公开(公告)号：US07247825B2

公开(公告)日：2007-07-24

申请号：US10604275

申请日：2003-07-08

申请人： Dirk Sönksen ,  Robert Mainberger ,  Guenter Schmidt

发明人： Dirk Sönksen ,  Robert Mainberger ,  Guenter Schmidt

IPC分类号： G01V8/00 ,  G01N21/00

CPC分类号： G02B21/26 ,  G02B21/002 ,  G02B21/365

摘要： The invention is based on an apparatus and a method for scanning specimens (1) using an optical imaging system (3) and a scanning stage (2), images of the specimen (1) being acquired by means of a camera (4), and/or measurements on the specimen (1) being made by means of an optical measurement device (5), at specimen points Xp, Yp. For that purpose, the scanning stage (2) is calibrated by obtaining and storing height values Z at different calibration positions X, Y of the scanning stage (2), and thereby generating a running height profile of the scanning stage (2). For the scanning of specimens (1), the specimen height positions Zp at specimen points Xp, Yp are determined by means of a reference height Zref of the specimen (1) together with the running height profile of the scanning stage (2). While each specimen point Xp, Yp is being traveled to with the scanning stage (2) the relevant specimen height position Zp is already being set, so that running errors of the scanning stage (2) are compensated for and image acquisitions or measurements are possible immediately upon reaching the specimen point Xp, Yp.

摘要翻译： 本发明是基于使用光学成像系统（3）和扫描台（2）扫描样本（1）的装置和方法，通过照相机（4）获取样本（1）的图像， 和/或通过光学测量装置（5）在样本点X P1，Y P上进行样品（1）的测量。 为此，通过在扫描台（2）的不同校准位置X，Y处获取和存储高度值Z来校准扫描阶段（2），从而生成扫描台（2）的行进高度分布。 对于样品（1）的扫描，在样品点X P1，Y P p处的样品高度位置Z

通过 试样（1）的基准高度Z 与扫描台（2）的行走高度轮廓一起。 虽然每个样品点X P1，Y P1都被扫描阶段（2）移动到相关的样品高度位置Z

被设置，使得扫描级（2）的运行错误得到补偿，并且可以在到达样本点X，Y，P 时立即进行图像采集或测量。

公开(公告)号：US06879440B2

公开(公告)日：2005-04-12

申请号：US10355868

申请日：2003-01-31

申请人： Franz Cemic ,  Lambert Danner ,  Robert Mainberger ,  Michael Veith ,  Martin Osterfeld ,  Uwe Graf

发明人： Franz Cemic ,  Lambert Danner ,  Robert Mainberger ,  Michael Veith ,  Martin Osterfeld ,  Uwe Graf

IPC分类号： G02B7/28 ,  G02B21/24 ,  G02B21/06

CPC分类号： G02B7/28 ,  G02B21/247

摘要： An autofocus module for a microscope-based system includes at least two light sources, each of which generates a light beam for focusing. An optical directing device is provided that directs a respective portion of each light beam onto an incoupling means, which couples each of the light beams into the illuminating light beam of the microscope-based system and directs the light beams onto a specimen. A first and a second detector receive the light beams of the first and second light source reflected from the surface of the specimen, and ascertain the intensities on the first and second detector in time-multiplexed fashion.

摘要翻译： 用于基于显微镜的系统的自动对焦模块包括至少两个光源，每个光源产生用于聚焦的光束。 提供一种光引导装置，其将每个光束的相应部分引导到一个耦合装置上，该耦合装置将每个光束耦合到基于显微镜的系统的照明光束中，并将光束引导到样本上。 第一和第二检测器接收从样本表面反射的第一和第二光源的光束，并以时分复用的方式确定第一和第二检测器上的强度。

公开(公告)号：US07271889B2

公开(公告)日：2007-09-18

申请号：US10524687

申请日：2003-08-21

申请人： Franz Cemic ,  Lambert Danner ,  Uwe Graf ,  Robert Mainberger ,  Dirk Sönksen ,  Volker Knorz

发明人： Franz Cemic ,  Lambert Danner ,  Uwe Graf ,  Robert Mainberger ,  Dirk Sönksen ,  Volker Knorz

IPC分类号： G01N21/00 ,  G01N21/55

CPC分类号： G02B21/10 ,  G01N21/8806 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/8825 ,  G01N2021/8838 ,  G01N2201/0696 ,  G02B21/125

摘要： A device and method for inspecting an object (2) uses a bright field illumination beam path (4) of a bright field light source (5), said beam path being formed so that it passes through the projection optics (3), and a dark field illumination beam path (6) of a dark field light source (7), this beam path being formed so that it also passes through the projection optics (3). The object (2) can be projected by the projection optics (3) onto the least one detector (8), and the object (2) is simultaneously illuminated by both light sources (5, 7). In order to simultaneously detect bright field images and dark field images without involving complicated filtering operations, the light used for the dark field illumination is pulsed and the pulse intensity of the light used for the dark field illumination is greater by at least one order of magnitude than the intensity of the continuous light, which is used for the bright field illumination, during a pulsed interval.

