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公开(公告)号：US4783144A
公开(公告)日：1988-11-08
申请号：US842168
申请日：1986-03-20
申请人： Ronald S. Hershel , Ray Winn
发明人： Ronald S. Hershel , Ray Winn
CPC分类号： G01B11/06 , G01N21/41 , Y10S359/90
摘要： Optical membranes having embossed data on their surfaces are made by dispensing the polymer/solvent mixture onto a rotatable supporting surface bearing the embossed data, spinning the rotatable surface under conditions sufficient to form the membrane from the polymer and removing the membrane, after formation, from the rotatable surface. Such membranes can be light-transmissive, light-reflective or, as desired, partially reflective and partially transmissive.
摘要翻译： 在其表面上具有压印数据的光学膜通过将聚合物/溶剂混合物分配到具有压花数据的可旋转支撑表面上来制备，在足以从聚合物形成膜的条件下旋转可旋转表面，在形成之后从膜上除去膜 可旋转的表面。 这样的膜可以是透光的，光反射的或根据需要的部分反射和部分透射。
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2.发明授权Apparatus for projecting a series of images onto dies of a semiconductor wafer 失效用于将一系列图像投影到半导体晶片的管芯上的装置
公开(公告)号：US4425037A
公开(公告)日：1984-01-10
申请号：US378370
申请日：1982-05-14
申请人： Ronald S. Hershel , Martin E. Lee
发明人： Ronald S. Hershel , Martin E. Lee
CPC分类号： G03F7/70691 , G03F7/70225 , G03F9/7026
摘要： The apparatus forms one-to-one reticle images on a wafer. The apparatus includes means for holding a reticle containing an image pattern corresponding to the size of the desired wafer pattern. An illumination system substantially uniformly illuminates the reticle pattern. A one-to-one stationary projection optical system projects an image of the reticle pattern onto a predetermined focal plane. Suitable means such as a vacuum chuck holds the wafer. An alignment system steps and orients a wafer chuck to register markings on the individual dies of the wafer with the projected image of corresponding markings on the reticle. A fluid servo system acts on the chuck to hold at least a portion of the wafer in the predetermined focal plane of the projection optical system.
摘要翻译： 该装置在晶片上形成一对一的掩模版图像。 该装置包括用于保持包含对应于所需晶片图案的尺寸的图像图案的掩模版的装置。 照明系统基本均匀地照射标线图案。 一对一固定投影光学系统将掩模版图案的图像投影到预定焦平面上。 合适的装置如真空吸盘夹持晶片。 对准系统对晶片卡盘进行步骤和定位，以使晶片的各个管芯上的标记与掩模版上相应标记的投影图像对准。 流体伺服系统作用在卡盘上以将晶片的至少一部分保持在投影光学系统的预定焦平面中。
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公开(公告)号：US4808807A
公开(公告)日：1989-02-28
申请号：US937767
申请日：1986-12-04
申请人： Ronald S. Hershel
发明人： Ronald S. Hershel
CPC分类号： G03F9/7026 , G02B7/32 , G03F9/7049
摘要： An optical focus sensing system is disclosed. The system provides a focus shift measurement capability utilizing the relative motion between two gratings to produce different diffraction orders which are separately detected by a pair of detectors to form signals having a phase difference proportional to the focus error corresponding to the planes occupied by the two gratings. A control circuit is responsive to the phase difference between the signals from the two detectors to provide a controllable focusing capability.
摘要翻译： 公开了一种光学焦点感测系统。 该系统利用两个光栅之间的相对运动提供聚焦偏移测量能力，以产生由一对检测器单独检测的不同衍射级，以形成具有与对应于两个光栅占据的平面的聚焦误差成比例的相位差的信号 。 控制电路响应来自两个检测器的信号之间的相位差，以提供可控的聚焦能力。
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公开(公告)号：US4681414A
公开(公告)日：1987-07-21
申请号：US618056
申请日：1984-06-06
申请人： Ronald S. Hershel
发明人： Ronald S. Hershel
CPC分类号： G03F7/702 , G02B19/0028 , G02B19/0047 , G03F7/70358
摘要： A condenser useful in ring-field optics includes a device for homogenizing light with little or no change in light cone angle, or in the polar distribution of light linked to a device for channeling the light emerging from the homogenizing device equally, but with variable intensity, into an arc of light spots having a predetermined intensity, radius, width and direction, a device for magnifying the width of the arc of light spots, and for reducing proportionately its cone angle in the direction of its width while converting its shape from elliptical to circular with substantially symmetrical distribution of light, a device for transferring the circular arc of light spots to, and focusing the arc at an image plane while homogenizing the light along the length of the arc, and a device for easily changing arc radius. This condenser may include an autocollimator for aligning the condenser elements with one another, and with the projection optics of a photolithographic device.
