公开(公告)号：US06379851B1

公开(公告)日：2002-04-30

申请号：US09629078

申请日：2000-07-31

Applicant: Robert Innes

Inventor： Robert Innes

IPC: G03F900

CPC classification number: B82Y10/00 ,  B82Y40/00 ,  H01J37/304 ,  H01J37/3174 ,  H01J2237/30455 ,  Y10S430/143

Abstract: The present invention relates to methods of predicting proximity heating in real-time as the writing proceeds enabling beam compensation to be performed in real-time. Particular attention is given to vector scanning in which the pattern of writing does not follow prescribed kinematics, but the writing tends to cluster into cells. A library of standard cells is constructed. As writing of the pattern proceeds, the individual flashes are agglomerated into cells that are compared with standard cells to determine proximity heating in the resist as a function of the distance of the previously written cells from the point of present writing, and the elapsed time since writing a previously written cell. Present writing snaps to a sufficiently coarse space-time grid to limit the computational burden but fine enough the represent variations in temperature over space and time. Further agglomeration of cells into super-cells, super-super-cells, etc. are also described. An advantage of the present technique is its applicability to vector scanning and to stenciling techniques for writing patterns on the wafer surface, not dependent on foreknowledge of a particular pattern of writing, as is the case for raster or serpentine scanning.

Abstract translation: 本发明涉及随着写入进行实时地进行光束补偿的实时预测接近加热的方法。 特别注意矢量扫描，其中写作模式不遵循规定的运动学，但书写倾向于聚集成细胞。 构建了标准单元库。 随着图案的写作进行，单个闪光被聚集成与标准单元相比较的单元，以确定抗蚀剂中的接近加热作为先前写入的单元与当前写入点的距离的函数，以及从 写一个以前写的单元格。 目前的写入捕捉到足够粗糙的时空网格以限制计算负担，但足够高的空间和时间表示温度变化。 还描述了细胞进一步附聚到超细胞，超超细胞等中。 本技术的优点在于其适用于向量扫描和用于在晶片表面上书写图案的模板技术，而不依赖于特定写入模式的预知，如光栅或蛇形扫描的情况。

公开(公告)号：US3944844A

公开(公告)日：1976-03-16

申请号：US493089

申请日：1974-07-30

Applicant: Robert Innes

Inventor： Robert Innes

IPC: G01F23/62 ,  G01F23/64 ,  G01F23/74 ,  H01H13/18 ,  H01H36/02 ,  G01F3/06

CPC classification number: G01F23/64 ,  G01F23/74 ,  H01H13/186 ,  H01H36/02 ,  Y10T307/766

Abstract: The invention is concerned with a float-operated electrical switch assembly comprising a vertical tubular housing, at least the lower end of which is arranged to be open to a liquid the level of which is to be monitored. A float is restrained to move vertically in the housing with changes in the liquid level and a magnet mounted on the float cooperates with a magnetically responsive switch actuator which is contained in a tubular casing of non-magnetic material extending into the housing from the side of the housing. The switch assembly is primarily intended for a low level alarm.

Abstract translation: 本发明涉及一种浮动操作的电气开关组件，其包括竖直管状壳体，其至少其下端布置成对其水平被监视的液体开放。 浮子被限制为在液面中随着液面的变化而在壳体中垂直移动，并且安装在浮子上的磁体与磁响应开关致动器配合，所述磁响应开关致动器容纳在从非磁性材料的管状壳体中延伸到壳体的侧面 住房。 开关组件主要用于低电平报警。

