公开(公告)号：US20090256650A1

公开(公告)日：2009-10-15

申请号：US12371468

申请日：2009-02-13

Applicant: Andrea Cathelin ,  Didier Belot ,  Alexandre Augusto Shirakawa ,  Eric Kerherve ,  Jean-Marie Pham ,  Pierre Jary

Inventor： Andrea Cathelin ,  Didier Belot ,  Alexandre Augusto Shirakawa ,  Eric Kerherve ,  Jean-Marie Pham ,  Pierre Jary

IPC: H03H9/54 ,  B05D5/12 ,  B44C1/22

CPC classification number: H03H9/584 ,  H03H9/589 ,  Y10T29/42 ,  Y10T29/49005

Abstract: A filter with coupled resonator having a substrate; an acoustic mirror intended to support acoustic resonators, and to isolate these resonators from the substrate; a first structure with an upper resonator and a lower resonator coupled to one another through at least one layer of acoustic coupling; a second structure with an upper resonator and a lower resonator coupled to one another through at least one layer of acoustic coupling; the lower resonators of the first and second structure having the same electrodes. The first and second structures are connected via a fifth resonator for which electrodes and the piezoelectric layer of the lower resonators are of the first and second structure.

Abstract translation: 具有耦合谐振器的滤波器，具有基板; 用于支撑声谐振器的声反射镜，并将这些谐振器与基板隔离; 具有通过至少一个声耦合层彼此耦合的上谐振器和下谐振器的第一结构; 具有通过至少一个声耦合层彼此耦合的上谐振器和下谐振器的第二结构; 第一和第二结构的下部谐振器具有相同的电极。 第一和第二结构通过电极和下部谐振器的压电层具有第一和第二结构的第五谐振器连接。

公开(公告)号：US07868517B2

公开(公告)日：2011-01-11

申请号：US12255426

申请日：2008-10-21

Applicant: Didier Belot ,  Andreia Cathelin ,  Alexandre Augusto Shirakawa ,  Jean-Marie Pham ,  Pierre Jary ,  Eric Kerherve

Inventor： Didier Belot ,  Andreia Cathelin ,  Alexandre Augusto Shirakawa ,  Jean-Marie Pham ,  Pierre Jary ,  Eric Kerherve

IPC: H01L41/04

CPC classification number: H03H9/17 ,  H03H9/02228

Abstract: A Lamb wave resonator includes a piezoelectric layer, and a first electrode against a first face of the piezoelectric layer. The first electrode includes fingers and a contact arm, with each finger including a first side in contact with the contact arm and two other sides parallel to one another. Portions of the piezoelectric layer are at least partially etched between the two fingers to form a recess. The fingers are spaced apart from one another by a distance W calculated according to the following equation: W = n · va lateral f , with ⁢ ⁢ n ∈ N where, valateral is an acoustic propagation speed of Lamb waves, n is an order of a resonance mode of the Lamb waves, f is a resonance frequency of the Lamb wave resonator.

Abstract translation: 兰姆波谐振器包括压电层和抵靠压电层的第一面的第一电极。 第一电极包括指状物和接触臂，每个指状物包括与接触臂接触的第一侧和彼此平行的两个另外的边。 在两个手指之间至少部分蚀刻压电层的一部分以形成凹部。 手指按照以下等式计算的距离W彼此间隔开：W = n·va横向f，其中n n为N，其中，侧向是兰姆波的声传播速度，n是 Lamb波的谐振模式，f是兰姆波谐振器的谐振频率。

公开(公告)号：US08188811B2

公开(公告)日：2012-05-29

申请号：US12371468

申请日：2009-02-13

Applicant: Andrea Cathelin ,  Didier Belot ,  Alexandre Augusto Shirakawa ,  Eric Kerherve ,  Jean-Marie Pham ,  Pierre Jary

Inventor： Andrea Cathelin ,  Didier Belot ,  Alexandre Augusto Shirakawa ,  Eric Kerherve ,  Jean-Marie Pham ,  Pierre Jary

IPC: H03H9/54 ,  H03H3/02

CPC classification number: H03H9/584 ,  H03H9/589 ,  Y10T29/42 ,  Y10T29/49005

Abstract: A filter with coupled resonator having a substrate; an acoustic mirror intended to support acoustic resonators, and to isolate these resonators from the substrate; a first structure with an upper resonator and a lower resonator coupled to one another through at least one layer of acoustic coupling; a second structure with an upper resonator and a lower resonator coupled to one another through at least one layer of acoustic coupling; the lower resonators of the first and second structure having the same electrodes. The first and second structures are connected via a fifth resonator for which electrodes and the piezoelectric layer of the lower resonators are of the first and second structure.

Abstract translation: 具有耦合谐振器的滤波器，具有基板; 用于支撑声谐振器的声反射镜，并将这些谐振器与基板隔离; 具有通过至少一个声耦合层彼此耦合的上谐振器和下谐振器的第一结构; 具有通过至少一个声耦合层彼此耦合的上谐振器和下谐振器的第二结构; 第一和第二结构的下部谐振器具有相同的电极。 第一和第二结构通过电极和下部谐振器的压电层具有第一和第二结构的第五谐振器连接。

公开(公告)号：US20090102316A1

公开(公告)日：2009-04-23

申请号：US12255426

申请日：2008-10-21

Applicant: Didier BELOT ,  Andreia CATHELIN ,  Alexandre Augusto SHIRAKAWA ,  Jean-Marie PHAM ,  Pierre JARY ,  Eric KERHERVE

Inventor： Didier BELOT ,  Andreia CATHELIN ,  Alexandre Augusto SHIRAKAWA ,  Jean-Marie PHAM ,  Pierre JARY ,  Eric KERHERVE

IPC: H01L41/04

CPC classification number: H03H9/17 ,  H03H9/02228

Abstract: A Lamb wave resonator includes a piezoelectric layer, and a first electrode against a first face of the piezoelectric layer. The first electrode includes fingers and a contact arm, with each finger including a first side in contact with the contact arm and two other sides parallel to one another. Portions of the piezoelectric layer are at least partially etched between the two fingers to form a recess. The fingers are spaced apart from one another by a distance W calculated according to the following equation: W = n · va lateral f , with   n ∈ N where,valateral is an acoustic propagation speed of Lamb waves, n is an order of a resonance mode of the Lamb waves, f is a resonance frequency of the Lamb wave resonator.

Abstract translation: 兰姆波谐振器包括压电层和抵靠压电层的第一面的第一电极。 第一电极包括指状物和接触臂，每个指状物包括与接触臂接触的第一侧和彼此平行的两个另外的边。 在两个手指之间至少部分蚀刻压电层的一部分以形成凹部。 手指按照以下等式计算的距离W彼此间隔开：