公开(公告)号：US07887995B2

公开(公告)日：2011-02-15

申请号：US11326149

申请日：2006-01-05

申请人： Takashi Niwa ,  Susumu Ichihara ,  Koichiro Jujo ,  Hiroyuki Hoshina

发明人： Takashi Niwa ,  Susumu Ichihara ,  Koichiro Jujo ,  Hiroyuki Hoshina

IPC分类号： G03F7/00

CPC分类号： C25D5/022 ,  C25D1/10

摘要： An electroforming mold has a first negative type photosensitive material formed on an electroconductive substrate, and a first through-hole extends through the firs photosensitive material to expose the electroconductive substrate. An electroconductive layer formed on an upper face of the first photosensitive material surrounds the first through-hole. A second negative type photosensitive material formed on an upper face of the electroconductive layer has a second through-hole that overlies and exposes both the first through-hole and a peripheral part of the electroconductive layer that surrounds the first through-hole. Because the electroconductive substrate and the electroconductive layer are separated from one another, the first and second through-holes precipitate an electroformed object independently during use of the electroforming mold resulting in a uniform electroformed object.

摘要翻译： 电铸模具具有形成在导电基体上的第一负型感光材料，第一通孔延伸穿过第一感光材料以露出导电基片。 形成在第一感光材料的上表面上的导电层包围第一通孔。 形成在导电层的上表面上的第二负型感光材料具有覆盖并暴露包围第一通孔的导电层的第一通孔和周边部分的第二通孔。 因为导电基片和导电层彼此分开，所以第一和第二通孔在电铸模使用期间独立地沉淀电铸物体，从而形成均匀的电铸物体。

公开(公告)号：US07496250B2

公开(公告)日：2009-02-24

申请号：US11799974

申请日：2007-05-03

申请人： Takashi Niwa ,  Kenji Kato ,  Susumu Ichihara ,  Norio Chiba ,  Yasuyuki Mitsuoka ,  Manabu Oumi ,  Nobuyuki Kasama

发明人： Takashi Niwa ,  Kenji Kato ,  Susumu Ichihara ,  Norio Chiba ,  Yasuyuki Mitsuoka ,  Manabu Oumi ,  Nobuyuki Kasama

IPC分类号： G02B6/12

CPC分类号： G01Q60/38 ,  G01Q60/06 ,  G01Q60/22

摘要： An optical microcantilever for a scanning near field microscope comprises a support section, a cantilever-shaped optical waveguide, and a light blocking wall. The optical waveguide has a free end, a fixed end fixed to the support section and terminating in a light input/output end, and a tip formed at a side of the free end of the cantilever and having a microscopic aperture at an end thereof. The light blocking wall blocks the transmission of light scattered from a region of the light input/output end in the direction of the tip of the optical waveguide.

摘要翻译： 用于扫描近场显微镜的光学微悬臂梁包括支撑部分，悬臂形光波导和遮光壁。 光波导具有自由端，固定到支撑部分并终止于光输入/输出端的固定端，以及形成在悬臂自由端一侧的尖端，并在其一端具有微小孔。 光阻挡壁阻挡从光输入/输出端的区域在光波导的尖端方向上散射的光的透射。

公开(公告)号：US20060160027A1

公开(公告)日：2006-07-20

申请号：US11326149

申请日：2006-01-05

申请人： Takashi Niwa ,  Susumu Ichihara ,  Koichiro Jujo ,  Hiroyuki Hoshina

发明人： Takashi Niwa ,  Susumu Ichihara ,  Koichiro Jujo ,  Hiroyuki Hoshina

IPC分类号： G03F7/00

CPC分类号： C25D5/022 ,  C25D1/10

摘要： To provide an electroforming mold for manufacturing a multi-step structure minute component and a method for manufacturing the same, for which height control is possible and manufacturing process does not become complicated. On the upper face of a film of an electroconductive layer 2 formed on the upper face of a substrate 1, a resist 3 is formed in which a first soluble portion 3b and a first insoluble portion 3a are formed. Next, a light-absorbing body 10 is formed on the upper face of the resist, exposure and development are carried out, in addition a film of an electroconductive layer 2 is formed on the upper face thereof, and a light-absorbing body 10 and an electroconductive layer 5 on the upper face of the light-absorbing body 10 are removed by liftoff. Further, a resist is formed on the upper face thereof, in which a second soluble portion 6b and a second insoluble portion 6a are formed. Next, the first resist and the second resist are developed to remove the first soluble portion 3b and the second soluble portion 6b, thereby giving an electroforming mold 101 having an electroconductive layer on the basal part of respective steps.