公开(公告)号：US2004870A

公开(公告)日：1935-06-11

申请号：US74358234

申请日：1934-09-11

Applicant: ROBERT INNES

Inventor： ROBERT INNES

IPC: B43K29/04

CPC classification number: B43K29/04

公开(公告)号：US20070119397A1

公开(公告)日：2007-05-31

申请号：US11164620

申请日：2005-11-30

Applicant: Matthew Diggs ,  Wally Beaber ,  Robert Innes

Inventor： Matthew Diggs ,  Wally Beaber ,  Robert Innes

IPC: F01L1/26 ,  F01L1/18 ,  F01L1/14

CPC classification number: F01L1/146 ,  F01L1/182 ,  F01L1/26 ,  F01L2001/2427 ,  F01L2101/00 ,  F01L2103/00 ,  F01L2105/00

Abstract: A multiple cylinder internal combustion engine having a camshaft-driven valvetrain with a camshaft disposed within an engine block includes at least two intake and/or exhaust valves with a pair of valves operated by a common camshaft lobe and a cam follower. The valvetrain may include independently operable mechanical or hydraulic lash adjusters. The cam follower contacts the common camshaft lobe and at least two pushrods with each pushrod having an associated single plane rocker arm which couples to a fulcrum mounted to the cylinder head to actuate the at least two valves.

Abstract translation: 具有设置在发动机缸体内的具有凸轮轴的凸轮轴驱动阀门的多气缸内燃机包括至少两个进气和/或排气阀，其具有由公共凸轮轴凸角和凸轮从动件操作的一对阀。 阀门可以包括可独立操作的机械或液压间隙调节器。 凸轮从动件接触共同的凸轮轴凸角和至少两个按钮，每个推杆具有相关联的单个平面摇臂，其联接到安装到气缸盖的支点以致动至少两个阀。

公开(公告)号：US06365806B1

公开(公告)日：2002-04-02

申请号：US09494839

申请日：2000-01-31

Applicant: Robert Innes ,  Jon Popi

Inventor： Robert Innes ,  Jon Popi

IPC: A01H100

CPC classification number: A01H4/00 ,  A01H4/008 ,  A01H5/00

Abstract: According to the invention, there is provided an inbred corn plant designated 94INK1A. This invention thus relates to the plants, seeds and tissue cultures of the inbred corn plant 94INK1A, and to methods for producing a corn plant produced by crossing the inbred corn plant 94INK1A with itself or with another corn plant, such as another inbred. This invention further relates to corn seeds and plants produced by crossing the inbred plant 94INK1A with another corn plant, such as another inbred, and to crosses with related species. This invention further relates to the inbred and hybrid genetic complements of the inbred corn plant 94INK1A, and also to the SSR and genetic isozyme typing profiles of inbred corn plant 94INK1A.

Abstract translation: 根据本发明，提供了称为94INK1A的近交玉米植物。 因此，本发明涉及近交玉米植物94INK1A的植物，种子和组织培养物，以及通过将近交玉米植物94INK1A与其他玉米植物如另一近交系交叉产生的玉米植物的生产方法。 本发明还涉及通过将近交植物94INK1A与另一种玉米植物（例如另一种近交系）杂交并与相关物种杂交而产生的玉米种子和植物。 本发明还涉及近交玉米植物94INK1A的近交和杂交遗传互补，以及近交玉米植物94INK1A的SSR和遗传同工酶分型谱。

公开(公告)号：US06219146B1

公开(公告)日：2001-04-17

申请号：US09350509

申请日：1999-07-09

Applicant: Robert Innes ,  William A. Eckes

Inventor： Robert Innes ,  William A. Eckes

IPC: G01B1100

CPC classification number: G01B11/26

Abstract: A laser beam or other parallel light beam divides at a beamsplitter into sample and reference beams. The sample beam reflects from a reflective surface back to the beamsplitter, and the reference beam reflects from a retroreflector back to the beamsplitter. The beams are then directed into a telescope. The angle between sample and reference beams at the telescope is proportional to the angle between the laser beam and the normal to the reflective surface. The telescope collects both sample beam and reference beam and transforms each beam into a sharply defined point image. The lateral separation between the two point images is proportional to the magnification of the telescope and to the angle formed at the telescope between the sample beam and the reference beam. If the reflective surface is accurately aligned relative to the laser beam, then the two point images are substantially superposed on one another. Alignment is performed by adjusting the orientation of the reflective surface, until the lateral separation between the two point images reaches zero or a predetermined value.

