公开(公告)号：US06528008B1

公开(公告)日：2003-03-04

申请号：US09218934

申请日：1998-12-22

Applicant: Per Bjoerkman

Inventor： Per Bjoerkman

IPC: B28B114

CPC classification number: G01L9/0075 ,  G01L9/0044

Abstract: A ceramic membrane for a capacitive vacuum measuring cell includes a thin ceramic membrane with a thickness of

Abstract translation: 用于电容式真空测量电池的陶瓷膜包括厚度<250μm，特别是小于120μm的薄陶瓷膜。 膜由Al2O3的带状生坯体制造，并且通过在烧结后使膜平滑而赋予高平坦度。 生坯在比烧结后施加的平滑温度高的烧结温度下烧结。

公开(公告)号：US07107855B2

公开(公告)日：2006-09-19

申请号：US10360229

申请日：2003-02-07

Applicant: Per Bjoerkman

Inventor： Per Bjoerkman

IPC: G01L9/12

CPC classification number: G01L9/0075 ,  G01L9/0044

Abstract: A ceramic membrane for a capacitive vacuum measuring cell includes a thin ceramic membrane with a thickness of

Abstract translation: 用于电容式真空测量电池的陶瓷膜包括厚度<250μm，特别是小于120μm的薄陶瓷膜。 膜由Al 2 O 3 3的带状生坯体制成，并且通过在烧结后使膜平滑而赋予高平坦度。 生坯在比烧结后施加的平滑温度高的烧结温度下烧结。

公开(公告)号：US06591687B1

公开(公告)日：2003-07-15

申请号：US09219090

申请日：1998-12-22

Applicant: Per Bjoerkman ,  Ray Olsson

Inventor： Per Bjoerkman ,  Ray Olsson

IPC: G01L912

CPC classification number: G01L9/0075 ,  Y10T29/43 ,  Y10T29/435 ,  Y10T29/49007 ,  Y10T29/49155 ,  Y10T29/49174 ,  Y10T29/49224

Abstract: A capacitive vacuum measuring cell includes first and second ceramic housing bodies (1, 4) joined by an edge seal (3). A thin ceramic membrane (2) is supported between first and second housing bodies (1, 4) by the edge seal (3) at a small distance from the first housing body (1) creating a reference vacuum chamber (25) therebetween. An electrically conductive material (7) coats opposing surfaces of the first housing body (1) and the membrane (2) to form a capacitor. A measurement vacuum chamber (26) is provided between the membrane (2) and the second housing body (4). A port (5) communicates with the second housing body (4) to connect the measurement vacuum chamber (26) of the measuring cell to the medium to be measured. The membrane (2) is made from an Al2O3 slurry that is sintered in a first heating step, cooled, and then reheated to smooth the membrane.

Abstract translation: 电容式真空测量单元包括通过边缘密封件（3）连接的第一和第二陶瓷壳体（1,4）。 薄壁陶瓷膜（2）通过边缘密封（3）在与第一壳体（1）相距很小的距离处被支撑在第一和第二壳体（1,4）之间，从而在它们之间形成参考真空室（25）。 导电材料（7）涂覆第一壳体（1）和膜（2）的相对表面以形成电容器。 在膜（2）和第二壳体（4）之间设置测量真空室（26）。 端口（5）与第二壳体（4）连通，将测量室的测量真空室（26）连接到待测介质。 膜（2）由在第一加热步骤中烧结的Al 2 O 3浆料制成，冷却，然后再加热以使膜平滑。

公开(公告)号：US07140085B2

公开(公告)日：2006-11-28

申请号：US10618511

申请日：2003-07-11

Applicant: Per Bjoerkman ,  Ray Olsson

Inventor： Per Bjoerkman ,  Ray Olsson

IPC: H01G7/00

CPC classification number: G01L9/0075 ,  Y10T29/43 ,  Y10T29/435 ,  Y10T29/49007 ,  Y10T29/49155 ,  Y10T29/49174 ,  Y10T29/49224

Abstract: A capacitive vacuum measuring cell includes first and second ceramic housing bodies (1, 4) joined by an edge seal (3). A thin ceramic membrane (2) is supported between first and second housing bodies (1, 4) by the edge seal (3) at a small distance from the first housing body (1) creating a reference vacuum chamber (25) therebetween. An electrically conductive material (7) coats opposing surfaces of the first housing body (1) and the membrane (2) to form a capacitor. A measurement vacuum chamber (26) is provided between the membrane (2) and the second housing body (4). A port (5) communicates with the second housing body (4) to connect the measurement vacuum chamber (26) of the measuring cell to the medium to be measured. The membrane (2) is made from an Al2O3 slurry that is sintered in a first heating step, cooled, and then reheated to smooth the membrane.

Abstract translation: 电容式真空测量单元包括通过边缘密封件（3）连接的第一和第二陶瓷壳体（1,4）。 薄壁陶瓷膜（2）通过边缘密封（3）在与第一壳体（1）相距很小的距离处被支撑在第一和第二壳体（1,4）之间，从而在它们之间形成参考真空室（25）。 导电材料（7）涂覆第一壳体（1）和膜（2）的相对表面以形成电容器。 在膜（2）和第二壳体（4）之间设置测量真空室（26）。 端口（5）与第二壳体（4）连通，将测量室的测量真空室（26）连接到待测介质。 膜（2）由在第一加热步骤中烧结的Al 2 N 3 O 3浆料制成，冷却，然后再加热以使膜平滑。