SYSTEM FOR MAGNETORHEOLOGICAL FINISHING OF SUBSTRATES
    1.
    发明申请
    SYSTEM FOR MAGNETORHEOLOGICAL FINISHING OF SUBSTRATES 有权
    基底磁体组织系统

    公开(公告)号:US20120164925A1

    公开(公告)日:2012-06-28

    申请号:US12977180

    申请日:2010-12-23

    IPC分类号: B24B19/00 B24B57/00

    CPC分类号: B24B31/112 B24B1/005

    摘要: A system for magnetorheological finishing of a substrate. An integrated fluid management module (IFMM) provides dynamic control of the rheological fluid properties of the MR fluid on a conventional MR finishing apparatus, and dispensing of the fluid to the wheel. A magnetically shielded chamber charged with MR fluid is in contact with the carrier wheel. A transverse line removes the spent MR fluid from the wheel as the ribbon leaves the work zone. Replenishment fluid is added to the chamber via a dripper, and preferably an electric mixer agitates MR fluid in the chamber. A grooved magnetically-shielded insert at the exit of the chamber forms a polishing ribbon on the carrier wheel as the wheel is turned. A sensor sensitive to concentration of magnetic particles provides a signal for control of MR fluid properties, particularly, water content in the MR fluid. Means is provided for cooling fluid within the chamber.

    摘要翻译: 一种基板磁流变整理系统。 集成流体管理模块(IFMM)提供对常规MR整理装置上MR流体的流变流体特性的动态控制,以及将流体分配到车轮。 装有MR流体的磁屏蔽室与承载轮接触。 当条带离开工作区时,横向线从轮上移除废的MR流体。 补充液通过滴液器加入到腔室中,优选地,电动搅拌器搅拌腔室中的MR流体。 在腔室出口处的槽形磁屏蔽插入件在车轮转动时在载体轮上形成抛光带。 对磁性颗粒浓度敏感的传感器提供了用于控制MR流体性质,特别是MR流体中的含水量的信号。 提供了用于在室内冷却流体的装置。

    Magnetorheological fluid for ultrasmooth polishing
    2.
    发明授权
    Magnetorheological fluid for ultrasmooth polishing 有权
    磁流变液用于超光滑抛光

    公开(公告)号:US09157010B2

    公开(公告)日:2015-10-13

    申请号:US13551786

    申请日:2012-07-18

    CPC分类号: C09G1/02

    摘要: A magnetorheological fluid for use in magnetorheological ultrasmooth polishing of a substrate surface, comprising an aqueous carrier vehicle; a first amount of magnetic particles having a average diameter between about 1 micrometer and about 2 micrometers; and a second amount of abrasive particles having an average diameter between about

    摘要翻译: 一种用于衬底表面的磁流变超平滑抛光的磁流变流体,包括水性载体载体; 第一量的平均直径在约1微米至约2微米之间的磁性颗粒; 以及平均直径在约1纳米至约15纳米之间的第二数量的磨料颗粒。 流体还可以包括化学稳定剂。 优选地,磁性颗粒的尺寸比磨料颗粒的尺寸大2至3个数量级。 优选地,磁性颗粒是球形的并且包括羰基铁,并且优选地,磨料颗粒选自氧化铝,氧化锆,氧化铈,二氧化硅,碳化硼,碳化硅,天然金刚石,合成金刚石和组合 其中。

    MAGNETORHEOLOGICAL FLUID FOR ULTRASMOOTH POLISHING
    3.
    发明申请
    MAGNETORHEOLOGICAL FLUID FOR ULTRASMOOTH POLISHING 有权
    用于超声波抛光的磁流变流体

    公开(公告)号:US20140020305A1

    公开(公告)日:2014-01-23

    申请号:US13551786

    申请日:2012-07-18

    IPC分类号: C09G1/02

    CPC分类号: C09G1/02

    摘要: A magnetorheological fluid for use in magnetorheological ultrasmooth polishing of a substrate surface, comprising an aqueous carrier vehicle; a first amount of magnetic particles having a average diameter between about 1 micrometer and about 2 micrometers; and a second amount of abrasive particles having an average diameter between about