Abstract translation: 激光束或其他平行光束在分束器处分为采样和参考光束。 样品光束从反射表面反射回分光镜，参考光束从后向反射镜反射回分光镜。 然后将梁导入望远镜。 在望远镜处的样品和参考光束之间的角度与激光束与反射表面的法线之间的角度成比例。 望远镜收集采样光束和参考光束，并将每个光束转换成锐利定义的点图像。 两点图像之间的横向分离与望远镜的放大倍数成比例，并与样品光束与参考光束之间的望远镜形成的角度成比例。 如果反射表面相对于激光束精确对准，则两点图像基本上彼此重叠。 通过调整反射表面的方向来进行对准，直到两点图像之间的横向分离达到零或预定值。

公开(公告)号：US5847959A

公开(公告)日：1998-12-08

申请号：US789246

申请日：1997-01-28

Applicant: Lee H. Veneklasen ,  Robert Innes ,  Sergey Babin ,  David Trost ,  Jeffrey Varner

Inventor： Lee H. Veneklasen ,  Robert Innes ,  Sergey Babin ,  David Trost ,  Jeffrey Varner

IPC: H01J37/305 ,  H01J37/302 ,  H01J37/317 ,  H01L21/027 ,  G06F11/00 ,  G03C5/00

CPC classification number: B82Y10/00 ,  B82Y40/00 ,  H01J37/3026 ,  H01J37/3174 ,  H01J2237/31769 ,  Y10S430/143

Abstract: An electron beam pattern generating system for exposing a pattern on a substrate using a raster scan method. The system stores a rasterized representation of the pattern as a plurality of regular pixel dose exposure levels. These pixel dose exposure levels are evaluated by the system for one or more proximity effects and corrections to the dose exposure level and/or pixel location are calculated. The system includes apparatus for both calculation and storage of intermediate and final results as required. As they are calculated, the corrections are provided to an exposure dose modulator wherein they are applied to forming the pattern. Thus corrections for both long range and short range proximity effects due to both electron scattering and heating as well as for proximity effects due to global thermal expansion can be calculated and provided during run-time and a corrected pattern exposed.

Abstract translation: 一种电子束图案生成系统，用于使用光栅扫描方法在衬底上曝光图案。 系统将图案的光栅化表示存储为多个规则像素剂量曝光水平。 这些像素剂量暴露水平由系统评估一个或多个邻近效应，并且计算对剂量暴露水平和/或像素位置的校正。 该系统包括用于根据需要计算和存储中间和最终结果的装置。 当它们被计算时，校正被提供给曝光剂量调制器，其中它们被应用于形成图案。 因此，由于电子散射和加热以及由于全局热膨胀引起的邻近效应，对长距离和短距离邻近效应的校正可以在运行时间和校正图案暴露期间被计算和提供。

公开(公告)号：US07982951B1

公开(公告)日：2011-07-19

申请号：US12927185

申请日：2010-11-08

Applicant: Robert Innes ,  Stephen LeRoy Bursch

Inventor： Robert Innes ,  Stephen LeRoy Bursch

IPC: G02B23/16

CPC classification number: G02B23/16

Abstract: A digitally controlled platform for precise celestial tracking of astronomical telescopes, generally those having an independent pointing mechanism. A movable stage carrying the telescope is moved relative to a base by three digitally controlled actuators each of which determines the distance between a point fixed in the base and a point fixed stage. The base and stage otherwise are connected by a mechanism that holds a single point fixed in the base in coincidence with a single point fixed in the stage. It functions without approximation at any digitally specified latitude and longitude, enabling astrophotography with alt/azimuth mounted telescopes and diurnal tracking through the zenith. The digital controller may be a personal computer laptop running a multitasking operating system linked to the platform electronics by a Universal Serial Bus cable. Novel software design allows precise tracking, control, and calibration in spite of operating system and Universal Serial Bus latency.