摘要翻译： 为了提供一种用于制造多步结构微小部件的电铸模具及其制造方法，其高度控制是可能的，并且制造工艺不会变得复杂。 在形成在基板1的上表面上的导电层2的膜的上表面上形成抗蚀剂3，其中形成有第一可溶部分3b和第一不溶部分3a。 接下来，在抗蚀剂的上表面上形成光吸收体10，进行曝光和显影，此外，在其上表面上形成有导电层2的膜，以及光吸收体10和 在吸光体10的上表面上的导电层5通过剥离除去。 此外，在其上表面上形成有抗蚀剂，其中形成有第二可溶部分6b和第二不溶部分6a。 接下来，将第一抗蚀剂和第二抗蚀剂显影以除去第一可溶部分3b和第二可溶部分6b，从而在各步骤的基底部分上形成具有导电层的电铸模具101。

公开(公告)号：US06856473B2

公开(公告)日：2005-02-15

申请号：US09997484

申请日：2001-11-21

申请人： Manabu Oumi ,  Susumu Ichihara ,  Kenji Kato ,  Yasuyuki Mitsuoka ,  Takashi Niwa ,  Nobuyuki Kasama ,  Hidetaka Maeda ,  Yoko Shinohara

发明人： Manabu Oumi ,  Susumu Ichihara ,  Kenji Kato ,  Yasuyuki Mitsuoka ,  Takashi Niwa ,  Nobuyuki Kasama ,  Hidetaka Maeda ,  Yoko Shinohara

IPC分类号： G01Q60/22 ,  G02B9/08 ,  H01J1/56

CPC分类号： G01Q60/22 ,  G01Q70/06

摘要： An optical aperture is fabricated by providing a pressing body and object having a substrate, at least one conical- or pyramidal-shaped tip disposed on the substrate, at least one stopper disposed on the substrate at a vicinity of the tip, and an optical shielding film disposed on at least a portion of each of the stopper and the tip. A surface of the pressing body is then disposed in confronting relation to the object. The pressing body is then displaced to bring the surface of the pressing body in contact with the object so that a force component is directed to a front end of the tip to form an optical aperture at the front end of the tip.

摘要翻译： 通过提供一种按压体和具有基底的物体来制造光学孔，所述物体具有设置在基底上的至少一个圆锥形或锥形末端，设置在基底附近的至少一个止动件，以及光学屏蔽 薄膜设置在每个止动器和尖端的至少一部分上。 然后将按压体的表面以与物体相对的方式设置。 然后按压体移动，使按压体的表面与物体接触，使得力分量被引导到尖端的前端，以在尖端的前端形成光学孔。

公开(公告)号：US06834537B1

公开(公告)日：2004-12-28

申请号：US09700323

申请日：2001-09-27

申请人： Takashi Niwa ,  Kenji Kato ,  Susumu Ichihara ,  Norio Chiba ,  Yasuyuki Mitsuoka ,  Manabu Oumi ,  Nobuyuki Kasama

发明人： Takashi Niwa ,  Kenji Kato ,  Susumu Ichihara ,  Norio Chiba ,  Yasuyuki Mitsuoka ,  Manabu Oumi ,  Nobuyuki Kasama

IPC分类号： G01B528

CPC分类号： G01Q60/38 ,  G01Q60/06 ,  G01Q60/22

摘要： An optical microcantilever has an optical waveguide for propagating light. The optical waveguide has a first side, a second side opposite to the first side, and a tip portion formed on the first side and at a free end of the optical waveguide. The tip portion has a microscopic aperture. A light blocking film is disposed on the first side of the optical waveguide. A reflecting film is disposed on the second side of the optical waveguide. A reflecting member forms part of the reflecting film and is disposed at the free end of the optical waveguide. The reflecting member has a generally planar surface for reflecting light propagated by the optical waveguide and for guiding the reflected light towards the microscopic aperture to generate near-field light at the microscopic aperture.

