  Uwe Stoeckgen

IPC: H01L21/20 ,  H01L21/4763 ,  H01L21/44

CPC classification number: H01L21/7684 ,  H01L21/76819 ,  H01L21/76879

Abstract: Contact elements in the contact level of a semiconductor device may be formed on the basis of a selective deposition technique, such as electroless plating, wherein an efficient planarization of the contact level is achieved without subjecting the contact elements to undue mechanical stress. In some illustrative embodiments, an overfilling of the contact openings may be reliably avoided and the planarization of the surface topography is accomplished on the basis of a non-critical polishing process. In other cases, electrochemical etch techniques are applied in combination with a conductive sacrificial current distribution layer in order to remove any excess material of the contact elements without inducing undue mechanical stress.

Abstract translation: 可以基于选择性沉积技术（例如化学镀）形成半导体器件的接触电平中的接触元件，其中在不使接触元件受到不适当的机械应力的情况下实现接触电平的有效平面化。 在一些示例性实施例中，可以可靠地避免接触开口的过度填充，并且基于非关键抛光工艺来实现表面形貌的平坦化。 在其他情况下，电化学蚀刻技术与导电牺牲电流分布层结合使用，以便去除接触元件的任何多余材料而不引起不适当的机械应力。

公开(公告)号：US06430563B1

公开(公告)日：2002-08-06

申请号：US09689130

申请日：2000-10-12

Applicant: Franz-Josef Fritz ,  Norbert Schroeder

Inventor： Franz-Josef Fritz ,  Norbert Schroeder

IPC: G60F1730

CPC classification number: G06Q10/10 ,  G06F8/71 ,  G06F17/30014 ,  G06F17/30882 ,  Y10S707/955 ,  Y10S707/99931 ,  Y10S707/99943 ,  Y10S707/99944 ,  Y10S707/99945 ,  Y10S707/99953

Abstract: A system and method for storage and management of multiple versions and context variants of documents in a multi-user environment is provided by a three-tiered content system/model for storage and a context resolution mechanism for retrieval. It utilizes three classes consisting of logical objects, physical objects, and components that contain administrative data associated with physical objects. The physical objects that belong to the same logical object (a collection) may be context specific variants (based on content, format, language, etc.) of each other, or related by a different criteria. The context resolution mechanism retrieves the most appropriate variant of an object through correlation of attributes of physical objects encapsulated by a particular logical object and attributes of a front-end client application. The system comprises a logical hyperlink mechanism that allows physical links between objects to be resolved at run-time. It also provides a check-in/-out control mechanism to allow simultaneous access to objects in a multi-user environment.

Abstract translation: 用于存储和管理多用户环境中文档的多个版本和上下文变体的系统和方法由用于存储的三层内容系统/模型和用于检索的上下文解析机制提供。 它使用由逻辑对象，物理对象和包含与物理对象相关联的管理数据的组件组成的三个类。 属于同一逻辑对象（集合）的物理对象可以是上下文特定的变体（基于内容，格式，语言等），或者由不同的标准相关。 上下文解析机制通过由特定逻辑对象封装的物理对象的属性和前端客户端应用程序的属性的相关性来检索对象的最合适的变体。 该系统包括逻辑超链接机制，其允许在运行时解析对象之间的物理链路。 它还提供了一个检入/关闭控制机制，允许同时访问多用户环境中的对象。

公开(公告)号：US20150008132A1

公开(公告)日：2015-01-08

申请号：US14321910

申请日：2014-07-02

Applicant: Juerg Stahl ,  Norbert Schroeder ,  Fred Richter

Inventor： Juerg Stahl ,  Norbert Schroeder ,  Fred Richter

IPC: C25D21/12 ,  C25F3/02

CPC classification number: C25D21/12 ,  C23C18/1675 ,  C25D7/00 ,  C25D7/12 ,  C25F3/02 ,  G01N27/4166

Abstract: The invention relates to an electrochemical analysis method for monitoring and controlling the quality of electrochemical deposition and/or plating processes whereby the electrochemical analysis method uses a fingerprinting analysis method of an output signal to have an indicator of whether the chemistry and/or process is operating in the normally expected range, whereby the method utilizes one or more substrates as working electrode(s) and a) whereby the potential between the one or more working electrodes and one or more reference electrodes being analyzed to provide an output signal fingerprint which is represented as potential difference as a function of time or b) the input power of a process power supply to provide input energy in the form of current and/or potential between the working electrode(s) and a counter-electrode whereby the method utilizes the potential between the one or more working electrode(s) and at least one of: one or more reference electrodes; or one or more counter-electrodes; to provide an output signal fingerprint. The invention also relates to an electrochemical system (FIG. 3).

