Manufacturing of polymer-coated particles for chemical mechanical polishing
    1.
    发明申请
    Manufacturing of polymer-coated particles for chemical mechanical polishing 有权
    用于化学机械抛光的聚合物涂覆颗粒的制造

    公开(公告)号:US20060024434A1

    公开(公告)日:2006-02-02

    申请号:US10909242

    申请日:2004-07-29

    IPC分类号: B05D7/00

    摘要: A method of manufacturing polymer-coated particles is useful for chemical mechanical polishing magnetic, optical, semiconductor or silicon substrates. First it provides a dispersion of particle cores in a non-aqueous solvent. Then introducing a polymeric precursor into the dispersion to react the polymeric precursor forms a polymer. The polymer coats at least a portion of the surface of the particle cores with the polymer and forms the polymer-coated particles having a solid outer polymeric shell. Substituting the non-aqueous solvent with water forms an aqueous mixture containing the polymer-coated particles. And it forms an aqueous chemical mechanical polishing formulation with the polymer-coated particles without drying the polymer-coated particles.

    摘要翻译: 制备聚合物涂覆颗粒的方法可用于化学机械抛光磁性,光学,半导体或硅衬底。 首先,它提供颗粒芯在非水溶剂中的分散体。 然后将聚合物前体引入分散体以使聚合物前体反应形成聚合物。 聚合物用聚合物涂覆颗粒芯的表面的至少一部分,并形成具有固体外聚合物壳的聚合物涂覆的颗粒。 用水代替非水溶剂形成含有聚合物涂覆颗粒的含水混合物。 并且它与聚合物涂覆的颗粒形成水性化学机械抛光配方,而不干燥聚合物涂覆的颗粒。

    Polmer-coated particles for chemical mechanical polishing
    3.
    发明申请
    Polmer-coated particles for chemical mechanical polishing 有权
    用于化学机械抛光的Polmer涂层颗粒

    公开(公告)号:US20060032146A1

    公开(公告)日:2006-02-16

    申请号:US10903425

    申请日:2004-07-29

    IPC分类号: C09K3/14

    摘要: The polishing composition is suitable for chemical mechanical polishing magnetic, optical, semiconductor or silicon substrates. The polishing composition includes abrasive particles in a liquid media. The abrasive particles have a particle core, the particle core having a hardness and a polymeric shell physisorbed to and encapsulating the particle core. The polymeric shell has a solid structure and a hardness lower than the hardness of the particle core. The abrasive particles have an average particle size of less than or equal to about 2 micrometers dispersed in the liquid media.

    摘要翻译: 抛光组合物适用于化学机械抛光磁性,光学,半导体或硅衬底。 抛光组合物包括液体介质中的磨料颗粒。 研磨颗粒具有颗粒核,颗粒芯具有硬度和物理吸附并包封颗粒核的聚合物壳。 聚合物壳体具有比颗粒芯的硬度低的固体结构和硬度。 研磨颗粒具有分散在液体介质中的平均粒度小于或等于约2微米。