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    BROADBAND LIGHT SOURCE AND OPTICAL INSPECTOR HAVING THE SAME
    1.
    发明申请
    BROADBAND LIGHT SOURCE AND OPTICAL INSPECTOR HAVING THE SAME 有权
    宽光源光源和具有该光源的光学检测器

    公开(公告)号：US20160097513A1

    公开(公告)日：2016-04-07

    申请号：US14872228

    申请日：2015-10-01

    Applicant: Sung-Yoon RYU ,  Woo-Seok KO ,  Yu-Sin YANG ,  Sang-Kil LEE ,  Chung-Sam JUN ,  Seong-Jin YUN

    Inventor： Sung-Yoon RYU ,  Woo-Seok KO ,  Yu-Sin YANG ,  Sang-Kil LEE ,  Chung-Sam JUN ,  Seong-Jin YUN

    IPC: F21V7/04 ,  H01S3/00 ,  F21V7/08

    CPC classification number: H01S3/0071 ,  G01N21/8806 ,  G01N21/956

    Abstract: A broadband light source includes a first electrodeless lamp to generate first broadband light from plasma, a first elliptical reflector having first and second focuses, the first elliptical reflector enclosing a rear portion of the first electrodeless lamp positioned at the first focus of the first elliptical reflector such that the first broadband light is reflected from the first elliptical reflector toward a light collector as a collective light, a symmetrically curved reflector having a third focus, the symmetrically curved reflector positioned such that the third focus is coincident with one of the first and second focuses, and a laser irradiator to provide a laser beam to the first electrodeless lamp.

    Abstract translation: 宽带光源包括第一无电极灯以产生来自等离子体的第一宽带光，具有第一和第二焦点的第一椭圆形反射器，第一椭圆形反射器包围位于第一椭圆形反射器的第一焦点处的第一无电极灯的后部 使得第一宽带光从第一椭圆形反射器朝向聚光器反射，作为集体光，具有第三焦点的对称弯曲反射器，对称弯曲的反射器被定位成使得第三焦点与第一和第二光焦度中的一个重合 焦点和激光照射器，以向第一无电极灯提供激光束。

    OVERLAY MEASURING METHOD AND SYSTEM, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME
    2.
    发明申请
    OVERLAY MEASURING METHOD AND SYSTEM, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME 有权
    重叠测量方法和系统以及使用其制造半导体器件的方法

    公开(公告)号：US20160013109A1

    公开(公告)日：2016-01-14

    申请号：US14796478

    申请日：2015-07-10

    Applicant: Seong-Jin YUN ,  Woo-Seok KO ,  Yu-Sin YANG ,  Sang-Kil LEE ,  Chung-Sam JUN

    Inventor： Seong-Jin YUN ,  Woo-Seok KO ,  Yu-Sin YANG ,  Sang-Kil LEE ,  Chung-Sam JUN

    IPC: H01L21/66 ,  H01J37/26

    CPC classification number: H01L22/20 ,  H01J37/222 ,  H01J2237/221 ,  H01J2237/2617 ,  H01J2237/2817

    Abstract: An overlay measuring method includes irradiating an electron beam onto a sample, including a multi-layered structure of overlapped upper and lower patterns formed thereon, to obtain an actual image of the upper and lower patterns. A first image representing the upper pattern and a second image representing the lower pattern are obtained from the actual image. A reference position for the upper and lower patterns is determined from a design image of the upper and lower patterns. A position deviation of the upper pattern with respect to the reference position in the first image and a position deviation of the lower pattern with respect to the reference position in the second image are calculated to determine an overlay between the upper pattern and the lower pattern.

    Abstract translation: 覆盖测量方法包括将电子束照射到样品上，包括形成在其上的重叠的上下图案的多层结构，以获得上下图案的实际图像。 从实际图像中获得代表上部图案的第一图像和表示较低图案的第二图像。 根据上下图案的设计图像确定上下图案的参考位置。 计算上部图形相对于第一图像中的基准位置的位置偏差和下部图形相对于第二图像中的基准位置的位置偏差，以确定上部图案和下部图案之间的叠加。

    APPARATUS FOR PUNCTURING MAXILLARY SINUS
    4.
    发明申请
    APPARATUS FOR PUNCTURING MAXILLARY SINUS 审中-公开

    公开(公告)号：US20200030000A1

    公开(公告)日：2020-01-30

    申请号：US15735865

    申请日：2016-03-09

    Applicant: Yeong Seok YUN ,  Seong Ho YUN ,  Seong Jin YUN

    Inventor： Yeong Seok YUN ,  Seong Ho YUN ,  Seong Jin YUN

    IPC: A61B17/34 ,  A61B18/08

    Abstract: The present invention relates to an apparatus for puncturing a maxillary sinus, the apparatus including a main body gripped by an operator and having a puncturing tube, an ultrasonic probing unit disposed in the main body and configured to detect a posterior fontanel without bones along a direction from a middle meatus to a maxillary sinus, a puncturing unit disposed in the main body, and having a needle disposed at a front end of the puncturing tube and configured to cauterize the posterior fontanel using electricity and puncture the posterior fontanel and a cautery wire configured to pass through the puncturing tube and supply electricity to the needle, an operation unit disposed in the main body and configured to move the puncturing unit toward the posterior fontanel, and an irrigation tube disposed to be fitted to the cautery wire in the puncturing tube and installed at the posterior fontanel punctured by the needle.

