公开(公告)号：US07573283B2

公开(公告)日：2009-08-11

申请号：US11765019

申请日：2007-06-19

申请人： Axel Schmidt ,  Frank Fehrmann ,  Ulf Hackius ,  Stojan Kanev ,  Steffen Laube ,  Jorg Kiesewetter

发明人： Axel Schmidt ,  Frank Fehrmann ,  Ulf Hackius ,  Stojan Kanev ,  Steffen Laube ,  Jorg Kiesewetter

IPC分类号： G01R31/06

CPC分类号： G01R31/2891

摘要： A method is disclosed for measurement of wafers and other semiconductor components in a probe station, which serves for examination and testing of electronic components. The device under test is held by a chuck and at least one electric probe by a probe support and the device under test and the probe are selectively positioned relative to each other by a positioning device with electric drives and the device under test is contacted. The drive of the positioning device remains in a state of readiness until establishment of contact and is switched off after establishment of contact and before measurement of the device under test.

摘要翻译： 公开了一种用于测量探针台中的晶片和其它半导体部件的方法，其用于电子部件的检查和测试。 被测器件由卡盘和至少一个电探头通过探针支架和被测器件保持，并且探针通过具有电驱动器的定位装置相对于彼此选择性地定位，并且被测器件被接触。 定位装置的驱动器保持在准备状态，直到建立接触并且在建立接触之后和在测试装置的测量之前被关闭。

公开(公告)号：US20080315903A1

公开(公告)日：2008-12-25

申请号：US11765019

申请日：2007-06-19

申请人： Axel SCHMIDT ,  Frank FEHRMANN ,  Ulf HACKIUS ,  Stojan KANEV ,  Steffen LAUBE ,  Jorg KIESEWETTER

发明人： Axel SCHMIDT ,  Frank FEHRMANN ,  Ulf HACKIUS ,  Stojan KANEV ,  Steffen LAUBE ,  Jorg KIESEWETTER

IPC分类号： G01R31/02 ,  G01R1/04

CPC分类号： G01R31/2891

摘要： A method is disclosed for measurement of wafers and other semiconductor components in a probe station, which serves for examination and testing of electronic components. The device under test is held by a chuck and at least one electric probe by a probe support and the device under test and the probe are selectively positioned relative to each other by a positioning device with electric drives and the device under test is contacted. The drive of the positioning device remains in a state of readiness until establishment of contact and is switched off after establishment of contact and before measurement of the device under test.

摘要翻译： 公开了一种用于测量探针台中的晶片和其它半导体部件的方法，其用于电子部件的检查和测试。 被测器件由卡盘和至少一个电探头通过探针支架和被测器件保持，并且探针通过具有电驱动器的定位装置相对于彼此选择性地定位，并且被测器件被接触。 定位装置的驱动器保持在准备状态，直到建立接触并且在建立接触之后和在测试装置的测量之前被关闭。