Abstract translation: 本发明涉及一种用于监测和控制电化学沉积和/或电镀过程的质量的电化学分析方法，其中电化学分析方法使用输出信号的指纹分析方法来指示化学和/或过程是否在运行 在正常预期的范围内，由此该方法利用一个或多个基板作为工作电极，并且a）由此分析一个或多个工作电极与一个或多个参考电极之间的电位，以提供表示的输出信号指纹 作为电位差作为时间的函数，或b）工作电源的输入功率，以在工作电极和对电极之间以电流和/或电位的形式提供输入能量，由此该方法利用电位 在所述一个或多个工作电极和以下中的至少一个之间：一个或多个参考电极; 或一个或多个反电极; 提供输出信号指纹。 本发明还涉及电化学系统（图3）。

公开(公告)号：US20110244679A1

公开(公告)日：2011-10-06

申请号：US12962968

申请日：2010-12-08

Applicant: Axel Preusse ,  Norbert Schroeder ,  Uwe Stoeckgen

Inventor： Axel Preusse ,  Norbert Schroeder ,  Uwe Stoeckgen

IPC: H01L21/44

CPC classification number: H01L21/7684 ,  H01L21/76819 ,  H01L21/76879

Abstract: Contact elements in the contact level of a semiconductor device may be formed on the basis of a selective deposition technique, such as electroless plating, wherein an efficient planarization of the contact level is achieved without subjecting the contact elements to undue mechanical stress. In some illustrative embodiments, an overfilling of the contact openings may be reliably avoided and the planarization of the surface topography is accomplished on the basis of a non-critical polishing process. In other cases, electrochemical etch techniques are applied in combination with a conductive sacrificial current distribution layer in order to remove any excess material of the contact elements without inducing undue mechanical stress.

Abstract translation: 可以基于选择性沉积技术（例如化学镀）形成半导体器件的接触电平中的接触元件，其中在不使接触元件受到不适当的机械应力的情况下实现接触电平的有效平面化。 在一些示例性实施例中，可以可靠地避免接触开口的过度填充，并且基于非关键抛光工艺来实现表面形貌的平坦化。 在其他情况下，电化学蚀刻技术与导电牺牲电流分布层结合使用，以便去除接触元件的任何多余材料而不引起不适当的机械应力。

公开(公告)号：US20060266652A1

公开(公告)日：2006-11-30

申请号：US11347454

申请日：2006-02-03

Applicant: Andreas Netz ,  Niels Rackwitz ,  Joern Schnapke ,  Frank Kuechenmeister ,  Norbert Schroeder

Inventor： Andreas Netz ,  Niels Rackwitz ,  Joern Schnapke ,  Frank Kuechenmeister ,  Norbert Schroeder

IPC: C25D21/12

CPC classification number: C25D21/12 ,  H01L22/20 ,  H01L2924/0002 ,  H01L2924/014 ,  H01L2924/00

Abstract: By evaluating a dynamic failure signal, such as a voltage signal and/or a current signal, obtained during an electroplating operation for forming solder bumps, an inline control system with a responsiveness on a substrate basis may be established. Thus, the electroplating tool may be controlled on a single wafer basis to improve process uniformity and also significantly reduce yield loss.

Abstract translation: 通过评估在用于形成焊料凸块的电镀操作期间获得的动态故障信号，例如电压信号和/或电流信号，可以建立基于基板的响应性的在线控制系统。 因此，可以在单个晶片的基础上控制电镀工具以改善工艺均匀性并且还显着降低产量损失。

公开(公告)号：US20050165496A1

公开(公告)日：2005-07-28

申请号：US10965161

申请日：2004-10-15

Applicant: Frank Westendorf ,  Vibeke Egetoft ,  Norbert Schroeder

Inventor： Frank Westendorf ,  Vibeke Egetoft ,  Norbert Schroeder

IPC: G06Q10/00 ,  G06Q40/00 ,  G05B11/01 ,  G06F11/00

CPC classification number: G06Q10/10 ,  G06Q40/02

Abstract: Computer-implemented methods and computer systems are provided for executing at least one action in response to the content of a data object describing an event or incident triggering the at least one action. As disclosed herein, the at least one action to be executed may be determined on the basis of the content of the data object and an execution plan object may be generated on the basis of the determination of the at least one action. Further, the execution plan object may include a schedule of the execution of the at least one action and the at least one action may be executed according to the execution plan object schedule.

Abstract translation: 提供了计算机实现的方法和计算机系统，用于响应于描述触发所述至少一个动作的事件或事件的数据对象的内容来执行至少一个动作。 如本文所公开的，可以基于数据对象的内容来确定要执行的至少一个动作，并且可以基于至少一个动作的确定来生成执行计划对象。 此外，执行计划对象可以包括执行至少一个动作的调度，并且可以根据执行计划对象调度来执行至少一个动作。

公开(公告)号：US07055134B2

公开(公告)日：2006-05-30

申请号：US10209281

申请日：2002-07-30

Applicant: Norbert Schroeder

Inventor： Norbert Schroeder

IPC: G06F9/44

CPC classification number: G06F9/465

Abstract: Methods and data processing apparatus, including computer program products, providing and implementing an integration framework for service providers, where a persistent object identifier object is used to provide a general reference to a persistent object of a service provider. A service provider has a service provider client, a service provider backend, and a service provider repository for storing service provider persistent objects. The service provider provides to its objects the services of storage of persistent objects in the service provider repository; visualization of objects in the service provider client, and access to objects in the service provider backend. The framework has a client framework and a backend framework. The client framework communicates directly with the backend framework, and the backend framework performs non-visual operations on the service provider backend.