    Overlay measuring method and system, and method of manufacturing semiconductor device using the same
    6.
    发明授权
    Overlay measuring method and system, and method of manufacturing semiconductor device using the same 有权
    覆盖测量方法和系统，以及使用其制造半导体器件的方法

    公开(公告)号：US09455206B2

    公开(公告)日：2016-09-27

    申请号：US14796478

    申请日：2015-07-10

    Applicant: Seong-Jin Yun ,  Woo-Seok Ko ,  Yu-Sin Yang ,  Sang-Kil Lee ,  Chung-Sam Jun

    Inventor： Seong-Jin Yun ,  Woo-Seok Ko ,  Yu-Sin Yang ,  Sang-Kil Lee ,  Chung-Sam Jun

    IPC: H01L21/66 ,  H01J37/22

    CPC classification number: H01L22/20 ,  H01J37/222 ,  H01J2237/221 ,  H01J2237/2617 ,  H01J2237/2817

    Abstract: An overlay measuring method includes irradiating an electron beam onto a sample, including a multi-layered structure of overlapped upper and lower patterns formed thereon, to obtain an actual image of the upper and lower patterns. A first image representing the upper pattern and a second image representing the lower pattern are obtained from the actual image. A reference position for the upper and lower patterns is determined from a design image of the upper and lower patterns. A position deviation of the upper pattern with respect to the reference position in the first image and a position deviation of the lower pattern with respect to the reference position in the second image are calculated to determine an overlay between the upper pattern and the lower pattern.

    Abstract translation: 覆盖测量方法包括将电子束照射到样品上，包括形成在其上的重叠的上下图案的多层结构，以获得上下图案的实际图像。 从实际图像中获得代表上部图案的第一图像和表示较低图案的第二图像。 根据上下图案的设计图像确定上下图案的参考位置。 计算上部图形相对于第一图像中的基准位置的位置偏差和下部图形相对于第二图像中的基准位置的位置偏差，以确定上部图案和下部图案之间的叠加。

    Air purifier having dehumidification function
    7.
    发明授权
    Air purifier having dehumidification function 有权
    空气净化器具有除湿功能

    公开(公告)号：US08500882B2

    公开(公告)日：2013-08-06

    申请号：US13125513

    申请日：2009-10-22

    Applicant: Seong-Jin Yun ,  Byung-Kil Park

    Inventor： Seong-Jin Yun ,  Byung-Kil Park

    IPC: B01D53/02

    CPC classification number: F24F3/1423 ,  B01D2257/80 ,  B01D2259/4508 ,  F24F3/1603 ,  F24F2001/0096

    Abstract: There is provided an air purifier having a dehumidification function, including: a body case having an inner space; a blower part installed in the inner space of the body case and drawing outside air from both sides of the body case through a single blower fan; an air purifying part purifying air drawn from one side of the body case; and a dehumidifying part removing moisture from air drawn from the other side of the body case by a dehumidifying rotor. Through the blower part drawing the air from both sides of the body case, the air purifier purifies the air drawn from one side of the body case and dehumidifies the air drawn from the other side of the body case. Accordingly, a drop in an airflow amount caused by concurrently performing the dehumidification and the purification may be alleviated, so improved dehumidification and purification effects are achieved.

    Abstract translation: 提供一种具有除湿功能的空气净化器，包括：具有内部空间的主体壳体; 鼓风机部分安装在主体壳体的内部空间中并通过单个鼓风机从主体壳体的两侧抽出外部空气; 空气净化部净化从主体壳体的一侧抽取的空气; 以及除湿部，其通过除湿转子从主体壳体的另一侧抽出的空气除去水分。 通过从主体两侧抽出空气的鼓风机部分，空气净化器净化从主体壳体的一侧抽出的空气，并且从主体壳体的另一侧抽吸的空气进行除湿。 因此，可以减轻由同时进行除湿和净化而引起的气流量的下降，从而可以实现改善的除湿和净化效果。

    AIR PURIFIER HAVING DEHUMIDIFICATION FUNCTION
    8.
    发明申请
    AIR PURIFIER HAVING DEHUMIDIFICATION FUNCTION 有权
    具有除湿功能的空气净化器

    公开(公告)号：US20110197770A1

    公开(公告)日：2011-08-18

    申请号：US13125513

    申请日：2009-10-22

    Applicant: Seong-Jin Yun ,  Byung-Kil Park

    Inventor： Seong-Jin Yun ,  Byung-Kil Park

    IPC: B01D45/14

    CPC classification number: F24F3/1423 ,  B01D2257/80 ,  B01D2259/4508 ,  F24F3/1603 ,  F24F2001/0096

    Abstract: There is provided an air purifier having a dehumidification function, including: a body case having an inner space; a blower part installed in the inner space of the body case and drawing outside air from both sides of the body case through a single blower fan; an air purifying part purifying air drawn from one side of the body case; and a dehumidifying part removing moisture from air drawn from the other side of the body case by a dehumidifying rotor. Through the blower part drawing the air from both sides of the body case, the air purifier purifies the air drawn from one side of the body case and dehumidifies the air drawn from the other side of the body case. Accordingly, a drop in an airflow amount caused by concurrently performing the dehumidification and the purification may be alleviated, so improved dehumidification and purification effects are achieved.

    Abstract translation: 提供一种具有除湿功能的空气净化器，包括：具有内部空间的主体壳体; 鼓风机部分安装在主体壳体的内部空间中并通过单个鼓风机从主体壳体的两侧抽出外部空气; 空气净化部净化从主体壳体的一侧抽取的空气; 以及除湿部，其通过除湿转子从主体壳体的另一侧抽出的空气除去水分。 通过从主体两侧抽出空气的鼓风机部分，空气净化器净化从主体壳体的一侧抽出的空气，并且从主体壳体的另一侧抽吸的空气进行除湿。 因此，可以减轻由同时进行除湿和净化而引起的气流量的下降，从而可以实现改善的除湿和净化效果。

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