Abstract translation: 一种用于天文望远镜精确天体跟踪的数字控制平台，通常是具有独立指向机构的天文望远镜。 携带望远镜的可移动台架通过三个数字控制的致动器相对于基座移动，每个致动器确定固定在基座中的点与点固定台之间的距离。 基座和台架通过一个机构连接，该机构将固定在基座中的单个点与固定在平台中的单个点重合。 它在任何数字指定的纬度和经度下无需近似功能，可通过天文望远镜进行天文摄影，并通过天顶进行昼夜跟踪。 数字控制器可以是运行通过通用串行总线电缆链接到平台电子设备的多任务操作系统的个人计算机膝上型计算机。 新的软件设计允许精确的跟踪，控制和校准，尽管操作系统和通用串行总线延迟。

公开(公告)号：US06720565B2

公开(公告)日：2004-04-13

申请号：US10057324

申请日：2001-10-26

Applicant: Robert Innes ,  Sergey Babin ,  Robin Teitzel ,  Lee Veneklasen

Inventor： Robert Innes ,  Sergey Babin ,  Robin Teitzel ,  Lee Veneklasen

IPC: G21K510

CPC classification number: H01J37/3174 ,  B82Y10/00 ,  B82Y40/00 ,  G03F1/78 ,  H01J37/304 ,  H01J2237/31769 ,  Y10S430/143

Abstract: The present invention relates to methods of predicting proximity heating of resists in electron beam lithography in real-time as the writing proceeds enabling beam compensation in current and/or dwell time to be performed during writing. A method of using a precomputed kernel capable of proximity resist temperature evaluation in real-time as beam writing proceeds by scalar product of the kernel with a graded cell size coverage map. A shifted impulse response function is shown to give the kernel values accurate to within a few percent.

Abstract translation: 本发明涉及随着写入的进行，在写入期间在电流和/或停留时间内实现光束补偿，实时地预测电子束光刻中抗蚀剂的接近加热的方法。 一种使用能够进行邻近抗蚀剂温度评估的预计算核心的方法，因为波束写入是通过内核的标量积与分级单元大小覆盖图进行的。 显示了移位的脉冲响应函数，使内核值精确到几个百分点。

公开(公告)号：US06429363B1

公开(公告)日：2002-08-06

申请号：US09756468

申请日：2001-01-08

Applicant: Robert Innes ,  Jon Popi

Inventor： Robert Innes ,  Jon Popi

IPC: A01H500

CPC classification number: A01H5/10

Abstract: According to the invention, there is provided an inbred corn plant designated 94INK1B. This invention thus relates to the plants, seeds and tissue cultures of the inbred corn plant 94INK1B, and to methods for producing a corn plant produced by crossing the inbred corn plant 94INK1B with itself or with another corn plant, such as another inbred. This invention further relates to corn seeds and plants produced by crossing the inbred plant 94INK1B with another corn plant, such as another inbred, and to crosses with related species. This invention further relates to the inbred and hybrid genetic complements of the inbred corn plant 94INK1B, and also to the SSR and genetic isozyme typing profiles of inbred corn plant 94INK1B.

Abstract translation: 根据本发明，提供了称为94INK1B的近交玉米植物。 因此，本发明涉及近交玉米植物94INK1B的植物，种子和组织培养物，以及通过将近交玉米植物94INK1B与其他玉米植物（例如另一种近交系）杂交而产生的玉米植物的生产方法。 本发明还涉及通过将近交植物94INK1B与另一种玉米植物（例如另一种近交系）杂交并与相关物种杂交而产生的玉米种子和植物。 本发明还涉及近交玉米植物94INK1B的近交和杂交遗传互补，以及近交玉米植物94INK1B的SSR和遗传同工酶分型谱。