Abstract translation: 方法和数据处理装置，包括计算机程序产品，为服务提供者提供和​​实现集成框架，其中使用持久对象标识符对象来提供对服务提供者的持久对象的一般参考。 服务提供商具有服务提供商客户端，服务提供者后端以及用于存储服务提供者持久对象的服务提供商存储库。 服务提供商向其对象提供在服务提供商存储库中存储持久对象的服务; 可视化服务提供商客户端中的对象，以及访问服务提供商后端中的对象。 该框架具有客户端框架和后端框架。 客户端框架直接与后端框架进行通信，后端框架在服务提供商后端执行非视觉操作。

公开(公告)号：US6134552A

公开(公告)日：2000-10-17

申请号：US14538

申请日：1998-01-28

Applicant: Franz-Joseph Fritz ,  Norbert Schroeder

Inventor： Franz-Joseph Fritz ,  Norbert Schroeder

IPC: G06F9/44 ,  G06F12/00 ,  G06F17/30 ,  G06Q10/10

CPC classification number: G06Q10/10 ,  G06F17/30014 ,  G06F17/30882 ,  G06F8/71 ,  Y10S707/955 ,  Y10S707/99931 ,  Y10S707/99943 ,  Y10S707/99944 ,  Y10S707/99945 ,  Y10S707/99953

Abstract: A system and method is described for the efficient management and storage of documents in a multi-user environment by implementing a three-tiered content model for storage and a context resolution mechanism for retrieval. Source objects may logically reference target objects where the target objects dynamically exist in different versions. In particular, the content model contains three classes in a collection wherein each subsequent class inherits the properties of the previous class. The classes comprise logical objects, physical objects, and components. All physical objects that belong to the same logical object are context specific variants, such as different versions of each other. Physical objects in a collection can be related by different criteria, as well as by user-defined relations. The system provides for versioning of objects, such as variations based on content, format, language, etc., to create variants of objects in the same collection, however variance among physical objects which belong to one logical object is not limited to different versions. Such versioning is controlled through a check-in/-out mechanism to allow use in a multi-user environment. The context resolution mechanism is used to retrieve the most accurate version of an object pursuant to certain user-supplied criteria in response to a call from a client front-end application. The system is linked to various independent front-end editor/browser applications through application programming interfaces. The system also provides for references between various objects in the Knowledge Provider. A dynamic logical hyperlink mechanism is provided to maintain references from source to target objects while a different version of the target object is being created.

Abstract translation: 描述了通过实现用于存储的三层内容模型和用于检索的上下文解析机制来在多用户环境中有效地管理和存储文档的系统和方法。 源对象可以在逻辑上引用目标对象动态存在于不同版本中的目标对象。 特别地，内容模型在集合中包含三个类，其中每个后续类继承前一类的属性。 这些类包括逻辑对象，物理对象和组件。 属于同一逻辑对象的所有物理对象都是上下文特定的变体，例如彼此的不同版本。 集合中的物理对象可以通过不同的标准以及用户定义的关系来关联。 该系统提供对象的版本化，例如基于内容，格式，语言等的变体，以创建相同集合中的对象的变体，然而属于一个逻辑对象的物理对象之间的差异不限于不同的版本。 这种版本控制是通过一个登入/退出机制来控制的，以允许在多用户环境中使用。 上下文解析机制用于响应于来自客户端前端应用程序的调用，根据特定的用户提供的标准来检索对象的最准确版本。 该系统通过应用程序编程接口链接到各种独立的前端编辑器/浏览器应用程序。 该系统还提供知识提供者中各种对象之间的引用。 提供了一种动态逻辑超链接机制，用于在源目标对象的目标对象的不同版本被创建时保持引用。

公开(公告)号：US06413733B1

公开(公告)日：2002-07-02

申请号：US09581357

申请日：2000-06-09

Applicant: Rolf Nagel ,  Juergen Mistele ,  Norbert Schroeder

Inventor： Rolf Nagel ,  Juergen Mistele ,  Norbert Schroeder

IPC: C12Q150

CPC classification number: C12Q1/50

Abstract: A stabilized reagent for the photometric enzymatic determination of creatine kinase (CK) in biological sample material by forming ATP from creatine phosphate and ADP and detecting the ATP formed, containing an organic or inorganic sulphur compound preferably in a submolar amount relative to the added CK activator. A corresponding reagent in a liquid form is stable at 2 to 8° C. for up to 12 months without significant loss of function.

Abstract translation: 一种用于通过从磷酸肌酸和ADP形成ATP并检测形成的ATP而测定生物样品材料中的肌酸激酶（CK）的稳定化试剂，所述ATP含有相对于添加的CK激活剂优选为亚摩尔量的有机或无机硫化合物 。 液体形式的相应试剂在2至8℃下稳定长达12个月，不会明显损失功能。