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公开(公告)号:US20080061250A1
公开(公告)日:2008-03-13
申请号:US11374945
申请日:2006-03-14
IPC分类号: H01J37/317
CPC分类号: H01J37/3171 , H01J37/244 , H01J37/304 , H01J2237/221 , H01J2237/226 , H01J2237/2446 , H01J2237/24507 , H01J2237/24528 , H01J2237/24535 , H01J2237/24542 , H01J2237/24571 , H01J2237/30472 , H01J2237/30477
摘要: An image monitor system monitors characteristics of an ion beam employed in ion implantation. The monitored characteristics can include particle count, particle information, beam current intensity, beam shape, and the like. The system includes one or more image sensors that capture frames or images along a beam path of an ion beam. An image analyzer analyzes the captured frames to obtain measured characteristics. A controller determines adjustments or corrections according to the measured characteristics and desired beam characteristics.
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2.
公开(公告)号:US07423277B2
公开(公告)日:2008-09-09
申请号:US11374945
申请日:2006-03-14
IPC分类号: H01J37/317 , H01J49/10
CPC分类号: H01J37/3171 , H01J37/244 , H01J37/304 , H01J2237/221 , H01J2237/226 , H01J2237/2446 , H01J2237/24507 , H01J2237/24528 , H01J2237/24535 , H01J2237/24542 , H01J2237/24571 , H01J2237/30472 , H01J2237/30477
摘要: An image monitor system monitors characteristics of an ion beam employed in ion implantation. The monitored characteristics can include particle count, particle information, beam current intensity, beam shape, and the like. The system includes one or more image sensors that capture frames or images along a beam path of an ion beam. An image analyzer analyzes the captured frames to obtain measured characteristics. A controller determines adjustments or corrections according to the measured characteristics and desired beam characteristics.
摘要翻译: 图像监视器系统监测离子注入中使用的离子束的特性。 监测的特征可以包括粒子数,粒子信息,束电流强度,束形状等。 该系统包括一个或多个图像传感器,其捕获沿着离子束的光束路径的帧或图像。 图像分析仪分析捕获的帧以获得测量的特征。 控制器根据测量的特性和期望的波束特性来确定调整或校正。
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