摘要翻译： 可用于环形场光学器件的冷凝器包括用于均匀化光的装置，其具有很少或没有光锥角度的变化，或者在连接到用于将均匀化装置出射的光均匀引导的光的极化分布中，但具有可变强度 变成具有预定强度，半径，宽度和方向的光斑弧，用于放大光斑弧宽度的装置，并且用于在其宽度方向上成比例地减小其锥角，同时将其形状从椭圆形 以基本上对称的光分布为圆形，用于将光斑的圆弧传送到图像平面并使焦点聚焦在一起，同时使光沿着该弧的长度均匀化的装置和用于容易地改变弧半径的装置。 该冷凝器可以包括用于将电容器元件彼此对准的自动准直器以及光刻设备的投影光学元件。
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5.发明授权Apparatus and methods for measuring the optical thickness and index of refraction of thin, optical membranes 失效用于测量薄的光学膜的光学厚度和折射率的装置和方法
公开(公告)号：US4453828A
公开(公告)日：1984-06-12
申请号：US326488
申请日：1981-12-02
申请人： Ronald S. Hershel , Ray Winn
发明人： Ronald S. Hershel , Ray Winn
IPC分类号： B29C41/12 , B29L7/00 , B29L11/00 , G01B11/06 , G01N21/41 , G02B1/04 , G02B1/10 , G02B5/00 , G03F1/14 , G02B11/06
摘要： A method for measuring accurately the optical thickness and index of refraction of thin, optical membranes includes directing light onto the membrane at one or more known angles of incidence, finding at least one angle of incidence, called a null angle, where the membrane reflects substantially none of the incident light, then calculating the optical thickness of the membrane, its index of refraction, or both, from one or more such null angles. Apparatus for this purpose includes means for directing a light beam onto thin, optical membranes, means for varying the angle of incidence of a light beam upon the membrane, and means for detecting the angles of incidence of the light beam on the membrane, including the null angles.
摘要翻译： 精确测量薄的光学膜的光学厚度和折射率的方法包括以一种或多种已知的入射角将光引导到膜上，发现至少一个入射角（称为零角），其中膜基本上反射 没有一个入射光，然后从一个或多个这样的零角度计算膜的光学厚度，折射率或两者。 用于此目的的装置包括用于将光束引导到薄的光学膜上的装置，用于改变光束在膜上的入射角的装置，以及用于检测光束在膜上的入射角的装置，包括 零角度。
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6.发明授权Apparatus for projecting a series of images onto dies of a semiconductor wafer 失效用于将一系列图像投影到半导体晶片的管芯上的装置
公开(公告)号：US4391494A
公开(公告)日：1983-07-05
申请号：US400536
申请日：1982-07-21
申请人： Ronald S. Hershel
发明人： Ronald S. Hershel
CPC分类号： G03F7/70691 , G03F7/70225 , G03F9/7026
摘要： The apparatus forms one-to-one reticle images on a wafer. The apparatus includes means for holding a reticle containing an image pattern corresponding to the size of the desired wafer pattern. An illumination system substantially uniformly illuminates the reticle pattern. A one-to-one stationary projection optical system projects an image of the reticle pattern onto a predetermined focal plane. Suitable means such as a vacuum chuck holds the wafer. An alignment system steps and orients a wafer chuck to register markings on the individual sides of the wafer with corresponding markings on the reticle. A fluid servo system acts on the chuck to hold at least a portion of the wafer in the predetermined focal plane of the projection optical system.
摘要翻译： 该装置在晶片上形成一对一的掩模版图像。 该装置包括用于保持包含对应于所需晶片图案的尺寸的图像图案的掩模版的装置。 照明系统基本均匀地照射标线图案。 一对一固定投影光学系统将掩模版图案的图像投影到预定焦平面上。 合适的装置如真空吸盘夹持晶片。 对准系统对晶片卡盘进行步骤和定位，以在晶片的各个侧面上对准标记，其中标线上具有相应的标记。 流体伺服系统作用在卡盘上以将晶片的至少一部分保持在投影光学系统的预定焦平面中。
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公开(公告)号：US4105289A
公开(公告)日：1978-08-08
申请号：US681469
申请日：1976-04-29
申请人： Ronald S. Hershel
发明人： Ronald S. Hershel
CPC分类号： G02B27/4244 , G02B5/1871
摘要： A method and apparatus for receiving optical radiation representative of a scene and for generating a processed image having periodic spatial amplitude modulations; i.e., a sampled image which does not suffer substantial loss of overall illumination. In accordance with the invention there is provided a means for generating a plurality of ordered images of the scene, at least one of the ordered images being out of phase with respect to the other ordered images. Phase shift means are provided for imparting a phase shift to said at least one ordered image so that it is substantially in phase with respect to the other ordered images. Focusing means are provided for collecting the ordered images to obtain the processed image. In the preferred embodiment of the invention the plurality of ordered images are substantially non-overlapping. In this embodiment, the means for generating a plurality of ordered images includes a phase grating and a lens adjacent the phase grating. Also, in this embodiment the phase shift means comprises a phase retarding plate which is operative to impart a phase shift to the zero order.
摘要翻译： 一种用于接收表示场景的光辐射并用于生成具有周期性空间幅度调制的经处理图像的方法和装置; 即不会对整体照明造成实质性损失的采样图像。 根据本发明，提供了一种用于生成场景的多个有序图像的装置，所述有序图像中的至少一个相对于其他有序图像是异相的。 提供了相移装置，用于向所述至少一个有序图像赋予相移，使得其相对于其它有序图像基本上同相。 提供聚焦装置用于收集有序图像以获得经处理的图像。 在本发明的优选实施例中，多个有序图像基本上不重叠。 在该实施例中，用于产生多个有序图像的装置包括相位光栅和邻近相位光栅的透镜。 此外，在本实施例中，相移装置包括相位延迟板，该相位延迟板可操作以将相移赋予零级。
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