    摘要翻译: 一种用于衬底表面的磁流变超平滑抛光的磁流变流体,包括水性载体载体; 第一量的平均直径在约1微米至约2微米之间的磁性颗粒; 以及平均直径在约1纳米至约15纳米之间的第二数量的磨料颗粒。 流体还可以包括化学稳定剂。 优选地,磁性颗粒的尺寸比磨料颗粒的尺寸大2至3个数量级。 优选地,磁性颗粒是球形的并且包括羰基铁,并且优选地,磨料颗粒选自氧化铝,氧化锆,氧化铈,二氧化硅,碳化硼,碳化硅,天然金刚石,合成金刚石和组合 其中。

    System for magnetorheological finishing of substrates
    4.
    发明授权
    System for magnetorheological finishing of substrates 有权
    基板磁流变整理系统

    公开(公告)号:US08613640B2

    公开(公告)日:2013-12-24

    申请号:US12977180

    申请日:2010-12-23

    IPC分类号: B24B49/00

    CPC分类号: B24B31/112 B24B1/005

    摘要: A system for magnetorheological finishing of a substrate. An integrated fluid management module (IFMM) provides dynamic control of the rheological fluid properties of the MR fluid on a conventional MR finishing apparatus, and dispensing of the fluid to the wheel. A magnetically shielded chamber charged with MR fluid is in contact with the carrier wheel. A transverse line removes the spent MR fluid from the wheel as the ribbon leaves the work zone. Replenishment fluid is added to the chamber via a dripper, and preferably an electric mixer agitates MR fluid in the chamber. A grooved magnetically-shielded insert at the exit of the chamber forms a polishing ribbon on the carrier wheel as the wheel is turned. A sensor sensitive to concentration of magnetic particles provides a signal for control of MR fluid properties, particularly, water content in the MR fluid. Means is provided for cooling fluid within the chamber.

    摘要翻译: 一种基板磁流变整理系统。 集成流体管理模块(IFMM)提供对常规MR整理装置上MR流体的流变流体特性的动态控制,以及将流体分配到车轮。 装有MR流体的磁屏蔽室与承载轮接触。 当条带离开工作区时,横向线从轮上移除废的MR流体。 补充液通过滴液器加入到腔室中,优选地,电动搅拌器搅拌腔室中的MR流体。 在腔室出口处的槽形磁屏蔽插入件在车轮转动时在载体轮上形成抛光带。 对磁性颗粒浓度敏感的传感器提供了用于控制MR流体性质,特别是MR流体中的含水量的信号。 提供了用于在室内冷却流体的装置。

    Method and apparatus for measurement and control of magnetic particle concentration in a magnetorheological fluid
    5.
    发明授权
    Method and apparatus for measurement and control of magnetic particle concentration in a magnetorheological fluid 有权
    用于测量和控制磁流变流体中磁性颗粒浓度的方法和装置

    公开(公告)号:US08896293B2

    公开(公告)日:2014-11-25

    申请号:US13085688

    申请日:2011-04-13

    CPC分类号: B24B57/02 B24B49/10 G01N27/74

    摘要: A system for sensing and controlling concentration of magnetic particles in magnetorheological fluid comprising a wire coil and an AC voltage generator that, when energized, creates a magnetic flux field including a fringing field. When the fringing field extends through the magnetorheological fluid, the impedance in the circuit is proportional to the concentration of magnetic particles. A reference wire coil identical to the sensing wire coil is connected therewith. A demodulator is connected to each of the coils sends an impedance difference signal to a feedback controller connected to controllable dispensing apparatus for adding a calculated amount of replenishing fluid to the magnetorheological fluid. The system may be incorporated into an integrated fluid management module having apparatus for receiving and replenishing spent magnetorheological fluid and a sensor system in accordance with the present invention for use in a magnetorheological finishing system having a carrier wheel.

