METHOD AND DEVICE FOR PREPARING A MULTILAYER COATING ON A SUBSTRATE
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    发明申请
    METHOD AND DEVICE FOR PREPARING A MULTILAYER COATING ON A SUBSTRATE 审中-公开
    用于在基板上制备多层涂层的方法和装置

    公开(公告)号:US20100143608A1

    公开(公告)日:2010-06-10

    申请号:US12598530

    申请日:2008-04-29

    IPC分类号: C23C16/06 C23C16/513

    摘要: Method for preparing a substrate comprising a solid support and a plurality of layers on the support; at least one layer consisting of a uniform, homogeneous, and continuous film of particles of one or more metal oxide(s), or of uniformly, homogeneously, dispersed particles of one or more metal oxide(s), on the support or on an underlying layer; at least one layer consisting of a continuous or discontinuous film of one or more metal(s) or of one or more metal alloy(s), or of dispersed nanoparticles of one or more metal(s) or of one or more metal alloy(s), on the support or on an underlying layer; the method comprising the following steps: a)—impregnating the heated solid support or an already deposited underlying layer with a solution of precursors of the metal oxide or oxides in a supercritical fluid, and depositing a uniform, homogeneous, and continuous film of particles of one or more metal oxide(s), or of uniformly, homogeneously, dispersed particles of one or more metal oxide(s), on the support or on the underlying layer; b)—depositing a continuous or discontinuous film of one or more metal(s) or of one or more metal alloy(s), or dispersed nanoparticles of one or more metal(s) or of one or more metal alloy(s), on the support or on an underlying layer, by chemical vapour deposition CVD, from one or more precursors; the steps a) and b) being carried out in the same chamber, same reactor.

    摘要翻译: 在载体上制备包括固体支持物和多个层的基材的方法; 至少一层由均匀的,均匀的和连续的一层或多层金属氧化物的颗粒膜或一个或多个均匀分散的一种或多种金属氧化物颗粒组成的层,在载体上或在 下层 至少一层由一种或多种金属或一种或多种金属合金的连续或不连续膜组成,或由一种或多种金属或一种或多种金属合金的分散纳米颗粒( s),在支撑上或在下层上; 该方法包括以下步骤:a)将加热的固体载体或已经沉积的下层与金属氧化物或氧化物的前体溶液浸渍在超临界流体中,并沉积均匀,均匀和连续的 一种或多种金属氧化物或均匀均匀分布的一种或多种金属氧化物的颗粒在载体上或下层上; b)沉积一种或多种金属或一种或多种金属合金或一种或多种金属或一种或多种金属合金的分散纳米颗粒的连续或不连续膜, 通过化学气相沉积CVD从一种或多种前体在载体上或在下层上; 步骤a)和b)在相同的室内进行,同一反应器。