摘要翻译： 光学微悬臂梁具有用于传播光的光波导。 光波导具有第一侧，与第一侧相对的第二侧，以及形成在光波导的第一侧和自由端上的尖端部。 尖端部分具有微观孔径。 遮光膜设置在光波导的第一侧上。 反射膜设置在光波导的第二侧上。 反射构件形成反射膜的一部分并且设置在光波导的自由端。 反射构件具有用于反射由光波导传播的光的大体上平面的表面，并且用于将反射的光引导到微孔以在微小孔处产生近场光。

公开(公告)号：US06785201B2

公开(公告)日：2004-08-31

申请号：US10177414

申请日：2002-06-21

申请人： Yoko Shinohara ,  Yasuyuki Mitsuoka ,  Manabu Oumi ,  Nobuyuki Kasama ,  Hidetaka Maeda ,  Kenji Kato ,  Susumu Ichihara ,  Takashi Niwa ,  Toshifumi Ohkubo ,  Terunao Hirota ,  Hiroshi Hosaka ,  Kiyoshi Itao

发明人： Yoko Shinohara ,  Yasuyuki Mitsuoka ,  Manabu Oumi ,  Nobuyuki Kasama ,  Hidetaka Maeda ,  Kenji Kato ,  Susumu Ichihara ,  Takashi Niwa ,  Toshifumi Ohkubo ,  Terunao Hirota ,  Hiroshi Hosaka ,  Kiyoshi Itao

IPC分类号： G11B700

CPC分类号： B82Y10/00 ,  G11B7/122 ,  G11B7/124 ,  G11B7/1387 ,  G11B7/22

摘要： It is an optical information recording and reading apparatus for recording and/or reading information at a high density by using a near-field light-generating device as a near-field optical head. The end surface of the core of a flexible optical waveguide is formed in an intermediate position in the optical waveguide and in a portion fixed to the near-field optical head. Light for recording and reading information is spread within the clad. The spread light flux is reflected toward the near-field optical head by a reflective surface formed on the side of one end of the optical waveguide. The reflected light flux is collected by light-collecting structures and then is made to enter an optical minute aperture formed in the near-field optical head. Near-field light is created near the minute aperture. Light scattered by the surface of the recording medium is received. Thus, information on the recording medium can be recorded and read.

摘要翻译： 通过使用近场光产生装置作为近场光学头，是用于高密度地记录和/或读取信息的光学信息记录和读取装置。 柔性光波导的芯的端面形成在光波导中的中间位置和固定在近场光头上的部分中。 用于记录和读取信息的光在涂层内传播。 扩散光束通过形成在光波导的一端侧的反射面向近场光学头反射。 反射光通量被聚光结构收集，然后进入形成在近场光学头中的光学微小孔。 在近距离光圈附近产生近场光。 接收由记录介质的表面散射的光。 因此，可以记录和读取记录介质上的信息。

公开(公告)号：US06747265B1

公开(公告)日：2004-06-08

申请号：US09830381

申请日：2001-07-12

申请人： Takashi Niwa ,  Susumu Ichihara ,  Yasuyuki Mitsuoka ,  Kenji Kato ,  Norio Chiba ,  Manabu Oumi ,  Nobuyuki Kasama

发明人： Takashi Niwa ,  Susumu Ichihara ,  Yasuyuki Mitsuoka ,  Kenji Kato ,  Norio Chiba ,  Manabu Oumi ,  Nobuyuki Kasama

IPC分类号： H01J516

CPC分类号： G01Q20/02 ,  G01Q60/22

摘要： An optical cantilever for an SNOM has a base portion, a cantilever portion extending from the base portion and having a hole formed proximate a distal end thereof, a dielectric member extending through the hole and having a sharpened tip at a first end projecting outward of a first surface of the cantilever portion, and a light shielding film covering the first surface of the cantilever portion and the first end of the dielectric member except for a portion of the sharpened tip so as to form a very small aperture at the sharpened tip which is not covered by the light shielding film.

摘要翻译： 用于SNOM的光学悬臂具有基部，从基部延伸的悬臂部分，并且具有邻近其远端形成的孔;延伸穿过该孔的电介质构件，并且在第一端处向外突出的尖端 悬臂部分的第一表面和覆盖悬臂部分的第一表面的光屏蔽膜和除了锋利尖端的一部分之外的电介质构件的第一端，以便在锐化尖端处形成非常小的孔， 未被遮光膜覆盖。

公开(公告)号：US06684676B2

公开(公告)日：2004-02-03

申请号：US09997819

申请日：2001-11-30

申请人： Manabu Oumi ,  Susumu Ichihara ,  Takashi Niwa ,  Kenji Kato ,  Yoko Shinohara ,  Hidetaka Maeda ,  Nobuyuki Kasama ,  Yasuyuki Mitsuoka

发明人： Manabu Oumi ,  Susumu Ichihara ,  Takashi Niwa ,  Kenji Kato ,  Yoko Shinohara ,  Hidetaka Maeda ,  Nobuyuki Kasama ,  Yasuyuki Mitsuoka

IPC分类号： B21D2800

CPC分类号： G01Q60/22 ,  G01Q70/06 ,  Y10T29/49016

摘要： An apparatus for producing optical aperture is disclosed. A pressing body has a plane covering a tip and at least a part of stoppers. An opaque film formed on the tip. The pressing body is displaced toward the tip for forming an aperture on a point of the tip. According to the apparatus, the amount of displacement of the plate can be controlled excellently by the stopper and can be made very small. Thus, the aperture having a uniform and small size can be produced on the point of the tip easily.