摘要翻译： 用于检查物体（2）的装置和方法使用亮场光源（5）的亮场照明光束路径（4），所述光束路径形成为使得其通过投影光学器件（3），并且 暗场光源（7）的暗场照明光束路径（6），该光束路径被形成为使得其也穿过投影光学器件（3）。 物体（2）可以被投影光学器件（3）投影到最少一个检测器（8）上，物体（2）同时被两个光源（5,7）照射。 为了同时检测亮场图像和暗场图像而不涉及复杂的滤波操作，用于暗场照明的光被脉冲，并且用于暗场照明的光的脉冲强度大于至少一个数量级 比在脉冲间隔期间用于亮场照明的连续光的强度高。

公开(公告)号：US20050259245A1

公开(公告)日：2005-11-24

申请号：US10524687

申请日：2003-08-21

申请人： Franz Cemic ,  Lambert Danner ,  Uwe Graf ,  Robert Mainberger ,  Dirk Sonksen ,  Volker Knorz

发明人： Franz Cemic ,  Lambert Danner ,  Uwe Graf ,  Robert Mainberger ,  Dirk Sonksen ,  Volker Knorz

IPC分类号： G01B11/30 ,  G01N21/88 ,  G01N21/95 ,  G01N21/956 ,  G02B21/06 ,  G02B21/10 ,  G02B21/12 ,  H01L21/66

CPC分类号： G02B21/10 ,  G01N21/8806 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/8825 ,  G01N2021/8838 ,  G01N2201/0696 ,  G02B21/125

摘要： The invention relates to a device and method for inspecting an object (2) involving the use of a bright field illumination beam path (4) of a bright field light source (5), said beam path being formed so that it passes through the projection optics (3), and involving the use or a dark field illumination beam path (6) of a dark field light source (7), this beam path being formed so that it also passes through the projection optics (3). The object (2) can be projected by the projection optics (3) onto the least one detector (8), and the object (2) is simultaneously illuminated by both light sources (5, 7). In order to simultaneously detect bright field images and dark field images without involving complicated filtering operations, the inventive device or method for inspecting an object (2) is characterized in that the light used for the dark field illumination is pulsed and in that the pulse intensity of the light used for the dark field illumination is greater by at least one order of magnitude than the intensity of the continuous light, which is used for the bright field illumination, during a pulsed interval.

摘要翻译： 本发明涉及一种用于检查涉及使用明场光源（5）的亮场照明光束路径（4）的物体（2）的装置和方法，所述光束路径被形成为使得其通过突起 光学器件（3），并且涉及暗场光源（7）的使用或暗场照明光束路径（6），该光束路径被形成为使得其也穿过投影光学器件（3）。 物体（2）可以被投影光学器件（3）投影到最少一个检测器（8）上，物体（2）同时被两个光源（5,7）照射。 为了同时检测亮场图像和暗场图像而不涉及复杂的滤波操作，本发明的用于检测物体（2）的装置或方法的特征在于用于暗场照明的光是脉冲的，并且脉冲强度 用于暗场照明的光比在脉冲间隔期间用于亮场照明的连续光的强度至少大一个数量级。

公开(公告)号：US06194863B1

公开(公告)日：2001-02-27

申请号：US09369268

申请日：1999-08-06

申请人： Robert Mainberger

发明人： Robert Mainberger

IPC分类号： H02P800

CPC分类号： H02P8/22

摘要： A method and an apparatus for driving a stepping motor is provided. Digital desired current values are stored in the form of a sine table and are read from the sine table at a constant sampling frequency. The intervals between the read-out table values can be varied equally and unequally. The digital desired current values are converted into discrete analog signals. A sinusoidal signal is reconstructed from the analog signals. A motor current for exciting a phase of the stepping motor is derived from the sinusoidal signal.

摘要翻译： 提供了一种用于驱动步进电动机的方法和装置。 数字期望电流值以正弦表的形式存储，并以恒定的采样频率从正弦表读取。 读出的表值之间的间隔可以平均和不平等地变化。 数字期望电流值被转换为离散模拟信号。 从模拟信号重建正弦信号。 从正弦信号导出用于激励步进电机的相位的电动机电流。