公开(公告)号：US20110094446A1

公开(公告)日：2011-04-28

申请号：US12995794

申请日：2009-06-05

申请人： Yasuo Shimizu ,  Hideyuki Ogata ,  Koichi Matsumoto ,  Takafumi Noguchi ,  Yosuke Jimbo ,  Satohiro Okayama ,  Yawara Morioka ,  Noriyasu Sugiyama ,  Takashi Shigeta ,  Hiroyuki Kurihara ,  Masanori Hashimoto ,  Sadatsugu Wakamatsu

发明人： Yasuo Shimizu ,  Hideyuki Ogata ,  Koichi Matsumoto ,  Takafumi Noguchi ,  Yosuke Jimbo ,  Satohiro Okayama ,  Yawara Morioka ,  Noriyasu Sugiyama ,  Takashi Shigeta ,  Hiroyuki Kurihara ,  Masanori Hashimoto ,  Sadatsugu Wakamatsu

IPC分类号： C23C16/50

CPC分类号： H01L31/18 ,  C23C16/50 ,  C23C16/5096 ,  C23C16/54 ,  H01J37/32568 ,  H01L21/67748 ,  H01L31/1876 ,  Y02E10/50 ,  Y02P70/521

摘要： A thin-film solar cell manufacturing apparatus, includes: a film formation space in which a substrate is disposed so that a film formation face of the substrate is substantially parallel to a direction of gravitational force, and in which a desired film is formed on the film formation face by a CVD method; a cathode unit including cathodes to which a voltage is applied, and two or more power feeding points, the cathodes being disposed at both sides of the cathode unit; and an anode distantly disposed so as to face the cathodes that are disposed at both sides of the cathode unit.

摘要翻译： 薄膜太阳能电池制造装置包括：成膜空间，其中设置基板，使得基板的成膜面基本上平行于重力方向，并且其中形成所需的膜 通过CVD法形成成膜面; 阴极单元，其包括施加有电压的阴极和两个或更多个馈电点，阴极设置在阴极单元的两侧; 以及与阴极单元的两侧配置的阴极相对地远离地设置的阳极。

公开(公告)号：US20110094445A1

公开(公告)日：2011-04-28

申请号：US12995295

申请日：2009-06-04

申请人： Yasuo Shimizu ,  Hideyuki Ogata ,  Koichi Matsumoto ,  Takafumi Noguchi ,  Jouji Wakamori ,  Satohiro Okayama ,  Yawara Morioka ,  Noriyasu Sugiyama ,  Takashi Shigeta ,  Hiroyuki Kurihara ,  Masanori Hashimoto ,  Sadatsugu Wakamatsu

发明人： Yasuo Shimizu ,  Hideyuki Ogata ,  Koichi Matsumoto ,  Takafumi Noguchi ,  Jouji Wakamori ,  Satohiro Okayama ,  Yawara Morioka ,  Noriyasu Sugiyama ,  Takashi Shigeta ,  Hiroyuki Kurihara ,  Masanori Hashimoto ,  Sadatsugu Wakamatsu

IPC分类号： H01L31/18

CPC分类号： H01L21/67781 ,  C23C16/24 ,  C23C16/45565 ,  C23C16/4587 ,  H01J37/32532 ,  H01L21/67161 ,  H01L21/67167 ,  H01L21/67173 ,  H01L21/67754 ,  H01L31/202 ,  H01L31/206 ,  Y02E10/50 ,  Y02P70/521

摘要： An apparatus for manufacturing a thin film solar cell of the present invention includes a film forming chamber in which a film is formed on a film formation face of a substrate using a CVD method; an electrode unit including a cathode unit having cathodes to which voltages are to be applied arranged on both sides thereof, and a pair of anodes each of which is arranged to face a different one of the cathodes, at a separation distance therefrom; a mask for covering a peripheral edge portion of the substrate; and a discharge duct installed around the cathode unit. A film formation space is formed between the cathode unit and the substrate installed on the side of the anode, an evacuation passage is formed between the mask and the cathode unit, the discharge duct and the film formation space are connected together via the evacuation passage, and a film forming gas introduced into the film formation space is evacuated from the discharge duct through the evacuation passage.

摘要翻译： 本发明的薄膜太阳能电池的制造装置包括使用CVD法在基板的成膜面上形成膜的成膜室; 包括阴极单元的电极单元，阴极单元具有要施加电压的阴极布置在其两侧，以及一对阳极，每个阳极以与其间隔开的距离与其他阴极对齐; 掩模，用于覆盖基板的周边部分; 以及安装在阴极单元周围的排放管​​。 在阴极单元和安装在阳极侧的基板之间形成膜形成空间，在掩模和阴极单元之间形成排气通道，排出管和成膜空间经由排气通道连接在一起， 并且从成膜空间引入的成膜气体通过排气通道从排出管排出。