    摘要翻译: 一种用于感测和控制磁流变流体中的磁性颗粒浓度的系统,包括线圈和AC电压发生器,当被通电时,产生包括边缘场的磁通场。 当边缘场延伸穿过磁流变流体时,电路中的阻抗与磁性颗粒的浓度成比例。 与传感线圈相同的参考线圈线圈与其连接。 连接到每个线圈的解调器将阻抗差信号发送到连接到可控分配装置的反馈控制器,用于将计算量的补充流体添加到磁流变流体。 该系统可以并入具有用于接收和补充用过的磁流变流体的装置的集成流体管理模块和根据本发明的用于具有承载轮的磁流变整理系统中的传感器系统。

    METHOD AND APPARATUS FOR MEASUREMENT AND CONTROL OF MAGNETIC PARTICLE CONCENTRATION IN A MAGNETORHEOLOGICAL FLUID
    6.
    发明申请
    METHOD AND APPARATUS FOR MEASUREMENT AND CONTROL OF MAGNETIC PARTICLE CONCENTRATION IN A MAGNETORHEOLOGICAL FLUID 有权
    用于测量和控制磁流体中磁性颗粒浓度的方法和装置

    公开(公告)号:US20120164916A1

    公开(公告)日:2012-06-28

    申请号:US13085688

    申请日:2011-04-13

    IPC分类号: B24B49/08 B24B7/24

    CPC分类号: B24B57/02 B24B49/10 G01N27/74

    摘要: A system for sensing and controlling concentration of magnetic particles in magnetorheological fluid comprising a wire coil and an AC voltage generator that, when energized, creates a magnetic flux field including a fringing field. When the fringing field extends through the magnetorheological fluid, the impedance in the circuit is proportional to the concentration of magnetic particles. A reference wire coil identical to the sensing wire coil is connected therewith. A demodulator is connected to each of the coils sends an impedance difference signal to a feedback controller connected to controllable dispensing apparatus for adding a calculated amount of replenishing fluid to the magnetorheological fluid. The system may be incorporated into an integrated fluid management module having apparatus for receiving and replenishing spent magnetorheological fluid and a sensor system in accordance with the present invention for use in a magnetorheological finishing system having a carrier wheel.

    摘要翻译: 一种用于感测和控制磁流变流体中的磁性颗粒浓度的系统,包括线圈和AC电压发生器,当被通电时,产生包括边缘场的磁通场。 当边缘场延伸穿过磁流变流体时,电路中的阻抗与磁性颗粒的浓度成比例。 与传感线圈相同的参考线圈线圈与其连接。 连接到每个线圈的解调器将阻抗差信号发送到连接到可控分配装置的反馈控制器,用于将计算量的补充流体添加到磁流变流体。 该系统可以并入具有用于接收和补充用过的磁流变流体的装置的集成流体管理模块和根据本发明的用于具有承载轮的磁流变整理系统中的传感器系统。

    Method and apparatus for measuring and controlling solids composition of a magnetorheological fluid
    7.
    发明授权
    Method and apparatus for measuring and controlling solids composition of a magnetorheological fluid 有权
    用于测量和控制磁流变流体的固体组成的方法和装置

    公开(公告)号:US06893322B2

    公开(公告)日:2005-05-17

    申请号:US10845804

    申请日:2004-05-14

    摘要: A system for dispensing magnetorheological fluid to an MR finishing machine includes a pump for pressurizing the system; a first magnetic valve for regulating MR fluid flow by magnetically varying the structure and apparent viscosity of the fluid through a first flow passage; a similar second magnetic valve magnetically controlling a second flow passage in line with the first valve and flow passage; a pressure sensor disposed between the first and second valves; and an electronic control means. MR fluid flow through the system is controlled to a predetermined flow rate solely by the first valve. When the second valve is deactivated, a reference pressure is determined and saved. When the second valve is activated, a second pressure is determined and saved. From the pressure difference, the solids concentration of the fluid is determined, and a computer algorithm adds a calculated amount of water to the fluid reservoir as needed. The second valve is deactivated, and the measurement cycle is repeated, as may be desired.

    摘要翻译: 用于将磁流变流体分配到MR整理机的系统包括用于对系统加压的泵; 第一磁阀,用于通过第一流动通道磁力改变流体的结构和表观粘度来调节MR流体流; 类似的第二磁阀,磁力地控制与第一阀和流动通道一致的第二流动通道; 设置在所述第一和第二阀之间的压力传感器; 和电子控制装置。 通过系统的MR流体流动仅由第一阀控制到预定的流量。 当第二个阀停用时,确定并保存参考压力。 当第二个阀被激活时,确定并保存第二个压力。 根据压力差,确定流体的固体浓度,并且计算机算法根据需要将计算量的水添加到流体储存器。 第二个阀被去激活,根据需要重复测量循环。