摘要翻译： 公开了一种用于制造光学孔径的装置。 按压体具有覆盖尖端和止挡件的至少一部分的平面。 在尖端形成不透明的薄膜。 按压体朝向尖端移位，以在尖端的点上形成孔。 根据该装置，可以通过止动器来极好地控制板的位移量，并且可以非常小。 因此，可以容易地在尖端上产生具有均匀和小尺寸的孔。

公开(公告)号：US06567373B1

公开(公告)日：2003-05-20

申请号：US09807771

申请日：2001-06-04

申请人： Kenji Kato ,  Manabu Oumi ,  Yasuyuki Mitsuoka ,  Nobuyuki Kasama ,  Takashi Niwa ,  Susumu Ichihara

发明人： Kenji Kato ,  Manabu Oumi ,  Yasuyuki Mitsuoka ,  Nobuyuki Kasama ,  Takashi Niwa ,  Susumu Ichihara

IPC分类号： G11B1564

CPC分类号： G11B7/139 ,  G11B7/08576 ,  G11B7/122 ,  G11B7/1384 ,  G11B2007/13727

摘要： An optical head for optical recording/reading apparatus, which records and reads information with high reliability, by making use of an optical interaction with a medium in a minute area, on a high density medium revolving at high speed. It has a structure, in which an optical waveguide mechanism applies a loading force to a slider 6 receiving a buoyant force, and a system for introducing a light to the slider 6 and a system for applying the loading force are integrated into an identical body. As the result, a stable posture regulation of the slider 6 and an increase of the light intensity of irradiation on the medium can be achieved, and it becomes possible to record and read information with high reliability. Furthermore, by disposing a minute structure in the vicinity of an edge in the surface facing the medium of the slider 6, so that the minute structure can come closer to the medium, further improvement in high density can be made.

摘要翻译： 一种用于光学记录/读取装置的光学头，其通过在高速度的高密度介质上利用与微小区域中的介质的光学相互作用来高信度地记录和读取信息。 它具有一种结构，其中光波导机构对接受浮力的滑块6施加一个加载力，并且用于将光引入滑块6的系统和用于施加加载力的系统被集成到相同的主体中。 结果，可以实现滑块6的稳定姿态调节和介质上的照射光强度的增加，并且可以高可靠性地记录和读取信息。 此外，通过在与滑块6的介质相对的表面中的边缘附近设置微小结构，使得微小结构可以更靠近介质，可以进一步提高高密度。

公开(公告)号：US20070211986A1

公开(公告)日：2007-09-13

申请号：US11799974

申请日：2007-05-03

申请人： Takashi Niwa ,  Kenji Kato ,  Susumu Ichihara ,  Norio Chiba ,  Yasuyuki Mitsuoka ,  Manabu Oumi ,  Nobuyuki Kasama

发明人： Takashi Niwa ,  Kenji Kato ,  Susumu Ichihara ,  Norio Chiba ,  Yasuyuki Mitsuoka ,  Manabu Oumi ,  Nobuyuki Kasama

IPC分类号： G12B21/06 ,  G01N13/04 ,  G01N13/14 ,  G02B6/10

CPC分类号： G01Q60/38 ,  G01Q60/06 ,  G01Q60/22

摘要： An optical microcantilever capable of reducing loss when propagating light. An optical microcantilever 10 comprises a support 1, an optical waveguide 2, a light-blocking film 3, a reflecting film 4, a pointed tip 5, a microscopic aperture 6 formed at the end of the tip 5, and a mirror 7 for reflecting propagating light H propagated from a light input/output end 8 of the optical waveguide 2 towards the microscopic aperture 6.

摘要翻译： 光学微悬臂梁能够在传播光时减少损耗。 光学微悬臂梁10包括支撑件1，光波导2，遮光膜3，反射膜4，尖端5，形成在尖端5的端部的微小孔6和反射镜 从光波导2的光输入/输出端8向微观孔6传播的传播光H。